Author: claimsbot

1. Method for determining steam quality comprising the steps of:
frequency-scanning a laser beam emitted from a narrow linewidth laser along a path through steam in a steam chamber to excite a molecular transition in the steam, the steam having a water vapor phase and a liquid water phase;
determining a total number of water vapor molecules in the path of the laser beam based on a normalized peak absorption amplitude of the water vapor phase as the laser beam passes through the steam;
determining a total number of liquid water molecules in the laser beam path based on a shift in dc level of a peak absorption amplitude of the water vapor phase from a dc level of a reference peak absorption amplitude;
determining specific volumes of the water vapor phase and the liquid water phase in the steam using the total numbers of water vapor and liquid water molecules; and
calculating quality of the steam based on the specific volumes of water vapor phase and liquid water phase in the steam.
2. Method as in claim 1 wherein the narrow linewidth laser is coupled with optic fibers for laser beam transmission and conditioning.
3. Method for determining steam quality comprising the steps of:
frequency-scanning a laser beam emitted from a narrow linewidth laser along a path through steam in a steam chamber to excite a molecular transition in the steam, the steam having a water vapor phase and a liquid water phase;
measuring peak absorption amplitude of the water vapor phase as the laser beam passes through the steam;
normalizing the peak absorption amplitude of the water vapor phase using a reference peak absorption amplitude to determine a normalized peak absorption amplitude;
determining a total number of water vapor molecules in the path of the laser beam based on the normalized peak absorption amplitude;
determining a dc level of the peak absorption amplitude of the water vapor phase;
determining a dc level of the reference peak absorption amplitude;
normalizing the dc level of the peak absorption amplitude of the water vapor phase with the de level of the reference peak absorption amplitude to determine a shift in the dc level of the peak absorption amplitude of the water vapor phase from the dc level of the reference peak absorption amplitude;
determining a total number of water molecules in the laser beam path based on the shift in the de level of the peak absorption amplitude of the water vapor phase using Beer Lambert’s law;
determining specific volumes of the water vapor phase and liquid water phase in the steam using the total numbers of water vapor and liquid water molecules; and
calculating quality of the steam based on the specific volumes of the water vapor phase and the liquid water phase in the steam.
4. Method as in claim 3 wherein the narrow linewidth laser is a narrow linewidth single mode tunable diode laser.
5. Method as in claim 4 wherein the narrow linewidth single mode tunable diode laser is an external cavity tunable diode laser.
6. Method as in claim 3 wherein the narrow linewidth single mode tunable diode laser has a tuning range wavelength of 1366 to 1440 nm.
7. Method as in claim 3 wherein the laser beam has a linewidth of less than or equal to 0.0075 nm.
8. Method as in claim 3 wherein the laser beam has a linewidth of less than or equal to 0.005 nm.
9. Method as in claim 3 wherein the laser beam has a linewidth of less than or equal to 0.0001 nm.
10. Method as in claim 3 wherein the step of frequency-scanning comprises splitting the laser beam into a first part which passes through the steam and a second part which is diverted along a path through ambient air outside of the chamber and the method further comprises the step of measuring peak absorption amplitude of water vapor in the ambient air as the second pan of the laser beam passes through the ambient air to determine the reference peak absorption amplitude.
11. Method as in claim 3 wherein the step of frequency-scanning comprises frequency-scanning a laser beam at a wavelength of 1383.8 nm to 1384.2 nm.
12. Method as in claim 3 wherein the chamber comprises glass windows for transmission of the laser beam through the steam and the method further comprises heating the glass windows to reduce steam condensation on the windows.
13. Method as in claim 12 wherein the glass windows are high-transmission quartz glass windows.
14. Method as in claim 3 wherein the chamber is part of a steam turbine system.
15. System for determining steam quality comprising:
a chamber for containing steam, the steam having a water vapor phase and a liquid water phase;
a narrow linewidth laser operatively associated with the chamber for frequency-scanning a laser beam along a path through the steam to excite a molecular transition in the steam; and
a device for measuring peak absorption amplitude of the water vapor phase as the laser beam passes through the steam and a shift in de level of a peak absorption amplitude of the water vapor phase from a dc level of a reference peak absorption amplitude.
16. System as in claim 15 wherein the chamber comprises glass windows for transmission of the laser beam through the steam and the system further comprises a heater for heating the glass windows to reduce steam condensation on the windows.
17. System as in claim 16 wherein the glass windows are high-transmission quartz glass windows.
18. System as in claim 15 wherein the narrow linewidth laser is a narrow linewidth single mode unable diode laser.
19. System as in claim 18 wherein the narrow linewidth single mode tunable diode laser is an external cavity tunable diode laser.
20. System as in claim 18 wherein the narrow linewidth single mode tunable diode laser has a tuning range wavelength of 1366 to 1440 nm.
21. System as in claim 15 wherein the narrow linewidth laser is capable of emitting a laser beam having a linewidth of less than or equal to 0.0075 nm.
22. System as in claim 15 wherein the narrow linewidth laser is capable of emitting a laser beam having linewidth of less than or equal to 0.005 nm.
23. System as in claim 15 wherein the narrow linewidth laser is capable of emitting a laser beam having linewidth of less than or equal to 0.0001 nm.
24. System as in claim 15 further comprising a beam splitter for splitting the laser beam into a first pad which passes through the steam and a second part which is diverted along a path through ambient air outside of the chamber and a device for measuring peak absorption amplitude of water vapor in the ambient air as the second part of the laser beam passes through the ambient air.
25. System as in claim 24 wherein the device for measuring peak absorption amplitude of the water vapor phase as the laser beam passes through the steam comprises a first photodetector for measuring the intensity of the laser beam after the laser beam passes through the steam, a device for measuring peak absorption amplitude of water vapor in the ambient air as the second part of the laser beam passes through the ambient air for measuring the intensity of the laser beam after the laser beam passes through the ambient air, and an oscilloscope for determining the peak absorption amplitude of the water vapor phase in the steam based on the intensity of first pad of the laser beam and the peak absorption amplitude of water vapor in the second part of the laser beam.
26. System as in claim 15 wherein the narrow linewidth laser is capable of frequency-scanning a laser beam at a wavelength of 1383.8 nm to 1384.2 nm.
27. System as in claim 15 wherein the device for measuring peak absorption amplitude comprises a photodetector for measuring the intensity of the laser beam after the laser beam passes through the steam and an oscilloscope for determining the peak absorption amplitude of the water vapor phase based on the intensity of the laser beam.
28. System as in claim 15 wherein the narrow linewidth laser is coupled with optic fibers for laser beam transmission and conditioning.
29. A steam turbine comprising the steam quality measurement system of claim 15.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. An image processor, comprising:
an image pickup part configured to pick up a pickup image of a certain area;
an irradiator configured to irradiate at least a part of the certain area for the pickup image picked up by the image pickup part;
an extractor configured to extract, as an irradiation image, a light irradiated from the irradiator, the irradiation image being extracted from the pickup image picked up by the image pickup part;
an image generating part configured to generate an irradiation removed image which is obtained by removing the irradiation image from the pickup image;
an object recognizer configured to recognize an object in the certain area, based on the irradiation removed image generated by the image generating part;
a distance sensor configured to sense a distance to the object recognized by the object recognizer; and
an administrative processor configured to administratively control each of the image pickup part, the irradiator, the extractor, the image generating part, the object recognizer, and the distance sensor, the administrative processor including:
a frequency analyzer configured to analyze a frequency component of a signal of an original image which is the pickup image including an external light and obtained by the image pickup part, and
a controller configured to:
control the irradiator such that the irradiator is set to have an irradiation period different from a period of the frequency component of the external light obtained by the frequency analyzer, and
control the extractor to be in conformity with the irradiation period of the irradiator.
2. The image processor according to claim 1, wherein the extractor is a variable band pass filter.
3. The image processor according to claim 2, wherein the frequency analyzer is configured to set the variable band pass filter to conform to the irradiation period of the irradiator.
4. The image processor according to claim 1, wherein the extractor includes a synchronous detector configured to extract an irradiation pattern of the irradiation image, by allowing a signal synchronous with the irradiation period of the irradiator to be inputted from the controller to the synchronous detector.
5. An image processor, comprising:
an image pickup part configured to pick up a pickup image of a certain area;
an irradiator configured to irradiate at least a part of the certain area for the pickup image picked up by the image pickup part;
an extractor configured to extract, as an irradiation image, a light irradiated from the irradiator, the irradiation image being extracted from the pickup image picked up by the image pickup part;
an image generating part configured to generate an irradiation removed image which is obtained by removing the irradiation image from the pickup image;
an object recognizer configured to recognize an object in the certain area, based on the irradiation removed image generated by the image generating part;
a distance sensor configured to sense a distance to the object recognized by the object recognizer; and
a luminance determiner configured to determine a per-pixel luminance of a signal of the pickup image which is an original image,
wherein the image generating part implements a difference operation between the pickup image and the irradiation image based on a determination result of the luminance determiner, wherein the image generating part forbids the difference operation of a part of an image signal which has a determination result of less than or equal to a noise level.
6. An image processor, comprising:
an image pickup part configured to pick up a pickup image of a certain area
an irradiator configured to irradiate at least a part of the certain area for the pickup image picked up by the image pickup part;
an extractor configured to extract, as an irradiation image, a light irradiated from the irradiator, the irradiation image being extracted from the pickup image picked up by the image pickup part;
an image generating part configured to generate an irradiation removed image which is obtained by removing the irradiation image from the pickup image;
an object recognizer configured to recognize an object in the certain area, based on the irradiation removed image generated by the image generating part;
a distance sensor configured to sense a distance to the object recognized by the object recognizer,
an image moving amount calculator configured to make a time-series calculation of a moving amount of an image on a screen based on:
the irradiation image extracted by the extractor from a pickup image picked up previously, and
the irradiation image extracted by the extractor from a pickup image picked up currently; and

a moving amount corrector configured to correct the following, based on the moving amount obtained by the image moving amount calculator:
a position of the irradiation image on the screen and a size of the irradiation image, the irradiation image being included in the pickup image obtained at a next time,

wherein the image processor is configured to remove, from the current pickup image, the irradiation image included in the next pickup image.
7. An image processing method, comprising:
picking up a pickup image of a certain area;
irradiating at least a part of the certain area for the pickup image picked up by the picking up operation;
extracting, as an irradiation image, a light irradiated from the irradiating operation, the irradiation image being extracted from the pickup image picked up by the picking up operation;
generating an irradiation removed image which is obtained by removing the irradiation image from the pickup image;
recognizing an object in the certain area, based on the irradiation removed image generated by the generating operation;
sensing a distance to the object recognized by the recognizing operation;
making a time-series calculation of a moving amount of an image on a screen based on:
the irradiation image extracted by the extracting operation from the pickup image picked up previously; and
the irradiation image extracted by the extracting operation from the pickup image picked up currently; and

correcting the following, based on the moving amount obtained by the image moving amount calculating operation:
a position of the irradiation image on the screen and a size of the irradiation image, the irradiation image being included in the pickup image obtained at a next time,

wherein the image processing method removes, from the current pickup image, the irradiation image included in the next pickup image.
8. An image processor, comprising:
means for picking up a pickup image of a certain area;
means for irradiating at least a part of the certain area for the pickup image picked up by the means for picking up;
means for extracting, as an irradiation image, a light irradiated from the means for irradiating, the irradiation image being extracted from the pickup image picked up by the means for picking up;
means for generating an irradiation removed image which is obtained by removing the irradiation image from the pickup image;
means for recognizing an object in the certain area, based on the irradiation removed image generated by the means for generating; and
means for sensing a distance to the object recognized by the means for recognizing; and
means for making a time-series calculation of a moving amount of an image on a screen based on:
the irradiation image extracted by the means for extracting from the pickup image picked up previously; and
the irradiation image extracted by the means for extracting from the pickup image picked up currently; and

means for correcting the following, based on the moving amount obtained by the means for making a time-series calculation of a moving amount:
a position of the irradiation image on the screen and a size of the irradiation image, the irradiation image being included in the pickup image obtained at a next time,

wherein the image processor removes, from the current pickup image, the irradiation image included in the next pickup image.

1. A method for evaluating a sample with a broadband optical wafer metrology tool employing a broadband illumination system arranged to illuminate the sample with broadband light spanning a plurality of wavelengths contained within a broadband spectrum, said broadband illumination interacting with the sample and further including a detection system for collecting at least a fraction of the light after interacting with the sample, said method comprising:
separating the broadband spectrum into at least two sub-bands wherein the frequency width of each sub-band is a fraction of the total frequency bandwidth;
providing a unique optical sub-path along at least a portion of the optical path between the illumination system and the detection system for each sub-band, said unique optical sub-path containing a sub-band optical system including at least one of a particular optical component or environmental controls selected to optimize performance over the frequency width of the associated sub-band; whereby the performance of the wafer metrology tool is improved over the total frequency bandwidth.
2. The method of claim 1, wherein the optical metrology tool employs at least one metrology system selected from the group consisting of spectroscopic reflectometers, polarized beam spectroscopic reflectometers, spectroscopic ellipsometers and spectroscopic scatterometers.
3. A method for evaluating a sample with a broadband optical wafer metrology tool employing a broadband illumination system arranged to illuminate the sample with broadband light spanning a plurality of wavelengths contained within a broadband spectrum, said broadband illumination interacting with the sample and further including a detection system for collecting at least a fraction of the light after interacting with the sample, said method comprising:
providing a first sub-band optical system for transmitting light in the VUV spectral region, said first sub-band optical system contained within a gas-purged first sub-band optical path, whereby said first sub-band optical system is maintained in a purged environment; and
providing at least one additional sub-band optical system located within a separate optical sub-path, maintained in the ambient environment, for transmitting light in one or more spectral regions selected from the group consisting of DUV, UV, VIS and NIR.
4. The method of claim 3 further comprising configuring each sub-band optical system such that all of the sub-band optical systems provide small-spot illumination of the sample at substantially the same location on the sample.
5. The method of claim 3, wherein the optical metrology tool employs at least one metrology system selected from the group consisting of spectroscopic reflectometers, polarized beam spectroscopic reflectometers, spectroscopic ellipsometers and spectroscopic scatterometers.
6. A method for evaluating a sample with an optical metrology tool employing an illumination system that includes at least two spectrally separated sources arranged to illuminate the sample, said illumination interacting with the sample and further including a detection system for collecting at least a fraction of the light after interacting with the sample, said method comprising:
directing a first portion of the illumination from a first source down a first optical path containing a first optical system including at least one of a particular optical component or environmental controls selected to optimize the performance over the emission spectrum of the first source;
directing a second portion of the illumination from a second source down a second optical path containing a second optical system including at least one of a particular optical component or environmental controls selected to optimize the performance over the emission spectrum of the second source; whereby, the performance of the optical metrology tool is improved.
7. The method of claim 6 further comprising configuring said first and second sub-band optical system such that both systems provide small-spot illumination of the sample at substantially the same location on the sample.
8. The method of claim 6, wherein the optical metrology tool employs at least one metrology system selected from the group consisting of reflectometers, polarized beam reflectometers, ellipsometers, scatterometers, optical CD metrology tools, spectroscopic reflectometers, polarized beam spectroscopic reflectometers, spectroscopic ellipsometers, spectroscopic scatterometers and spectroscopic optical CD metrology tools.
9. A method for evaluating a sample with an optical metrology tool employing:
an illumination system arranged to illuminate the sample, at a small-spot, with broadband light, said illumination interacting with and reflecting from the sample;
an optical system for collecting at least a fraction of the illumination after interacting with and reflecting from the sample;
a detection system that generates output signals in response to the incident illumination; and
a processor for analyzing the output signals; said method comprising:
spectrally separating the collected illumination into at least two sub-bands such that the frequency width of each sub-band is a fraction of the total frequency bandwidth of the broadband illumination;
directing the first sub-band of the spectrally separated illumination along a first optical path to a first detector that detects the first sub-band illumination and generates output signal in response thereto;
directing the second sub-band of the spectrally segregated illumination along a second optical path to a second detector that detects the second sub-band illumination and generates output signal in response thereto, wherein the first detector is optimized to detect illumination in the first sub-band and the second detector is optimized to detect illumination in the second sub-band and wherein said first and second optical paths contain a sub-band optical system including at least one of a particular optical component or environmental controls selected to optimize performance over the frequency bandwidth of associated sub-band.
10. The method of claim 9, wherein the spectral separation of the illumination is accomplished using spectrally selective optical elements selected from the group consisting of, gratings, prisms, and dichroic mirrors.
11. The method of claim 9, wherein the optical metrology tool employs at least one metrology system selected from the group consisting of reflectometers, polarized beam reflectometers, ellipsometers, scatterometers, optical CD metrology tools, spectroscopic reflectometers, polarized beam spectroscopic reflectometers, spectroscopic ellipsometers, spectroscopic scatterometers and spectroscopic optical CD metrology tools.
12. An arrangement of an optical metrology tool for evaluating a sample, including an illumination system configured to illuminate the sample with a broadband spectrum of broadband light spanning a plurality of wavelengths, said broadband light interacting with the sample, and further including a detection system for collecting at least a fraction of the light after interacting with the sample, said arrangement including:
means for separating the broadband spectrum into at least two sub-bands wherein the frequency width of each sub-band is a fraction of the total frequency bandwidth;
a first unique sub-path for transmitting light, within frequencies contained within the first sub-band, between the illumination system and the detection system;
a second unique sub-path for transmitting light, within frequencies contained within the second sub-band, between the illumination system and the detection system;
each sub-path containing a sub-band optical system including at least one of a particular optical component or environmental controls selected to optimize performance over the frequency band width of the sub-band; whereby,
the performance of the wafer metrology tool is improved over the total frequency bandwidth.
13. The arrangement of claim 12, wherein each sub-band optical system is further configured to produce small-spot illumination of the sample at substantially the same location on the sample.
14. The arrangement of claim 12, wherein the optical metrology tool employs at least one metrology system selected from the group consisting of spectroscopic reflectometers, polarized beam spectroscopic reflectometers, spectroscopic ellipsometers and spectroscopic scatterometers.
15. An arrangement of an optical metrology tool for evaluating a sample with light, including an illuminator comprised of at least two spectrally separated sources configured to illuminate and interact with the sample, further including a detection system for collecting at least a fraction of the light after interacting with the sample, said arrangement comprising:
a first unique sub-path for transmitting a first portion of the light emitted by the first source between the illuminator and the detection system;
a second unique sub-path for transmitting a second portion of the light emitted by the second source between the illuminator and the detection system;
each sub-path containing a sub-band optical system including at least one of a particular optical component or environmental controls selected to optimize performance over the spectral region spanned by the associated spectrally separated source; whereby,
the performance of the metrology tool is improved.
16. The arrangement of claim 15, wherein each sub-band optical system is further configured to produce small-spot illumination of the sample at substantially the same location on the sample.
17. The arrangement of claim 15, wherein the optical metrology tool employs at least one metrology system selected from the group consisting of reflectometers, polarized beam reflectometers, ellipsometers, scatterometers, optical CD metrology tools, spectroscopic reflectometers, polarized beam spectroscopic reflectometers, spectroscopic ellipsometers, spectroscopic scatterometers and spectroscopic optical CD metrology tools.
18. An arrangement of an optical metrology tool for evaluating a sample with light, said arrangement including an illuminator configured to provide small-spot, broadband illumination of a sample, said illumination interacting with and reflecting from the sample, an optical system for collecting a portion of the illumination reflected from the sample, and further including a detection system, said arrangement comprising:
means for spectrally separating the collected illumination into at least two sub-bands, such that the frequency width of each sub-band is a fraction of the total frequency bandwidth of the broadband illumination, and directing the first sub-band along a first optical path and directing the second sub-band along a second optical path, and wherein said first and second optical paths contain a sub-band optical system including at least one of a particular optical component or environmental controls selected to optimize performance over the frequency bandwidth of associated sub-band;
a first detector for detecting the first sub-band of the collected illumination;
a second detector for detecting the second sub-band of the collected illumination, wherein the first detector is optimized to detect illumination in the first sub-band and the second detector is optimized to detect illumination in the second sub-band.
19. The arrangement of claim 18 further including provision for maintaining said first and second detectors in purged environments to improve the temporal stability and repeatability of the detector response.
20. The arrangement of claim 18, wherein the optical metrology tool employs at least one metrology system selected from the group consisting of reflectometers, polarized beam reflectometers, ellipsometers, scatterometers, optical CD metrology tools, spectroscopic reflectometers, polarized beam spectroscopic reflectometers, spectroscopic ellipsometers, spectroscopic scatterometers and spectroscopic optical CD metrology tools.
21. An apparatus for evaluating a sample including an illuminator for illuminating the sample with light comprising a plurality of wavelengths, said illuminating light interacting with the sample, and further including a detection system for collecting at least a fraction of the light after interacting with the sample, comprising:
at least two spectrally segregated light sources selected such that each source emits light over a distinct spectral region, whereby the sum of source outputs comprises said plurality of wavelengths;
an optical system for separating the plurality of wavelengths into a plurality of sub-bands such that each sub-band includes a fraction of the plurality of illumination wavelengths, said optical system forming a unique optical sub-path for each sub-band along at least one portion of the optical path between the illuminator and the detection system, said sub-path containing a sub-band optical system including at least one of a particular optical component or environmental controls selected to optimize the measurement accuracy and performance at the associated sub-band illumination wavelengths, whereby, the performance of the wafer metrology tool is improved over the plurality of wavelengths;
a detection system generating output signals in response to the light collected at said plurality of wavelengths; and,
a processor for analyzing the output signals and evaluating the sample.
22. The apparatus of claim 21, wherein each sub-band optical system is further configured to produce small-spot illumination of the sample at substantially the same location on the sample.
23. The apparatus of claim 21, wherein the optical metrology tool employs at least one metrology system selected from the group consisting of reflectometers, polarized beam reflectometers, ellipsometers, scatterometers, optical CD metrology tools, spectroscopic reflectometers, polarized beam spectroscopic reflectometers, spectroscopic ellipsometers, spectroscopic scatterometers and spectroscopic optical CD metrology tools.
24. The apparatus of claim 21, wherein the metrology tool employs a plurality of metrology systems selected from the group consisting of reflectometers, polarized beam reflectometers, ellipsometers, scatterometers, optical CD metrology tools, spectroscopic reflectometers, polarized beam spectroscopic reflectometers, spectroscopic ellipsometers, spectroscopic scatterometers and spectroscopic optical CD metrology tools, and the processor analyzes the detector outputs either individually or in combination to evaluate the sample.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A sensor module for accumulating, processing and transmitting sensor data, comprising:
a data input for receiving sensor data from at least one instrument, and formatting the sensor data as digital sensor data,
a processor, coupled to the data input, configured to process and store the digital sensor data in memory, and packaging digital sensor data for transmission to a remote data system; and
a satellite communication modem, coupled to the processor and the internal antenna, receiving packaged digital sensor data and transmitting the packaged digital sensor data to the remote data system,
wherein the data input further including one or more of:
a first analog input configured to receive analog sensor data from at least one external sensor, a signal conditioning circuit receiving the analog sensor data and conditioning the analog sensor data, and an analog-to-digital converter, coupled to the signal conditioning circuit, configured to convert conditioned analog sensor data into digital sensor data, and
a first digital input configured to receive one or more of digital sensor data from an external sensor and user control data from a user, wherein the processor, coupled to the analog-to-digital converter and the first digital input, is configured to process and store the digital sensor data in memory, and packaging digital sensor data for transmission to a remote data systems;

wherein a sensor module may be configured through one or more of user control data from the first digital input and memory of the processor, to configure a sensor module in at least one of a plurality of modes,
wherein in a first mode, where the at least one sensor module is configured as a smart module coordinator, receiving digital sensor data from at least one other sensor module, storing digital sensor data from the at least one other sensor module, packaging digital sensor data from the at least one other sensor module with position data, and transmitting packaged digital sensor data and position data to the remote data system through the satellite communication modem and internal antenna;
wherein in a second mode, where the at least one sensor module is configured as a smart end device, receiving analog sensor data from at the least one sensor, converting the analog sensor data to digital sensor data in the analog-to-digital converter, and transmitting the digital sensor data to another sensor module configured as a smart module coordinator; and
wherein in a third mode, the sensor module is configured as a stand-alone smart sensor device, receiving analog sensor data from the at least one sensor, converting the analog sensor data to digital sensor data in the analog-to-digital converter, packaging digital sensor data from the at least one other sensor module with position data, and transmitting packaged digital sensor data and position data to the remote data system through the satellite communication modem and internal antenna.
2. The sensor module of claim 1, further comprising:
a global positioning system receiver, coupled to the processor and an internal antenna, generating position data to the processor, the processor further configured to include package position data with digital sensor data for transmission to the remote data system;
wherein the satellite communication modem, coupled to the processor and the internal antenna, receives packaged digital sensor data and position data and transmits the packaged digital sensor data and position data to the remote data system.
3. A sensor module for accumulating, processing and transmitting sensor data, comprising:
a data input for receiving sensor data from at least one instrument, and formatting the sensor data as digital sensor data,
a processor, coupled to the data input, configured to process and store the digital sensor data in memory, and packaging digital sensor data for transmission to a remote data system; and
a satellite communication modem, coupled to the processor and the internal antenna, receiving packaged digital sensor data and transmitting the packaged digital sensor data to the remote data system,
wherein the data input further including one or more of:
a first analog input configured to receive analog sensor data from at least one external sensor, a signal conditioning circuit receiving the analog sensor data and conditioning the analog sensor data, and an analog-to-digital converter, coupled to the signal conditioning circuit, configured to convert conditioned analog sensor data into digital sensor data, and
a first digital input configured to receive one or more of digital sensor data from an external sensor and user control data from a user, wherein the processor, coupled to the analog-to-digital converter and the first digital input, is configured to process and store the digital sensor data in memory, and packaging digital sensor data for transmission to a remote data system,

the sensor module further comprising a local wireless communications system, coupled to the processor and configured to communication bi-directionally with a plurality of other sensor modules, to receive digital sensor data from other sensor modules and to transmit commands to other sensor modules,
wherein a sensor module may be configured through one or more of user control data from the first digital input and memory of the processor, to configure a sensor module in at least one of a plurality of modes,
wherein in a first mode the sensor module is configured as a smart module coordinator, receiving digital sensor data from at least one other sensor module, storing digital sensor data from the at least one other sensor module, packaging digital sensor data from the at least one other sensor module with position data, and transmitting packaged digital sensor data and position data to the remote data system through the satellite communication modem and internal antenna,
wherein in a second mode, the sensor module is configured as a smart end device, receiving analog sensor data from at the least one sensor, converting the analog sensor data to digital sensor data in the analog-to-digital converter, and transmitting, through the local wireless communications system, the digital sensor data to another sensor module configured as a smart module coordinator; and
wherein in a third mode, the sensor module is configured as a stand-alone smart sensor device, receiving analog sensor data from the at least one sensor, converting the analog sensor data to digital sensor data in the analog-to-digital converter, packaging digital sensor data from the at least one other sensor module with position data, and transmitting packaged digital sensor data and position data to the remote data system through the satellite communication modem and internal antenna.
4. A sensor module for accumulating, processing and transmitting sensor data, comprising:
a data input for receiving sensor data from at least one instrument, and formatting the sensor data as digital sensor data,
a processor, coupled to the data input, configured to process and store the digital sensor data in memory, and packaging digital sensor data for transmission to a remote data system; and
a satellite communication modem, coupled to the processor and the internal antenna, receiving packaged digital sensor data and transmitting the packaged digital sensor data to the remote data system,
wherein the data input further including one or more of:
a first analog input configured to receive analog sensor data from at least one external sensor, a signal conditioning circuit receiving the analog sensor data and conditioning the analog sensor data, and an analog-to-digital converter, coupled to the signal conditioning circuit, configured to convert conditioned analog sensor data into digital sensor data, and
a first digital input configured to receive one or more of digital sensor data from an external sensor and user control data from a user, wherein the processor, coupled to the analog-to-digital converter and the first digital input, is configured to process and store the digital sensor data in memory, and packaging digital sensor data for transmission to a remote data system,

the sensor module further comprising a global positioning system receiver, coupled to the processor and an internal antenna, generating position data to the processor, the processor further configured to include package position data with digital sensor data for transmission to the remote data system;
a local wireless communications system, coupled to the processor and configured to communication bi-directionally with a plurality of other sensor modules, to receive digital sensor data from other sensor modules and to transmit commands to other sensor modules,
wherein the satellite communication modem, coupled to the processor and the internal antenna, receives packaged digital sensor data and position data and transmits the packaged digital sensor data and position data to the remote data system,
wherein a sensor module may be configured through one or more of user control data from the first digital input and memory of the processor, to configure a sensor module in at least one of a plurality of modes,
wherein in a first mode the sensor module is configured as a smart module coordinator, receiving digital sensor data from at least one other sensor module, storing digital sensor data from the at least one other sensor module, packaging digital sensor data from the at least one other sensor module with position data, and transmitting packaged digital sensor data and position data to the remote data system through the satellite communication modem and internal antenna,
wherein in a second mode, the sensor module is configured as a smart end device, receiving analog sensor data from at the least one sensor, converting the analog sensor data to digital sensor data in the analog-to-digital converter, and transmitting through the local wireless communications system, the digital sensor data to another sensor module configured as a smart module coordinator; and
wherein in a third mode, the sensor module is configured as a stand-alone smart sensor device, receiving analog sensor data from the at least one sensor, converting the analog sensor data to digital sensor data in the analog-to-digital converter, packaging digital sensor data from the at least one other sensor module with position data, and transmitting packaged digital sensor data and position data to the remote data system through the satellite communication modem and internal antenna.
5. A sensor system comprising a plurality of sensor modules module for accumulating, processing and transmitting sensor data, arranged in a network, each of the sensor modules comprising a sensor, comprising:
a data input for receiving sensor data from at least one instrument, and formatting the sensor data as digital sensor data;
a processor, coupled to the data input, configured to process and store the digital sensor data in memory, and packaging digital sensor data for transmission to a remote data system; and
a satellite communication modem, coupled to the processor and the internal antenna, receiving packaged digital sensor data and transmitting the packaged digital sensor data to the remote data system,
wherein the data input of each sensor module further comprises one or more of:
a first analog input configured to receive analog sensor data from at least one external sensor, a signal conditioning circuit receiving the analog sensor data and conditioning the analog sensor data, and an analog-to-digital converter, coupled to the signal conditioning circuit, configured to convert conditioned analog sensor data into digital sensor data, and
a first digital input configured to receive one or more of digital sensor data from an external sensor and user control data from a user, wherein the processor, coupled to the analog-to-digital converter and the first digital input, is configured to process and store the digital sensor data in memory, and packaging digital sensor data for transmission to a remote data systems;

wherein at least one sensor module in the sensor system is programmed in a first mode, where the at least one sensor module is configured as a smart module coordinator, receiving digital sensor data from at least one other sensor module, storing digital sensor data from the at least one other sensor module, packaging digital sensor data from the at least one other sensor module with position data, and transmitting packaged digital sensor data and position data to the remote data system through the satellite communication modem and internal antenna;
wherein at least one sensor module in the sensor system is programmed in a second mode, where the at least one sensor module is configured as a smart end device, receiving analog sensor data from at the least one sensor, converting the analog sensor data to digital sensor data in the analog-to-digital converter, and transmitting, through the local wireless communications system, the digital sensor data to another sensor module configured as a smart module coordinator; and
wherein at lease one sensor module is configurable in a third mode, as a stand-alone smart sensor device, receiving analog sensor data from the at least one sensor, converting the analog sensor data to digital sensor data in the analog-to-digital converter, packaging digital sensor data from the at least one other sensor module with position data, and transmitting packaged digital sensor data and position data to the remote data system through the satellite communication modem and internal antenna.
6. The sensor system of claim 5, wherein each sensor module further comprises:
a global positioning system receiver, coupled to the processor and an internal antenna, generating position data to the processor, the processor further configured to include package position data with digital sensor data for transmission to the remote data system;
wherein the satellite communication modem, coupled to the processor and the internal antenna, receives packaged digital sensor data and position data and transmits the packaged digital sensor data and position data to the remote data system.
7. The sensor system of claim 5, wherein each sensor module further comprises:
a local wireless communications system, coupled to the processor and configured to communication bi-directionally with a plurality of other sensor modules, to receive digital sensor data from other sensor modules and to transmit commands to other sensor modules,
wherein each sensor module in the sensor system may be configured through one or more of user control data from the first digital input and memory of the processor, to configure a sensor module in at least one of a plurality of modes.
8. The sensor system of claim 6, wherein each sensor module further comprises:
a local wireless communications system, coupled to the processor and configured to communication bi-directionally with a plurality of other sensor modules, to receive digital sensor data from other sensor modules and to transmit commands to other sensor modules,
wherein each sensor module in the sensor system may be configured through one or more of user control data from the first digital input and memory of the processor, to configure a sensor module in at least one of a plurality of mode.