1-14. (canceled)
15. A secure communications terminal, comprising:
a satellite phone comprising a data port;
an encryption device; and
a modem to satellite phone interconnect board to capture a Dial Tone Modulation Frequency (DTMF) tone, demodulate V.34 encrypted modem information received from said encryption device, and convert said DTMF tone and said demodulate V.34 encrypted modem information into an ASCII string, said ASCII string being presented out-of-band with respect to said DTMF tone to said satellite phone data port.
16. The secure communications terminal according to claim 15, wherein:
said modem to satellite phone interconnect board is comprised of a modem.
17. The secure communications terminal according to claim 15, wherein:
said modem to satellite phone interconnect board is formed in a programmable integrated circuit (PIC).
18. The secure communications terminal according to claim 15, wherein:
said modem to satellite phone interconnect board alternately received an output from a FAXdata interface.
19. The secure communications terminal according to claim 15, wherein:
said satellite phone is controlled from a secure side of said encryption device.
20. The secure communications terminal according to claim 15, wherein:
said ASCII string is presented out-of-band with respect to a control signal presented to said satellite phone data port.
21. A method of providing secure communications over a non-secure data network, comprising:
capturing a Dial Tone Modulation Frequency (DTMF) tone;
demodulating V.34 encrypted modem information received from an encryption device;
converting said DTMF tone and said demodulate V.34 encrypted modem information into an ASCII string; and
presenting said ASCII string out-of-band with respect to said DTMF tone to a data port of a satellite phone.
22. The method of providing secure communications over a non-secure data network according to claim 21, further comprising:
alternatively receiving demodulated V.34 information at a FAXdata interface.
23. The method of providing secure communications over a non-secure data network according to claim 21, further comprising:
controlling said satellite phone from a secure side of said encryption device.
24. The method of providing secure communications over a non-secure data network according to claim 21, further comprising:
controlling a function of a satellite phone directly from a secure side of said encryption device.
25. The method of providing secure communications over a non-secure data network according to claim 21, further comprising:
presenting said ASCII string out-of-band with respect to a control signal presented to said data port of said satellite phone.
26. Apparatus for providing secure communications over a non-secure data network, comprising:
means for providing a false dial tone to an encryption device;
means for capturing a Dial Tone Modulation Frequency (DTMF) tone;
means for demodulating V.34 encrypted modem information from a modem;
means for converting said DTMF tone and said demodulate V.34 encrypted modem information into an ASCII string; and
means for presenting said ASCII string to a data port of a satellite phone.
27. The apparatus for providing secure communications over a non-secure data network according to claim 26, further comprising:
means for alternatively receiving an output from a FAXdata interface.
28. The apparatus for providing secure communications over a non-secure data network according to claim 26, further comprising:
means for controlling said satellite phone from a secure side of said encryption device.
29. The apparatus for providing secure communications over a non-secure data network according to claim 26, further comprising:
means for controlling a function of a satellite phone directly from a secure side of said encryption device.
30. The apparatus for providing secure communications over a non-secure data network according to claim 26, further comprising:
means for presenting said ASCII string presents said ASCII string out-of-band with respect to a control signal presented to said data port of said satellite phone.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An integrated circuit, comprising:
a substrate having a surface;
a first conductive path disposed on the substrate at a first level and having a first thickness in a direction normal to the substrate surface; and
a second conductive path disposed on the substrate at the first level and having a second thickness in the direction, the second thickness being significantly different than the first thickness.
2. The integrated circuit of claim 1 wherein:
the first conductive path comprises a digit line; and
the second conductive path comprises a supply line.
3. The integrated circuit of claim 1 wherein:
the first conductive path comprises a digit line;
the second conductive path comprises a supply line; and
the thickness of the supply line is significantly greater than the thickness of the digit line.
4. A memory circuit, comprising:
a substrate;
an insulator disposed on the substrate in a first level;
a digit line disposed on the insulator in a second level, the digit line having a first height; and
a supply line disposed on the insulator in the second level, the supply line having a second height that is significantly greater than the first height.
5. The memory circuit of claim 4 wherein:
the second level comprises first and second sublevels;
the digit line comprises,
a first portion of a first conductive material disposed on the insulator in the first sublevel; and
the supply line comprises,
a second portion of the first conductive material disposed on the insulator in the first sublevel, and
a portion of a second conductive material disposed on the second portion of the first conductive material in the second sublevel.
6. The memory circuit of claim 4 wherein:
the second level comprises first and second sublevels;
the digit line comprises,
a first portion of a conductive etch-stop material disposed on the insulator in the first sublevel; and
the supply line comprises,
a second portion of the conductive etch-stop material disposed on the insulator in the first sublevel, and
a portion of a conductive material disposed on the second portion of the conductive etch-stop material in the second sublevel.
7. The memory circuit of claim 4 wherein:
the second level comprises first, second, and third sublevels;
the digit line comprises,
a first portion of a first conductive material disposed on the insulator in the first sublevel, and
a first portion of a second conductive material disposed on the first portion of the first conductive material in the second sublevel; and
the supply line comprises,
a second portion of the first conductive material disposed on the insulator in the first sublevel,
a second portion of the second conductive material disposed on the second portion of the first conductive material in the second sublevel, and
a portion of a third conductive material disposed on the second portion of the second conductive material in the third sublevel.
8. The memory circuit of claim 4 wherein:
the second level comprises first, second, and third sublevels;
the digit line comprises,
a first portion of a first conductive material disposed on the insulator in the first sublevel, and
a first portion of a conductive etch-stop material disposed on the first portion of the first conductive material in the second sublevel; and
the supply line comprises,
a second portion of the first conductive material disposed on the insulator in the first sublevel,
a second portion of the conductive etch-stop material disposed on the second portion of the first conductive material in the second sublevel, and
a portion of a third conductive material disposed on the second portion of the conductive etch-stop material in the third sublevel.
9. An integrated circuit, comprising:
a substrate;
a conductive layer structure disposed on the substrate;
a first conductive path formed from the conductive layer and having a first height; and
a second conductive path formed from the conductive layer and having a second height that is significantly different than the first height.
10. The integrated circuit of claim 9 wherein the conductive layer structure comprises a single conductive layer.
11. The integrated circuit of claim 10 wherein:
the conductive layer structure comprises,
a first conductive layer disposed on the substrate, and
a second conductive layer disposed on the first conductive layer;
the first conductive path comprises,
a first portion formed from the first conductive layer; and
the second conductive path comprises,
a first portion formed from the first conductive layer, and
a second portion formed from the second conductive layer.
12. The integrated circuit of claim 10 wherein:
the conductive layer structure comprises,
a barrier layer disposed on the substrate,
a conductive layer disposed on the barrier layer;
the first conductive path comprises,
a first portion formed from the barrier layer, and
a second portion formed from the conductive layer; and
the second conductive path comprises,
a first portion formed from the barrier layer,
a second portion formed from the conductive layer, the second portion of the second conductive path having a significantly greater height that the second portion of the first conductive path.
13. The integrated circuit of claim 10 wherein:
the conductive layer structure comprises,
a conductive layer disposed on the substrate, and
a cap layer disposed on the conductive layer;
the first conductive path comprises,
a first portion formed from the conductive layer, and
a second portion formed from the cap layer; and
the second conductive path comprises,
a first portion formed from the conductive layer, the first portion of the second conductive path having a significantly greater height than the first portion of the first conductive path; and
a second portion formed from the cap layer.
14. The integrated circuit of claim 10 wherein:
the conductive layer structure comprises,
a first conductive layer disposed on the substrate, and
a conductive etch-stop layer disposed on the first conductive layer;
the first conductive path comprises,
a first portion formed from the first conductive layer; and
the second conductive path comprises,
a first portion formed from the first conductive layer, and
a second portion formed from the conductive etch-stop layer.
15. The integrated circuit of claim 10 wherein:
the conductive layer structure comprises,
a first conductive layer disposed on the substrate,
a second conductive layer disposed on the first conductive layer, and
a third conductive layer disposed on the second conductive layer;
the first conductive path comprises,
a first portion formed from the first conductive layer, and
a second portion formed from the second conductive layer; and
the second conductive path comprises,
a first portion formed from the first conductive layer,
a second portion formed from the second conductive layer, and
a third portion formed from the third conductive layer.
16. The integrated circuit of claim 10 wherein:
the conductive structure layer comprises,
a first conductive layer disposed on the substrate,
a conductive etch-stop layer disposed on the first conductive layer, and
a third conductive layer disposed on the conductive etch-stop layer;
the first conductive path comprises,
a first portion formed from the first conductive layer, and
a second portion formed from the conductive etch-stop layer; and
the second conductive path comprises,
a first portion formed from the first conductive layer,
a second portion formed from the conductive etch-stop layer, and
a third portion formed from the third conductive layer.
17. An integrated circuit, comprising:
a substrate;
a conductive layer structure disposed over the substrate;
a memory array including a first conductive path formed from the conductive layer structure and having a first height; and
a second conductive path formed from the conductive layer structure and having a second height that is significantly different than the first height.
18. The integrated circuit of claim 17 wherein:
the conductive layer structure comprises,
a first conductive layer disposed on the substrate, and
a second conductive layer disposed on the first conductive layer;
the first conductive path comprises,
a first portion formed from the first conductive layer; and
the second conductive path comprises,
a first portion formed from the first conductive layer, and
a second portion formed from the second conductive layer.
19. The integrated circuit of claim 17 wherein:
the conductive layer structure comprises,
a first conductive layer disposed on the substrate, and
a conductive etch-stop layer disposed on the first conductive layer;
the first conductive path comprises,
a first portion formed from the first conductive layer; and
the second conductive path comprises,
a first portion formed from the first conductive layer, and
a second portion formed from the conductive etch-stop layer.
20. The integrated circuit of claim 17 wherein:
the conductive layer structure comprises,
a first conductive layer disposed on the substrate,
a second conductive layer disposed on the first conductive layer, and
a third conductive layer disposed on the second conductive layer;
the first conductive path comprises,
a first portion formed from the first conductive layer, and
a second portion formed from the second conductive layer; and
the second conductive path comprises,
a first portion formed from the first conductive layer,
a second portion formed from the second conductive layer, and
a third portion formed from the third conductive layer.
21. The integrated circuit of claim 17 wherein:
the conductive layer structure comprises,
a first conductive layer disposed on the substrate,
a conductive etch-stop layer disposed on the first conductive layer, and
a third conductive layer disposed on the conductive etch-stop layer;
the first conductive path comprises,
a first portion formed from the first conductive layer, and
a second portion formed from the conductive etch-stop layer; and
the second conductive path comprises,
a first portion formed from the first conductive layer,
a second portion formed from the conductive etch-stop layer, and
a third portion formed from the third conductive layer.
22. The integrated circuit of claim 17 wherein:
the conductive layer is covered with a barrier layer
23. An integrated circuit, comprising:
a substrate;
a conductive layer structure disposed over the substrate;
a memory array including,
a first conductive path formed from the conductive layer structure and having a first height, and
a second conductive path formed from the conductive layer structure and having a second height that is significantly different than the first height.
24. The integrated circuit of claim 23 wherein:
the conductive layer structure comprises,
a first conductive layer disposed on the substrate, and
a second conductive layer disposed on the first conductive layer;
the first conductive path comprises,
a first portion formed from the first conductive layer; and
the second conductive path comprises,
a first portion formed from the first conductive layer, and
a second portion formed from the second conductive layer.
25. The integrated circuit of claim 23 wherein:
the conductive layer structure comprises,
a first conductive layer disposed on the substrate, and
a conductive etch-stop layer disposed on the first conductive layer;
the first conductive path comprises,
a first portion formed from the first conductive layer; and
the second conductive path comprises,
a first portion formed from the first conductive layer, and
a second portion formed from the conductive etch-stop layer.
26. A memory circuit, comprising:
a substrate;
a plurality of conductive layer structures disposed on the substrate;
address, data, and command busses each disposed in one of the conductive layer structures;
a memory array coupled to the address, data, and command busses, the memory array including,
memory cells arranged in rows and columns, and
digit lines disposed in one of the conductive layers, each of the digit lines having substantially a first height and being coupled to the memory cells in a respective column; and
a signal line disposed in the one of the conductive layer structures and outside of the memory array, the signal lines having substantially a second height that is significantly greater than the first height.
27. The memory circuit of claim 26 wherein:
the one conductive layer structure comprises,
a first conductive layer, and
a second conductive layer disposed on the first conductive layer;
the digit lines each comprise,
a first portion formed from the first conductive layer; and
the signal line comprises,
a first portion formed from the first conductive layer, and
a second portion formed from the second conductive layer.
28. The memory circuit of claim 26 wherein:
the one conductive layer structure comprises,
a first conductive layer, and
a conductive etch-stop layer disposed on the first conductive layer;
each digit line comprises,
a first portion formed from the first conductive layer; and
the signal line comprises,
a first portion formed from the first conductive layer, and
a second portion formed from the conductive etch-stop layer.
29. The memory circuit of claim 26 wherein:
the one conductive layer structure comprises,
a first conductive layer disposed on the substrate,
a second conductive layer disposed on the first conductive layer, and
a third conductive layer disposed on the second conductive layer;
each digit line comprises,
a first portion formed from the first conductive layer, and
a second portion formed from the second conductive layer; and
the signal line comprises,
a first portion formed from the first conductive layer,
a second portion formed from the second conductive layer, and
a third portion formed from the third conductive layer.
30. The memory circuit of claim 26 wherein:
the one conductive layer structure comprises,
a first conductive layer disposed on the substrate,
a conductive etch-stop layer disposed on the first conductive layer, and
a third conductive layer disposed on the conductive etch-stop layer;
each digit line comprises,
a first portion formed from the first conductive layer, and
a second portion formed from the conductive etch-stop layer; and
the signal line comprises,
a first portion formed from the first conductive layer,
a second portion formed from the conductive etch-stop layer, and
a third portion formed from the third conductive layer.
31. The memory circuit of claim 26 wherein the memory cells each comprise a dynamic-random-access memory cell.
32. The memory circuit of claim 26 wherein the memory cells each comprise a static-random-access memory cell.
33. The memory circuit of claim 26 wherein the signal line comprises a supply rail.
34. The memory circuit of claim 26 wherein the signal line comprises a ground rail.
35. A memory circuit, comprising:
a substrate;
a plurality of conductive layer structures disposed on the substrate;
address, data, and command busses each disposed in one of the conductive layers;
a memory array coupled to the address, data, and command busses, the memory array including,
memory cells arranged in rows and columns, and
digit lines disposed in one of the conductive layer structures, each of the digit lines having substantially a first height and being coupled to the memory cells in a respective column, and
a signal line disposed in the one of the conductive layer structures and having substantially a second height that is significantly greater than the first height.
36. The memory circuit of claim 35 wherein:
the one conductive layer structure comprises,
a first conductive layer, and
a second conductive layer disposed on the first conductive layer;
the digit lines each comprise,
a first portion formed from the first conductive layer; and
the signal line comprises,
a first portion formed from the first conductive layer, and
a second portion formed from the second conductive layer.
37. The memory circuit of claim 35 wherein:
the one conductive layer structure comprises,
a first conductive layer, and
a conductive etch-stop layer disposed on the first conductive layer;
each digit line comprises,
a first portion formed from the first conductive layer; and
the signal line comprises,
a first portion formed from the first conductive layer, and
a second portion formed from the conductive etch-stop layer.
38. An electronic system, comprising:
a data input device;
a data output device; and
computing circuitry coupled to the data input and output devices, the computing circuitry including a memory circuit, the memory circuit including,
a substrate;
a plurality of conductive layer structures disposed on the substrate;
address, data, and command busses each disposed in one of the conductive layer structures;
a memory array coupled to the address, data, and command busses, the memory array including,
memory cells arranged in rows and columns, and
digit lines disposed in one of the conductive layer structures, each of the digit lines having substantially a first height and being coupled to the memory cells in a respective column; and
a signal line disposed in the one of the conductive layer structures and outside of the memory array, the signal lines having substantially a second height that is significantly greater than the first height.
39. The electronic system of claim 38 wherein:
the one conductive layer structure comprises,
a first conductive layer, and
a second conductive layer disposed on the first conductive layer;
the digit lines each comprise,
a first portion formed from the first conductive layer; and
the signal line comprises,
a first portion formed from the first conductive layer, and
a second portion formed from the second conductive layer.
40. The electronic system circuit of claim 38 wherein:
the one conductive layer structure comprises,
a first conductive layer, and
a conductive etch-stop layer disposed on the first conductive layer;
each digit line comprises,
a first portion formed from the first conductive layer; and
the signal line comprises,
a first portion formed from the first conductive layer, and
a second portion formed from the conductive etch-stop layer.
41. A method for forming an integrated circuit, comprising:
forming on a substrate a conductive layer having a first thickness;
reducing the thickness in a first region of the conductive layer while preserving the thickness in a second region of the conductive layer;
forming a first conductive path in the first region, the first conductive path having a second thickness that is significantly less than the first thickness; and
forming a second conductive path in the second region, the second conductive path having substantially the first thickness.
42. The method of claim 41, wherein the forming a first conductive path comprises:
removing a portion of the conductive layer in the first region; and
forming the first conductive path from a remaining portion of the conductive layer.
43. The method of claim 41, further comprising forming a cap layer on the conductive layer after reducing the thickness.
44. A method for forming an integrated circuit, comprising:
forming a first conductive layer on a substrate;
forming a second conductive layer on the first conductive layer;
exposing a region of the first conductive layer through the second conductive layer;
forming a first conductive path in the exposed region of the first conductive layer; and
forming a second conductive path in a region that includes the first and second conductive layers.
45. The method of claim 44 wherein the forming a first conductive path comprises etching a region of the second conductive layer over the region of the first conductive layer with an etchant that is significantly more reactive with the second layer than with the first layer.
46. The method of claim 44, further comprising forming a cap layer on the exposed region of the first conductive layer and on the second conductive layer.
47. A method, comprising:
forming a structure on a substrate, the structure including a first conductive layer disposed on the substrate and a second conductive layer disposed on the first conductive layer;
removing the second conductive layer from a first region of the structure while preserving the second conductive layer in a second region of the structure;
forming a first conductive path in the first region of the structure from the first conductive layer; and
forming a second conductive path in the second region of the substrate from the first and second conductive layers.
48. The method of claim 47 wherein the removing comprises:
masking the second region of the structure; and
etching the first region of the structure with an etchant that etches the second layer significantly faster than the first layer.
49. A method, comprising:
forming a structure on a substrate, the structure including a first conductive layer disposed on the substrate, a second conductive layer disposed on the first conductive layer, and a third conductive layer disposed on the second conductive layer;
removing the third conductive layer from a first region of the structure while preserving the third conductive layer in a second region of the structure;
forming a first conductive path in the first region of the structure from the first and second conductive layers; and
forming a second conductive path in the second region of the substrate from the first, second, and third conductive layers.
50. The method of claim 49 wherein the removing comprises:
masking the second region of the structure; and
etching the first region of the structure with an etchant that etches the third layer significantly faster than the second layer.
51. A method for forming a memory circuit, comprising:
forming on a substrate a conductive layer having a first thickness;
reducing the thickness in a first region of the conductive layer while preserving the thickness in a second region of the conductive layer;
forming digit lines in the first region, each of the digit lines having substantially a second thickness that is significantly less than the first thickness; and
forming a signal line in the second region, the signal line having substantially the first thickness.
52. The method of claim 51 wherein the forming digit lines comprises:
removing a portion of the conductive layer in the first region; and
forming the digit lines from a remaining portion of the conductive layer
53. A method for forming a memory circuit, comprising:
forming a structure on a substrate, the structure including a first conductive layer disposed on the substrate and a second conductive layer disposed on the first conductive layer;
removing the second conductive layer from a first region of the structure while preserving the second conductive layer in a second region of the structure;
forming digit lines in the first region of the structure from the first conductive layer; and
forming a signal line in the second region of the substrate from the first and second conductive layers.
54. The method of claim 53 wherein the removing comprises:
masking the second region of the structure; and
etching the first region of the structure with an etchant that etches the second layer significantly faster than the first layer.
55. A method for forming a memory circuit, comprising:
forming a structure on a substrate, the structure including a first conductive layer disposed on the substrate, a second conductive layer disposed on the first conductive layer, and a third conductive layer disposed on the second conductive layer;
removing the third conductive layer from a first region of the structure while preserving the third conductive layer in a second region of the structure;
forming digit lines in the first region of the structure from the first and second conductive layers; and
forming a signal line in the second region of the substrate from the first, second, and third conductive layers.
56. The method of claim 55 wherein the removing comprises:
masking the second region of the structure; and
etching the first region of the structure with an etchant that etches the third layer significantly faster than the second layer.