1. A flexible computer-implemented method for classifying defects, comprising:
applying a sequence of rules for defects to inspection data generated by inspection of a semiconductor specimen, wherein the sequence of rules comprises statistical rules, deterministic rules, hybrid statistical and deterministic rules, or some combination thereof, wherein a portion of the sequence of rules is applied as the defects are found at the end of the inspection;
classifying the defects based on results of said applying, wherein results of said classifying comprise multiple output classifications for the defects; and
illustrating the results of said classifying in an interactive user interface.
2. The method of claim 1, wherein the deterministic rules apply one or more tests to characteristics of the defects, and wherein the characteristics comprise whether the defects are bright or dark, contrast of the defects with respect to background, measured size, detection method, information about defects on other levels of the specimen, location of the defects on the specimen, proximity to other events, or some combination of attributes that can be used deterministically to classify defects.
3. The method of claim 1, wherein the statistical rules are based on characteristics of the defects comprising color, size, edge sharpness, eccentricity, roundness, transparency, texture, context, or some combination thereof, and wherein the statistical rules apply the characteristics statistically to bin defects.
4. The method of claim 1, wherein characteristics of the defects input to the statistical rules and the deterministic rules used for said applying are selected by a user.
5. The method in claim 1, wherein the another portion of the sequence of rules comprises rules based on proximity of the defects to other defects on the specimen or previous specimen history, and wherein dependent rules are applied after the another portion is applied.
6. The method of claim 1, wherein said applying is performed while a user is reviewing the defects.
7. The method of claim 1, further comprising tuning inspection recipes based on the results of said classifying.
8. The method of claim 1, further comprising using the results of said classifying in sampling defects for a subsequent activity.
9. The method of claim 1, further comprising performing engineering analysis using the results of said classifying.
10. The method of claim 1, further comprising performing the computer-implemented method on data generated by different inspection or review tools having different hardware configurations.
11. The method of claim 1, wherein said classifying comprises determining if the defects are nuisance defects based on results of said applying the deterministic rules or a combination of the deterministic and statistical rules.
12. The method of claim 1, wherein the statistical rules and the hybrid statistical and deterministic rules are organized into groups for selection to aid in user understanding of these rules and to provide classifications that reflect intent of a user.
13. The method of claim 1, wherein the statistical rules are weighted separately.
14. The method of claim 1, wherein the sequence of rules is organized by a user working with the interactive user interface, and wherein the sequence of rules is represented in the interactive user interface as a tree having different levels.
15. The method of claim 14, wherein the tree comprises nodes that produce one or more branches, one or more terminating bins, or some combination thereof.
16. The method of claim 14, wherein the tree comprises deterministic nodes, statistical nodes, or hybrid deterministic and statistical nodes.
17. The method of claim 14, wherein the tree comprises deterministic nodes designated by characteristic name, statistical nodes designated by name, and hybrid nodes designated by name.
18. The method of claim 14, wherein the interactive user interface illustrates the results of said classifying graphically and with sample images.
19. The method in claim 14, further comprising building one of the deterministic rules using the interactive user interface through applying unrestricted Boolean operators to defect characteristics.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method for receiving a digital broadband transmission for saving power in a receiver, the method comprising:
providing information indicating a maximum burst duration.
2. A method according to claim 1, wherein the information indicating the maximum burst duration is signalled in a time slice identifier descriptor.
3. A method according to claim 2, wherein the time slice identifier descriptor is carried in one or more program specific information or service information tables.
4. A method according to claim 3, wherein the one or more program specific information or service information tables comprise a network information table, program map table and IPMAC notification table.
5. A method according to claim 1, wherein said information indicating the maximum burst duration is applicable for power saving, if a remainder of the burst is lost.
6. A method according to claim 1, wherein the digital broadband transmission comprises a multi-carrier signal transmission.
7. A method according to claim 1, wherein the digital broadband transmission comprises a DVB transmission.
8. A method according to claim 7, wherein the DVB transmission comprises a DVB-T transmission.
9. A method according to claim 1, wherein the digital broadband transmission comprises a wireless digital broadband transmission.
10. A method according to claim 9, wherein the wireless digital transmission comprises a mobile DVB-T transmission.
11. A method for transmitting a digital broadband transmission, the method comprising:
providing information indicating a maximum burst duration.
12. A method according to claim 11, wherein the information indicating the maximum burst duration is signalled in a time slice identifier descriptor.
13. A method according to claim 12, wherein the time slice identifier descriptor is carried in one or more program specific information or service information tables.
14. A method according to claim 13, wherein the one or more program specific information or service information tables comprise a network information table, program map table and IPMAC notification table.
15. A data processing system comprising means for carrying out the steps of the method according to claims 1 or 11.
16. A computer program comprising computer executable program code adapted to perform the steps of the method of claims 1 or 11 when said program is run on a computer.
17. A computer program as claimed in claim 16 embodied on a computer readable medium.
18. A computer readable medium comprising program code adapted to carry out the method of claims 1 or 11 when run on a computer.
19. A carrier medium carrying the computer executable program of claim 16.
20. A system for providing a digital broadband transmission, comprising:
means for providing information indicating a maximum burst duration.
21. A system according to claim 20, wherein the information indicating the maximum burst duration is signalled in a time slice identifier descriptor.
22. A system according to claim 21, wherein the time slice identifier descriptor is carried in one or more program specific information or service information tables.
23. A system according to claim 22, wherein the one or more program specific information or service information tables comprise a network information table, program map table and IPMAC notification table.
24. A receiver for receiving a digital broadband transmission for saving power in the receiver, comprising:
means for receiving information indicating a maximum burst duration.
25. A receiver according to claim 24, wherein information indicating the maximum burst duration is signalled in a time slice identifier descriptor.
26. A receiver according to claim 25, wherein the time slice identifier descriptor is carried in one or more program specific information or service information tables.
27. A receiver according to claim 26, wherein the one or more program specific information or service information tables comprise a network information table; program map table and IPMAC notification table.
28. A receiver according to claim 24, wherein the receiver further comprises a mobile DVB-T receiver.
29. A receiver according to claim 28, wherein the information indicating the maximum burst duration is applied for saving power in the receiver, if a remainder of the burst is lost.
30. A receiver according to claim 28, wherein the receiver further comprises a mobile station for interaction with the digital broadcast transmission.
31. A transmitter for transmitting a digital broadband transmission, comprising:
means for providing information indicating a maximum burst duration.
32. A transmitter according to claim 31, wherein the information indicating the maximum burst duration is signalled in a time slice identifier descriptor.
33. A transmitter according to claim 32, wherein the time slice identifier descriptor is carried in one or more program specific information or service information tables.
34. A transmitter according to claim 33, wherein the one or more program specific information or service information tables comprise a network information table, program map table and IPMAC notification table.