Author: claimsbot

1. A method of fabricating an extreme ultraviolet photomask, comprising:
providing a mask comprising, in order, a substrate, a reflective layer, and a capping layer;
forming an opening in the capping layer and at least a portion of the reflective layer;
forming an absorber layer in the opening and over a top surface of the capping layer; and
removing at least a portion of the absorber layer, while leaving another portion of the absorber layer to form an absorber, wherein the absorber has a top surface lower than a top surface of the capping layer.
2. The method of claim 1, wherein the absorber has the top surface lower than a top surface of the reflective layer.
3. The method of claim 1, wherein a height difference of the top surface of the absorber and the top surface of the capping layer ranges between about 20 nm and about 50 nm.
4. The method of claim 1, wherein the reflective layer comprises alternating Mo and Si layers ranging between about 20 pairs and about 80 pairs.
5. The method of claim 1, further comprising:
forming an underlying reflective layer over the substrate; and
forming an intervening layer between the underlying reflective layer and the reflective layer.
6. The method of claim 5, wherein the intervening layer includes Cr, Ru, or a combination thereof.
7. The method of claim 5, wherein the absorber is formed on the intervening layer.
8. The method of claim 5, wherein the underlying reflective layer comprises alternating Mo and Si layers ranging between about 20 pairs and about 40 pairs.
9. The method of claim 5, wherein a thickness ratio of the reflective layer to the underlying reflective layer ranges between about 0.25 and about 1.
10. The method of claim 1, further comprising forming a planarization layer over the absorber layer.
11. The method of claim 10, wherein the planarization layer is Ag2O3, Si-containing layer, Carbon-containing layer, or combinations thereof.
12. The method of claim 10, further comprising removing the planarization layer before removing the at least a portion of the absorber layer.
13. The method of claim 1, wherein the absorber layer is TaSi, TaBN, TaN, TaSiON, TaBO, or TaON.
14. The method of claim 1, wherein the absorber has a thickness ranging between about 20 nm and about 150 nm.
15. The method of claim 1, further comprising forming a hard mask layer over the capping layer.
16. The method of claim 15, further comprising removing the hard mask after forming the absorber.
17. The method of claim 1, wherein the step of removing includes a CMP process andor a dry etching process.
18. An extreme ultraviolet photomask, comprising:
a reflective layer over a substrate;
a capping layer over the reflective layer; and
an absorber in the capping layer and the reflective layer, wherein a top surface of the absorber is lower than a top surface of the capping layer.
19. A method for forming an integrated circuit comprising:
forming a photomask by
forming a reflective layer over a substrate;
forming a capping layer over the reflective layer; and
forming an absorber in the capping layer and the reflective layer, wherein a top surface of the absorber is lower than a top surface of the capping layer;

forming a layer on a substrate; and
patterning the layer using the photomask in a photolithography step.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A wide-angle photographic lens system enabling correction of distortion, comprising: a first lens, an iris, a second lens and a third lens sequentially arranged along an optical axis from an object, wherein
the first lens has weak refractivity, the second lens has strong positive refractivity, and the third lens has negative refractivity, wherein the lens system satisfies relations,
|f1f|>2.8, f2f<1, and tetc<0.4,
wherein f1 is a focal length of the first lens, f is a total focal length of all the lenses, f2 is a focal length of the second lens, te is a lens thickness on an effective diameter of a rear surface of the second lens, and tc is a center thickness of the second lens.
2. The wide-angle photographic lens system enabling correction of distortion as set forth in claim 1, wherein incidence angles of a main beam of light in a field not less than 60% of a maximum image height in the lens system satisfy a relation,
A\u2014fr<A\u2014s,

wherein A_fr is an incidence angle of the main beam of light received on a tangent of a center of a front surface of the first lens, and A_s is an incidence angle of the main beam of light received on the iris.
3. The wide-angle photographic lens system enabling correction of distortion as set forth in claim 1 or 2, satisfying a relation,
|R\u2014L1S1f|>3.5,

wherein R_L1S1 is a radius of curvature of a front surface of the first lens.
4. The wide-angle photographic lens system enabling correction of distortion as set forth in claim 1 or 2, satisfying a relation,
h\u2014L1S1<h\u2014L3S2,

wherein h_L1S1 is an effective diameter of a front surface of the first lens, and h_L3S2 is an effective diameter of a rear surface of the third lens.
5. The wide-angle photographic lens system enabling correction of distortion as set forth in claim 1 or 2, satisfying a relation,
t34t>0.09,

wherein t34 is an interval between a rear surface of the first lens and a front surface of the second lens, and t is a total length of the lens system which is a distance from a front surface of the first lens to an image surface.
6. The wide-angle photographic lens system enabling correction of distortion as set forth in claim 1 or 2, satisfying a relation,
f23f>0.8,

wherein f is the total focal length of all the lenses, and f23 is a sum of focal lengths of the second lens and the third lens.
7. The wide-angle photographic lens system enabling correction of distortion as set forth in claim 1 or 2, wherein the first lens has aspheric surfaces on opposite surfaces, the second lens has an aspheric surface on at least one surface, and the third lens has aspheric surfaces on opposite surfaces.
8. The wide-angle photographic lens system enabling correction of distortion as set forth in claim 1 or 2, wherein any one or more of the first lens, the second lens and the third lens are made of a material different from a material of remaining lenses.
9. A wide-angle photographic lens system enabling correction of distortion, comprising: a first lens, an iris, a second lens and a third lens sequentially arranged along an optical axis from an object, wherein
the first lens has weak refractivity, the second lens has strong positive refractivity, and the third lens has negative refractivity, wherein incidence angles of a main beam of light in a field not less than 70% of a maximum image height in the lens system satisfy a relation,
A\u2014fr<A\u2014s,
wherein A_fr is an incidence angle of the main beam of light received on a tangent of a center of a front surface of the first lens, and A_s is an incidence angle of the main beam of light received on the iris.
10. The wide-angle photographic lens system enabling correction of distortion as set forth in claim 9, satisfying relations, |f1f|>2.8, f2f<1, and tetc<0.4,
wherein f1 is a focal length of the first lens, f is a total focal length of all the lenses, f2 is a focal length of the second lens, te is a lens thickness on an effective diameter of a rear surface of the second lens, and tc is a center thickness of the second lens.
11. The wide-angle photographic lens system enabling correction of distortion as set forth in claim 9 or 10, satisfying a relation,
|R\u2014L1S1f|>3.5,

wherein R_L1S1 is a radius of curvature of the front surface of the first lens.
12. The wide-angle photographic lens system enabling correction of distortion as set forth in claim 9 or 10, satisfying a relation,
h\u2014L1S1<h\u2014L3S2,

wherein h_L1S1 is an effective diameter of the front surface of the first lens, and h_L3S2 is an effective diameter of a rear surface of the third lens.
13. The wide-angle photographic lens system enabling correction of distortion as set forth in claim 9 or 10, satisfying a relation,
t34t>0.09,

wherein t34 is an interval from a rear surface of the first lens to a front surface of the second lens, and t is a total length of the lens system which is a distance from the front surface of the first lens to an image surface.
14. The wide-angle photographic lens system enabling correction of distortion as set forth in claim 9 or 10, satisfying a relation,
f23f>0.8,

wherein f is a total focal length of all the lenses, and f23 is a sum of focal lengths of the second lens and the third lens.
15. The wide-angle photographic lens system enabling correction of distortion as set forth in claim 9 or 10, wherein the first lens has aspheric surfaces on opposite surfaces, the second lens has an aspheric surface on at least one surface, and the third lens has aspheric surfaces on opposite surfaces.
16. The wide-angle photographic lens system enabling correction of distortion as set forth in claim 9 or 10, wherein any one or more of the first lens, the second lens and the third lens are made of a material different from a material of remaining lenses.

1. A system for maintaining machine operation, comprising:
at least one monitoring device coupled to a portion of a first machine operating in a machine environment, the at least one monitoring device configured to monitor a first parameter associated with the first machine; and
a first electronic control module communicatively coupled to the at least one monitoring device and configured to:
identify a data collection error associated with the at least one monitoring device;
detect, in response to the data collection error, a second electronic control module proximate the first electronic control module, the second electronic control module configured to collect at least one second parameter that is interchangeable with the first parameter;
establish a wireless communication channel with the second electronic control module; and
download the at least one second parameter from the second electronic control module via the wireless communication channel.
2. The system of claim 1, wherein the first electronic control module is further configured to determine whether the second electronic control module is compatible with the first electronic control module.
3. The system of claim 1, wherein the first electronic control module is located on the first machine and the second electronic control module is located on a second machine.
4. The system of claim 3, wherein determining whether the second electronic control module is compatible with the first electronic control module includes:
identifying a model number associated with the second machine; and
determining, based on the identified model number, whether the second electronic control module is compatible with the first electronic control module.
5. The system of claim 1, wherein the first electronic control module is further configured to substitute the at least one second parameter for the first parameter associated with the data collection error.
6. The system of claim 5, wherein the first electronic control module is further configured to generate a warning signal indicative of the data collection error.
7. The system of claim 1, wherein the wireless communication channel includes a peer-to-peer wireless communication channel and the first and second electronic control modules are adapted to communicate via the peer-to-peer wireless communication channel.
8. The system of claim 1, wherein the wireless communication channel includes a Bluetooth-compatible wireless communication channel and the first and second electronic control modules are adapted to communicate via the Bluetooth-compatible wireless communication channel.
9. A method for maintaining machine operation, comprising:
identifying a data collection error associated with a first parameter to be collected by a first electronic control module of a first machine;
detecting, in response to the data collection error, a second electronic control module proximate the first electronic control module, the second electronic control module configured to collect at least one second parameter that is interchangeable with the first parameter;
establishing, by the first electronic control module, a wireless communication channel between the first electronic control module and the second electronic control module;
querying the second electronic control module for the at least one second parameter; and
receiving the at least one second parameter from the second electronic control module via the wireless communication channel, in response to the query.
10. The method of claim 9, wherein the second electronic control module is associated with a second machine.
11. The method of claim 10, wherein detecting the second electronic control module includes determining whether the second electronic control module is compatible with the first electronic control module.
12. The method of claim 11, wherein determining whether the second electronic control module is compatible with the first electronic control module includes:
identifying a model number associated with the second machine; and
determining, based on the identified model number, whether the second electronic control module is compatible with the first electronic control module.
13. The method of claim 9, wherein receiving the at least one parameter from the second electronic control module includes substituting the at least one parameter for the parameter associated with the data collection error.
14. The method of claim 13, further including generating a warning signal indicative of the data collection error.
15. The method of claim 9, wherein the wireless communication channel includes a peer-to-peer wireless communication channel and the first and second electronic control modules are adapted to communicate via the peer-to-peer wireless communication channel.
16. The method of claim 9, wherein the wireless communication channel includes a Bluetooth-compatible wireless communication channel and the first and second electronic control modules are adapted to communicate via the Bluetooth-compatible wireless communication channel.
17. A project environment, comprising:
a first machine operating in the project environment, the first machine being proximate a second machine;
at least one monitoring device coupled to a portion of the first machine, the at least one monitoring device configured to monitor a first parameter associated with the first machine; and
a first electronic control module disposed on the first machine and communicatively coupled to the at least one monitoring device, the first electronic control module configured to:
identify a data collection error associated with the at least one monitoring device;
detect, in response to the data collection error, a second electronic control module associated with the second machine, the second electronic control module configured to collect at least one second parameter that is interchangeable with the first parameter;
establish a wireless communication channel with the second electronic control module; and
download the at least one second parameter from the second electronic control module via the wireless communication channel.
18. The project environment of claim 17, wherein the first electronic control module is further configured to determine whether the second electronic control module is compatible with the first electronic control module.
19. The project environment of claim 18, wherein determining whether the second electronic control module is compatible with the first electronic control module includes:
identifying a model number associated with the second machine; and
determining, based on the identified model number, whether the second electronic control module is compatible with the first electronic control module.
20. The project environment of claim 17, wherein the first electronic control module is further configured to substitute the at least one second parameter for the first parameter associated with the data collection error.
21. The project environment of claim 17, wherein the first electronic control module is further configured to generate a warning signal indicative of the data collection error.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A method for verifying an installation, the method comprising:
processing contents of a plurality of software packages effective to generate installations of the plurality of software packages on one or more virtual machines;
for each virtual machine of the one or more virtual machines, traversing a corresponding installation directory of the each virtual machine and generating an installation index of content identifiers for files found in the installation directory, the files being a result of processing the plurality of software packages to install the plurality of software packages on the each virtual machine;
transmitting one or more installation indexes for the one or more virtual machines to a monitoring client;
generating, by the monitoring client, a repository index including software indexes, by, for each software index, populating the each software index with content identifiers for files by analyzing the contents of a corresponding software package of the plurality of software packages, the corresponding software package including files and instructions effective to install the corresponding software package;
identifying, by the monitoring client, first software packages for which not all of the content identifiers of a corresponding software index of the software indexes are found in the installation index; and
reporting, by the monitoring client, a status of the one or more virtual machines in accordance with the first software packages including reporting that the first software packages were not installed correctly;
wherein transmitting the one or more installation indexes for the one or more virtual machines to the monitoring client is performed in one or more servlets corresponding to the one or more virtual machines in response to requests from the monitoring client for uniform resource locators corresponding to the one or more virtual machines.
2. The method of claim 1, wherein each installation index includes a file path corresponding to each content identifier included in each installation index.
3. The method of claim 1, wherein each content identifier is a checksum for a corresponding file.
4. The method of claim 1, wherein traversing the corresponding installation directory for each of the one or more virtual machines is performed in a low priority thread.
5. The method of claim 1, further comprising generating the installation index by, for each software package:
expanding artifacts corresponding to the software package; and
generating the software index including content identifiers for files of the expanded artifacts.
6. The method of claim 5, wherein generating the software index further includes labeling the software index with a package identifier and version identifier of the corresponding software package.
7. The method of claim 6, further comprising including a path in the software index for each content identifier for files of the corresponding software package.
8. The method of claim 7, wherein reporting the status of the one or more virtual machines in accordance with the first software packages further comprises:
evaluating the first software package with respect to an application manifest defining an interdependent installation of software packages; and
reporting any errors in accordance with the evaluation.
9. The method of claim 1, wherein the one or more virtual machines include a plurality of virtual machines, the method further comprising:
transmitting, by the monitoring client, requests for installation indexes from the plurality of virtual machines;
aggregating installation indexes received from the plurality of virtual machines; and
wherein identifying software packages for which not all of the content identifiers of the corresponding software index are found in the installation index comprises analyzing the aggregated installation indexes.
10. A system for verifying an installation, the system comprising:
one or more virtual machine (VM) computer systems each having one or more processors and hosting one or more virtual machines, each of the one or more VM computer systems programmed to, for each virtual machine of the one or more virtual machines hosted thereby:
process contents of a plurality of software packages effective to generate installations of the plurality of software packages on the each virtual machine;
traverse a corresponding installation directory and generating an installation index of content identifiers for files found in the installation directory for the each virtual machine;
transmit the one or more installation indexes for the one or more virtual machines to a monitoring client;

a monitoring client system programmed to:
generate a repository index by generating software indexes, by, for each software index, analyzing contents of a corresponding software package of the plurality of software packages as executed to install the corresponding software package and adding identifiers for files stored in the corresponding software package to the each software index, the corresponding software package including files and instructions effective to install the corresponding software package;
identify one or more first software packages for which all of the content identifiers of a corresponding software index are found in the installation index; and
report a status of the one or more virtual machines of the one or more VM computer systems in accordance with the one or more first software packages including reporting that the one or more first software packages were not installed correctly;

wherein the one or more VM computer systems are each further programmed to transmit the one or more installation indexes for the one or more virtual machines to the monitoring client using a servlet corresponding to the one or more virtual machines in response to requests from the monitoring client for uniform resource locators corresponding to the one or more virtual machines.
11. The system of claim 10, wherein each installation index includes a file path corresponding to each content identifier included in each installation index.
12. The system of claim 10, wherein each content identifier is a checksum for a corresponding file.
13. The system of claim 10, wherein the one or more VM computer systems are further programmed to traverse the corresponding installation directory for each of the one or more virtual machines is performed in a low priority thread.
14. The system of claim 10, wherein the monitoring client system is further programmed to generate the installation index by, for each software package:
expanding artifacts corresponding to the software package; and
generating the software index including content identifiers for files of the expanded artifacts.
15. The system of claim 14, wherein the monitoring client system is further programmed to generate the software index by labeling the software index with a package identifier and version identifier of the corresponding software package.
16. The system of claim 15, wherein the monitoring client system is further programmed to include a path in the software index for each content identifier for files of the corresponding software package.
17. The system of claim 16, wherein the monitoring client system is further programmed to report the status of the one or more virtual machines in accordance with the one or more first software packages by:
evaluating the one or more first software package with respect to an application manifest defining an interdependent installation of software packages; and
reporting any errors in accordance with the evaluation.
18. The system of claim 10, wherein the one or more virtual machines include a plurality of virtual machines, and the monitoring client is further programmed to:
transmit requests for installation indexes from the plurality of virtual machines;
aggregate installation indexes received from the plurality of virtual machines; and
identify software packages for which all of the content identifiers of the corresponding software index are found in the installation index comprises analyzing the aggregated installation indexes.