1. An indicating device comprising a first monitor capable of undergoing at least one color change in proportion to high energy radiation and a second monitor capable of monitoring integral value of one of time, temperature, time-temperature, or exposure to UV light by developing a first color and monitoring exceeding a pre-determined higher temperature by said first color changing to a second color.
2. The device of claim 1 wherein said monitoring of integral value is observed as at least one of color development, color intensification, color change or change in fluorescence.
3. The device of claim 2 wherein said color change, color development, color intensification or change in fluorescence is selected from one of colorless to blue, colorless to red, colorless to purple, blue to red or red to blue.
4. The device of claim 3 wherein said second monitor comprises at least one compound selected from diacetylene, partially polymerized diacetylene and polydiacetylene.
5. The device of claim 4 where said diacetylene is R\u2032\u2014C\u2261C\u2014C\u2261C\u2014R\u2033, where R\u2032 and R\u2033 are independently selected from: (CH2)b\u2014H; (CH2)bOH; (CH2)b-OCONH\u2014R1; (CH2)b\u2014O\u2014CO\u2014R1; (CH2)b\u2014O\u2014R1; (CH2)b\u2014COOH; (CH2)b\u2014COOM; (CH2)b\u2014NH2; (CH2)b\u2014CONHR1; (CH2)b\u2014CO\u2014O\u2014R1 or a mixture thereof; where b=1-10; R1 is an aliphatic or aromatic radical and M is a cation or (R1)3N+.
6. The device of claim 4 wherein said diacetylene is a derivative of one of 2,4-hexadiyn-1,6-diol, 3,5-octadiyn-1,8-diol, 4,6-decadiyn-1,10-diol, 5,7-dodecadiyn-1,12-diol or mixtures thereof.
7. The device of claim 4 where said diacetylene is selected from R\u2014C\u2261C\u2014C\u2261C\u2014R, where R is selected from CH2OCONH(CH2)5CH3; (CH2)3OCONH(CH2)3CH3; (CH2)4OCONHCH2COO(CH2)3CH3; and symmetrical or asymmetrical fatty chain diynoic acids, their derivatives and salts.
8. The device of claim 7 where said diacetylene is selected from tricosa-10,12-diynoic acid, and pentacosa-10,12-diynoic acid.
9. The device of claim 1 wherein said device is used for monitoring a false positive signal in a radiation sensitive device.
10. The device of claim 1 wherein said device is used for monitoring a false negative signal in a radiation sensitive device.
11. A process of applying an indicating device comprising a first monitor capable of undergoing at least one color change in proportion to high energy radiation and a second monitor capable of monitoring integral value of time, temperature, time-temperature or exposure to UV light and a pre-determined higher temperature wherein said second monitor changes to a first color upon exposure to said time, temperature, time-temperature or UV light and said first color changes to a second color upon subsequent exposure to said pre-determined higher temperature.
12. A process of monitoring at least one of exposure to time, temperature, time-temperature or UV light and a pre-determined higher temperature by monitoring color density of an indicating device comprising a first monitor capable of undergoing at least one color change in proportion to exposure to high energy radiation and a second monitor capable of monitoring integral value of time, temperature, time-temperature or exposure to UV light and a pre-determined higher temperature wherein said second monitor changes to a first color upon exposure to said time, temperature, time-temperature or UV light and said first color changes to a second color upon subsequent exposure to said pre-determined higher temperature.
13. A process of monitoring tampering of a radiation sensitive device by using an indicating device comprising a first monitor capable of undergoing at least one color change in proportion to exposure to high energy radiation and a second monitor capable of monitoring integral value of time, time-temperature, temperature or exposure to UV light and a pre-determined higher temperature for determining exposure to at least one of time, temperature, time-temperature or UV light and a pre-determined higher temperature wherein said second monitor changes to a first color upon exposure to at least one of said time, temperature, time-temperature or UV light and said first color changes to a second color upon subsequent exposure to said pre-determined higher temperature.
14. A process of monitoring tampering of a radiation sensitive device with an indicating device comprising a first monitor capable of undergoing at least one color change in proportion to exposure to high energy radiation and a second monitor capable of monitoring integral value of time, temperature, time-temperature or exposure to UV light and a predetermined higher temperature with a color bar of a color reference bar printed on it by comparing a color of the second monitor to the color bar reference wherein said second monitor changes to a first color upon exposure to at least one of said time, temperature, time-temperature or UV light and said first color changes to a second color upon subsequent exposure to said pre-determined higher temperature.
15. A process of monitoring at least one of effect of, time, temperature, time-temperature or UV light and a pre-determined higher temperature with an indicating device comprising a first monitor capable of undergoing at least one color change in proportion to high energy radiation and a second monitor capable of monitoring integral value of time, temperature, time-temperature, or exposure to UV light and a pre-determined higher temperature with an optical densitometer or a spectrophotometer by monitoring color changes in the second monitor wherein said second monitor changes to a first color upon exposure to said time, temperature or UV light and said first color changes to a second color upon subsequent exposure to said pre-determined higher temperature.
16. A process of exposing an indicating device comprising a first monitor capable of undergoing at least one color change in proportion to exposure to high energy radiation and a second monitor capable of monitoring integral value of time, temperature, time-temperature or exposure to UV light and a predetermined higher temperature wherein said second monitor changes to a first color upon exposure to said time, temperature, time-temperature or UV light and said first color changes to a second color upon subsequent exposure to said pre-determined higher temperature.
17. A monitor for high energy radiation comprising:
a first monitor capable of changing first color density in response to a primary radiation at a first rate and in response to a second radiation at a second rate;
a second monitor capable of changing second color density in response to said second radiation at a third rate wherein said first rate and said third rate are faster than said second rate; and
wherein the second monitor is capable of monitoring integral value of time, temperature, time-temperature or exposure to UV light and a pre-determined higher temperature; and
wherein each of the first monitor and the second monitor are comprised of different diacetylenes wherein said second monitor changes to a first color upon exposure to said time, temperature, time-temperature or UV light and said first color changes to a second color upon subsequent exposure to said pre-determined higher temperature.
18. The monitor of claim 17 wherein said changes first color density or said changes second color density is selected from one of colorless to blue, colorless to red, colorless to purple, blue to red or red to blue and wherein said first color density and said changes second color density are different.
19. The monitor of claim 17 wherein at least one of said first monitor or said second monitor comprises a diacetylene selected from at least one compound selected from diacetylene, partially polymerized diacetylene and polydiacetylene.
20. The monitor of claim 19 where said diacetylene is R\u2032\u2014C\u2261C\u2014C\u2261C\u2014R\u2033, where R\u2032 and R\u2033 are independently selected from: (CH2)b\u2014H; (CH2)bOH; (CH2)b-OCONH\u2014R1; (CH2)b\u2014O\u2014CO\u2014R1; (CH2)b\u2014O\u2014R1; (CH2)b\u2014COOH; (CH2)b\u2014COOM; (CH2)b\u2014NH2; (CH2)b\u2014CONHR1; (CH2)b\u2014CO\u2014O\u2014R1 or a mixture thereof; where b=1-10; R1 is an aliphatic or aromatic radical and M is a cation or (R1)3N+.
21. The monitor of claim 19 wherein said diacetylene is a derivative of one of 2,4-hexadiyn-1,6-diol, 3,5-octadiyn-1,8-diol, 4,6-decadiyn-1,10-diol, 5,7-dodecadiyn-1,12-diol or mixtures thereof.
22. The monitor of claim 19 where said diacetylene is selected from R\u2014C\u2261C\u2014C\u2261C\u2014R, where R is selected from CH2OCONH(CH2)5CH3; (CH2)3OCONH(CH2)3CH3; (CH2)4OCONHCH2COO(CH2)3CH3; tricosa-10,12-diynoic acid, and pentacosa-10,12-diynoic acid.
23. A monitor comprising:
a first monitor comprising a first diacetylene and capable of changing first color density proportional to a dose of high energy radiation wherein said first monitor also changes first color density proportion to at least one of time, temperature, time-temperature, UV exposure or excessive heat;
a second monitor comprising a second diacetylene wherein said second monitor capable of changing second color density proportional to said at least one of, time, temperature, time-temperature, UV exposure or excessive heat wherein said second monitor changes to a first color upon exposure to said time, temperature, time-temperature or UV light and said first color changes to a second color upon subsequent exposure to said excessive temperature; and
an indicating device comprising a high energy radiation monitor capable of undergoing at least one color change in proportion to said high energy radiation and a second monitor capable of monitoring integral value of time, temperature, time-temperature, or exposure to UV light and a pre-determined higher temperature.
24. The monitor of claim 23 wherein said changing first color density or said changing second color density is selected from one of colorless to blue, colorless to red, colorless to purple, blue to red or red to blue and wherein said first color density and said changes second color density are different.
25. The monitor of claim 23 wherein at least one of said first diacetylene and said second diacetylene is selected from at least one compound selected from partially polymerized diacetylene and polydiacetylene.
26. The monitor of claim 23 where the said diacetylene is R\u2032\u2014C\u2261C\u2014C\u2261C\u2014R\u2033, where R\u2032 and R\u2033 are independently selected from: (CH2)b\u2014H; (CH2)bOH; (CH2)b\u2014OCONH\u2014R1; (CH2)b\u2014O\u2014CO\u2014R1; (CH2)b\u2014O\u2014R1; (CH2)b\u2014COOH; (CH2)b\u2014COOM; (CH2)b\u2014NH2; (CH2)b\u2014CONHR1; (CH2)b\u2014CO\u2014O\u2014R1 or a mixture thereof; where b=1-10; R1 is an aliphatic or aromatic radical and M is a cation or (R1)3N+.
27. The monitor of claim 23 wherein said diacetylene is a derivative of one of 2,4-hexadiyn-1,6-diol, 3,5-octadiyn-1,8-diol, 4,6-decadiyn-1,10-diol, 5,7-dodecadiyn-1,12-diol or mixtures thereof.
28. The monitor of claim 23 where said diacetylene is selected from R\u2014C\u2261C\u2014C\u2261C\u2014R, where R is selected from CH2OCONH(CH2)5CH3; (CH2)3OCONH(CH2)3CH3; (CH2)4OCONHCH2COO(CH2)3CH3; and tricosa-10,12-diynoic acid, and pentacosa-10,12-diynoic acid.
29. A device comprising:
a first monitor capable of undergoing at least one color change in proportion to exposure to high energy radiation; and
a second monitor capable of monitoring integral value of time, temperature, time-temperature or exposure to UV light by developing a first color and monitoring exceeding a predetermined higher temperature by said first color changing to a second color.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
What is claimed is:
1. A polishing apparatus comprising:
a polishing table having a polishing surface thereon;
a top ring for pressing a workpiece to be polished against said polishing surface;
a dresser for dressing said polishing surface on the polishing table;
a dressing element provided on a surface of said dresser for dressing said polishing surface by sliding contact with said polishing surface; and
an ejection nozzle provided on the surface of said dresser for ejecting a fluid supplied from a fluid source toward said polishing surface.
2. A polishing apparatus according to claim 1, wherein said dressing element is annularly disposed on the lower surface of said dresser, and said ejection nozzle is disposed inside of said dressing element annularly disposed.
3. A polishing apparatus according to claim 1, wherein:
said dressing element has a fluid flow hole defined therethrough for flowing said fluid from said fluid source to a lower surface of said dressing element, and a fluid ejection slot defined in the lower surface of said dressing element; and
said fluid ejection slot is extended from said fluid flow hole to an outer circumferential edge of said dressing element.
4. A polishing apparatus according to claim 3, wherein said fluid ejection slot is extended toward an outer circumferential edge of said dresser.
5. A polishing apparatus comprising:
a polishing table having a polishing surface thereon;
a top ring for pressing a workpiece to be polished against said polishing surface;
a dresser for dressing said polishing surface on the polishing table;
a dressing element provided on a surface of said dresser for dressing said polishing surface by sliding contact with said polishing surface; and
an ejection nozzle provided on the surface of said dresser for ejecting a mixture of a fluid supplied from a fluid source and a gas supplied from a gas source toward said polishing surface.
6. A polishing apparatus according to claim 5, wherein said dressing element is annularly disposed on the lower surface of said dresser, and said ejection nozzle is disposed inside of said dressing element annularly disposed.
7. A polishing apparatus according to claim 5, wherein:
said dressing element has a fluid flow hole defined therethrough for flowing the fluid from said fluid source to a lower surface of said dressing element, and a fluid ejection slot defined in the lower surface of said dressing element; and
said fluid ejection slot is extended from said fluid flow hole to an outer circumferential edge of said dressing element.
8. A polishing apparatus according to claim 7, wherein said fluid ejection slot is extended toward an outer circumferential edge of said dresser.