1460719239-9df4a86f-8fd2-428b-afc0-ca244a421334

What is claimed is:

1. A processor, comprising:
an instruction pipeline having a plurality of stages;
a result pipeline having a plurality of stages;
an execution unit connected to the instruction pipeline and the result pipeline, wherein the execution unit includes an operand input and a result output, wherein the operand input receives an operand from the instruction pipeline and wherein the execution unit transmits a result to the result output as a function of the operand received by the operand input; and
a reorder buffer, wherein the reorder buffer supplies instructions and operands to the instruction pipeline and receives results from the result pipeline and wherein the instruction pipeline and the result pipeline wrap around the reorder buffer to create counter rotating queues.
2. The processor of claim 1, wherein the execution unit includes a plurality of stages, wherein each stage operates under control of a clock.
3. The processor of claim 1, wherein the execution unit is a wavefront processor.
4. The processor of claim 1, wherein the instruction pipeline is two instructions wide.
5. The processor of claim 1, wherein the result output is connected to the data pipeline and wherein the result output transmits a result to the result pipeline as a function of the operand received by the operand input.
6. The processor of claim 1, wherein the result output is connected to the instruction pipeline, wherein the result output transmits a result to the instruction pipeline as a function of the operand received by the operand input and wherein the instruction pipeline subsequently copies the result to the result pipeline.
7. The processor of claim 1, wherein the reorder buffer is implemented with non-associative memory.
8. The processor of claim 7, wherein each result must travel at least one half trip around the result pipeline after being recovered.
9. The processor of claim 8, wherein each result recovered into the result pipeline after a halfway point is marked as needing to pass the reorder buffer.
10. The processor of claim 8, wherein each result recovered into the result pipeline carries a tag identifying the instruction with which the result is associated.
11. The processor of claim 10, wherein the tag identifies the reorder buffer register associated with the instruction.
12. The processor of claim 1, wherein each result recovered into the result pipeline carries a tag identifying the instruction with which the result is associated.
13. The processor of claim 12, wherein the tag identifies the reorder buffer register associated with the instruction.
14. The processor of claim 1, wherein the processor further comprises:
a cache, wherein the cache stores recently accessed data and instructions;
an instruction prefetch unit; and
a branch prediction unit connected to the instruction prefetch unit;
wherein the reorder buffer receives an instruction from the instruction prefetch unit and launches the instruction, with its operands, down the instruction pipeline.
15. The processor of claim 1, wherein the reorder buffer uses nonassociative memory.
16. The processor of claim 1, wherein the reorder buffer is distributed across two or more segments of the instruction pipeline.
17. The processor of claim 1, wherein the reorder buffer is configured as two segments, wherein each instruction in the instruction pipeline includes an instruction tag and wherein a reorder buffer tag is appended to each instruction tag, wherein the reorder buffer tag identifies the reorder buffer which issued the instruction.
18. The processor of claim 1, wherein each result in the result pipeline includes a tag identifying whether the result is valid and whether the result is a predicted value.
19. The processor of claim 1, wherein partial results are stored in a consumer array within the instruction pipeline.
20. A computer system comprising:
memory; and
a processor; wherein the processor includes:
a cache connected to the memory, wherein the cache stores recently accessed data and instructions;
an instruction prefetch unit;
a branch prediction unit connected to the instruction prefetch unit;
an instruction pipeline having a plurality of stages;
a result pipeline having a plurality of stages;
an execution unit connected to the instruction pipeline and the result pipeline, wherein the execution unit includes an operand input and a result output, wherein the operand input receives an operand from the instruction pipeline and wherein the result output transmits a result to the result pipeline as a function of the operand received by the operand input; and
a reorder buffer, wherein the reorder buffer receives instructions from the instruction prefetch unit, supplies instructions and operands to the instruction pipeline and receives results from the result pipeline and wherein the instruction pipeline and the result pipeline wrap around the reorder buffer to create counter rotating queues.
21. The processor of claim 20, wherein the execution unit includes a plurality of stages, wherein each stage operates under control of a clock.
22. The processor of claim 20, wherein the execution unit is a wavefront processor.
23. The processor of claim 20, wherein the instruction pipeline is two instructions wide.
24. The processor of claim 20, wherein the result output is connected to the data pipeline and wherein the result output transmits a result to the result pipeline as a function of the operand received by the operand input.
25. The processor of claim 20, wherein the result output is connected to the instruction pipeline, wherein the result output transmits a result to the instruction pipeline as a function of the operand received by the operand input and wherein the instruction pipeline subsequently copies the result to the result pipeline.
26. The processor of claim 20, wherein the reorder buffer is implemented with non-associative memory.
27. The processor of claim 26, wherein each result must travel at least one half trip around the result pipeline after being recovered.
28. The processor of claim 27, wherein each result recovered into the result pipeline after a halfway point is marked as needing to pass the reorder buffer.
29. The processor of claim 27, wherein each result recovered into the result pipeline carries a tag identifying the instruction with which the result is associated.
30. The processor of claim 29, wherein the tag identifies the reorder buffer register associated with the instruction.
31. The processor of claim 20, wherein each result recovered into the result pipeline carries a tag identifying the instruction with which the result is associated.
32. The processor of claim 31, wherein the tag identifies the reorder buffer register associated with the instruction.
33. The processor of claim 20, wherein the processor further comprises:
a cache, wherein the cache stores recently accessed data and instructions;
an instruction prefetch unit; and
a branch prediction unit connected to the instruction prefetch unit;
wherein the reorder buffer receives an instruction from the instruction prefetch unit and launches the instruction, with its operands, down the instruction pipeline.
34. The processor of claim 20, wherein the reorder buffer uses nonassociative memory.
35. The processor of claim 20, wherein the reorder buffer is distributed across two or more segments of the instruction pipeline.
36. The processor of claim 20, wherein the reorder buffer is configured as two segments, wherein each instruction in the instruction pipeline includes an instruction tag and wherein a reorder buffer tag is appended to each instruction tag, wherein the reorder buffer tag identifies the reorder buffer which issued the instruction.
37. The processor of claim 20, wherein each result in the result pipeline includes a tag identifying whether the result is valid and whether the result is a predicted value.
38. The processor of claim 20, wherein partial results are stored in a consumer array within the instruction pipeline.
39. A method of executing instructions within a counterflow pipeline processor having an instruction pipeline, a data pipeline, a reorder buffer and a plurality of execution units, including a first execution unit, the method comprising:
fetching an instruction;
determining operands for the instruction;
issuing the instruction into the instruction pipeline;
determining, at the first execution unit, if the instruction is ready for execution;
if the instruction is ready for execution, loading the operands into the first execution unit;
monitoring for a result from the first execution unit;
on receiving a result, storing the result in the result pipeline;
determining if the instruction has executed; and
if the instruction has not executed by the end of the instruction pipeline, wrapping the instruction back into the instruction pipeline.
40. The method according to claim 39, wherein writing the result to the reorder buffer includes:
determining if the result was stored in the result pipeline over half a pipeline length before reaching the reorder buffer; and
if not, writing the result from the reorder buffer to the result pipeline.
41. The method according to claim 39, wherein writing the result to the reorder buffer includes:
determining if the instruction was invalidated; and
if so, deleting the result from the result pipeline.
42. The method according to claim 39, wherein storing the result in the result pipeline includes storing, with the result in the result pipeline, a tag associated with the instruction.
43. A processor, comprising:
an instruction pipeline having a plurality of stages, including a first and a second stage;
a result pipeline having a plurality of stages, including an first and a second stage;
first and second execution units, wherein the first and second execution units are connected to the first and second stages, respectively, of the instruction pipeline and the result pipeline, wherein each execution unit includes an operand input and a result output, wherein the operand input receives an operand from its respective stage of the instruction pipeline and wherein the result output transmits a result to its respective stage of the result pipeline as a function of the operand received by the operand input; and
first and second reorder buffers, wherein the first reorder buffer supplies instructions and operands to the first stage of the instruction pipeline and receives results from the first stage of the result pipeline and wherein the second reorder buffer supplies instructions and operands to the second stage of the instruction pipeline and receives results from the second stage of the result pipeline.
44. The processor of claim 43, wherein each execution unit includes a plurality of stages, wherein each stage operates under control of a clock.
45. The processor of claim 43, wherein one of the execution units is a wavefront processor.
46. A computer system having memory and a processor, wherein the processor is capable of executing a plurality of instructions, including a first instruction, wherein the processor comprises:
a plurality of instruction pipelines;
a plurality of result pipelines; and
a plurality of reorder buffers, wherein each reorder buffer receives instructions from one instruction pipeline and issues instructions to a second instruction pipeline, wherein each reorder buffer receives data from one result pipeline and issues data to a second result pipeline and wherein each reorder buffer includes:
a register file having a plurality of registers, wherein each register includes a data entry and a tag field; and
a register alias table having a plurality of register alias table entries, wherein each register alias table entry includes a pipeline field and a register field, wherein the pipeline field shows which instruction pipeline the first instruction was dispatched into and wherein the register field show the register into which the first instruction will write its result.
47. The computer system according to claim 46, wherein each register alias table entry further includes a last field which points to the register alias table entry which previously was going to write to the first register.
48. The computer system according to claim 46, wherein each register includes further includes an alias field, wherein the alias field is capable of holding the register alias table entry which is assigned to write to that register.
49. In a computer system having a plurality of threads, including a first and second thread, a method of executing more than one thread at a time, the method comprising:
providing a first and a second reorder buffer;
reading first instructions and first operands associated with the first thread from the first reorder buffer;
executing one of the first instructions and storing a result in the first reorder buffer, wherein storing the result includes marking the result with a tag associating the result with the first thread;
reading second instructions and second operands associated with the second thread from the second reorder buffer; and
executing one of the second instructions and storing a result in the second reorder buffer, wherein storing the result includes marking the result with a tag associating the result with the second thread.
50. In a counterflow pipeline processing system having an instruction pipeline and a data pipeline, both of which feed back into a reorder buffer, a method of recovering from incorrect speculations, wherein the method comprises:
detecting a mispredicted branch, wherein the mispredicted branch includes a first instruction;
invalidating, in the reorder buffer, all instructions after the mispredicted branch;
if the first instruction is in the instruction pipeline and can execute, executing the instruction and invalidating results associated with that instruction when they reach the reorder buffer; and
if the instruction reaches the end of the instruction pipeline, deleting the instruction.
51. A method of controlling data speculation, comprising:
providing an instruction;
obtaining an operand associated with the instruction, wherein obtaining an operand includes:
determining whether the operand is valid;
determining whether the operand is a speculative value; and
marking the operand as a function of whether the operand is valid and whether the operand is a speculative value;

executing the instruction to generate a result as a function of the operand; and
if the operand was a speculative value, checking for a nonspeculative value for the operand, comparing the nonspeculative value against the speculative value and, if the speculative value was correct, saving the result.
52. The method of controlling data speculation according to claim 51, wherein marking the operand includes attaching a valid bit and a speculative bit to the operand.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A method of forming a dielectric film having at least one of Si\u2014N, Si\u2014C, or Si\u2014B bonds on a semiconductor substrate by atomic layer deposition (ALD), which comprises:
(i) supplying a precursor in a pulse to adsorb the precursor on a surface of a substrate loaded in a reactor, said precursor having at least one Si\u2014C or Si\u2014N bond, at least one of hydrocarbon, and at least two halogens attached to silicon in its molecule;
(ii) supplying a reactant gas in a pulse over the surface without overlapping the supply pulse of the precursor;
(iii) reacting the adsorbed precursor with the reactant gas on the surface by applying RF power in a pulse to the reaction gas during step (ii); and
(iv) repeating steps (i) to (iii) to form a dielectric film having at least one of Si\u2014N, Si\u2014C, or Si\u2014B bonds on the substrate.
2. The method according to claim 1, further comprising purging the reactor between steps (i) and (ii) and between steps (iii) and (iv).
3. The method according to claim 1, wherein in step (iii), RF power is applied after stabilizing a flow of the reactant gas in step (ii).
4. The method according to claim 3, wherein in step (ii), a first time period between starting the supply of the reactant gas and starting the application of RF power is longer than a second time period between starting the application of RF power and ending the application of RF power.
5. The method according to claim 4, wherein the first time period is about 2.3 seconds to about 8 seconds, and the second time period is about 0.3 seconds to about 5 seconds.
6. The method according to claim 1, wherein a temperature of the substrate is controlled at room temperature to 550\xb0 C.
7. The method according to claim 1, wherein an inactive gas is continuously supplied throughout steps (i) to (iv).
8. The method according to claim 1, wherein the reactant gas is supplied to the reactor via a mass flow controller (MFC).
9. The method according to claim 1, wherein the precursor has a general formula:
Xa\u2014Sib(Yc)\u2014Rd or Xa\u2014Sib(Yc)\u2014Ne\u2014Rd

wherein each X is attached to silicon and is independently selected from the group consisting of H, F, Cl, I, and Br, each Y bonds two silicones and is independently selected from the group consisting of CH2, C2H4, NH, NCH2, and NCl, each R is attached to silicon or nitrogen and is independently selected from the group consisting of CH3, C2H5, C3H7, C(CH3)3, NH2, and CH2Cl, each N in the general formula is attached to silicon, and a, b, c, d, and e are integers.
10. The method according to claim 9, wherein the precursor is at least one compound selected from the group consisting of:
11. The method according to claim 9, wherein in the general formula, the number of X’s is \xbd or more of the number of Y’s and R’s in total.
12. The method according to claim 1, wherein the dielectric film is constituted by SiN, SiCN, SiC, SiBN, or SiBCN.
13. The method according to claim 12, wherein the dielectric film is constituted by SiN, SiCN, or SiC, and the reactant gas is selected according to the type of the dielectric film and is at least one selected from the group consisting of N2, NH3, NxHy, NxHyCz, CxHy, CxFy, CxHyNz, and H2 wherein x, y, and z are integers.
14. The method according to claim 13, wherein the dielectric film is constituted by SiN or SiCN, and the reactant gas is selected according to the type of the dielectric film and is at least one selected from the group consisting of NH3, NxHy, and NxHyCz wherein x, y, and z are integers.
15. The method according to claim 12, wherein the dielectric film is constituted by SiBN or SiBCN, and the reactant gas is at least one selected from the group consisting of BxHy and BxHyCz wherein x, y, and z are integers.
16. The method according to claim 1, wherein the precursor is the only gas which contains silicon.

1460719231-a21a8207-163c-471a-9b4c-ab6dda636ad1

1. A vertical-type non-volatile memory device, comprising:
an insulation layer pattern provided on a substrate, the insulation layer pattern having a linear shape that extends in a first direction on the substrate;
single-crystalline semiconductor patterns provided on the substrate to make contact with a first sidewall and a second sidewall opposite to the first sidewall of the insulation layer pattern, each of the single-crystalline semiconductor patterns being separated by the insulation layer pattern, the single-crystalline semiconductor patterns having a pillar shape that extends in a vertical direction relative to the substrate;
a tunnel oxide layer making contact with at least a portion of a sidewall of the single-crystalline semiconductor patterns, the contact portions of the tunnel oxide layer being spaced apart from one another in the vertical direction by a predetermined distance;
a charge-trapping layer and a blocking dielectric layer provided on the tunnel oxide layer;
control gate patterns provided on the blocking dielectric layer to face the sidewall of the single-crystalline semiconductor patterns, the control gate patterns having a linear shape, wherein a plurality of the control gate patterns are spaced apart from one another by a predetermined distance and are stacked in a multilayered structure; and
a plurality of the insulation interlayer patterns provided in a gap between upper and lower layers of the control gate patterns, making contact with the sidewall of the single-crystalline semiconductor patterns,
wherein the tunnel oxide layer is conformally formed on the profile of the sidewall of the single-crystalline semiconductor patterns, and upper and bottom surfaces of the insulation interlayer patterns.
2. The vertical-type non-volatile memory device of claim 1, wherein the charge-trapping layer and blocking dielectric layer in each of the layer are conformally formed on the profile of the sidewall of the single-crystalline semiconductor patterns, and upper and bottom surfaces of the insulation interlayer patterns.
3. The vertical-type non-volatile memory device of claim 1, wherein the single-crystalline semiconductor patterns comprises single-crystalline silicon.
4. The vertical-type non-volatile memory device of claim 1, wherein the sum of a line width of the insulation layer pattern and line widths of two single-crystalline semiconductor patterns provided on both sides of the insulation layer pattern is substantially the same as the critical dimensions of a trench to be formed through a photolithography process.
5. The vertical-type non-volatile memory device of claim 1, further comprising a metal silicide pattern provided on a surface of the control gate patterns to face the sidewall of the single-crystalline semiconductor patterns.
6. The vertical-type non-volatile memory device of claim 5, wherein the metal silicide pattern comprises at least one selected from the group consisting of cobalt silicide, nickel silicide and palladium silicide.
7. A vertical-type non-volatile memory device, comprising:
an insulation layer pattern provided on a substrate, the insulation layer pattern having a linear shape that extends in a first direction on the substrate;
single-crystalline semiconductor patterns provided on the substrate to make contact with a first sidewall and a second sidewall opposite to the first sidewall of the insulation layer pattern, the single-crystalline semiconductor patterns being separated by the insulation layer pattern, the single-crystalline semiconductor patterns having a pillar shape that extends in a vertical direction relative to the substrate;
a tunnel oxide layer making contact with at least a portion of a sidewall of the single-crystalline semiconductor patterns, the contact portions of the tunnel oxide layer being spaced apart from one another in the vertical direction by a predetermined distance;
a charge-trapping layer and a blocking dielectric layer provided on the tunnel oxide layer;
control gate patterns provided on the blocking dielectric layer to face the sidewall of the single-crystalline semiconductor patterns, the control gate patterns having a linear shape, wherein a plurality of the control gate patterns are spaced apart from one another by a predetermined distance and are stacked in a multilayered structure; and
a plurality of the insulation interlayer patterns provided in a gap between upper and lower layers of the control gate patterns, making contact with the sidewall of the single-crystalline semiconductor patterns,
wherein the charge-trapping layer and blocking dielectric layer in each of the layer are conformally formed on the profile of the sidewall of the single-crystalline semiconductor patterns, and upper and bottom surfaces of the insulation interlayer patterns.
8. The vertical-type non-volatile memory device of claim 7, wherein the tunnel oxide layer is conformally formed on the profile of the sidewall of the single-crystalline semiconductor patterns, and upper and bottom surfaces of the insulation interlayer patterns.
9. The vertical-type non-volatile memory device of claim 7, wherein the single-crystalline semiconductor patterns comprises single-crystalline silicon.
10. The vertical-type non-volatile memory device of claim 7, wherein the sum of a line width of the insulation layer pattern and line widths of two single-crystalline semiconductor patterns provided on both sides of the insulation layer pattern is substantially the same as the critical dimensions of the trench to be formed through a photolithography process.
11. The vertical-type non-volatile memory device of claim 7, further comprising a metal silicide pattern provided on a surface of the control gate patterns to face the sidewall of the single-crystalline semiconductor patterns.
12. The vertical-type non-volatile memory device of claim 11, wherein the metal silicide pattern comprises at least one selected from the group consisting of cobalt silicide, nickel silicide and palladium silicide.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

We claim:

1. An electrode core material comprising: a substrate and at least one porous material layer diffusion-bonded to said substrate, said substrate comprising a metal foil having a three-dimensional structure which is substantially deformed from a major plane of the metal foil, said porous material layer comprising metal fine particles diffusion-bonded to each other, and said porous material layer having a three-dimensional structure which is substantially uniform in thickness and porosity.
2. The electrode core material in accordance with claim 1, wherein the substantially deformed three-dimensional structure of the substrate comprises a plurality of curved bulges protruding from at least one of a front and a back side of said substrate.
3. The electrode core material in accordance with claim 2, wherein the curved bulges have a strip-shaped form which is laterally bounded by slits in the metal foil.
4. The electrode core material in accordance with claim 2, wherein the curved bulges protrude in an alternating manner from the front and back sides of the substrate.
5. The electrode core material in accordance with claim 2, wherein the substantially deformed three-dimensional structure of the substrate comprises a plurality of rows of bulge portions and a flat portion having a predetermined width interposed between the rows of bulge portions, each of said rows of bulge portions comprising first and second strip-shaped, curved bulge portions, said first and second strip-shaped, curved bulge portions protruding respectively from front and back sides of said substrate in an alternating manner along a first planar direction, said bulge portion rows being aligned along a second planar direction orthogonal to said first planar direction.
6. The electrode core material in accordance with claim 1, wherein said porous material layer has a thickness of about 5 to 50 m per one layer.
7. The electrode core material in accordance with claim 1, wherein said metal foil comprises electrolytic nickel and has a non-deformed thickness of about 10 to 35 m.
8. A method of producing an electrode core material, comprising the steps of:
(a) preparing a paste comprising metal fine particles and a thickener;
(b) atomizing said paste and applying said atomized paste to at least one surface of a metal foil;
(c) drying said paste applied to said metal foil and sintering said paste together with said metal foil in a reducing atmosphere, thereby producing at least one porous material layer diffusion-bonded to said metal foil; and
(d) processing said metal foil, having said porous material layer diffusion-bonded thereto, into a three-dimensional structure which is substantially deformed from a major plane of the metal foil.
9. The method of producing an electrode core material in accordance with claim 8, wherein the atomizing step is carried out using a binary-fluid nozzle.
10. The method of producing an electrode core material in accordance with claim 8, wherein said processing step (d) comprises forming, in said metal foil having said porous material layer diffusion-bonded thereto, a plurality of slits in a fixed direction at fixed intervals in rows in X- and Y-directions of the metal foil plane, and causing a strip-shaped portion between two laterally spaced slits to bulge from a front or back side of said metal foil, wherein a plurality of said strip-shaped portions bulge from opposite sides of said metal foil, alternating in at least one of said X- and Y-directions.
11. The method of producing an electrode core material in accordance with claim 8, wherein said metal fine particles comprise carbonyl nickel powder.
12. The method of producing an electrode core material in accordance with claim 11, wherein said metal fine particles further comprise at least one additive powder selected from the group consisting of a cobalt powder and a cobalt compound powder, said additive powder being present in an amount of about 3 to 10 parts by weight per 100 parts by weight of said carbonyl nickel powder.
13. A method of producing an electrode core material, comprising the steps of:
(a) preparing a paste comprising metal fine particles and a thickener;
(b) producing a substrate comprising a metal foil processed into a three-dimensional structure which is substantially deformed from a major plane of said metal foil;
(c) atomizing said paste and applying said atomized paste to at least one surface of said substrate;
(d) drying said paste applied to said substrate and sintering said paste together with said substrate in a reducing atmosphere, thereby producing at least one porous material layer diffusion-bonded to said substrate.
14. The method of producing an electrode core material in accordance with claim 13, wherein said step (b) comprises forming in said metal foil a plurality of slits in a fixed direction at fixed intervals in rows in X- and Y-directions of the metal foil plane, and causing a strip-shaped portion between two laterally spaced slits to bulge from a front or back side of said metal foil, wherein a plurality of said strip-shaped portions bulge from opposing sides of said metal foil, alternating in at least one of said X- and Y-directions.
15. The method of producing an electrode core material in accordance with claim 13, wherein said atomizing step is carried out using a binary-fluid nozzle
16. The method of producing an electrode core material in accordance with claim 13, wherein said metal fine particles comprise carbonyl nickel powder.
17. An alkaline storage battery comprising: a positive electrode plate; a negative electrode plate; a separator interposed between said positive electrode plate and said negative electrode plate; and an alkaline electrolyte, wherein at least one of said positive electrode plate and said negative electrode plate comprises a core material and an active material, said core material comprising a substrate and at least one porous material layer diffusion bonded to said substrate, said substrate comprising a metal foil having a three-dimensional structure which is substantially deformed from a major plane of the metal foil, said porous material layer comprising metal fine particles diffusion-bonded to each other, said porous material layer having a three-dimensional structure which is substantially uniform in thickness and porosity, and at least a portion of said active material being filled into pores of said porous material layer to form a mixed layer comprising said metal fine particles and said active material.