1. An actinic ray-sensitive or radiation-sensitive composition containing (\u03b1) a compound represented by the following formula (\u03b1I) capable of generating an acid having a size of 200 \u212b3 or more in volume and (\u03b2) a compound capable of generating an acid upon irradiation with an actinic ray or radiation:
wherein in formula (\u03b1I), each of R1 to R3 represents a hydrogen atom or a substituent, each of R4 and R5 is a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group or a cyano group, and two or more members of R1 to R5 may combine with each other to form a ring,
R6 represents a substituent, and
A represents a monovalent organic group.
2. The actinic ray-sensitive or radiation-sensitive composition as claimed in claim 1,
wherein A has a ring structure.
3. The actinic ray-sensitive or radiation-sensitive composition as claimed in claim 1,
wherein the size of the acid generated from the compound (\u03b1) is 300 \u212b3 or more in volume.
4. The actinic ray-sensitive or radiation-sensitive composition as claimed in claim 3,
wherein the size of the acid generated from said compound (\u03b1) is 400 \u212b3 or more in volume.
5. The actinic ray-sensitive or radiation-sensitive composition as claimed in claim 1, which further contains (\u03b3) a resin having a group capable of decomposing by an action of acid to produce an alkali-soluble group and is used for positive pattern formation.
6. The actinic ray-sensitive or radiation-sensitive composition as claimed in claim 5, wherein the resin (\u03b3) having a group capable of decomposing by an action of acid to produce an alkali-soluble group is a resin containing a repeating unit represented by the following formula (2):
wherein in formula (2), R12 represents a hydrogen atom or a methyl group, and
Ar represents an aromatic ring.
7. The actinic ray-sensitive or radiation-sensitive composition as claimed in claim 1, which further contains (\u03b4) a crosslinking agent and is used for negative pattern formation.
8. The actinic ray-sensitive or radiation-sensitive composition as claimed in claim 7,
wherein the crosslinking agent (\u03b4) is a compound having two or more hydroxymethyl groups or alkoxymethyl groups in the molecule.
9. The actinic ray-sensitive or radiation-sensitive composition as claimed in claim 1, which further contains (\u03b5) a compound having a phenolic hydroxyl group and is used for negative pattern formation.
10. The actinic ray-sensitive or radiation-sensitive composition as claimed in claim 9,
wherein the phenolic hydroxyl group-containing compound (\u03b5) is a polymer compound containing a repeating unit represented by the following formula (2):
wherein in formula (2), R12 represents a hydrogen atom or a methyl group, and
Ar represents an aromatic ring.
11. The actinic ray-sensitive or radiation-sensitive composition as claimed in claim 1, which is used for electron beam or extreme-ultraviolet exposure.
12. The actinic ray-sensitive or radiation-sensitive composition as claimed in claim 1,
wherein the compound (\u03b2) is a compound capable of generating an acid having a size of 200 \u212b3 or more in volume upon irradiation with an actinic ray or radiation.
13. A resist film formed using the actinic ray-sensitive or radiation-sensitive composition claimed in claim 1.
14. A resist-coated mask blanks coated with the resist film claimed in claim 13.
15. A resist pattern forming method comprising exposing the resist film claimed in claim 13 and developing the exposed film.
16. A resist pattern forming method comprising exposing the resist-coated mask blanks claimed in claim 14 and developing the exposed mask blanks.
17. A method for manufacturing an electronic device, comprising the resist pattern forming method claimed in claim 15.
18. An actinic ray-sensitive or radiation-sensitive composition containing (A) a compound represented by the following formula (I) capable of generating an acid having a size of 200 \u212b3 or more in volume by an action of acid and (B) a compound capable of generating an acid upon irradiation with an actinic ray or radiation:
wherein in formula (I), R1 represents an alkyl group, a cycloalkyl group, an alkenyl group, an alkynyl group, an aryl group or a silicon atom-containing group,
each of R2 and R3 independently represents a hydrogen atom, an alkyl group, a cycloalkyl group, an alkenyl group, an alkynyl group, an aryl group, an alkylsulfonyl group, an arylsulfonyl group or a heterocyclic group,
each of R4 to R6 independently represents a hydrogen atom or a monovalent substituent,
at least two members of R1 to R6 may combine with each other to form a ring, and
A represents a monovalent organic group.
19. The actinic ray-sensitive or radiation-sensitive composition as claimed in claim 18, wherein A has a ring structure.
20. The actinic ray-sensitive or radiation-sensitive composition as claimed in claim 18, wherein the size of the acid generated from the compound (A) is 300 \u212b3 or more in volume.
21. The actinic ray-sensitive or radiation-sensitive composition as claimed in claim 20, wherein the size of the acid generated from the compound (A) is 400 \u212b3 or more in volume.
22. The actinic ray-sensitive or radiation-sensitive composition as claimed in claim 18, which further contains (D) a crosslinking agent.
23. The actinic ray-sensitive or radiation-sensitive composition as claimed in claim 18, which further contains (C) a compound having one or more phenolic hydroxyl groups or a compound where the hydrogen atom in at least one phenolic hydroxyl group out of the one or more phenolic hydroxyl groups is replaced by a group capable of leaving by an action of acid.
24. The actinic ray-sensitive or radiation-sensitive composition as claimed in claim 23,
wherein the compound (C) is a polymer compound containing a repeating unit represented by the following formula (1):
wherein in formula (1), R14 represents a hydrogen atom or a methyl group,
B represents a single bond or a divalent linking group, and
Ar represents an aromatic ring.
25. The actinic ray-sensitive or radiation-sensitive composition as claimed in claim 23,
wherein the compound (C) is a compound in which the hydrogen atom in at least one phenolic hydroxyl group out of the phenolic hydroxyl groups of the compound having one or more phenolic hydroxyl groups is replaced by an acid-labile group represented by the following formula (III):
wherein in formula (III), each of L1 and L2 independently represents a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group or an aralkyl group,
M represents a single bond or a divalent linking group, and
Q represents an alkyl group, a cycloalkyl group that may contain a heteroatom, an aromatic ring group that may contain a heteroatom, an amino group, an ammonium group, a mercapto group, a cyano group or an acyl group, provided that at least two members of Q, M and L1 may combine with each other to form a 5- or 6-membered ring.
26. The actinic ray-sensitive or radiation-sensitive composition as claimed in claim 23,
wherein the compound (C) is a polymer compound further containing a repeating unit represented by the following formula (3):
wherein in formula (3), R12 represents a hydrogen atom or a methyl group,
X represents a hydrogen atom or a group having a non-acid-decomposable polycyclic alicyclic hydrocarbon structure, and when a plurality of X are present, at least one of the plurality of X represents a group having a non-acid-decomposable polycyclic alicyclic hydrocarbon structure,
Ar represents an aromatic ring group,
B represents a single bond or a divalent linking group, and
m is an integer of 1 or more.
27. The actinic ray-sensitive or radiation-sensitive composition as claimed in claim 18, wherein the compound (B) is a compound capable of generating an acid having a size of 200 \u212b3 or more in volume upon irradiation with an actinic ray or radiation.
28. A resist film formed using the actinic ray-sensitive or radiation-sensitive composition claimed in claim 18.
29. A resist-coated mask blanks coated with the resist film claimed in claim 28.
30. A pattern forming method comprising exposing the resist film claimed in claim 28 and developing the exposed film.
31. A pattern forming method comprising exposing the resist-coated mask blanks claimed in claim 29 and developing the exposed mask blanks.
32. The pattern forming method as claimed in claim 30, wherein the exposure is performed using an electron beam, an X-ray or EUV light.
33. The actinic ray-sensitive or radiation-sensitive composition as claimed in claim 18, wherein R1 represents a cycloalkyl group, an alkenyl group, an alkynyl group, an aryl group, or a group having a silicon atom, which may have a substituent.
34. The actinic ray-sensitive or radiation-sensitive composition as claimed in claim 18, wherein R1 represents a cycloalkyl group, an aryl group, or a group having a silicon atom, which may have a substituent.
35. The actinic ray-sensitive or radiation-sensitive composition as claimed in claim 15, wherein R1 represents an alkyl group having a carbon number of 2 or more.
36. The actinic ray-sensitive or radiation-sensitive composition as claimed in claim 18, wherein R1 represents a cycloalkyl group, an alkenyl group, an alkynyl group, an aryl group or a silicon atom-containing group.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. Apparatus comprising at least one physical computer-readable storage medium having stored thereon computer-executable instructions that, when loaded into at least one hardware processor and executed, transform the hardware processor to perform the following:
receive a request from at least one client device operating within a learning management system, wherein the request relates to executing a command within the learning management system;
execute the command in response to the request;
evaluate whether the client device is a mobile client device; and
format a response to the command based on whether the client device is a mobile client device.
2. The apparatus of claim 1, wherein the instructions to receive a request include instructions to receive a request to authenticate the client device to participate in the learning management system.
3. The apparatus of claim 1, wherein the instructions to receive a request include instructions to receive a request to upload content from the client device to a server system operating within the learning management system.
4. The apparatus of claim 1, wherein the instructions to receive a request include instructions to receive a request to download content to the client device from a server system operating within the learning management system.
5. The apparatus of claim 1, further comprising instructions to determine that the client system is a mobile client system, and wherein formatting a response includes formatting the response for rendering on the mobile client device.
6. The apparatus of claim 5, further comprising instructions to compress content for downloading to the mobile client device.
7. The apparatus of claim 5, wherein the instructions to format the response include instructions to format the response for rendering on a compact display screen provided by the mobile client device.
8. The apparatus of claim 1, further comprising instructions to synchronize status information related to the learning management system between the client device and a server system, in real time with occurrence of events represented in the status information.
9. The apparatus of claim 1, further comprising instructions to receive a request to authenticate the client device to participate in the learning management system.
10. The apparatus of claim 9, further comprising instructions to approve the authentication request.
11. The apparatus of claim 10, further comprising instructions to determine that the client device is a mobile communications device, and further comprising instructions to establish a session within the learning management system that designates the client device as a mobile communications device.
12. The apparatus of claim 1, further comprising instructions to send to the client device data representing a course calendar.
13. The apparatus of claim 1, further comprising instructions to send to the client device data representing least one alert related to the learning management system.
14. Apparatus comprising at least one physical computer-readable storage medium having stored thereon computer-executable instructions that, when loaded into at least one hardware processor and executed, transform the hardware processor to perform the following:
receive at least one command from a user participating within a learning management system using a mobile client device;
evaluate whether to process the command locally at the mobile client device; and
providing a response to the command.
15. The apparatus of claim 14, further comprising instructions to send a request to process the command to a server operating within the learning management system, and further comprising instructions to receive a response to the request from the server.
16. The apparatus of claim 14, wherein the instructions to receive at least one command include instructions to receive at least one command to submit educational testing materials for assessment.
17. The apparatus of claim 16, wherein the instructions to receive a response include instructions to receive an assessment of the educational testing materials.
18. The apparatus of claim 14, wherein the instructions to receive a command include instructions to receive information representing course enrollment information, and further comprising instructions to send the course enrollment information to a server operating within the learning management system.
19. A server system for operating in a learning management system, the server comprising:
at least one instance of processing hardware;
at least one bus system coupled to communicate with the processing hardware;
at least one computer-readable storage medium coupled to communicate with the processing hardware via the bus system, wherein the storage medium is encoded with computer-executable instructions that, when loaded into the processing hardware, transform the processing hardware to
receive a request from at least one client device operating within a learning management system, wherein the request relates to executing a command within the learning management system;
execute the command in response to the request;
evaluate whether the client device is a desktop client device having a first display screen of a first size or a mobile client device having a second display screen of a second size smaller than the first size; and
format a response to the command for rendering on the first or second display screen, based on whether the client device is the mobile client device.
20. The server system of claim 19, wherein the computer-readable storage medium further comprises a server-side learning management system and platform software, wherein the platform software is adapted to facilitate collaboration between a plurality of client devices and for managing documents within the learning management system.