Author: claimsbot

1. A multi-turn coil device comprising:
a. a flexible circuit board; and
b. a plurality of serially electrically coupled coils coupled to the flexible circuit board, each coil having a coil direction, and wherein the coils are positioned such that each coil substantially overlaps each of the other coils when the flexible circuit board is folded.
2. The device of claim 1, wherein the coils are configured so that when the flexible circuit board is folded, each overlapping coil is in substantially the same direction.
3. The device of claim 2, wherein the flexible circuit board has a first side and a second side and wherein one or more coils are coupled to the second side.
4. The device of claim 3, wherein the serially electrically coupled coils on the first side are electrically coupled to the coils on the second side through an electrically conductive path through the flexible circuit board.
5. The device of claim 2, wherein the folding circuit board is a multilayer flexible circuit board.
6. The device of claim 2, further comprising an insulator configured to prevent the shorting of the coils when folded.
7. The device of claim 2, further comprising one or more alignment means.
8. The device of claim 7, wherein the alignment means is a folding line.
9. The device of claim 2, wherein the flexible circuit board if folded according to an accordion fold, a fold over fold, a double fold, or a rolling fold, therein forming a multi-turn coil.
10-20. (canceled)

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A device for measuring mass concentration of particulate matter in an exhaust flow of an internal combustion engine, comprising:
a sensor body, wherein the sensor body is configured to be coupled to an exhaust conduit of the internal combustion engine;
a signal electrode and a detector electrode at least partially enclosed in the sensor body, wherein an end of the signal electrode and an end of the detector electrode are configured to be located in the exhaust conduit; and
wherein a voltage is applied to the signal electrode during use and an electric charge accumulates or electrical current flows on the detector electrode as particulate matter flows between the ends of the signal electrode and the detector electrode in the exhaust conduit during use, and wherein the electric charge that accumulates on the detector electrode or the current that flows varies with the mass concentration of particulate matter in the exhaust conduit.
2. The device of claim 1, wherein the signal electrode is at least partially enclosed in an insulating material and a conducting tube.
3. The device of claim 1, wherein the detector electrode is at least partially enclosed in an insulating material and a conducting tube.
4. The device of claim 1, wherein the voltage applied to the signal electrode during use is between about 500 volts and about 1000 volts.
5. The device of claim 1, wherein the detector electrode is coupled to a detector system that converts the electric charge that accumulates on the detector electrode or the current flow on the detector electrode into an output voltage, and wherein the output voltage corresponds to the mass concentration of particulate matter in the exhaust conduit.
6. The device of claim 1, further comprising an electrically insulating sheath at least partially enclosing the signal electrode and an electrically insulating sheath at least partially enclosing the detector electrode.
7. A system for measuring mass concentration of particulate matter in an exhaust flow of an internal combustion engine, comprising:
a sensor body, wherein the sensor body is configured to be coupled to an exhaust conduit of the internal combustion engine;
a signal electrode and a detector electrode at least partially enclosed in the sensor body, wherein an end of the signal electrode and an end of the detector electrode are configured to be located in the exhaust conduit;
a voltage supply coupled to the signal electrode; and
a detector system coupled to the detector electrode;
wherein a voltage is applied to the signal electrode from the voltage supply during use and an electric charge accumulates on the detector electrode as particulate matter flows between the ends of the signal electrode and the detector electrode in the exhaust conduit during use, and wherein the electric charge that accumulates on the detector electrode varies with the mass concentration of particulate matter in the exhaust conduit.
8. The system of claim 7, wherein the signal electrode is at least partially enclosed in an insulating material and a conducting tube.
9. The system of claim 7, wherein the detector electrode is at least partially enclosed in an insulating material and a conducting tube.
10. The system of claim 7, wherein the voltage applied to the signal electrode during use is between about 500 volts and about 1000 volts.
11. The system of claim 7, wherein the detector system converts the electric charge that accumulates on the detector electrode or the current flow on the detector electrode into an output voltage, and wherein the output voltage corresponds to the mass concentration of the particulate matter in the exhaust conduit.
12. The system of claim 7, further comprising an electrically insulating sheath at least partially enclosing the signal electrode and an electrically insulating sheath at least partially enclosing the detector electrode.
13. A method for measuring mass concentration of particulate matter in an exhaust conduit of an internal combustion engine, comprising:
applying a voltage to a signal electrode, wherein an end of the signal electrode is located in the exhaust conduit;
measuring an accumulation of electric charge on a detector electrode or a current flow on the detector electrode, wherein an end of the detector electrode is located in the exhaust conduit, and wherein the accumulation of electric charge varies with the mass concentration of particulate matter in the exhaust conduit; and
converting the accumulation of electric charge or electrical current on the detector electrode to an output voltage, wherein the output voltage corresponds to a concentration of particulate matter in the exhaust conduit.
14. The method of claim 13, wherein the signal electrode and the detector electrode are at least partially enclosed in a sensor body.
15. The method of claim 13, wherein the signal electrode is at least partially enclosed in an insulating material and a conducting tube.
16. The method of claim 13, wherein the detector electrode is at least partially enclosed in an insulating material and a conducting tube.
17. The method of claim 13, wherein the voltage applied to the signal electrode is between about 500 volts and about 1000 volts.
18. The method of claim 13, further comprising converting the accumulation of electric charge on the detector electrode or the current flow on the detector electrode into an output voltage with a detector system wherein the output voltage corresponds to the mass concentration of particulate matter in the exhaust conduit.
19. A device for measuring mass concentration and size distribution of particulate matter in an exhaust flow of a combustion engine, comprising:
a cylinder section configured to be coupled to an exhaust conduit of the combustion engine;
a light source coupled to a perimeter of the cylinder section; and
at least one photodetector coupled to the perimeter of the cylinder section, wherein at least one of the photodetectors is configured to detect light scattered by particulate matter in the cylinder section, wherein at least one of the photodetectors is placed at a selected angle with respect to the light source, and wherein the selected angle is selected to provide an estimate of the size distribution of the particulate matter during use.
20-32. (canceled)
33. A system for measuring mass concentration and size distribution of particulate matter in an exhaust flow of a combustion engine, comprising:
a cylinder section configured to be coupled to an exhaust conduit of the combustion engine;
a light source coupled to a perimeter of the cylinder section;
at least one photodetector coupled to the perimeter of the cylinder section, wherein at least one of the photodetectors is configured to detect light scattered by particulate matter in the cylinder section, wherein at least one of the photodetectors is placed at a selected angle with respect to the light source, and wherein the selected angle is selected to provide an estimate of the particulate matter size distribution during use; and
an electronics system coupled to the light source and at least one of the photodetectors, wherein the electronics system provides power to the light source and at least one of the photodetectors and obtains data from at least one of the photodetectors during use, and wherein the electronics system processes the data from at least one of the photodetectors to determine the particulate matter mass concentrations and size distributions during use.
34-44. (canceled)
45. A method for measuring mass concentration and size distributions of particulate matter in an exhaust conduit of a combustion engine, comprising:
providing light from a light source into a cylinder section coupled to an exhaust conduit of the combustion engine;
detecting light scattered by particulate matter in the cylinder section with at least one photodetector coupled to a perimeter of the cylinder section, wherein at least one of the photodetectors is placed at a selected angle with respect to the light source, and wherein the selected angle is selected to provide an estimate of the particulate matter size distribution; and
determining the particulate matter mass concentrations and size distributions from data obtained from at least one of the photodetectors.
46-53. (canceled)

1. A rotation detecting device arranged in face-to-face relation with a metallic body or magnet body provided in a rotational member, the rotation detecting device comprising:
a magnetic sensor;
peripheral component parts electrically or mechanically connected with the magnetic sensor, the peripheral components including an electrode electrically connected with the magnetic sensor, a cable core line electrically connected with the electrode, a cable insulating sheath to electrically insulate the cable core line, and a portion of a cable covering to cover an exterior of the cable insulating sheath; and
a fixture, made of a metallic material, to position the magnetic sensor and the peripheral component parts;
the magnetic sensor, the peripheral component parts and the fixture being molded together so as to be covered by a thermoplastic elastomer or a material capable of exhibiting a rubber elasticity.
2. The rotation detecting device as claimed in claim 1, further comprising an electric terminal of the magnetic sensor,
wherein the electric terminal or the electrode and the thermoplastic elastomer or the material capable of exhibiting the rubber elasticity are sealingly bonded together by the molding.
3. The rotation detecting device as claimed in claim 1, further comprising a connecting member to integrally connect the magnetic sensor and the fixture together,
wherein the magnetic sensor, the peripheral component parts, the fixture and the connecting member are molded together so as to be covered by the thermoplastic elastomer or the material capable of exhibiting the rubber elasticity.
4. The rotation detecting device as claimed in claim 1, further comprising a cable clamp affixed to the fixture to hold the cable covering,
wherein the magnetic sensor, the peripheral component parts, the fixture and the cable clamp are molded together so as to be covered by the thermoplastic elastomer or the material capable of exhibiting the rubber elasticity.
5. The rotation detecting device as claimed in claim 1, in which the thermoplastic elastomer or the material capable of exhibiting the rubber elasticity to cover the cable core line is externally pressed so that the thermoplastic elastomer or the material capable of exhibiting the rubber elasticity and an outer skin of the cable are tightly sealed together.
6. The rotation detecting device as claimed in claim 5, further comprising a press-fixing member to externally press the thermoplastic elastomer or the material capable of exhibiting the rubber elasticity, which covers the cable core line.
7. The rotation detecting device as claimed in claim 1, further comprising an annular cable sealing member capable of being plastically deformed in a direction radially inwardly thereof and provided on an outer periphery of the cable insulating sheath with the magnetic sensor with a gap intervening therebetween,
wherein the magnetic sensor, the peripheral component parts, the fixture and the cable sealing member are molded together so as to be covered by the thermoplastic elastomer or the material capable of exhibiting the rubber elasticity, and
wherein the cable sealing member is plastically deformed in a direction radially inwardly thereof together with a portion of the thermoplastic elastomer or the material capable of exhibiting the rubber elasticity, which portion covers an outer peripheral portion of the cable insulating sheath.
8. The rotation detecting device as claimed in claim 1, further comprising a ring member, provided on an outer periphery of the thermoplastic elastomer or the material capable of exhibiting the rubber elasticity, to hold the thermoplastic elastomer or said material and the cable covering member in a fastened condition.
9. A method of manufacturing a rotation detecting device, comprising:
loading a magnetic sensor having an electric terminal to be arranged in face-to-face relation with a magnet body or a metallic body provided on a rotational member, peripheral component parts electrically or mechanically connected with the magnetic sensor, a fixture, made of a metallic material, to position the magnetic sensor and a thermoplastic elastomer or a material capable of exhibiting the rubber elasticity into a mold assembly, the peripheral components including an electrode electrically connected with magnetic sensor, a cable core line electrically connected with the electrode, a cable insulating sheath to electrically insulate the cable core line and a portion of a cable covering to cover an exterior of the cable insulating sheath; and
compressive molding the magnetic sensor and the peripheral component parts so as to be covered by the thermoplastic elastomer or said material within the mold assembly.
10. The method of manufacturing the rotation detecting device as claimed in claim 9, in which the mold assembly includes an upper mold and a lower mold and in which the compressive molding comprises:
intervening and sandwiching the magnetic sensor, the peripheral component parts and a rubber material mixed with a vulcanizing agent between the upper mold and the lower mold;
heating at least one of the upper mold and the lower mold; and
subsequent to the heating, applying a pressure between the upper mold and the lower mold.
11. The method of manufacturing the rotation detecting device as claimed in claim 9, in which the mold assembly includes an upper mold and a lower mold and in which the compressive molding comprises:
intervening and sandwiching the magnetic sensor, the peripheral component parts, the fixture and the thermoplastic elastomer or the material capable of exhibiting the rubber elasticity between the upper mold and the lower mold;
heating at least one of the upper mold and the lower mold; and
subsequent to the previous substep, applying a pressure between the upper mold and the lower mold to allow the following two elements to be sealingly bonded together by vulcanization:
an electric terminal of the magnetic sensor or a metallic electrode and the thermoplastic elastomer or the material capable of exhibiting the rubber elasticity, or the fixture and the material capable of exhibiting the rubber elasticity.
12. The method of manufacturing the rotation detecting device as claimed in claim 9, in which the compressive molding comprises loading, in addition to the magnetic sensor, the peripheral component parts and the fixture,
a connecting member connecting the magnetic sensor and the fixture and the thermoplastic elastomer or the material capable of exhibiting the rubber elasticity, into the mold assembly so that the magnetic sensor and the peripheral component parts are integrally compressive molded together so as to be covered by the thermoplastic elastomer or said material.
13. The method of manufacturing the rotation detecting device as claimed in claim 12, in which the mold assembly includes an upper mold and a lower mold and in which during the applying the pressure for the compressive molding step, an excessive portion of the material is expelled to the outside of the mold assembly through a gap formed beforehand between the upper mold and the lower mold.
14. The method of manufacturing the rotation detecting device as claimed in claim 9, in which the compressive molding comprises:
loading, in addition to the magnetic sensor, the peripheral component parts and the fixture,
a cable clamp affixed to the fixture, the cable clamp being made of a metallic material and capable of holding the cable covering, and the thermoplastic elastomer or the material capable of exhibiting the rubber elasticity into the mold assembly so that the magnetic sensor and the peripheral component part are integrally molded together within the mold assembly so as to be covered by the thermoplastic elastomer or said material.
15. The method of manufacturing the rotation detecting device as claimed in claim 10, further comprising, subsequent to the compressive molding, sealing the thermoplastic elastomer or the material capable of exhibiting the rubber elasticity and an outer skin of the cable core line tightly together by pressing from outside the thermoplastic elastomer or the material capable of exhibiting the rubber elasticity then covering the cable core line.
16. The method of manufacturing the rotation detecting device as claimed in claim 9, in which the mold assembly includes an upper mold and a lower mold and in which the compressive molding executes compressively molding within the mold assembly, in addition to the magnetic sensor, the peripheral component parts and the fixture, an annular cable sealing member spacedly provided on an outer periphery of the cable insulating sheath, the cable seal member being capable of undergoing a plastic deformation in a radially inward direction, together with the thermoplastic elastomer or the material capable of exhibiting the rubber elasticity so as to be covered by the thermoplastic elastomer or said material; and
the method further comprises, subsequent to the preceding compressive molding, plastically deforming the cable sealing member together with a portion of a covering material including the thermoplastic elastomer or said material, which portion covers an outer peripheral portion of the cable, in a direction radially inwardly thereof.
17. The method of manufacturing the rotation detecting device as claimed in claim 9, further comprising, subsequent to the compressive molding, providing a ring member to hold a covering material and the cable covering in a fastened condition in the covering material,
wherein the covering material includes the material capable of exhibiting the rubber elasticity or the thermoplastic elastomer.
18. A wheel support bearing assembly for supporting a vehicle wheel rotatably relative to a vehicle body structure, comprising:
an outer member having double row rolling surfaces formed in an inner periphery thereof;
an inner member having an outer periphery formed with rolling surfaces in face-to-face relation with the rolling surfaces in the outer member;
double row rolling elements interposed between the opposed rolling surfaces; and
a rotation detecting device as defined in claim 1, which is fitted to one of the outer and inner members which serves as a stationary member,
wherein the magnet body or the metallic body confronting the magnetic sensor of the rotation detecting device is fitted to the other of the outer and inner members which serves as a rotational member.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A device manufacturing method comprising:
patterning a beam of radiation;
positioning a substrate in a substrate compartment;
projecting the patterned beam of radiation through an optics compartment and a channel that provides an open connection between the optics compartment and the substrate compartment onto the substrate;
maintaining an ionized flush gas at a higher pressure in the channel than in the substrate compartment and in the optics compartment during said projecting;
intercepting particles that emanate from the substrate with the ionized flush gas;
pumping the flush gas carrying the intercepted particles from the substrate compartment using a pump coupled to a gas outlet of the substrate compartment coupled to at least one of said compartments; and
establishing an electrical potential difference between a wall of the channel and the outlet andor a rotor of the pump so that the outlet andor the rotor of the pump attracts positively charged ions that stem from the ionized flush gas in the channel.
2. A device manufacturing method according to claim 1, further comprising maintaining electric potentials of walls of the optics compartment andor the substrate compartment and any object in the optics compartment andor the substrate compartment at a higher potential level than the outlet andor the rotor of the pump.
3. A device manufacturing method according to claim 1, further comprising supplying the flush gas into the channel from an inlet in a wall of the channel between the substrate compartment and the optics compartment.
4. A device manufacturing method according to claim 3, further comprising ionizing the flush gas prior to supplying the flush gas through the inlet into the channel.
5. A device manufacturing method according to claim 1, wherein the flush gas is ionized using an alternating electromagnetic field generated in the channel.
6. A device manufacturing method according to claim 1, further comprising:
placing a plurality of substrates on a substrate table in the substrate compartment successively,
projecting the patterned beam onto the substrates, when each substrate is on the substrate table in the substrate compartment, respectively, to impart patterns to the substrates for further processing of the substrates;
electrically charging an electrically exposed area on the substrate table to a surface potential different from a wall potential of the wall of the substrate compartment, during a period in which no substrate that is used for said further processing is on the substrate table, intermediate between projection onto successive ones of said substrates;
positioning the substrate table with said charged exposed area during said period to a position to attract material from a space in the substrate compartment near said position; and
removing the attracted material from the substrate table before placing a next one of the substrates on the substrate table.
7. A device manufacturing method according to claim 6, wherein an at least partially electrically conductive object, with a top surface that has substantially a same diameter as the substrates, is placed on the substrate table in said period, and at least part of the top surface of the object is charged to the surface potential.
8. A device manufacturing method according to claim 6, wherein the substrate table is moved while the electrically exposed area is at the surface potential.
9. A lithographic projection apparatus arranged to project a patterned beam of radiation from a patterning device onto a substrate, the lithographic projection apparatus comprising:
a substrate compartment with a first gas outlet;
an optics compartment with a second gas outlet;
a channel that provides open gas and radiation communication between the optics compartment and the substrate compartment;
a flush gas supply and flush gas ionizer arranged to establish a higher pressure of ionized flush gas in the channel than in the substrate compartment and the optics compartment;
a pump coupled to at least one of the gas outlets for pumping the flush gas from at least one of the compartments; and
an electric circuit arranged to establish an electrical potential difference between a wall of the channel and at least one of the outlets andor a rotor of the pump, said circuit having a polarity so that at least one outlet andor the rotor of the pump attracts positively charged ions that stem from the ionized flush gas in the channel.
10. A lithographic projection apparatus according to claim 9, wherein walls of the optics compartment andor the substrate compartment and any objects in the optics compartment andor the substrate compartment are electrically conductive at their surfaces, and electrically coupled to the electric circuit to maintain a potential of the wall of the optics compartment andor the wall of the substrate compartment and the objects above a potential of the outlet andor the rotor of the pump, andor wherein the walls of the optics compartment andor the wall of the substrate compartment andor the objects are electrically isolated from the channel wall and the outlet andor the rotor of the pump that is kept at an electrical potential difference between a wall of the channel.
11. A lithographic projection apparatus according to claim 9, further comprising a flush gas supply inlet in a wall of the channel, between the substrate compartment and the optics compartment.
12. A lithographic projection apparatus according to claim 11, further comprising an ionization chamber for ionizing the flush gas in a supply conduit for feeding flush gas to the inlet.
13. A lithographic projection apparatus according to claim 12, wherein the ionization chamber comprises a gas flow circuit with a branch coupled to the inlet, an electromagnetic field generator coupled to a part of the gas flow circuit for ionizing flush gas that flows through the circuit, and a second electric circuit is coupled between a wall of the branch and a wall of the gas flow circuit for establishing a potential difference between the wall of the branch and the wall of the gas flow circuit, with a polarity to attract ionized gas from the gas flow circuit into the branch.
14. A device manufacturing method comprising:
patterning a beam of radiation;
placing a plurality of substrates and patterning devices in a path of the beam successively, the substrates or patterning devices being placed on a support structure;
projecting the beam from the patterning devices onto the substrates, to impart patterns to the substrates for further processing;
electrically charging an electrically exposed area on the support structure to a surface potential different from a wall potential of a wall of a compartment that contains the support structure, during a period between projections of the beam onto successive ones of the substrates and wherein no substrate that is used for said further processing or patterning device is on the support structure;
positioning the support structure with said charged, electrically exposed area during said period at a position to attract material from a space near said position; and
removing the attracted material from the support structure before placing a next one of the substrates or the patterning devices on the support structure.
15. A device manufacturing method according to claim 14, wherein an at least partially electrically conductive object, with a top surface that has substantially a same diameter at the substrates, is placed on the support structure in said period instead of a substrate, and at least the top surface of the object is charged to the surface potential.
16. A device manufacturing method according to claim 15, wherein the support structure is moved while the electrically exposed area remains charged at the surface potential.
17. A device manufacturing method according to claim 15, wherein a pair of table electrodes is provided in the support structure facing the conductive object, a potential difference being applied to the table electrodes to hold the substrates or patterning devices on the support structure, a common mode potential being applied to the pair of table electrodes relative to the wall potential to charge the electrically exposed area to the surface potential.
18. A device manufacturing method according to claim 15, wherein a table electrode is provided in the support structure facing the conductive object substantially without conductive contact between the table electrode and the object, and a charging electrode is conductively connected to the object, a potential difference being applied between the charging electrode and the table electrode and the wall of the compartment.
19. A lithographic projection apparatus arranged to project a pattern from a patterning device onto a substrate, the lithographic projection apparatus comprising:
a support structure for supporting the substrate or the patterning device during projection of the pattern, said support structure being in a compartment; and
an electrical potential application circuit, arranged to establish a surface potential of an electrically exposed area on the support structure in a region that is normally occupied by the substrate or the patterning device during projection, the electrical potential application circuit being arranged to establish mutually different surface potentials relative to a wall potential of a wall of the compartment selectively during selected periods.
20. A lithographic projection apparatus according to claim 19, further comprising a pair of electrodes in the support structure, a differential potential application circuit arranged to apply a potential difference between the electrodes and a common mode potential application circuit connected between the wall and the pair of electrodes, and arranged to apply a potential difference between a common mode potential of the electrodes and a wall potential of the wall.
21. A lithographic projection apparatus arranged to project a patterned beam of radiation from a patterning device onto a substrate, the lithographic projection apparatus comprising:
a walled substrate compartment with a gas outlet;
a walled optics compartment with a gas outlet;
a walled channel that provides open gas and radiation communication between the optics compartment and the substrate compartment;
a flush gas ionizer with an output for supplying ionized flush gas; and
a flush gas inlet in a wall of the channel between the optic compartment and the substrate compartment, coupled to the output, for feeding ionized flush gas into the channel.
22. A lithographic projection apparatus according to claim 21, wherein the ionizer comprises a gas flow circuit with a branch coupled to the inlet, an electromagnetic field generator coupled to a part of the gas flow circuit for ionizing flush gas that flows through the circuit, and an electric circuit coupled between a wall of the branch and a wall of the gas flow circuit for establishing a potential difference between the wall of the branch and the wall of the gas flow circuit, with a polarity to attract ionized gas from the gas flow circuit into the branch.