Author: claimsbot

1. A method of fabricating an extreme ultraviolet photomask, comprising:
providing a mask comprising, in order, a substrate, a reflective layer, and a capping layer;
forming an opening in the capping layer and at least a portion of the reflective layer;
forming an absorber layer in the opening and over a top surface of the capping layer; and
removing at least a portion of the absorber layer, while leaving another portion of the absorber layer to form an absorber, wherein the absorber has a top surface lower than a top surface of the capping layer.
2. The method of claim 1, wherein the absorber has the top surface lower than a top surface of the reflective layer.
3. The method of claim 1, wherein a height difference of the top surface of the absorber and the top surface of the capping layer ranges between about 20 nm and about 50 nm.
4. The method of claim 1, wherein the reflective layer comprises alternating Mo and Si layers ranging between about 20 pairs and about 80 pairs.
5. The method of claim 1, further comprising:
forming an underlying reflective layer over the substrate; and
forming an intervening layer between the underlying reflective layer and the reflective layer.
6. The method of claim 5, wherein the intervening layer includes Cr, Ru, or a combination thereof.
7. The method of claim 5, wherein the absorber is formed on the intervening layer.
8. The method of claim 5, wherein the underlying reflective layer comprises alternating Mo and Si layers ranging between about 20 pairs and about 40 pairs.
9. The method of claim 5, wherein a thickness ratio of the reflective layer to the underlying reflective layer ranges between about 0.25 and about 1.
10. The method of claim 1, further comprising forming a planarization layer over the absorber layer.
11. The method of claim 10, wherein the planarization layer is Ag2O3, Si-containing layer, Carbon-containing layer, or combinations thereof
12. The method of claim 10, further comprising removing the planarization layer before removing the at least a portion of the absorber layer.
13. The method of claim 1, wherein the absorber layer is TaSi, TaBN, TaN, TaSiON, TaBO, or TaON.
14. The method of claim 1, wherein the absorber has a thickness ranging between about 20 nm and about 150 nm.
15. The method of claim 1, further comprising forming a hard mask layer over the capping layer.
16. The method of claim 15, further comprising removing the hard mask after forming the absorber.
17. The method of claim 1, wherein the step of removing includes a CMP process andor a dry etching process.
18. An extreme ultraviolet photomask, comprising:
a reflective layer over a substrate;
a capping layer over the reflective layer; and
an absorber in the capping layer and the reflective layer, wherein a top surface of the absorber is lower than a top surface of the capping layer.
19. A method for forming an integrated circuit comprising:
forming a photomask by
forming a reflective layer over a substrate;
forming a capping layer over the reflective layer; and
forming an absorber in the capping layer and the reflective layer, wherein a top surface of the absorber is lower than a top surface of the capping layer;

forming a layer on a substrate; and
patterning the layer using the photomask in a photolithography step.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. An automotive interior component comprising:
an automotive instrument panel having an outer surface and an inner surface;
an automotive Passenger Side Inflatable Restraint (PSIR) hidden chute assembly contained behind the automotive instrument panel, wherein the PSIR hidden chute assembly has a chute and at least one PSIR door, the chute being connected to the inner surface of the automotive instrument panel; and,
a tuning clip connected to the chute and configured to engage the PSIR door;
wherein engagement of the tuning clip to the PSIR door reduces deflection of the automotive instrument panel visible on the outer surface by biasing the PSIR door upward.
2. The automotive interior component of claim 1, further comprising a plurality of tuning clips.
3. The automotive interior component of claim 2, wherein the plurality of tuning clips comprises four tuning clips.
4. The automotive interior component of claim 1, wherein the PSIR door has a protruding portion for engagement with the tuning clip.
5. The automotive interior component of claim 1, further comprising a PSIR forward door and PSIR rearward door.
6. The automotive interior component of claim 1, wherein the automotive instrument panel is bonded to the PSIR hidden chute assembly via vibration welding.
7. The automotive interior component of claim 1, wherein the tuning clip is manually engaged to the PSIR door.
8. The automotive interior component of claim 1, wherein the tuning clip has a handle portion upon which a sufficient amount of manual pressure is applied to the handle portion to engage the tuning clip to the PSIR door.
9. An apparatus for attaching an automotive Passenger Side Inflatable Restraint (PSIR) hidden chute assembly to an automotive instrument panel comprising:
a PSIR hidden chute assembly having a chute, a PSIR forward door, and a PSIR rearward door, the chute being connected to an inner surface of an automotive instrument panel; and,
a plurality of tuning clips connected to the chute and configured to engage at least one of the PSIR forward door and the PSIR rearward door;
wherein engagement of the plurality of tuning clips to the PSIR forward door and the PSIR rearward door reduces deflection of the automotive instrument panel visible on an outer surface by biasing the PSIR forward door and PSIR rearward door upward.
10. The apparatus of claim 9, wherein the plurality of tuning clips comprises four tuning clips.
11. The apparatus claim 9, wherein the PSIR forward door has a protruding portion for engagement with at least one of the plurality of tuning clips, and wherein the PSIR rearward door has a protruding portion for engagement with at least one of the plurality of tuning clips.
12. The apparatus of claim 9, wherein the automotive instrument panel is bonded to the PSIR hidden chute assembly via vibration welding.
13. The apparatus of claim 9, wherein the plurality of tuning clips are manually engaged to the PSIR forward door and the PSIR rearward door.
14. The apparatus of claim 9, wherein each of the plurality of tuning clips has a handle portion upon which a sufficient amount of manual pressure is applied to the handle portion to engage the plurality of tuning clips to the PSIR forward door and the PSIR rearward door.
15. A method for manufacturing an automotive interior component comprising:
providing an automotive instrument panel having an outer surface and an inner surface;
providing a Passenger Side Inflatable Restraint (PSIR) chute assembly having a tuning clip and a PSIR door;
aligning the automotive instrument panel to the PSIR door;
heating a connection between the PSIR chute assembly and the automotive instrument panel;
cooling the connection between the PSIR chute assembly and the automotive instrument panel; and,
engaging the tuning clip to bias the PSIR door upward, wherein engagement of the tuning clip to the PSIR door reduces deflection of the automotive instrument panel visible on the outer surface.
16. The method of claim 15, wherein the PSIR chute assembly further comprises a chute and the PSIR door comprises a protruding portion, and wherein the tuning clip is connected to the chute and configured to engage the protruding portion of the PSIR door.
17. The method of claim 15, wherein heating the connection further comprises vibration welding.
18. The method of claim 15, further comprising a plurality of four tuning clips.
19. The method of claim 15, further comprising a PSIR forward door and PSIR rearward door.
20. The method of claim 15, wherein the tuning clip has a handle portion upon which a sufficient amount of manual pressure is applied to the handle portion to engage the tuning clip to the PSIR door.

1. An appliance comprising:
a sealable chamber;
a door for the sealable chamber, wherein in an opened position the door allows access to the chamber; and,
a venting system for allowing air to escape from the sealable chamber when the door is in a closed position,
wherein the venting system includes a vent flap, the vent flap moveable from a closed position sealing the vent system to an open position allowing air to escape wherein the vent flap forms part of the door and wherein in an open position the vent flap extends exteriorly of the door.
2. An appliance according to claim 1, wherein the vent flap forms at least part of the exterior surface of the appliance.
3. An appliance according to claim 1, wherein the appliance is adapted for placement in a joinery structure or kitchen furniture.
4. An appliance according to claim 1, wherein the vent flap is tiltable between an open position and a closed position.
5. An appliance according to claim 1, further comprising an actuator for moving the vent flap between the closed position and the open position.
6. An appliance according to claim 1, further including a biasing element connected to the vent flap, for biasing the vent flap into the closed position.
7. An appliance according to claim 1, further comprising a controller for controlling the operation of the appliance.
8. An appliance according to claim 7, wherein the controller is connected to the actuator, in use the controller controlling the actuator in accordance with an operating cycle of the appliance.
9. An appliance according to claim 1, wherein the venting system includes a mixing chamber for mixing air from the chamber with external air, in order to control the moisture content of the air exiting the venting system.
10. An appliance according to claim 1, wherein the venting system includes a variable speed fan.
11. An appliance according to claim 10, wherein the variable speed fan is connected to the controller.
12. An appliance according to claim 1, wherein the door is slideable between open position and a closed position and the sealable chamber is coupled to the door and is slideable with the door.
13. An appliance according to claim 1, wherein the appliance is a dishwasher.
14. An appliance according to claim 13, wherein the vent flap is actuated in accordance with the washing cycle of the dishwasher.
15. An appliance according to claim 1, wherein the door is adapted to receive an exterior face panel coupled to the vent flap wherein the vent flap moves the exterior face panel.
16. A dishwasher comprising:
a sealable chamber;
a door for the sealable chamber, wherein in an opened position the door allows access to the chamber; and
a venting system for allowing air to escape from the sealable chamber when the door is in a closed position,
wherein the venting system includes a vent flap, the vent flap moveable from a closed position sealing the vent system to an open position allowing air to escape, wherein the vent flap forms part of the door and wherein in an open position the vent flap extends exteriorly of the door.
17. A dishwasher according to claim 16, wherein the dishwasher is a drawer type dishwasher.
18. A venting system for an appliance having a sealable chamber, wherein the venting system allows air to escape from a sealable chamber when the appliance is in a closed configuration, and
wherein the venting system includes a vent flap on an exterior surface of a door of the appliance, the vent flap moveable from a closed position sealing the vent system to an open position allowing air to escape, wherein in an open position the vent flap extends exteriorly of the door.
19. An appliance comprising:
a sealable chamber;
a door for the sealable chamber, wherein in an opened position the door allows access to the chamber, and
a venting system for allowing air to escape from the sealable chamber when the door is in a closed position;
wherein the venting system includes an exhaust duct and a vent flap, the vent flap moveable from a closed position in which the exhaust duct is obstructed to an open position in which the exhaust duct is unobstructed, and wherein the vent flap forms part of the door and extends exteriorly of the door when in an open position.
20. A method for venting an appliance, comprising the step of moving a vent flap from a closed position to an open position, wherein the vent flap extends exteriorly of the door of the appliance where in an open position, wherein the vent flap forms part of the exterior surface of a door of the appliance, wherein the vent flap extends exteriorly of the door of the appliance wherein in an open position, and wherein the door remains in a closed position.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A set of computer readable media containing computer instructions for operating a certificate proxy and installation system for providing a unified certificate request interface to a plurality of certificate authorities and for installing certificates to destination servers, the set of computer readable media comprising physical computer readable media upon which is stored the computer instructions executable by a computing system to perform a method comprising:
presenting a uniform interface for receiving information pertaining to the submission of an individual certificate signing request to the plurality of certificate authorities, said interface providing a uniform set of entries for information items required in a certificate signing request generally;
presenting a selectable object whereby a choice of one of the plurality of certificate authorities may be entered;
receiving entry items through the uniform interface and a selection of a certificate authority;
storing items of identification sufficient to identify a requesting entity to each of the plurality of certificate authorities;
communicating with a certificate authority interface of the selected certificate authority, the communicating presenting at least the received entry items required by the selected certificate authority, the communication it its totality presenting a certificate signing request to the selected certificate authority, the communication further presenting items of identification whereby a requesting entity may be associated to the certificate signing request;
receiving a certificate signed by a certificate authority generated from a certificate signing request by way of said network interface;
identifying a destination network server corresponding to a received certificate signed by a certificate authority;
determining a network server type, said network server types providing at least the type of server software installed to the identified destination network server; and
performing a set of installation steps, the performed set of installation steps applicable to the determined network server type, the performance of the set of installation steps including the transferring of the received certificate to the destination network server by way of said network interface.
2. A set of computer readable media according to claim 1, wherein said instructions are further executable to perform the steps of:
operating an SMTP service;
receiving an e-mail message by the SMTP service, the e-mail message containing a certificate signed by a certificate authority;
parsing an e-mail message containing a certificate signed by a certificate authority to extract that certificate for installation.
3. A set of computer readable media according to claim 1, wherein said instructions are further executable to perform the steps of:
upon receiving a certificate signed by a certificate authority, and optionally after identifying a destination network server, notifying a person that the received certificate is ready to be installed; and
prior to performing the set of installation steps, receiving an approval indication from a person indicating that a certificate is to be installed.
4. A set of computer readable media according to claim 1, wherein said performing a set of installation steps includes steps for automated controlling of a network interface provided by a web server.
5. A set of computer readable media according to claim 1, wherein said performing a set of installation steps includes steps for automated controlling of a shell interface.
6. A set of computer readable media according to claim 1, wherein said performing a set of installation steps includes steps for transmission and installation of a certificate through a server agent program.
7. A set of computer readable media according to claim 1, wherein said performing a set of installation steps includes steps for restarting a destination server program.
8. A set of computer readable media according to claim 1, wherein said performing a set of installation steps includes steps for restarting a destination server computer.
9. A set of computer readable media according to claim 1, wherein said performing a set of installation steps includes steps for notifying an administrator to restart a destination server program or destination server computer.
10. A set of computer readable media according to claim 1, wherein said instructions are further executable to confirm the installation of a received certificate to a destination server following the performance of a set of installation steps.
11. A set of computer readable media according to claim 10, wherein said instructions are further executable to generate an alert to an administrator if the installation of a received certificate to a destination server is not confirmed.