Author: claimsbot

1. A serially concatenated convolutional decoder of a mobile communication system, comprising:
a demultiplexer and zero inserter for inserting zero on the position of a substituted code when the substituted code is inputted and outputting it while outputting received code bits, and outputting the substituted code to the multiplexer;
an inner Soft In Soft Out (SISO) input unit for generating a decode value by adapting the outputted code bit and a probability value feed-backed from an output terminal to a maximum probability decode algorithm;
a deinterleaver for deinterleaving the generated decode value;
a multiplexer for inserting the substituted code into the decode value outputted from the deinterleaver and outputting it; and
an outer SISO output unit for generating the final decode value by adapting the decode value having the inserted substituted code and probability value of the zero to the maximum probability decode algorithm.
2. The serially concatenated convolutional decoder of the mobile communication system according to claim 1, wherein the serially concatenated convolutional decoder of the mobile communication system further comprises a puncturer and interleaver for improving the decoding performance by puncturing the final decode value outputted from the outer Soft In Soft Out (SISO) output unit with the puncturing pattern, interleaving it, and providing it as the probability value of the inner SISO input unit.
3. A dual mode concatenated convolutional encoder of a mobile communication system, comprising:
a first Recursive Systematic Convolutional (RSC) encoder for coding inputted data sequence with 1n code rate;
a puncturer for puncturing the code inputted from the first RSC encoder with a certain puncturing pattern;
an interleaver for dispersing errors clustered on one code by relocating position of the punctured code;
a second RSC encoder for outputting new two code values by coding the error dispersed code with 1n code rate;
a delayer for delaying the code punctured and thrown away from the puncturer for a certain time; and
a substituent for substituting the punctured code delayed on the delayer for the code on the punctured position when it is inputted among the codes outputted from the second RSC encoder, and outputting it.
4. The dual mode concatenated convolutional encoder of the mobile communication system according to claim 3, wherein the dual mode concatenated convolutional encoder of the mobile communication system further comprises a switch for connecting the output of the second Recursive Systematic Convolutional (RSC) encoder and delayer to the substituent in a serial coding mode.
5. The dual mode concatenated convolutional encoder of the mobile communication system according to claim 4, wherein the switch directly connects the output of the second Recursive Systematic Convolutional (RSC) encoder and delayer to an output terminal side in a parallel coding mode.
6. The dual mode concatenated convolutional encoder of the mobile communication system according to claim 4, wherein the second Recursive Systematic Convolutional (RSC) encoder can operate faster than the first RSC encoder in the serial coding mode.
7. The dual mode concatenated convolutional encoder of the mobile communication system according to claim 3, wherein the Recursive Systematic Convolutional (RSC) encoder adapts a encoder having 4 constraint length.
8. The dual mode concatenated convolutional encoder of the mobile communication system according to claim 3, wherein the 1n code rate is 12.
9. A serially concatenated convolutional decoder of a mobile communication system, comprising:
a demultiplexer and zero inserter for outputting the received code as it is in a parallel decoding mode, providing an inputted substituted code to a multiplexer and inserting zero on the position of the substituted code and outputting the zero inserted code bit in a serial decoding mode;
an inner Soft In Soft Out (SISO) input unit for generating a decode value by adapting the code bit and a feedback-inputted probability value to a maximum probability decode algorithm;
a deinterleaver for deinterleaving the generated decode value;
a multiplexer for inserting the substituted code into the decode value outputted from the deinterleaver or selecting the puncture bit and outputting it;
an outer SISO output unit for generating the final decode value by adapting a decode value having the substituted code or a probability value such as a code value and a zero value provided from the puncture bit and deinterleaver to the maximum probability decode algorithm; and
a puncturer and interleaver for puncturing the final decode value with a puncturing pattern, interleaving it, and providing it as a probability value of the inner SISO input unit.
10. The dual mode concatenated convolutional decoder of the mobile communication system according to claim 9, wherein the inner Soft In Soft Out (SISO) input unit operates faster than the outer SISO output unit in the serial decoding mode.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A method of enhancing handover over a wireless connection, for use in a plurality of moving devices, the method comprising:
receiving a control message by one of a plurality of moving devices;
transmitting a report message by the one of the plurality of moving devices, wherein the one of the plurality of moving devices sets in a state for group handover and represents all others of the plurality of moving devices for a handover decision; and
determining a part or all of the plurality of moving devices are allowed to perform the group handover according to the report message, each of the part or all of the plurality of moving devices allowed to perform the group handoverperforms a handover procedure sequentially after receiving a reconfiguration message.
2. The method as claimed in claim 1, wherein the control message comprises a measurement command, and the one of the plurality of moving devices prepares a measure report in the report message in response to the measurement command.
3. The method as claimed in claim 2, wherein the measure report comprises a sequence of user equipment identifiers (UE IDs) of the plurality of moving devices.
4. The method as claimed in claim 2, wherein the measure report further comprises information representing for a group of the plurality of moving devices.
5. The method as claimed in claim 2, wherein the measure report further comprises mobility information.
6. The method as claimed in claim 1, wherein determining the part or all of the plurality of moving devices allowed to perform the group handover comprising
determining a group handover decision by a first control node according to the report message from the one of the plurality of moving devices,
if the group handover is allowed, the first control node indicating a plurality of timers for controlling the group handover and sending a handover request to a second control node.
7. The method as claimed in claim 6, wherein the first control node indicates the plurality of timers for controlling the group handover by a timer list.
8. The method as claimed in claim 7, wherein the timer list comprises a handover timer for each of the plurality of moving devices in the group handover.
9. The method as claimed in claim 7, wherein the timer list comprises a path switch timer for each of the plurality of moving devices in the group handover.
10. The method as claimed in claim 6, wherein the handover request comprises a sequence of the plurality of moving devices.
11. The method as claimed in claim 10, wherein the sequence is represented as a sequence of user equipment identifiers (UE IDs) of the plurality of moving devices.
12. The method as claimed in claim 6, wherein wherein each of the plurality of moving devices is respectively placed in a corresponding carriage of a train, and wherein the measure report further comprises a sequence S={u1, u2, . . . , un}, where uk is an user equipment identifier (UE ID) of one of the plurality of moving devices in k-th carriage.
13. The method as claimed in claim 12, wherein each of the plurality of timers is correspoding to one of the plurality of moving devices for handover controlling.
14. The method as claimed in claim 6, wherein the plurality of timers is adjusted according to the velocity of the train, the length of the carriages of the train, or an overlapping area between the first control node and the second control node.
15. The method as claimed in claim 6, wherein the plurality of timers for handover controlling is adjusted according to information from the report message by an overlapping area between the first control node and the second control node.
16. The method as claimed in claim 6, wherein each of the moving devices allowed to perform the group handover receives the reconfiguration message and performs the handover according to corresponding one of the plurality of timers, and after the correspoding timer is expired, the next handover procedure is configured according to a sequence of the plurality of moving devices.
17. The method as claimed in claim 6, further comprising
the second control node transmitting a handover response to the first control node in response to the handover request, wherein the handover response comprises information indicating which of the plurality of moving devices are allowed to perform the group handover.
18. The method as claimed in claim 17, wherein the handover response comprises a first handover request response which indicates that all of the plurality of moving devices are allowed to perform the group handover, and information for the first control node to perform the group handover.
19. The method as claimed in claim 17, wherein when the first control node receives the handover response comprising the first handover request response, the first control node starts to perform all handover procedures for all of the plurality of moving devices according to the pluralty of timers.
20. The method as claimed in claim 17, wherein the handover response comprises a confirmation of the plurality of timers for controlling the group handover.
21. The method as claimed in claim 20, wherein the plurality of timers for controlling the group handover is provided by a timer list.
22. The method as claimed in claim 21, wherein the timer list comprises a handover timer for each of the plurality of moving devices in the group handover.
23. The method as claimed in claim 21, wherein the timer list comprises a path switch timer for each of the plurality of moving devices in the group handover.
24. The method as claimed in claim 17, wherein the handover response comprises a second handover request response, which indicates that n moving devices are allowed to perform the group handover, wherein n is equal to zero or a number smaller than the total number of the the plurality of moving devices, the handover response further comprises information for the first control node to perform the group handover, if n is larger than zero.
25. The method as claimed in claim 24, wherein the handover response comprises a confirmation of the plurality of timers for controlling the group handover, if n is larger than zero.
26. The method as claimed in claim 25, wherein the plurality of timers for controlling the group handover is provided by a timer list.
27. The method as claimed in claim 26, wherein the timer list comprises a handover timer for each of the plurality of moving devices in the group handover.
28. The method as claimed in claim 26, wherein the timer list comprises a path switch timer for each of the plurality of moving devices in the group handover.
29. The method as claimed in claim 24, wherein when the first control node receives the handover response comprises the second handover request response, the first control node starts to perform handover procedures for the n moving devices, if n is larger than zero according to a pluralty of timers in the timer list.
30. The method as claimed in claim 17, wherein when the first control node performs the handover procedures for the ith moving device in some or all of the plurality of moving devices allowed to perform the group handover, after the timer Tci\u22121 for the (i\u22121)th moving device in the timer list timeout, the first control node sends the reconfiguration message to the ith moving device to start performing the handover procedure.
31. The method as claimed in claim 30, wherein when the first control node sends the reconfiguration message to the ith moving device to start performing the handover procedure, substantially the same time the first control node sends another one of the timers to perform a path switch procedure for the ith moving device.
32. The method as claimed in claim 17, wherein the information further comprises Target C-RNTI, Target DRB ID (uploaddownload), Target eNB AS Security Algorithm from the second control node for the first control node to perform the group handover.
33. A moving device comprising a transmitter, a receiver, and a processing circuit coupled to the transmitter and the receiver, wherein the transmitter and the receiver respectively transmits and receives wireless signals, and the processing circuit is configured for
receiving a control message;
setting in a state for group handover to representing others of the plurality of moving devices in the group handover; and
preparing and transmitting a measure report to determine a number of the plurality of moving devices which are allowed to sequentially perform handover operation in the group handover.
34. The moving device as claimed in claim 33, wherein the control message comprises a measurement command, and the one of the pluarity of moving devices prepares the measure report in the report message in response to the measurement command.
35. The moving device as claimed in claim 33, wherein the measure report comprises a sequence of user equipment identifiers (UE IDs) of the plurality of moving devices.
36. The moving device as claimed in claim 33, wherein the measure report further comprises information representing for a group of the plurality of moving devices.
37. A control node comprising a transmitter, a receiver, and a processing circuit coupled to the transmitter and the receiver, wherein the transmitter and the receiver respectively transmits and receives wireless signals, and the processing circuit is configured to:
transmitting a control message;
receiving a report message in response to the control message by a moving device of a plurality of moving devices, wherein the one of the plurality of moving devices sets in a state for group handover to representing others of the plurality of moving devices in the group handover; and
determining a group handover decision according to the report message from the one of the plurality of moving devices,
if the result of the group handover decision indicates that the group handover is allowed, the control node indicating a plurality of timers for controlling the group handover and sending a handover request to a target control node.
38. The control node as claimed in claim 37, wherein the plurality of timers for sequentially controlling the group handover is provided by a timer list.
39. The control node as claimed in claim 38, wherein the timer list comprises a handover timer for each of the plurality of moving devices in the group handover.
40. The control node as claimed in claim 38, wherein the timer list comprises a path switch timer for each of the plurality of moving devices in the group handover.
41. The control node as claimed in claim 37, wherein the processing circuit is further configured to receiving a handover response in response to the handover request, wherein the handover response comprises information related to that some or all of the plurality of moving devices are allowed to perform the group handover.
42. The control node as claimed in claim 41, wherein the handover response comprises a first handover request response, which indicates that all of the plurality of moving devices are allowed to perform the group handover, and information to perform the group handover.
43. The control node as claimed in claim 41, wherein when the handover response comprising the first handover request response is received, the processing circuit is further configured to starting to sequentially perform all handover procedures for all of the plurality of moving devices according to the pluralty of timers.
44. The control node as claimed in claim 41, wherein the handover response comprises a confirmation of the pluality of timers for controlling the group handover.
45. The control node as claimed in claim 41, wherein the handover response comprises a second handover request response, which indicates that n moving devices are allowed to perform the group handover, wherein n is equal to zero or a number smaller than the total number of the the plurality of moving devices, the handover response further comprises information to perform the group handover, if n is larger than zero.
46. The control node as claimed in claim 45, wherein when the handover response comprises the second handover request response, the processing circuit is further configured to starting to perform handover procedures for the n moving devices, if n is larger than zero according to the pluralty of timers.
47. The control node as claimed in claim 41, wherein when the processing circuit is further configured to performing a handover procedure for the ith moving device in some or all of the plurality of moving devices allowed to perform the group handover, after the timer Tci\u22121 for the (i\u22121)th moving device in the timer list timeout, the processing circuit is further configured to sending a reconfiguration message to the ith moving device to start performing the handover procedure, wherein i is an integer and is greater than zero and smaller than or equal to the number of the plurality of moving devices allowed to perform the group handover.
48. The control node as claimed in claim 47, wherein when the processing circuit is further configured to sending the reconfiguration message to the ith moving device to start performing the handover procedure, substantially the same time the processing circuit is further configured to sending another one of the plurality of timers to perform a path switch procedure for the ith moving device.
49. The control node as claimed in claim 37, wherein the processing circuit is further configured to sequentially and respectivley sending a reconfiguration message and performming a handover procedure according to corresponding one of the timers, and each of the moving devices allowed to perform the group handover receives, and after the correspoding timer is expired, the next handover procedure is configured according to a sequence of the plurality of moving devices.

1. An electric brake comprising:
a caliper having provided therein a motor, a rotary-linear motion conversion mechanism for converting rotation of the motor to a linear motion and a piston adapted to press a brake pad against a disc rotor according to a force transmitted from the rotary-linear motion conversion mechanism and thus generate a braking force;
a parking brake mechanism including an engaging structure capable of being engaged with an associated-movement portion which operates in association with the motor, the parking brake mechanism being capable of exerting a parking brake function through engagement and disengagement of the engaging structure relative to the associated-movement portion; and
an actuator including a coil and a plunger capable of displacement under an electromagnetic force generated by energization of the coil, the actuator being adapted to enable the engagement or the disengagement of the engaging structure relative to the associated-movement portion according to the displacement of the plunger, wherein;
at least one of the plunger and the engaging structure is provided with a force-receiving portion, the force-receiving portion being adapted to receive a force to thereby enable the disengagement of the engaging structure relative to the associated-movement portion; and
an opening for insertion of a force-applying member for applying a force to the force-receiving portion is formed in a housing for accommodating the parking brake mechanism.
2. An electric brake according to claim 1, wherein the force-applying member is inserted through the opening and, with a forward end portion of the force-applying member abutting against the force-receiving portion, the forward end portion is moved in a direction of displacement of the plunger, to thereby move the force-receiving portion in a direction for disengaging the engaging structure from the associated-movement portion.
3. An electric brake according to claim 1, wherein an axis of the opening for insertion of the force-applying member is substantially orthogonal to a direction of displacement of the plunger of the actuator.
4. An electric brake according to claim 3, wherein a forward end portion of the force-applying member includes an inclined portion so that when the force-applying member is inserted through the opening, with the inclined portion abutting against the force-receiving portion, the force-applying member is moved in a direction of the axis of the opening, to thereby move the force-receiving portion due to sliding along the inclined portion in a direction for disengaging the engaging structure from the associated-movement portion.
5. An electric brake according to claim 3, wherein the force-applying member is inserted through the opening and, with a forward end portion of the force-applying member abutting against the force-receiving portion, the force-applying member is pivotally moved about the opening so as to move the forward end portion in the direction of displacement of the plunger, to thereby move the force-receiving portion in a direction for disengaging the engaging structure from the associated-movement portion.
6. An electric brake according to claim 1, wherein a direction of an axis of the opening for insertion of the force-applying member is substantially the same as a direction of displacement of the plunger of the actuator.
7. An electric brake according to claim 6, wherein the force-applying member is inserted through the opening and, with a forward end portion of the force-applying member abutting against the force-receiving portion, the force-applying member is moved in the direction of the axis of the opening, to thereby move the force-receiving portion in a direction for disengaging the engaging structure from the associated-movement portion.
8. An electric brake according to claim 1, wherein the opening for insertion of the force-applying member is sealed with a cap member, the force-applying member being attached to the cap member.
9. An electric brake according to claim 1, wherein the associated-movement portion comprises a ratchet which rotates in association with the rotation of the motor, and the engaging structure comprises an engaging pawl that is disposed at a periphery of the ratchet so as to be capable of engaging a tooth portion of the ratchet.
10. An electric brake according to claim 9, wherein the engaging pawl is provided in a pivot arm pivotably disposed at the periphery of the ratchet, with a basal end portion of the pivot arm being pivotably attached to a pin.
11. An electric brake according to claim 10, wherein:
a direction of an axis of the opening for insertion of the force-applying member is substantially the same as a direction of displacement of the plunger of the actuator;
the force-receiving portion is formed at a forward end portion of the pivot arm; and
the force-applying member is inserted through the opening and, with a forward end portion of the force-applying member abutting against the force-receiving portion of the pivot arm, the force-applying member is moved in the direction of the axis of the opening, to thereby move the pivot arm in a direction for disengaging the engaging pawl from the ratchet.
12. An electric brake according to claim 11, wherein:
the opening for insertion of the force-applying member is sealed with a cap member, the force-applying member being attached to the cap member; and
the pivot arm is adapted to be moved in the direction for disengaging the engaging pawl from the ratchet by moving the cap member in a direction for separation from the opening.
13. An electric brake according to claim 9, wherein the force-applying member is preliminarily inserted through the opening for insertion of the force-applying member, and the engaging pawl is adapted to be disengaged from the ratchet by moving the force-applying member in the opening.
14. An electric brake according to claim 9, further comprising a bias device adapted to bias the engaging pawl in a direction for engagement with the tooth portion of the ratchet, the actuator being adapted to effect the displacement of the plunger so as to disengage the engaging pawl from the ratchet.
15. An electric brake according to claim 14, wherein the actuator comprises a self-holding type solenoid which is adapted to effect the displacement of the plunger so as to disengage the engaging pawl from the ratchet and maintains a position of the plunger after the displacement even when the coil is deenergized.
16. An electric brake according to claim 9, further comprising a bias device adapted to bias the engaging pawl in a direction for disengagement from the tooth portion of the ratchet, the actuator being adapted to effect the displacement of the plunger so as to engage the engaging pawl with the ratchet.
17. An electric brake comprising:
a caliper having provided therein a motor, a rotary-linear motion conversion mechanism for converting rotation of the motor to a linear motion and a piston adapted to press a brake pad against a disc rotor according to a force transmitted from the rotary-linear motion conversion mechanism and thus generate a braking force; and
a parking brake mechanism including an engaging structure capable of being engaged with an associated-movement portion which operates in association with the motor, the parking brake mechanism being capable of exerting a parking brake function through engagement and disengagement of the engaging structure relative to the associated-movement portion, the disengagement of the engaging structure being effected by operating the motor to temporarily rotate the associated-movement portion in a direction for braking, wherein:
a force-receiving portion is provided on the associated-movement portion, the force-receiving portion being adapted to receive a force to thereby enable the disengagement of the engaging structure relative to the associated-movement portion; and
an opening for insertion of a force-applying member for applying a force to the force-receiving portion is formed in a housing for accommodating the parking brake mechanism.
18. An electric brake according to claim 17, wherein the associated-movement portion comprises a ratchet which rotates in association with the rotation of the motor, and the engaging structure comprises an engaging pawl that is disposed at a periphery of the ratchet so as to be capable of engaging a tooth portion of the ratchet.
19. An electric brake according to claim 18, wherein:
the force-receiving portion is formed at an outer peripheral portion of the ratchet, the outer peripheral portion of the ratchet being located along a line of extension of the opening for insertion of the force-applying member; and
the ratchet is capable of being rotated in a direction for disengagement from the engaging pawl, by means of the force-applying member inserted through the opening.
20. An electric brake according to claim 18, further comprising a bias device adapted to provide a force that biases the engaging pawl in a direction for disengagement from the tooth portion of the ratchet, and an actuator adapted to forcibly move the engaging pawl in a direction for engagement with the ratchet against the force of the bias device.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

What is claimed is:

1. A refrigerant supply apparatus for supplying a refrigerant to a cooling target, the apparatus comprising:
a refrigerant supply channel through which pure water as the refrigerant is supplied to the cooling target; and
an impurity removing unit disposed in an impurity removing channel which is a channel different from said refrigerant supply channel.
2. The apparatus according to claim 1, further comprising a pure water tank which stores the pure water,
wherein an upstream side of said refrigerant supply channel is connected to said pure water tank, and
said impurity removing channel circulates the pure water through said pure water tank.
3. The apparatus according to claim 2, wherein a lower portion of said pure water tank has a tapered shape.
4. The apparatus according to claim 2, further comprising an oxygen removing mechanism which removes dissolved oxygen in the pure water by supplying an inert gas into said pure water tank.
5. The apparatus according to claim 4, wherein said oxygen removing mechanism supplies the inert gas into the pure water in said pure water tank.
6. The apparatus according to claim 1, wherein said impurity removing unit includes at least one of an ion exchange resin, active carbon, a filtration film, a reverse osmosis film, a distillation unit, and a deaeration film.
7. The apparatus according to claim 1, further comprising a germicidal lamp which sterilizes the pure water.
8. The apparatus according to claim 1, further comprising:
a sensor which measures a purity of the pure water; and
a valve which stops supply of the pure water to the cooling target when the purity of the pure water does not satisfy a predetermined standard.
9. The apparatus according to claim 8, further comprising:
a first pump provided to said refrigerant supply channel; and
a second pump provided to said impurity removing channel,
wherein said first and second pumps are controlled independently of each other, such that said first pump is stopped when the purity of the pure water does not satisfy the predetermined standard, and that said second pump is stopped when the purity of the pure water satisfies the predetermined standard.
10. The apparatus according to claim 8, wherein said sensor includes a resistivity sensor.
11. The apparatus according to claim 8, wherein said sensor includes a dissolved oxygen sensor.
12. The apparatus according to claim 1, further comprising a temperature adjustment unit which adjusts a temperature of the pure water.
13. A device manufacturing apparatus comprising the refrigerant supply apparatus defined in claim 1 as part of a cooling apparatus.
14. An exposure apparatus comprising the refrigerant supply apparatus defined in claim 1 as part of a cooling apparatus.
15. A device manufacturing apparatus comprising:
a driving section which generates heat;
a refrigerant supply channel through which pure water as a refrigerant is supplied to a cooling section that cools said driving section;
a sensor which is disposed in said refrigerant supply channel and measures a purity of the pure water; and
a controller which controls supply of the pure water to said cooling section on the basis of the purity of the pure water measured by said sensor.
16. The apparatus according to claim 15, wherein said controller stops supply of the pure water to said cooling section when the purity of the pure water does not satisfy a predetermined standard.
17. The apparatus according to claim 15, wherein said sensor includes a resistivity sensor.
18. The apparatus according to claim 15, wherein said sensor includes a dissolved oxygen sensor.
19. The apparatus according to claim 15, further comprising an impurity removing unit which removes impurities in the pure water.
20. The apparatus according to claim 19, wherein said impurity removing unit is disposed in an impurity removing channel which is a channel different from said refrigerant supply channel.
21. The apparatus according to claim 20, further comprising:
a first pump provided to said refrigerant supply channel; and
a second pump provided to said impurity removing channel,
wherein said first and second pumps are controlled independently of each other, such that said first pump is stopped when the purity of the pure water does not satisfy the predetermined standard, and that said second pump is stopped when the purity of the pure water satisfies the predetermined standard.
22. The apparatus according to claim 19, wherein said impurity removing unit is disposed in a branch channel of said refrigerant removing channel.
23. The apparatus according to claim 19, wherein said impurity removing unit includes at least one of an ion exchange resin, active carbon, a filtration film, a reverse osmosis film, a distillation unit, and a deaeration film.
24. The apparatus according to claim 15, further comprising a germicidal lamp which sterilizes the pure water.
25. The apparatus according to claim 15, further comprising a pure water tank which stores the pure water, wherein an upstream side of said refrigerant supply channel is connected to said pure water tank.
26. The apparatus according to claim 25, wherein a lower portion of said pure water tank has a tapered shape.
27. The apparatus according to claim 25, further comprising an oxygen removing mechanism which removes dissolved oxygen in the pure water by supplying an inert gas into said pure water tank.
28. The apparatus according to claim 27, wherein said oxygen removing mechanism supplies the inert gas into the pure water in said pure water tank.
29. The apparatus according to claim 15, further comprising a temperature adjustment unit which adjusts a temperature of the pure water.
30. The apparatus according to claim 15, which is formed as an exposure apparatus.
31. A device manufacturing method including a step of processing a substrate using the device manufacturing apparatus according to claim 15.
32. A device manufacturing method including steps of:
transferring a pattern to a substrate with the device manufacturing apparatus according to claim 30; and
developing the substrate.