1. An exhaust gas treatment method for treating exhaust gas containing at least one harmful gas component selected from the group consisting of organometallic gas, metal hydride gas and halide gas; wherein, at least a portion of the exhaust gas is made in an excited state, and is reacted with a reaction remover containing a calcium compound under reduced pressure.
2. The exhaust gas treatment method according to claim 1, wherein the exhaust gas is reacted with the reaction remover in the presence of oxygen.
3. The exhaust gas treatment method according to claim 1, wherein the exhaust gas is reacted with a reaction remover in the form of a viscous flow.
4. The exhaust gas treatment method according to claim 1, wherein at least a portion of the exhaust gas is put into the excited state by plasma andor ultraviolet light.
5. The exhaust gas treatment method according to claim 1, wherein the exhaust gas contains xenon andor krypton.
6. The exhaust gas treatment method according to claim 1, wherein the reaction remover contains calcium oxide andor calcium hydroxide.
7. The exhaust gas treatment method according to claim 1, wherein the harmful gas component in a hydride or halide of an element oxide of which is a solid.
8. An exhaust gas treatment apparatus for treating exhaust gas containing at least one harmful gas component selected from the group consisting of organometallic gas, metal hydride gas and halide gas, comprising: a first exhaust pump for reducing the pressure of the exhaust gas, a second exhaust pump for reducing the pressure of the exhaust gas, an excitation unit arranged between the first exhaust pump and the second exhaust pump for putting the exhaust gas into an excited state, and a reaction removal unit containing a reaction remover for removing the harmful gas component by reacting with the harmful gas component present in exhaust gas discharged from the excitation unit.
9. The exhaust gas treatment apparatus according to claim 8, wherein an oxygen supply unit for supplying oxygen is arranged in the excitation unit.
10. The exhaust gas treatment apparatus according to claim 8, wherein the excitation unit is composed of a plasma device andor an ultraviolet radiation device.
11. The exhaust gas treatment apparatus according to claim 8, wherein the reaction remover is composed of calcium oxide andor calcium hydroxide.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
Therefore, having thus described the invention, at least the following is claimed:
1. A photodetector, comprising:
a plurality of detection zones for detecting a plurality of modes of light incident on the plurality of detection zones, the plurality of detection zones positioned adjacent to one another on a substrate and arranged in a coplanar, annular configuration; and
a plurality of segments located within the detection zones, each of the segments being adapted to detect the plurality of modes.
2. The photodetector of claim 1, wherein the plurality of segments further comprises interdigitating, planar metal-semiconductor-metal (MSM).
3. The photodetector of claim 1, wherein the plurality of detection zones are concentric, annular detection zones.
4. The photodetector of claim 1, wherein the plurality of detection zones are coplanar, detection zones.
5. The photodetector of claim 1, wherein in the plurality of detection zones, one detection zone detects a combination of modes that is substantially distinct from a mode of light detected by other detection zones.
6. The photodetector of claim 1, wherein the nonconductive material comprises the substrate.
7. The photodetector of claim 1, wherein the plurality of segments are comprised of doped semiconductor materials creating a PIN structure.
8. The photodetector of claim 1, further comprising an optical element placed between the photodetector and a fiber for enhancing the separation of a plurality of modes by the plurality of detection zones.
9. The photodetector of claim 8, wherein the optical element comprises a diffractive element.
10. The photodetector of claim 8, wherein the optical element comprises a binary diffractive element.
11. The photodetector of claim 8, wherein the optical element comprises a holographic element.
12. A system for correcting modal dispersion in an optical fiber system, comprising:
a multisegment photodetector coupled to an end of an optical fiber for detecting optical signals exiting the optical fiber and for converting the optical signals to an electrical output, the multisegment photodetector including a plurality of photodetector regions configured such that one of the plurality of photodetectors regions intercepts a mode in a manner distinct from another of the plurality of photodetectors.
13. The system of claim 12, wherein the plurality of photodetector regions comprise an array of coplanar, annular regions.
14. The system of claim 12, wherein the plurality of photodetector regions further comprises coplanar, circular sections having a plurality of interdigitated, planar MSM segments.
15. The system of claim 12, wherein the plurality of photodetector regions further comprises a plurality of interdigitated segments representing a conductive portion of the plurality of photodetector regions.
16. The system of claim 12, wherein the plurality of photodetector regions further comprises a plurality of doped semiconductor materials creating a PIN structure.
17. The system of claim 12, further comprising a diffractive element coupled between the multisegment photodetector and the end of the optical fiber for directing the optical signals into the multisegment photodetector.
18. The system of claim 12, further comprising an output circuit coupled to the plurality of photodetector regions for modifying signals from the plurality of photodetector regions and producing a signal substantially similar to an optical signal coupled into the optical fiber.
19. The system of claim 18, further comprising an optical signal launched into the optical fiber.
20. The system of claim 12, further comprising a network selected from the group consisting of attenuators, amplifier, phase shifters and transmission lines that modify a plurality of detected signals, individually, and subsequently combining the modified detected signals to reproduce, as closely as possible, the originally transmitted signal.
21. The system of claim 12, further comprising a network for performing digital signal processing on a plurality of detected signals, individually, and subsequently combining the modified detected signals to reproduce, as closely as possible, the originally transmitted signal.
22. A photodetector system for use in an optical fiber system, comprising:
means for individually detecting a plurality of modes exiting an optical fiber; and
means for correcting for timing differences in the plurality of modes.
23. The photodetector system of claim 22, further comprising means for converting optical signals from the plurality of modes into an electrical output and means for modifying the electrical output to minimize effects of modal dispersion.
24. A photodetection system, comprising:
a plurality of photodetectors positioned on a substrate, the plurality of photodetectors each having a plurality of segmented generally coplanar conductive layers including an active layer where an optical signal incident thereupon is converted to an electrical output; and
a protective layer between each active layer to electrically isolate the plurality of segmented generally coplanar conductive layers.
25. The photodetection system of claim 24, wherein the plurality of photodetectors include a plurality of electrical contacts.
26. The photodetection system of claim 24, further comprising an output circuit for modifying the electrical output.