Author: claimsbot

1. An exposure method comprising the steps of:
exposing a pattern of a reticle onto a substrate by scanning the reticle and the substrate, and by illuminating an illumination area having a slit shape on the reticle using a light from a light source, the slit shape having a longitudinal direction corresponding to a direction orthogonal to a scanning direction; and
correcting an accumulated illuminance in the scanning direction at each position of the illumination area in the longitudinal direction,
wherein said correcting step includes the steps of:
calculating a first illuminance correction amount common to plural areas on the substrate, the pattern being to be transferred to each area; and
calculating a second illuminance correction amount intrinsic to each area, said correcting step correcting the accumulated illuminance based on the first and second illuminance correction amounts.
2. An exposure method according to claim 1, wherein the first correction amount calculating method includes the steps of:
converting two-dimensional data expressed by a coordinate in the area into one-dimensional data expressed by a coordinate along the longitudinal direction;
obtaining a high order component expressed by the coordinate along the longitudinal direction; and
obtaining the first correction amount that is maintained constant during scanning irrespective of a coordinate in the scanning direction, said correcting step setting the first correction amount to a first corrector that includes a pair of blades arranged on a plane optically conjugate relationship with the reticle such that an interval between the blades can be adjusted in a direction corresponding to the scanning direction.
3. An exposure method according to claim 1, wherein the first correction amount calculating method includes the step of obtaining a gradient component expressed by a coordinate along the longitudinal direction from two-dimensional data expressed by a coordinate in the area, said correcting step setting the first correction amount to a second corrector arranged on a plane that has an optically conjugate or Fourier transformation relationship with the reticle, the second corrector being configured linearly movable in the longitudinal direction or rotatable around one axis that is parallel to a direction corresponding to the scanning direction.
4. An exposure method according to claim 1, wherein the second correction amount calculating method includes the step of obtaining a gradient component expressed by a coordinate along the longitudinal direction from two-dimensional data expressed by a coordinate in the area, said correcting step setting the second correction amount to a second corrector arranged on a plane that has an optically conjugate or Fourier transformation relationship with the reticle, the second corrector being configured linearly movable in the longitudinal direction or rotatable around one axis that is parallel to a direction corresponding to the scanning direction.
5. An exposure method according to claim 1, wherein the first correction amount calculating method includes the step of obtaining a high order component expressed by a coordinate along the longitudinal direction from two-dimensional data expressed by a coordinate in the area, said correcting step setting the first correction amount to a third corrector arranged on a plane that has an optically conjugate or Fourier transformation relationship with the reticle, the third corrector being configured linearly movable in the longitudinal direction or rotatable around one axis that is parallel to a direction corresponding to the scanning direction.
6. An exposure method according to claim 1, wherein at least one of the first and second correction amounts is maintained constant irrespective of a coordinate along the scanning direction.
7. An exposure method according to claim 1, wherein at least one of the first and second correction amounts is expressed by a function of a coordinate along the scanning direction, and said exposure method further comprises the step of controlling the at least one in synchronization with scanning.
8. An exposure method according to claim 1, further comprising the step of correcting a laser exposure dose, which step includes the steps of:
calculating a third illuminance correction amount common to the plural areas on the substrate; and
calculating a fourth illuminance correction amount intrinsic to each area, said laser exposure dose correcting step correcting the laser exposure dose based on the third and fourth illuminance correction amounts.
9. An exposure method according to claim 8, wherein the third illuminance correction amount calculating step includes the steps of:
obtaining a high order component including a gradient component expressed by a coordinate along the scanning direction from two-dimensional data expressed by a coordinate in the area so as to set a component of the third illuminance correction amount in the scanning direction as a function of the coordinate along the scanning direction; and
setting a component of the third illuminance correction amount in the longitudinal direction by canceling out an illuminance variation caused by the first illuminance correction amount.
10. An exposure method according to claim 8, wherein the fourth illuminance correction amount calculating step includes the steps of:
obtaining a gradient component expressed by a coordinate along the scanning direction from two-dimensional data expressed by a coordinate in the area so as to set a component of the fourth illuminance correction amount in the scanning direction as a function of the coordinate along the scanning direction; and
setting a component of the fourth illuminance correction amount in the longitudinal direction by canceling out an illuminance variation caused by the second illuminance correction amount.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A soft starter module for selectively electrically connecting a power line terminal with an electric motor load terminal, the module comprising:
a first switching device having a first terminal electrically coupled with a load terminal and a second terminal electrically coupled with a line terminal;
a second switching device having a first terminal electrically coupled with the line terminal and a second terminal electrically coupled with the load terminal;
a driver apparatus providing switching control signals to the first and second switching devices for selectively electrically connecting the line terminal with the load terminal; and
a housing with a top, a bottom, and at least one side, the housing comprising:
a first housing structure,
a second housing structure mounted to the first housing structure, the first and second housing structures defining a cavity in which the first and second switching devices are mounted and allowing for external access to the load terminal and the line terminal,
at least one of the first and second housing structures including driver support structures for mounting the driver apparatus to the housing,
a first set of module mounting structures located on at least one of the first and second housing structures and allowing the housing to be mounted to a flat structure with a first one of the top, the bottom, and the at least one side generally parallel to the flat structure; and
a second set of module mounting structures located on at least one of the first and second housing structures and allowing the housing to be mounted to the flat structure with a second one of the top, the bottom, and the at least one side generally parallel to the flat structure.
2. The soft starter module of claim 1, wherein the driver apparatus comprises a first driver board providing switching control signals to the first switching device, and a second driver board providing switching control signals to the second switching device; and wherein the first and second housing structures individually include first driver support structures for mounting one of the driver boards thereto, and second driver support structures for mounting the driver boards to both the first and second housing structures.
3. The soft starter module of claim 2, wherein the first and second housing structures individually include driver support structures on a first side of the housing for mounting the driver apparatus to the first side of the housing, and wherein the first and second housing structures individually include first module mounting structures on a different second side of the housing allowing the housing to be mounted to a flat structure with the second side generally parallel to the flat structure.
4. The soft starter module of claim 1, wherein the first and second housing structures individually include driver support structures on a first side of the housing for mounting the driver apparatus to the first side of the housing, and wherein the first and second housing structures individually include first module mounting structures on a different second side of the housing allowing the housing to be mounted to a flat structure with the second side generally parallel to the flat structure.
5. The soft starter module of claim 1, wherein the module mounting structures include flanges on at least one of the first and second housing structures, and wherein the flanges individually include at least one hole or slot allowing the housing to be mounted to the flat structure with a fastener that extends through the hole or slot.
6. The soft starter module of claim 1, wherein the first and second housing structures each include first module mounting structures located on a side of the housing, and wherein at least one of the first and second housing structures includes second module mounting structures located on one of the top and the bottom of the housing.
7. The soft starter module of claim 6, wherein the module mounting structures comprise flanges that include at least one hole or slot allowing the housing to be mounted to the flat structure with a fastener that extends through the hole or slot.
8. The soft starter module of claim 6, wherein the first housing structure includes a set of second module mounting structures located on the top of the housing allowing the housing to be mounted to the flat structure with the top generally parallel to the flat structure, and wherein the second housing structure includes a set of second module mounting structures located on the bottom of the housing allowing the housing to be mounted to the flat structure with the bottom generally parallel to the flat structure.
9. The soft starter module of claim 8, wherein the module mounting structures comprise flanges that include at least one hole or slot allowing the housing to be mounted to the flat structure with a fastener that extends through the hole or slot.
10. The soft starter module of claim 1, further comprising:
a first heat sink connected to the first terminal of the first switching device and to the load terminal;
a second heat sink connected to the second terminal of the first switching device, to the first terminal of the second switching device, and to the line terminal;
a third heat sink connected to the second terminal of the second switching device, and to the load terminal; and
a clamp that clamps the first heat sink, the first switching device, the second heat sink, the second switching device, and the third heat sink into a stack arrangement mounted in the cavity of the housing.
11. The soft starter module of claim 1, further comprising at least one snubber resistor and at least one snubber capacitor operatively coupled with the driver apparatus and located within the housing cavity.
12. The soft starter module of claim 11, wherein the at least one snubber resistor is a tubular structure extending axially within the cavity between the first and second housing structures, and wherein the first and second housing structures individually include at least one resistor support extending into the cavity to engage the interior of an end of the snubber resistor.
13. The soft starter module of claim 12, wherein the resistor supports of the first and second housing structures are cone shaped.
14. The soft started module of claim 13, wherein the cone shaped resistor supports of the first and second housing structures include slots allowing the supports to flex to accommodate dimensional variations in the size of the snubber resistor.
15. The soft starter module of claim 11, wherein the at least one snubber capacitor is a cylindrical structure extending axially within the cavity between the first and second housing structures, and wherein the first and second housing structures individually include at least one capacitor support extending into the cavity to engage the end of the snubber capacitor.
16. The soft starter module of claim 1, further comprising at least one sharing resistor coupled between the line terminal and the load terminal and located within the housing cavity.
17. The soft starter module of claim 16, wherein the at least one sharing resistor is a tubular structure extending axially within the cavity between the first and second housing structures, and wherein the first and second housing structures individually include at least one resistor support extending into the cavity to engage the interior of an end of the sharing resistor.
18. The soft starter module of claim 17, wherein the resistor supports of the first and second housing structures are cone shaped.
19. The soft started module of claim 18, wherein the cone shaped resistor supports of the first and second housing structures include slots allowing the supports to flex to accommodate dimensional variations in the size of the sharing resistor.
20. The soft starter module of claim 1, wherein the first and second housing structures are joined along a closure line extending around a plurality of sides of the housing in a closure plane, wherein the first housing structure includes a first seal structure having at least two ribs and at least one groove between the ribs, the ribs and the groove extending along the closure line, and wherein the second housing structure includes a second seal structure having at least two ribs and at least one groove between the ribs, the ribs and the groove extending along the closure line, and wherein one of the ribs of the first seal structure is within the groove of the second seal structure when the first and second housing structures are joined along the closure line and one of the ribs of the second seal structure is within the groove of the first seal structure when the first and second housing structures are joined along the closure line.
21. The soft starter module of claim 1, wherein the first and second housing structures individually include a plurality of housing closure structures with holes for mounting the second housing structure to the first housing structure using fasteners extending through the holes.
22. The soft starter module of claim 21, wherein the housing closure structure holes of at least one of the first and second housing structures are adapted to fixedly receive self-tapping screws to mount the second housing structure to the first housing structure.
23. The soft starter module of claim 21, wherein the housing closure structures of at least one of the first and second housing structures include hexagonal recesses to receive hex nuts for mounting the second housing structure to the first housing structure using screws extending through the holes to engage the hex nuts.

1. A substrate cleaning apparatus of cleaning a substrate, the substrate cleaning apparatus comprising:
a main cleaning chamber having a cleaning space in which the substrate is cleaned, the main cleaning chamber comprising a sidewall in which a first vent hole is defined;
at least one first cleaning nozzle disposed in the main cleaning chamber to spray a first cleaning solution;
a cover member covering the main cleaning chamber, the cover member having one side in which a second vent hole is defined;
an air flow generation unit supplying air into the cleaning space through the first vent hole; and
an exhaust unit coupled to the one side of the cover member to suck and exhaust the air supplied into the cleaning space through the second vent hole.
2. The apparatus of claim 1, wherein the air flow generation unit and the exhaust unit generate an air flow within the cleaning space and the air flow is defined by a flow of the air crossing the cleaning space through the first and second vent holes.
3. The apparatus of claim 2, wherein the air flow generation unit and the exhaust unit exhaust mist generated from the first cleaning solution and filled into the cleaning space to the outside of the main cleaning chamber by using the air flow.
4. The apparatus of claim 2, further comprising:
a first auxiliary cleaning chamber disposed adjacent to the sidewall of the main cleaning chamber;
at least one second cleaning nozzle disposed in the first auxiliary cleaning chamber to spray a second cleaning solution;
a second auxiliary cleaning chamber facing the first auxiliary cleaning chamber with the main cleaning chamber therebetween;
at least one third cleaning nozzle disposed in the second auxiliary cleaning chamber to spray a third cleaning solution; and
a transfer unit disposed within the first auxiliary cleaning chamber, the cleaning chamber, and the second auxiliary cleaning chamber to transfer the substrate.
5. The apparatus of claim 4, wherein the air flow generation unit supplies the air into the first auxiliary cleaning chamber through a hole defined in the first auxiliary cleaning chamber, and the air supplied into the first auxiliary cleaning chamber is supplied into the cleaning space through the first vent hole.
6. The apparatus of claim 5, further comprising a guide member disposed within the first auxiliary cleaning chamber to extend to the first vent hole, wherein the guide member guides the air supplied into the first auxiliary cleaning chamber to the first vent hole.
7. The apparatus of claim 4, wherein the first cleaning nozzle sprays the first cleaning solution at a first pressure, the second cleaning nozzle sprays the second cleaning solution at a second pressure, and the third cleaning nozzle sprays the third cleaning solution at a third pressure,
wherein the first pressure is greater than each of the second and third pressures.
8. The apparatus of claim 4, further comprising:
a first auxiliary nozzle disposed within the first auxiliary cleaning chamber to spray a first fluid, the first auxiliary nozzle blocking mist generated from the first cleaning solution and introduced into the first auxiliary cleaning chamber through a first substrate entrance; and
a second auxiliary nozzle disposed within the second auxiliary cleaning chamber to spray a second fluid, the second auxiliary nozzle blocking the mist introduced into the second auxiliary cleaning chamber through a second substrate entrance,
wherein the first substrate entrance communicating with the first auxiliary cleaning chamber is defined in the main cleaning chamber and the second substrate entrance communicating with the second auxiliary cleaning chamber is defined in the main cleaning chamber.
9. The apparatus of claim 4, further comprising an auxiliary air flow generation unit supplying air into the second auxiliary cleaning chamber through a hole defined in the second auxiliary cleaning chamber to block the mist introduced into the second auxiliary cleaning chamber.
10. The apparatus of claim 4, wherein the first cleaning nozzle comprises a water jet nozzle, and each of the second and third cleaning nozzles comprises a spray nozzle or shower nozzle.
11. The apparatus of claim 1, wherein each of the first and second vent holes has a slit shape extending in a width direction of the sidewall of the main cleaning chamber.
12. The apparatus of claim 1, wherein the cover member comprises:
a side part in which the second vent hole is defined, the side part being coupled to the exhaust unit; and
a cover part coupled to the side part to cover an upper portion of the main cleaning chamber,
wherein the cover part is tilted from the second vent hole to the first vent hole in a side view.
13. The apparatus of claim 12, wherein the cover part guides the air supplied into the cleaning space through the first vent hole to the second vent hole.
14. The apparatus of claim 1, further comprising a blocking member protruding from at least one of the sidewall and other sidewalls of the main cleaning chamber to the cleaning space to block a liquid that descends along the sidewall and other sidewalls.
15. The apparatus of claim 1, wherein the first cleaning nozzle comprises a water jet nozzle.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A system for providing fuel having a desired calorie content to a combustion engine over a range of operating levels, comprising:
a. a first fuel supply pipe containing a first fuel;
b. a second fuel supply pipe containing a second fuel and connected to the first fuel supply pipe at a mixing point so that the first fuel mixes with the second fuel to create a mixed fuel having a first calorie content;
c. a control valve in the second fuel supply pipe upstream of the mixing point;
d. a process system downstream of the mixing point for processing the mixed fuel to create a processed mixed fuel having a second calorie content;
e. a first control signal reflective of the first calorie content of the mixed fuel;
f. a second control signal reflective of the second calorie content of the processed mixed fuel;
g. a third control signal reflective of the operating level of the combustion engine; and
h. a controller connected to the control valve for operating the control valve based on the first, second, and third control signals.
2. The system of claim 1, further including a mixed fuel calorimeter downstream of the mixing point that generates the first control signal.
3. The system of claim 1, further including a trim calorimeter downstream of the process system that generates the second control signal.
4. The system of claim 3, wherein the trim calorimeter is proximate the combustion engine.
5. The system of claim 1, wherein the third control signal changes over the range of operating levels of the combustion engine.
6. The system of claim 1, wherein the desired calorie content decreases as the operating level of the combustion engine increases.
7. The system of claim 1, wherein the process system includes a compressor.
8. A system for providing fuel having a desired calorie content to a combustion engine over a range of operating levels, comprising:
a. a first fuel supply pipe containing a first fuel;
b. a second fuel supply pipe containing a second fuel and connected to the first fuel supply pipe at a mixing point so that the first fuel mixes with the second fuel to create a mixed fuel having a first calorie content;
c. a control valve in the second fuel supply pipe upstream of the mixing point;
d. a process system downstream of the mixing point for processing the mixed fuel to create a processed mixed fuel having a second calorie content;
e. a trim calorimeter downstream of the process system that produces a trim control signal reflective of the second calorie content of the processed mixed fuel; and
f. a controller connected to the control valve for adjusting the control valve based on the trim control signal from the trim calorimeter.
9. The system of claim 8, wherein the trim calorimeter is proximate the combustion engine.
10. The system of claim 8, further including a mixed fuel calorimeter downstream of the mixing point that generates a mixed fuel control signal reflective of the first calorie content of the mixed fuel.
11. The system of claim 10, wherein the controller adjusts the control valve based on the trim control signal and the mixed fuel control signal.
12. The system of claim 8, further including an operating level control signal reflective of the operating level of the combustion engine.
13. The system of claim 8, wherein the desired calorie content changes over of the range of operating levels of the combustion engine.
14. The system of claim 8, wherein the desired calorie content decreases as the operating level of the combustion engine increases.
15. The system of claim 8, wherein the process system includes a compressor.
16. A method for providing fuel having a desired calorie content to a combustion engine over a range of operating levels, the method comprising:
a. determining the desired calorie content of the fuel;
b. mixing a first flow of fuel with a second flow of fuel to produce a mixed fuel having a first calorie content;
c. measuring the first calorie content of the mixed fuel;
d. processing the mixed fuel to produce a processed mixed fuel having a second calorie content;
e. measuring the second calorie content of the processed mixed fuel;
f. adjusting the second flow of fuel based on the desired calorie content, the first calorie content of the mixed fuel, and the second calorie content of the processed mixed fuel.
17. The method as recited in claim 16, further including determining the desired calorie content based on the operating level of the combustion engine.
18. The method as recited in claim 16, further including changing the desired calorie content as the operating level of the combustion engine changes.
19. The method of claim 16, further including comparing the first calorie content of the mixed fuel with the second calorie content of the processed mixed fuel to determine a trim value.
20. The method of claim 19, further including adjusting the desired calorie content by the trim value to determine an adjusted desired calorie content.
21. The method of claim 20, further including adjusting the second flow of fuel based on the difference between the adjusted desired calorie content and the first calorie content of the mixed fuel.