Author: claimsbot

1. A method for creating a plurality of devices on a semiconductor wafer, each of the plurality of devices having a plurality of device characteristics, the method comprising the steps of:
providing a layer of semiconductor film that at least partially covers a substrate of the semiconductor wafer, wherein the semiconductor film:
comprises a first composition at a first location on the semiconductor wafer, the first composition comprising at least two materials in a first predetermined proportion; and
comprises a second composition at a second location on the semiconductor wafer, the second composition comprising at least two materials in a second predetermined proportion, wherein the semiconductor film at the first location will become part of at least one of the plurality of devices, wherein the semiconductor film at the second location will become part of at least one other device of the plurality of devices, and wherein the first and second compositions are different and are expected to create differences in at least one of the plurality of device characteristics between devices created at the first location and devices created at the second location; and
performing a plurality of semiconductor processing steps on the semiconductor film to create the plurality of devices.
2. The method of claim 1, further comprising the steps of:
measuring one of the plurality of device characteristics of a first device that is at the first location;
the one device characteristic of a second device that is at the second location; and
the optimum device characteristic between the one measured device characteristic of the first device and the one measured device characteristic of the second device, thereby determining the option composition of the semiconductor film.
3. The method of claim 1:
wherein the step of performing a plurality of semiconductor processing steps further comprises the step of performing a plurality of semiconductor processing steps to create a plurality of devices at each of the first end second locations, some of the plurality of devices at the first location forming a first chip and some of the plurality of devices at the second location forming a second chip; and
the method further comprises the steps of:
measuring one of a plurality of device characteristics of the first chip, thereby measuring the device characteristic of a first device that it at the first location;
one of a plurality of device characteristics of the second chip thereby measuring the one device characteristic of a second device that is at the second location; and
the optimum device characteristic between the one measured device characteristic of the first chip and the one measured device characteristic of the second chip, thereby determining the optimum composition of the semiconductor film.
4. The method of claim 3 wherein the one measured device characteristic is power consumption.
5. The method of claim 1 wherein the first aid second predetermined proportions are different, thereby making the compositions different.
6. The method of claim 5 wherein the at least two materials deposited at the first location are different than the at least two materials deposited at the second location, thereby further making the compositions different.
7. The method of claim 1 wherein the at least two materials deposited at the first location are different than the at least two materials deposited at the second location, thereby making the compositions different.
8. The method of claim 1 wherein the semiconductor film is a gate dielectric material and wherein two of the plurality of device characteristics are performance and power consumption.
9. The method of claim 8 wherein each of the at least two materials for the first and second compositions comprise silicon, nitrogen, and oxygen, wherein the gate dielectric comprises SiNxOy, and wherein the first predetermined proportion contains more nitrogen than does the second predetermined proportion, thereby creating difference in performance and power consumption between devices formed in the first location and devices fanned in the second location.
10. A method for compensating for radial processing effect on a semiconductor wafer, the method of comprising the steps of:
providing a platen able to be spun about an axis;
a semiconductor wafer on a top surface of the platen, the semiconductor wafer having a top surface;
at least one nozzle and at least one vapor source per nozzle;
the at least one nozzle over a first location, at a first radius, on the semiconductor wafer;
a transport vapor through the at least one nozzle;
a vapor species from the vapor source with the transport vapor,
the vapor species and transport vapor onto the top surface of the semiconductor wafer;
a semiconductor film over the top surface of the semiconductor wafer by
controlling the dwell time aver the first location of the at least one nozzle, thereby depositing at the first location the semiconductor film having a first thickness, the semiconductor film at the first location comprising a first composition that comprises the vapor species;
the at least one nozzle over a second location, at a second radius, on the semiconductor wafer; and
controlling the dwell time over the second location of the at least one nozzle, thereby depositing at the second location the semiconductor film having a accord thickness, wherein the semiconductor film at the second location comprises a second composition that comprises the vapor species.
11. The method of claim 10 wherein the first and second dwell times are chosen to reduce a known radial variation in the semiconductor film that is caused by performing a semiconductor processing step on the semiconductor film, and wherein the method further comprises performing the semiconductor processing step on the semiconductor film.
12. The method of claim 10 wherein the first thickness is unequal to the second thickness.
13. The method of claim 10 wherein the first composition differs from the second composition.
14. The method of claim 10 wherein the first thickness is unequal to the second thickness, and wherein the first composition differs from the second composition.
15. The method of claim 10, further comprising providing a control system adapted to control:
an amount of vapor species emanating from the vapor source of each nozzle of the at least one nozzle; and
a flow rate of the transport vapor into each nozzle of the at least one nozzle.
16. The method of claim 10 wherein the control system is further adapted to control the spinning of the platen about the axis.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. (canceled)
2. (canceled)
3. (canceled)
4. (canceled)
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6. (canceled)
7. A stage cleaning method for a stage device for use in a vacuum,
the stage device comprising:
a gas supply unit to generate gas;
a pressure regulator to regulate a pressure of the gas;
a frame-shaped movable stage having a sample mounting surface;
a fixed stage having a surface facing an opposite surface of the movable stage from the sample mounting surface, the fixed stage being surrounded by the movable stage;
an air bearing to float the movable stage by supplying the gas to a gap portion between the fixed stage and the movable stage; and
a differential pumping portion to prevent the gas from flowing outside the gap portion between the movable stage and the fixed stage,

the method comprising the steps of:
regulating a floating height of the movable stage and a pressure in the differential pumping portion; and
moving the movable stage within a predetermined range while maintaining the floating height of the movable stage and the pressure in the differential pumping portion.
8. The stage cleaning method according to claim 7, wherein the step of regulating the floating height and the pressure in the differential pumping portion comprises the steps of:
adjusting the pressure in the differential pumping portion to a pressure equal to that for the movable stage in use when the floating height is set lower than that for the movable stage in use; and
adjusting the pressure in the differential pumping portion to a pressure higher than that for the movable stage in use when the floating height is set equal to that for the movable stage in use.
9. The stage cleaning method according to claim 7, further comprising, before the step of adjusting the floating height and the pressure in the differential pumping portion, the steps of:
moving the movable stage to a predetermined position;
setting the floating height of the movable stage lower than that for the movable stage in use and measuring rolling and pitching of the movable stage; and
determining that a particle exists on a track of the air bearing if any of the rolling and pitching exceeds a predetermined allowable value.
10. The stage cleaning method according to claim 7, further comprising, before the step of regulating the floating height and the pressure in the differential pumping portion, the steps of:
moving the movable stage to a predetermined position;
setting the floating height of the movable stage lower than that for the movable stage in use and measuring a vertical position of the movable stage; and
determining that a particle exists on a track of the air bearing if a change in the vertical position with respect to a change in a pressure for supplying the gas is out of a predetermined allowable value range.
11. The stage cleaning method according to claim 9, wherein the step of moving the movable stage within the predetermined range comprises the steps of:
moving the movable stage to one end of the fixed stage; and
moving the movable stage to an opposite end of the fixed stage.
12. The stage cleaning method according to claim 9, wherein the step of moving the movable stage within the predetermined range is the step of reciprocating the movable stage with a short stroke of 10 \u03bcm or less around a predetermined position twice or more.

1. A battery tray for a vehicle, comprising:
a deck;
first and second opposed longitudinal walls extending from the deck and cooperating with first and second opposed side walls extending from the deck and between the first and second longitudinal walls to form a container area adapted to receive at least one of a first and a second battery, the first battery having a longer longitudinal length than the second battery;
the second longitudinal wall and the second side wall including respective first and second battery hold down members each having a rib adapted to engage a retention feature of the first or second battery;
the first longitudinal wall and the first side wall including respective first and second ramped members adapted to urge at least the first battery into engagement with the respective first and second battery hold down members upon the first battery being positioned on the deck; and
a first clamping member removably coupled to the battery tray relative to one of the first longitudinal or side walls and adapted to engage the retention feature of the one of the first and second batteries positioned in the container area.
2. The battery tray of claim 1, wherein the first ramped member comprises a first pair of ramped members and the second ramped member comprises a second pair of ramped members, the ramped members of each of the first and second pair of ramped members being horizontally spaced from each other so as to define a recess therebetween in cooperation with the respective first side wall and the first longitudinal wall.
3. The battery tray of claim 2, wherein the first clamping member is positioned in the recess associated with the first longitudinal wall and adapted to engage the retention feature of the first battery.
4. The battery tray of claim 2, wherein the first clamping member is positioned in the recess associated with the first side wall and adapted to engage the retention feature of the second battery.
5. The battery tray of claim 4, further comprising a second clamping member configured to be positioned in the recess associated with the first longitudinal wall and removably coupled to the battery tray, the second clamping member adapted to engage the retention feature of the second battery.
6. The battery tray of claim 1, wherein each battery hold down member comprises an angled battery guide surface extending upwardly therefrom in a direction away from the deck.
7. The battery tray of claim 1, wherein the ribs of the first and second battery hold down members extend horizontally and are vertically spaced from the deck.
8. The battery tray of claim 1, wherein the first longitudinal and side walls each comprise a vertically extending protrusion configured to selectively engage a vertically extending slot formed in the first clamping member.
9. The battery tray of claim 1, wherein the first and second longitudinal and side walls, the deck, the first and second ramped members and the first and second battery hold down members are integrally formed as a single unitary member.
10. The battery tray of claim 1, wherein the first clamping member includes a snap-fit retention arrangement configured to facilitate removably coupling the first clamping member to the deck in a snap-fit manner.
11. The battery tray of claim 10, wherein the first clamping member includes an elongated body having an upper surface and an opposite lower surface from which the snap-fit retention arrangement protrudes, the body configured to be received in a recess formed in the deck adjacent the first side wall, the body sized and shaped such that the body is adapted to extend under a footprint of the second battery upon receipt of the second battery in the container area.
12. The battery tray of claim 1, wherein the deck includes a longitudinally extending channel formed therein adjacent the first side wall, and wherein the first clamping member includes a slide clamping member having an elongated body member configured to be received in the channel and a battery engaging member extending from the body member, the slide clamping member configured to cooperate with the channel to allow sliding in a first direction relative to the channel such that the battery engaging member is adapted to engage the first or second battery and to prevent sliding in a second opposite direction.
13. The battery tray of claim 12, wherein the channel includes ratchet teeth formed on opposed sides thereof, and wherein the body member includes outwardly extending resilient members protruding from opposed lateral sides thereof, the resilient members configured to cooperate with the ratchet teeth to allow movement of the slide clamping member in the first direction toward the second side wall and prevent movement of the slide clamping member in the second opposite direction toward the first side wall.
14. The battery tray of claim 13, wherein the first side wall includes a depression formed therein and an aperture formed therethrough in the area of the depression, the battery engaging member configured to be received in the depression when the slide clamping member is in a stowed position and configured to be accessed through the aperture to urge the battery clamping member in the first direction toward the second side wall.
15. The battery tray of claim 12, wherein the body member is adapted to extend under a footprint of the first or second battery upon engagement of the battery engaging member with the first or second battery.
16. A battery tray for a vehicle, comprising:
a deck;
first and second opposed longitudinal walls extending from the deck and cooperating with first and second opposed side walls extending from the deck and between the first and second longitudinal walls to form a container area adapted to receive at least one of a first and a second battery, the first and second longitudinal and side walls integrally formed with the deck, the first battery having a longer longitudinal length than the second battery;
the second longitudinal wall and the second side wall including respective first and second battery hold down members each having a horizontally extending rib adapted to engage a retention feature of the first or second battery and an upper angled guide surface, the ribs being vertically spaced apart from the deck and the angled guide surfaces extending from the ribs along the respective second longitudinal and side walls;
the first longitudinal wall and the first side wall including respective first and second ramped members adapted to urge at least the first battery into engagement with the respective first and second battery hold down members upon the first battery being positioned on the deck; and
a first clamping member removably coupled to the battery tray relative to the first side wall and adapted to engage the retention feature of the one of the first and second batteries positioned in the container area.
17. The battery tray of claim 16, wherein the deck includes a channel formed therein adjacent the first side wall and longitudinally extending toward the second side wall, and wherein the first clamping member includes a slide clamping member having an elongated body member configured to be received in the channel and a battery engaging member extending from the body member, the slide clamping member configured to cooperate with the channel to allow sliding in a first direction relative to the channel such that the battery engaging member is adapted to engage the first or second battery and to prevent sliding in a second opposite direction.
18. The battery tray of claim 17, wherein the channel includes ratchet teeth formed on opposed sides thereof, and wherein the body member includes outwardly extending resilient members protruding from opposed lateral sides thereof, the resilient members configured to cooperate with the ratchet teeth to allow movement of the slide clamping member in the first direction toward the second side wall and prevent movement of the slide clamping member in the second opposite direction toward the first side wall.
19. The battery tray of claim 16, wherein the first clamping member includes a snap-fit retention arrangement configured to facilitate removably coupling the first clamping member to the deck in a snap-fit manner.
20. The battery tray of claim 19, wherein the first clamping member includes an elongated body having an upper surface and an opposite lower surface from which the snap-fit retention arrangement protrudes, the body having a battery engaging member extending from the upper surface and configured to be received in a recess formed in the deck adjacent the first side wall when the slide clamping member is in a stowed position, the body sized and shaped such that the battery engaging member is adapted to engage the first or second battery and the body is adapted to extend under a footprint of the first or second battery upon receipt of the first or second battery in the container area.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A method of determining a password, wherein the password is subject to a set of requirements, said method comprising:
randomly selecting a first requirement from the set of requirements;
providing the first requirement for the password;
receiving characters for the password;
determining whether the characters satisfy the first requirement; and
providing information that indicates whether the characters satisfy the first requirement.
2. The method of claim 1, wherein determining whether the characters satisfy the first requirement comprises determining whether the characters satisfy the first requirement as each of the characters are received.
3. The method of claim 1, wherein determining whether the characters satisfy the first requirement comprises:
buffering a set of received characters; and
determining whether the set of received characters satisfy the first requirement.
4. The method of claim 1, further comprising:
randomly selecting a second requirement from the set of requirements; and
providing the second requirement, when the characters satisfy the first requirement.
5. The method of claim 1, wherein providing information that indicates whether the characters satisfy the first requirement comprises providing information that indicates the characters fail to satisfy the first requirement.
6. The method of claim 1, wherein providing information that indicates whether the characters satisfy the first requirement comprises providing information that indicates the first requirement when the characters fail to satisfy the first requirement.
7. An apparatus configured to perform the method of claim 1, said apparatus comprising:
means for randomly selecting a first requirement from the set of requirements;
means for providing the first requirement for the password;
means for receiving characters for the password;
means for determining whether the characters satisfy the first requirement; and
means for providing information that indicates whether the characters satisfy the first requirement.
8. A computer readable medium containing computer executable instructions for performing the method of claim 1, said medium comprising:
means for randomly selecting a first requirement from the set of requirements;
program code for providing the first requirement for the password;
program code for receiving characters for the password;
program code for determining whether the characters satisfy the first requirement; and
program code for providing information that indicates whether the characters satisfy the first requirement.
9. A method of determining a password, wherein the password is subject to a plurality of requirements, said method comprising:
determining a set of the plurality of requirements;
providing the set of requirements in a random sequence;
receiving characters for each of the set of requirements;
determining whether the characters respectively satisfy the set of requirements as the characters are received; and
providing information that indicates whether the characters satisfy the set of requirements.
10. The method of claim 9, wherein determining whether the characters respectively satisfy the set of requirements comprises determining whether characters respectively satisfy the set of requirements as each individual character is received.
11. The method of claim 9, wherein determining whether the characters respectively satisfy the set of requirements comprises:
buffering a set of characters; and
determining whether the set of characters respectively satisfy the set of requirements.
12. The method of claim 9, wherein providing information that indicates whether the characters satisfy the set of requirements comprises providing information that indicates the characters satisfy one of the set of requirements as soon as the one requirement has been satisfied.
13. An apparatus configured to perform the method of claim 9, said apparatus comprising:
means for determining a set of the plurality of requirements;
means for providing the set of requirements in a random sequence;
means for receiving characters for each of the set of requirements;
means for determining whether the characters respectively satisfy the set of requirements as the characters are received; and
means for providing information that indicates whether the characters satisfy the set of requirements.
14. A computer readable medium containing computer executable instructions for performing the method of claim 9, said medium comprising:
means for determining a set of the plurality of requirements;
program code for providing the set of requirements in a random sequence;
program code for receiving characters for each of the set of requirements;
program code for determining whether the characters respectively satisfy the set of requirements as the characters are received; and
program code for providing information that indicates whether the characters satisfy the set of requirements.
15. A method of entering a password, wherein the password is subject to a plurality of requirements, said method comprising:
providing a set of the requirements in a random sequence;
determining, during entry of characters, whether the characters satisfy the set of requirements; and
providing information that indicates when each of the set of requirements has been satisfied.
16. The method of claim 15, wherein providing the set of requirements in a random sequence comprises displaying each of the set of requirements individually based on the random sequence.
17. The method of claim 15, wherein providing the set of requirements in a random sequence comprises displaying the set of requirements in an ordered list based on the random sequence.
18. An apparatus configured to perform the method of claim 15, said apparatus comprising:
means for providing a set of the requirements in a random sequence;
means for determining, during entry of characters, whether the characters satisfy the set of requirements; and
means for providing information that indicates when each of the set of requirements has been satisfied.
19. A computer readable medium containing computer executable instructions for performing the method of claim 15, said medium comprising:
program code for providing a set of the requirements in a random sequence;
program code for determining, during entry of characters, whether the characters satisfy the set of requirements; and
program code for providing information that indicates when each of the set of requirements has been satisfied.