Author: claimsbot

What is claimed is:

1. A method of organizing information in a content management system comprising the steps of:
storing metadata in a tree hierarchy of tables in a storage repository using a first data format;
accessing the metadata in the storage repository to provide accessed metadata; and
creating a view of the accessed metadata in a second data format.
2. The method of claim 1 further comprising running a query against the view of the accessed metadata in the second data format.
3. The method of claim 1 wherein a first query language is associated with the first data format.
4. The method of claim 3 wherein the first query language is Structured Query Language (SQL).
5. The method of claim 3 wherein a second query language simpler than the first query language is used to form the query.
6. The method of claim 5 wherein the second query language is XML query language.
7. The method of claim 1 wherein the metadata is user metadata.
8. The method of claim 1 wherein the metadata is system metadata.
9. The method of claim 1 wherein the data repository is a library server.
10. A computer program product for organizing information in a content management system, the computer program product including a plurality of computer executable instructions stored on a computer readable medium, wherein the instructions, when executed by the content management system, cause the system to perform the steps of:
storing metadata in a tree hierarchy of tables in a storage repository using a first data format;
accessing the metadata in the storage repository to provide accessed metadata; and
creating a view of the accessed metadata in a second data format.
11. The computer program product of claim 10 wherein the computer readable medium is an optical disk.
12 The computer program product of claim 10 wherein the computer readable medium is a magnetic disk.
13. A content management system comprising:
a resource manager for storing objects;
a library server, coupled to the resource manager, for storing metadata regarding objects in the resource manager, the metadata being stored in a tree hierarchy of tables using a first data format, the library server including a query processor for viewing the hierarchy of tables in a second data format; and
and an application program interface, coupled to the query processor, for receiving queries associated with the second data format and providing the queries to the query processor.
14. The content management system of claim 13 wherein the query processor includes mapping means for mapping the tree-based hierarchy of the metadata to the second data format.
15. The content management system of claim 13 wherein the tree-based hierarchy exhibits at least one root table and one child component table.
16. The content management system of claim 13 wherein a first query language is associated with the first data format.
17. The content management system of claim 16 wherein the first query language is Structured Query Language (SQL).
18. The content management system of claim 16 wherein a second query language is the second data format.
19. The content management system of claim 18 wherein the second query language is XML query language.
20. The content management system of claim 13 wherein the metadata is user metadata.
21. The content management system of claim 13 wherein the metadata is system metadata.
22. The content management system of claim 13 further comprising a client coupled to the application program interface.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

What is claimed is:

1. A method of manufacturing a multilayer ceramic device comprising the steps of:
preparing a ceramic material containing a glass component;
preparing a shrinkage-suppressing inorganic material having a higher sintering temperature than said ceramic material;
forming, with said ceramic material, first glass-ceramic green sheets having first openings for defining a cavity and second glass-ceramic green sheets which do not have openings at least at a position where said first openings are provided;
laminating said first glass-ceramic green sheets and said second glass-ceramic green sheets to obtain a green sheet laminate having said cavity formed by said first openings, said cavity having an open surface in at least one of the surfaces of said green sheet laminate in the laminating direction;
forming shrinkage-suppressing layers with said shrinkage-suppressing inorganic material on both surfaces of said green sheet laminate in the laminating direction, thereby obtaining a composite laminate in which both surfaces of said green sheet laminate are covered by said shrinkage-suppressing layers;
pressing said composite laminate in the laminating direction; and
sintering said composite laminate;
wherein one of said shrinkage-suppressing layers which is formed over the surface in which said open surface of said cavity is provided is formed so as to have a second opening for exposing said open surface of said cavity at the step of obtaining said composite laminate, and at the step of pressing said composite laminate, the bottom portion of said cavity is pressed via said second opening while the surrounding region of the cavity is pressed.
2. The method according to claim 1, wherein said second opening has substantially the same shape as said open surface of said cavity.
3. The method according to claim 2, wherein said second glass-ceramic sheets are not provided with openings.
4. The method according to claim 1, wherein, during the step of pressing said composite laminate, said composite laminate is pressed in the laminating direction in a manner such that the bottom portion of said cavity receives the same amount of pressure as the surrounding region of said cavity.
5. The method according to claim 1, wherein said composite laminate is not pressed in the laminating direction during the step of sintering said composite laminate.
6. The method according to claim 1, further comprising the step of removing said shrinkage-suppressing layers after the step of sintering said composite laminate.
7. The method according to claim 1, further comprising the step of mixing the low-sintering-temperature ceramic material with an organic component for obtaining a desired slurry, and using the slurry to form the first glass-ceramic green sheets and the second glass-ceramic green sheets.
8. The method according to claim 1, further comprising the step of providing internal conductive layers between surfaces of the first and second glass-ceramic green sheets.
9. The method according to claim 1, further comprising the step of providing internal resistors between surfaces of the first and second glass-ceramic green sheets.
10. The method according to claim 1, further comprising the step of mixing the shrinkage-suppressing inorganic material and an organic component to form a slurry and then forming the shrinkage-suppressing layers from the slurry.
11. The method according to claim 10, wherein the shrinkage-suppressing layers are formed by applying the slurry containing the shrinkage-suppressing inorganic material on both major surfaces of the green sheet laminate.
12. The method according to claim 1, wherein the step of pressing the composite laminate is done by one of a hydrostatic pressing method and a rigid body pressing method.
13. The method according to claim 1, wherein the step of pressing is performed such that a bottom portion of the cavity is pressed uniformly over the entire region thereof.
14. The method according to claim 1, wherein the step of sintering said composite laminate includes the step of degreasing the composite laminate.
15. The method according to claim 14, wherein the step of degreasing is performed by subjecting the composite laminate to a temperature of about 200 C. to about 600C.
16. The method according to claim 1, wherein the step of sintering said composite laminate includes the step of subjecting said composite laminate to a temperature of about 800 C. to about 1000 C.
17. The method according to claim 1, wherein the shrinkage-suppressing inorganic material contained in the shrinkage-suppressing layers is not substantially sintered during the sintering step.
18. The method according to claim 1, wherein the green sheet laminate shrinks only in the thickness direction thereof during the sintering step.
19. The method according to claim 1, wherein shrinkage-suppressing layers prevent the green sheet laminate from shrinking in the X and the Y directions.
20. The method according to claim 1, wherein the cavity has a plurality of steps therein.

What is claimed is:

1. A gas delivery system for providing a gas to manufacturing equipment, comprising:
a gas supply unit for providing the gas to the manufacturing equipment including devices to regulate the supply of gas from the gas supply unit to the manufacturing equipment;
a main control unit for regulating the supply of the gas to the manufacturing equipment; and
a supplemental control unit which receives an emergency shutdown signal from the main control unit for closing off the supply of gas in response to a malfunction of the main control unit and generates a signal for maintaining a gas flow to operate the manufacturing equipment until the cause of the malfunction has been determined.
2. The system of clam 1, which further includes a warning unit which cautions a worker regarding the malfunction so that the worker can determine the cause of the malfunction.
3. The system of clam 1, the supplemental control unit has an auto recovery function.
4. The system of clam 1, wherein the emergency shutdown signal generated from the main control unit comprises a command for closing off the flow of gas from the gas supply unit.
5. The system of claim 1, wherein the supplemental control unit provides for the gas to flow to the manufacturing equipment until the cause of the malfunction has been determined by a worker who then decides when to terminate the gas flow.
6. The system of claim 1, wherein the supplemental control unit is coupled to a signal output end of the main control unit so that when the main control unit outputs the emergency shutdown signal, the supplemental control unit receives the emergency shutdown signal.
7. The system of claim 1, wherein the devices to regulate the supply of gas from the gas supply unit to manufacturing equipment comprise onoff valves.
8. The system of claim 7, wherein the onoff valves comprise air operated onoff valves.
9. The system of claim 1, which further comprises a relay for independently supplying power to each of the supplemental control unit and the main control unit.
10. The system of claim 1, further comprising a supplemental power supply for providing power to the supplemental control unit independently of the main control unit.
11. The system of claim 10, wherein the supplemental control unit further comprises a warning unit which is coupled to the supplemental power supply for cautioning a worker of the malfunction.
12. The system of claim 2, wherein the warning unit is one of a display unit and a warning lamp for displaying the operating status of the main control unit.
13. The system of claim 1, further comprising a gas leakage detection unit for sensing a gas leakage and transmitting a gas leakage detection signal to the main control unit such that the main control unit generates the emergency shutdown signal.
14. The system of claim 1, further comprising a plurality of gas containers for storing the gas to be supplied to the manufacturing equipment.
15. A gas delivery system comprising:
a gas supply unit which includes a gas flow path for supplying a gas to manufacturing equipment, and a plurality of onoff valves installed along the gas flow path to control the gas stream passing through the gas flow path;
a main control unit for controlling the supply of gas from the gas flow path to the manufacturing equipment; and
a supplemental control unit which receives an emergency shutdown signal from the main control unit and generates a signal for keeping open the plurality of onoff valves for maintaining a gas flow to operate the manufacturing equipment until the cause of the malfunction has been determined.
16. The system of claim 15, wherein the emergency shutdown signal generated from the main control unit comprises a command for closing off the plurality of valves.
17. The system of claim 15, wherein the supplemental control unit has an auto recovery function.
18. The system of claim 15, further comprising a relay for independently supplying power to each of the supplemental control unit and the main control unit.
19. The system of claim 15, which further includes a warning unit which cautions a worker regarding the malfunction so that the worker can determine the cause of the malfunction.
20. A method for providing a gas to manufacturing equipment, comprising:
supplying and regulating a flow of the gas to the manufacturing equipment using a main control unit;
generating an emergency shutdown signal from the main control unit for closing off the supply of gas in response to a malfunction of the main control unit, the main control unit in communication with a supplemental control unit; and
generating a supplemental control signal for maintaining the gas flow to operate the manufacturing equipment from the supplemental control unit until the cause of the malfunction has been determined.
21. The method of claim 20, further comprising:
stopping the flow of gas to the manufacturing equipment if there is a gas leakage.
22. A fluid delivery system for providing a fluid to manufacturing equipment, comprising:
a fluid supply unit for providing the fluid to the manufacturing equipment including devices to regulate the supply of fluid from the fluid supply unit to the manufacturing equipment;
a main control unit for regulating the supply of the fluid to the manufacturing equipment; and
a supplemental control unit which receives an emergency shutdown signal from the main control unit for closing off the supply of fluid in response to a malfunction of the main control unit, the supplemental control unit generating a signal for maintaining a fluid flow to operate the manufacturing equipment until the cause of the malfunction has been determined.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A resist composition for immersion exposure comprising:
a fluorine-containing polymeric compound (F) comprising a structural unit (f1) represented by general formula (f1-1) or (f1-2) shown below and a structural unit (f2) represented by general formula (f2-1) shown below;
a base component (A) that exhibits changed solubility in an alkali developing solution under the action of acid; and
an acid generator component (B) that generates acid upon exposure:
wherein each R independently represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group; X represents a divalent organic group; Aaryl represents a divalent aromatic cyclic group which may have a substituent; X01 represents a single bond or a divalent linking group; and each R2 independently represents an organic group having a fluorine atom;
wherein R represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group; and W is a group represented by any one of general formulas (w-1) to (w-4):
wherein R21 represents an alkyl group of 2 or more carbon atoms; R22 and R23 are bonded to each other to form an aliphatic monocyclic group of 7 or more carbon atoms; R24 represents a branched alkyl group of 3 or more carbon atoms; R25 and R26 are bonded to each other to form an aliphatic cyclic group; R27 represents an acid dissociable, dissolution inhibiting group; R28 represents a divalent linking group; R29 represents a linear or branched alkyl group or an aliphatic cyclic group; n represents an integer of 0 to 3; R30 and R30\u2032 each independently represent a linear or branched alkyl group or a hydrogen atom; and R29 and R30 may be bonded to each other to form an aliphatic cyclic group.
2. The resist composition for immersion exposure according to claim 1, which is a positive resist composition.
3. The resist composition for immersion exposure according to claim 2, wherein said base component (A) is a resin component (A1) that exhibits increased solubility in an alkali developing solution under action of acid.
4. The resist composition for immersion exposure according to claim 3, wherein said resin component (A1) comprises a structural unit (a1) derived from an acrylate ester having an acid dissociable, dissolution inhibiting group.
5. The resist composition for immersion exposure according to claim 4, wherein said resin component (A1) further comprises a structural unit (a2) derived from an acrylate ester having a lactone-containing cyclic group.
6. The resist composition for immersion exposure according to claim 4, wherein said resin component (A1) further comprises a structural unit (a3) derived from an acrylate ester having a polar group-containing aliphatic hydrocarbon group.
7. The resist composition for immersion exposure according to claim 1, which further comprises a nitrogen-containing organic compound (D).
8. A method of forming a resist pattern comprising:
applying the resist composition for immersion exposure of any one of claims 1 and 2-7 to a substrate to form a resist film;
subjecting said resist film to immersion exposure; and
subjecting said resist film to alkali developing to form a resist pattern.
9. A fluorine-containing polymeric compound comprising:
a structural unit (f1) represented by general formula (f1-1) or (f1-2) shown below:
wherein each R independently represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group; X represents a divalent organic group; Aaryl represents a divalent aromatic cyclic group which may have a substituent; X01 represents a single bond or divalent linking group; and each R2 independently represents an organic group having a fluorine atom, and
a structural unit (f2) represented by general formula (f2-1) shown below:
wherein R represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group; and W is a group represented by any one of general formulas (w-1) to (w-4):
wherein R21 represents an alkyl group of 2 or more carbon atoms; R22 and R23 are bonded to each other to form an aliphatic monocyclic group of 7 or more carbon atoms; R24 represents a branched alkyl group of 3 or more carbon atoms; R25 and R26 are bonded to each other to form an aliphatic cyclic group; R27 represents an acid dissociable, dissolution inhibiting group; R28 represents a divalent linking group; R29 represents a linear or branched alkyl group or an aliphatic cyclic group; n represents an integer of 0 to 3; R30 and R30\u2032 each independently represent a linear or branched alkyl group or a hydrogen atom; and R29 and R30 may be bonded to each other to form an aliphatic cyclic group.