1. A semiconductor device, comprising:
a substrate;
a ferroelectric capacitor formed above said substrate;
an interlayer insulating film which covers said ferroelectric capacitor and through which a hole reaching an electrode of said ferroelectric capacitor is formed; and
a wiring formed above said interlayer insulating film and connected to said electrode through said hole,
a planar shape of said hole being any one type selected from a group consisting of:
(1) a polygon with an interior angle of each angle thereof being obtuse;
(2) a closed curve with a bending direction thereof being constantly inward with respect to said hole; and
(3) a shape which consists of a line segment and a curve with a bending direction thereof being constantly inward with respect to said hole, an angle between a tangent of said curve and said line segment at an intersection of said line segment and said curve being obtuse, and an interior angle of an intersection of two of said line segments being obtuse.
2. The semiconductor device according to claim 1, wherein a shortest diameter of said hole is 1.0 \u03bcm or more.
3. The semiconductor device according to claim 1, wherein said wiring is an aluminum wiring, and a barrier metal film is formed between said wiring and said electrode.
4. The semiconductor device according to claim 3, wherein said barrier metal film is a titanium nitride film.
5. The semiconductor device according to claim 1, wherein said electrode contains a metal of a platinum family or an oxide thereof.
6. The semiconductor device according to claim 1, wherein a planar shape of said hole is a circle, or a regular polygon whose number of angles is identical to or more than five.
7. A manufacturing method of a semiconductor device, comprising the steps of:
forming a ferroelectric capacitor above a substrate;
forming an interlayer insulating film which covers said ferroelectric capacitor;
forming a hole reaching an electrode of said ferroelectric capacitor through said interlayer insulating film; and
forming a wiring which is connected to said electrode through said hole above said interlayer insulating film,
in the step of forming said hole, a planar shape of said hole being any one type selected from a group consisting of:
(1) a polygon with an interior angle of each angle thereof being obtuse;
(2) a closed curve with a bending direction thereof being constantly inward with respect to said hole; and
(3) a shape which consists of a line segment and a curve with a bending direction thereof being constantly inward with respect to said hole, an angle between a tangent of said curve and said line segment at an intersection of said line segment and said curve being obtuse, and an interior angle of an intersection of two of said line segments being obtuse.
8. The manufacturing method of a semiconductor device according to claim 7, wherein a shortest diameter of said hole is 1.0 \u03bcm or more.
9. The manufacturing method according to claim 7, wherein said wiring is an aluminum wiring, and a barrier metal film is formed between said wiring and said electrode before forming such a wiring.
10. The manufacturing method according to claim 8, wherein said wiring is an aluminum wiring, and a barrier metal film is formed between said wiring and said electrode before forming such a wiring.
11. The manufacturing method according to claim 9, wherein said barrier metal film is a titanium nitride film.
12. The manufacturing method according to claim 10, wherein said barrier metal film is a titanium nitride film.
13. The manufacturing method according to claim 7, wherein said electrode contains a metal of a platinum family or an oxide thereof.
14. The manufacturing method according to claim 8, wherein said electrode contains a metal of a platinum family or an oxide thereof.
15. The manufacturing method according to claim 9, wherein said electrode contains a metal of a platinum family or an oxide thereof.
16. The manufacturing method according to claim 10, wherein said electrode contains a metal of a platinum family or an oxide thereof.
17. The manufacturing method according to claim 11, wherein said electrode contains a metal of a platinum family or an oxide thereof.
18. The manufacturing method according to claim 12, wherein said electrode contains a metal of a platinum family or an oxide thereof.
19. The manufacturing method according to claim 7, wherein a planar shape of said hole is a circle, or a regular polygon whose number of angles is identical to or more than five.
20. The manufacturing method according to claim 7, wherein the step of forming said hole comprises the steps of:
forming a mask having an opening portion, a planar shape of which being identical to that of said hole to be formed;
performing etching of said interlayer insulating film by using said mask; and
removing said mask.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1-5. (canceled)
6. A composite pipe to metal end fitting joint comprising:
a metal inner sleeve configured on one end with an annular flange and projecting distally therefrom to be formed with an annular shell configured with a distally extending, continuous inwardly tapering conical inner sleeve surface;
a metal outer sleeve received over the inner sleeve abutted on one end with the flange and further configured with a distally projecting outer shell concentric with the inner shell and formed with a distally radially outwardly expanding continuous outer shell surface cooperating with the inner sleeve surface to form an annulus distally expanding in thickness:
a composite pipe configured on one extremity with a connector ring formed with inner and outer surfaces, the tapering proximally inwardly and the inner surface tapering proximally outwardly to form a proximally narrowing connector ring received complimentarily in the annulus; and
a bond on the interface between the connector ring and shell surfaces.
7. The joint of claim 6 wherein:
the inner sleeve includes a proximal end including a mechanical connector.
8. The joint of claim 7 wherein:
the connector is formed with threads.
9. The joint of claim 6 wherein:
the inner and outer sleeves are configured at their proximal ends with concentric barrels.
10. The joint of claim 6 wherein:
the outer sleeve is welded to the inner sleeve.
11. A composite pipe to metal end fitting joint comprising:
an elongated metal inner sleeve configured with first and second annular extremities, the sleeve projecting distally from the first extremity to form the second extremity with an inner shell configured with an exterior bonding surface tapered distally inwardly;
an elongated metal outer sleeve formed with a first annular extremity received over the first mentioned annular extremity and further configured with a distally projecting outer shell concentric with the inner shell and formed interiorly with a distally, radially outwardly expanding conical outer sleeve surface cooperating with the inner bonding surface to form an annulus distally expanding in thickness;
a composite pipe configured on one extremity with a connector ring formed with inner and outer surfaces, the tapering proximally inwardly and the inner surface tapering proximally outwardly to form a proximally narrowing connector ring received complimentarily in the annulus; and
a bond on the interface between the connector ring and shell surfaces.
12. The joint of claim 6 wherein:
the inner sleeve surface is configured with a continuous uninterrupted taper.
13. The joint of claim 6 that includes:
a weld welding the outer stem to the inner sleeves.
14. A composite to metal joint comprising:
a composite tube wall formed at one extremity with annular, concentric inner and outer bonding surfaces tapering distally outwardly and inwardly, respectively, to form a double tapered connector ring;
a metal fitting configured with concentric inner and outer shells formed with respective concentric inner and outer conical surfaces cooperating to form a proximally extending radially expanding, annular cavity receiving the connector ring;
a bond between the respective bonding surfaces and conical surfaces.
15. The composite to metal joint of claim 14 wherein:
the tube wall is formed with a constant diameter body terminating in the connector ring.
16. The composite to metal joint of claim 14 that includes:
means affixing the inner sleeve to the outer sleeve.
17. The composite to metal joint of claim 14 wherein:
the concentric bonding surfaces are formed symmetrical about a cylindrical median.
18. The composite to metal joint of claim 17 wherein:
conical surfaces angle proximally away from one another toward respective inner and outer surfaces of the respective inner and outer sleeves to form respective flexible annular edges.
19. A composite pipe to metal end fitting joint comprising:
a metal inner sleeve configured on one end with an exterior annular flange and projecting distally therefrom to be configured with a barrel and then stepping down in diameter at a selected point to form a distally facing annular abutment shoulder and projecting further distally to form an annular sleeve formed with an exterior surface tapering conically inwardly to form an inner sleeve surface;
a metal outer sleeve received over the inner sleeve, abutting the flange and formed with a collar embracing the barrel and expanded in diameter at the selected point to cooperate with the inner sleeve to form an annular nest and further configured with a distally, projecting outer shell concentric with the inner shell and formed interiorly with a distally radially outwardly expanding continuous outer shell bonding surface cooperating with the inner sleeve surface to form a distally expanding annulus;
a composite pipe received in the annulus and formed with a blunt end abutting the combined abutment shoulder; and
a bond on the interface between the respective bonding surfaces and the composite pipe.
20. The composite pipe to metal end fitting joint of claim 19 wherein:
the inner sleeve includes a mechanical connector.
21. The composite pipe to metal end fitting joint of claim 19 wherein:
the bond is an epoxy resin.
22. A composite pipe to metal end fitting joint comprising:
a metal inner sleeve configured exteriorly on one end with an exterior annular flange formed with a first distally facing annular abutment shoulder and projecting distally from the shoulder to form an annular barrel formed and then stepped down in diameter to form a second distally facing abutment shoulder and projecting further distally to form a distally extending exterior annular bonding surface;
a metal outer sleeve defining a torque tube received over the inner sleeve, abutting the first distally facing abutment shoulder and formed with a collar embracing the barrel and expanded in diameter in alignment with the second distally facing abutment shoulder to cooperate therewith in forming a combined abutment shoulder and further configured with a distally projecting outer shell concentric with the inner shell and formed interiorly with a distally, radially outwardly expanding continuous outer shell bonding surface cooperating with the exterior annular bonding surface to form a distally expanding annulus;
a composite pipe received in the annulus and formed with a blunt end abutting the combined abutment shoulder; and
a bond on the interface between the respective bonding surfaces and the composite pipe whereby, application of torque loads to the pipe will be carried through the composite of the inner sleeve and torque tube.
23. A composite pipe to metal end fitting joint comprising:
an elongated metal inner sleeve configured with first and second extremities, the sleeve projecting distally from the first extremity to form the second extremity and an inner shell configured with an annular exterior bonding surface;
an elongated metal outer sleeve defining a torque tube formed with a first annular extremity received over the first mentioned annular extremity and affixed thereto, the outer sleeve further configured with a distally projecting outer shell to carry torque loads, concentric with the inner shell and formed interiorly with a distally, radially outwardly expanding conical outer sleeve annular interior bonding surface cooperating with the exterior bonding surface to form an annulus distally expanding in radial thickness;
a composite pipe having one extremity received in the annulus;
and a bond on the interface between the exterior and interior bonding surfaces and the composite pipe whereby torque loads applied to the outer sleeve will be carried through the outer and inner shells to the pipe.
24. The joint of claim 23 wherein:
the first extremity of the inner sleeve is formed with an annular ring; and
extremity of the outer sleeve is formed with a collar applied to the ring.
25. The joint of claim 23 wherein:
the inner and outer sleeves are configured to form the annulus with an interior abutment shoulder; and
the composite tube is formed with a blunt end abutted against the shoulder.
26. The joint of claim 23 that includes:
a weld affixing the torque tube to the inner sleeve.
27. The end fitting of claim 19 wherein:
the inner sleeve is configured with the exterior surface of the barrel in the form of a cylinder.
28. The joint fitting of claim 22 wherein:
the inner sleeve is configured with the exterior surface of the barrel in the form of a cylinder.
29. The end fitting joint of claim 23 wherein:
the inner sleeve is configured with the exterior surface of the barrel in the form of a cylinder.
30. A method of making a metal to composite joint including:
selecting an inner cylindrical sleeve device with a sleeve having an outside bonding surface;
selecting an outside metal sleeve device with an inner diameter, the outside surface and inner diameter being sized to form an annulus of a predetermined radial thickness;
forming at least one of the devices with a first distally facing annular shoulder disposed in the annulus;
selecting a cylindrical composite pipe formed with a wall thickness of the predetermined thickness;
inserting the barrel into the pipe;
fitting the sleeve over the exterior of the pipe and positioning the pipe relative to the devices to abut the end of the pipe against the distally facing annular shoulder; and
selecting a bond and bonding the pipe to the barrel and shell.
30. The method of making a metal to composite joint of claim 30 wherein:
at least one of the devices selected is formed to taper distally to, when assembled, expand the annulus distally.