Author: claimsbot

1. A method for transmitting data, comprising:
automatically, for a period of time in which a broadband transmission path is available, activating the broadband transmission path and deactivating a previous transmission path; and
ascertaining, for a period of time in which a broadband transmission path is not available, a type of data to be transmitted, and ascertaining a transmission path suitable for the type of data, wherein individual transmission paths are successively used to ascertain the availability of a receiver, and wherein, upon a transmission path being found via which the receiver is available, data are transmitted via the found transmission path, and wherein, if the receiver is not available via any of the previously ascertained transmission paths, at least one new transmission path is ascertained and then the at least one new transmission path is used to ascertain the availability of the receiver.
2. The method as claimed in claim 1, wherein the type of data to be transmitted is taken as a basis for stipulating a priority list for the order of the transmissions.
3. The method as claimed in claim 1, wherein, when one transmission path fails, another transmission path is automatically activated.
4. The method as claimed in claim 1, wherein a number of transmission paths for which the availability of the receiver is successively ascertained is counted.
5. The method as claimed in claim 4, characterized wherein, when a prescribed number is reached, no further transmission attempt is made and an error message is sent.
6. (canceled)
7. The method as claimed in claim 1, wherein the method is for transmitting data between a rail vehicle and an operational control center.
8. The method as claimed in claim 2, wherein, when one transmission path fails, another transmission path is automatically activated.
9. The method as claimed in claim 2, wherein a number of transmission paths for which the availability of the receiver is successively ascertained is counted.
10. The method as claimed in claim 9, wherein, when a prescribed number is reached, no further transmission attempt is made and an error message is sent.
11. The method as claimed in claim 3, wherein a number of transmission paths for which the availability of the receiver is successively ascertained is counted.
12. The method as claimed in claim 11, wherein, when a prescribed number is reached, no further transmission attempt is made and an error message is sent.
13. A method for transmitting data in a system in which, for a period of time in which a broadband transmission path is available, the broadband transmission path is activated and, for a period of time in which a broadband transmission path is not available, a type of data to be transmitted is used to ascertain a suitable transmission path, the method comprising:
successively using individual transmission paths to ascertain the availability of a receiver;
transmitting data, upon a transmission path being ascertained via which the receiver is available, via the ascertained transmission path; and
ascertaining, upon the receiver not being available via any of the previously ascertained transmission paths, at least one new transmission path and then using the at least one new transmission path to ascertain the availability of the receiver.
14. The method as claimed in claim 13, wherein the type of data to be transmitted is taken as a basis for stipulating a priority list for the order of the transmissions.
15. The method as claimed in claim 13, wherein, when one transmission path fails, another transmission path is automatically activated.
16. The method as claimed in claim 13, wherein a number of transmission paths for which the availability of the receiver is successively ascertained is counted.
17. The method as claimed in claim 16, wherein, when a prescribed number is reached, no further transmission attempt is made and an error message is sent.
18. The method as claimed in claim 13, wherein the method is for transmitting data between a rail vehicle and an operational control center.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A method for fabricating an integrated circuit (IC), the method comprising:
providing a substrate having a conductive feature;
forming a dielectric layer having an opening over the substrate, wherein the opening aligns with the conductive feature and exposes at least a portion of the conductive feature;
forming a tungsten (W) capping layer over the conductive feature in the opening without using fluorine-containing gases; and
depositing a bulk W layer over the W capping layer.
2. The method of claim 1, wherein the W capping layer is formed by metal-organic chemical vapor deposition (MOCVD) with a W organic precursor.
3. The method of claim 1, wherein the W capping layer is formed by metal-organic chemical vapor deposition (MOCVD) with a W chloride precursor.
4. The method of claim 1, wherein the conductive feature includes a semiconductor material.
5. The method of claim 4, wherein prior to forming the W capping layer, a pre-silicide layer is formed over the conductive feature.
6. The method of claim 5, wherein the forming the pre-silicide layer includes depositing a titanium layer over the conductive feature in the opening.
7. The method of claim 6, wherein an anneal process is applied to the W capping layer and the conductive feature to form a silicide region in the conductive feature.
8. The method of claim 7, wherein the anneal process is applied after the forming the W capping layer.
9. The method of claim 7, wherein the anneal process is applied after the depositing the bulk W layer.
10. A method for fabricating an integrated circuit (IC), the method comprising:
providing a substrate having a conductive feature;
forming a dielectric layer having an opening over the substrate, wherein the opening aligns with the conductive feature and exposes at least a portion of the conductive feature;
depositing a pre-silicide metal layer over the conductive feature in the opening;
forming a non-fluorine-containing tungsten (W) capping layer over the pre-silicide metal layer in the opening;
depositing a bulk W layer over the W capping layer; and
after depositing the pre-silicide metal layer and the bulk W layer, annealing to form a silicide region in the conductive feature.
11. The method of claim 10, wherein the non-fluorine-containing W capping layer is formed by metal-organic chemical vapor deposition (MOCVD) with a W organic precursor.
12. The method of claim 10, wherein the non-fluorine-containing W capping layer is formed by MOCVD with metal-organic chemical vapor deposition (MOCVD) with a W chloride precursor.
13. The method of claim 10, wherein the forming the pre-silicide layer includes depositing a titanium layer over the conductive feature in the opening.
14. The method of claim 10, wherein the anneal process is applied after the forming the non-fluorine-containing W capping layer.
15. The method of claim 10, wherein the anneal process is applied after the depositing the bulk W layer.
16. An integrated circuit (IC), comprising:
a substrate;
a conductive feature over the substrate;
a dielectric layer over the substrate, having an opening to expose at least a portion of the conductive feature;
a tungsten (W) capping layer formed by metal-organic chemical vapor deposition (MOCVD), over the conductive feature in the opening, including covering sidewalls of the opening; and
a bulk W layer over the W capping layer and filling in the opening, wherein a composition of W capping layer includes:
more than fifty atomic percent (50%) of W;
more than one atomic percent (1%) of carbon;
more than one atomic percent (1%) of oxygen;
more than one atomic percent (1%) of nitrogen; and
more than one atomic percent (1%) of hydrogen.
17. An integrated circuit (IC) comprising:
a substrate;
a conductive feature over the substrate;
a dielectric layer over the substrate, having an opening to expose at least a portion of the conductive feature;
a tungsten (W) capping layer formed by metal-organic chemical vapor deposition (MOCVD), over the conductive feature in the opening, including covering sidewalls of the opening; and
a bulk W layer over the W capping layer and filling in the opening, wherein a composition of chloride in the W capping layer is more than one atomic percent (1%).
18. The IC of claim 17, further comprising:
a metal layer between the conductive feature and the W capping layer in the opening; and
a silicide region as a top portion of the conductive feature under the metal layer.
19. The IC of claim 18, wherein the metal layer includes one or more materials from the group consisting of titanium (Ti), nickel (Ni), cobalt (Co), iron (Fe), molybdenum (Mo), tantalum (Ta), zirconium (Zr), hafnium (Hf), niobium (Nb), platinum (Pt), iridium (Ir), palladium (Pd), rhodium (Rh), ruthenium (Ru), lanthanides and their mixing.
20. The IC of claim 16, further comprising a silicide feature disposed between the W capping layer and the conductive feature over the substrate.

What is claimed is:

1. An optical fabricating apparatus in which a photo-curing material, which is accommodated in a container and cured by being irradiated with light, is irradiated with light at an energy level necessary to cure the photo-curing material to thereby fabricate a structure, said apparatus comprising:
a light source section having a first light source which applies a first light to the photo-curing material, and a second light source which applies a second light, which causes a multiple photon absorption phenomenon, to the photo-curing material;
a light focusing section which focuses light so that light each energy of the first light and the second light becomes energy level necessary to cure the photo-curing material;
a changing section for changing a position in which light is focused by the light focusing section in the container; and
a control section which controls so as to effect
a preprocessing, in which light irradiation by the first light source and changing of a light focusing position are performed, so that a pre-shape, which is determined on the basis of a size of a structure of a predetermined shape to be fabricated, is fabricated, and thereafter,
a main processing, in which light irradiation by the second light source and changing of the light focusing position are performed, so that the predetermined shape is fabricated from the pre-shape.
2. The apparatus of claim 1, wherein the changing section comprises a scanning section for scanning two-dimensionally a position in which light from the light source section is focused, and a moving section for moving at least one of the light focusing position and a position of the photo-curing material in a direction intersecting a scan surface scanned by the scanning section.
3. The apparatus of claim 2, wherein the light source section comprises a switching section which effects switching between irradiation by the first light source and irradiation by the second light source to allow irradiation of light from one of the light sources.
4. The apparatus of claim 1, wherein the first light source emits light having a wavelength in an ultraviolet region.
5. The apparatus of claim 1, wherein the second light source includes a harmonic generating element and makes light emitted from the first light source into second light by which the multiple photon absorption phenomenon occurs.
6. The apparatus of claim 3, wherein the switching section is an exchanging section which exchanges a filter to one of a first optical filter which transmits light from the first light source, and a second optical filter which transmits light from the second light source.
7. An optical fabricating method in which a photo-curing material, which is accommodated in a container and cured by being irradiated with light, is irradiated with light at an energy level necessary to cure the photo-curing material to thereby fabricate a structure, said method comprising the steps of:
focusing light so that light energy of a first light applied to the photo-curing material and a second light applied to the photo-curing material and causing a multiple photon absorption phenomenon becomes an energy level necessary to cure the photo-curing material;
applying the first light so that a pre-shape, which is determined on the basis of a size of a structure of a predetermined shape to be fabricated, is fabricated, and thereafter, applying the second light so that the predetermined shape is fabricated from the pre-shape, with changing the light focusing position in the container, thereby fabricating the structure of the predetermined shape.
8. The method of claim 7, wherein the light focusing position is scanned in a two-dimensional manner and at least one of the light focusing position and a position of the photo-curing material is moved in a direction intersecting a scan surface, thereby allowing the light focusing position to change in the container.
9. The method of claim 7, wherein when the photo-curing material is irradiated with light, irradiation of one of the first light and the second light is carried out in an exchangeable manner.
10. The method of claim 7, wherein the first light is one having a wavelength in an ultraviolet region.
11. The method of claim 7, wherein the second light is one, by which the multiple photon absorption phenomenon occurs, generated from the first light by a harmonic generating phenomenon.
12. The method of claim 11, wherein when the photo-curing material is irradiated with light, one of a first optical filter which transmits the first light and a second optical filter which transmits the second light is used in an exchangeable manner.
13. An optical fabricating apparatus in which a photo-curing material, which is accommodated in a container and cured by being irradiated with light, is irradiated with light at an energy level necessary to cure the photo-curing material to thereby fabricate a structure, said apparatus comprising:
a light source section which applies light, which causes a multiple photon absorption phenomenon, to the photo-curing material;
a light focusing section which focuses light so that light energy from the light source section becomes an energy level necessary to cure the photo-curing material;
a holding section which can be immersed in the photo-curing material accommodated in the container and which holds a previously-fabricated article;
a changing section for changing a position at which light is focused by the light focusing section in the container; and
a control section which controls, in order to fabricate a structure of a predetermined shape to be fabricated, so that irradiation of light by the light source section near the article, and changing of the light focusing position are carried out.
14. The apparatus of claim 13, wherein the article is fabricated from one of a transparent material and a semi-transparent material.
15. An optical fabricating method in which a photo-curing material, which is accommodated in a container and cured by being irradiated with light, is irradiated with light at an energy level necessary to cure the photo-curing material to thereby fabricate a structure, said method comprising the steps of:
focusing light so that light energy of light applied to the photo-curing material and causing a multiple photon absorption phenomenon becomes an energy level necessary to cure the photo-curing material;
immersing a previously-fabricated article in the photo-curing material accommodated in the container;
changing a position in which light is focused in the container; and
in order to fabricate a structure of a predetermined shape to be fabricated, applying light, which causes the multiple photon absorption phenomenon, near the article, and changing the light focusing position in the container, thereby allowing fabrication of the structure of a predetermined shape.
16. The method of claim 15, wherein the article is fabricated from one of a transparent material and a semi-transparent material.
17. The apparatus of claim 1, wherein the pre-shape is fabricated based on a first block and smaller than the predetermined shape, and the predetermined shape is fabricated from the pre-shape based on a second block which is smaller than the first block.
18. The method of claim 7, wherein the pre-shape is fabricated based on a first block and smaller than the predetermined shape, and the predetermined shape is fabricated from the pre-shape based on a second block which is smaller than the first block.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A bridge apparatus mounted on a support structure and spanning between the support structure and a second structure, the bridge comprising a platform having an inboard end and an outboard end, wherein the inboard end of the platform is pivotally connected to the support structure, and wherein the outboard end of the platform is connected to the second structure, wherein the platform is supported by at least one line extending between the support structure and the platform, wherein the support structure has a capstan connected to the support structure and disposed above the platform, and wherein the at least one line extends from the platform to the capstan, and from the capstan to a counterweight, wherein at least a portion of the platform is moveable relative to the support structure in a vertical plane by movement of said at least one line, and wherein the capstan is motorised and pays out and recovers the line to raise and lower the platform toward and away from the second structure in a vertical plane around a pivot axis of the connection between the platform and the support structure.
2. The bridge apparatus as claimed in claim 1, wherein the bridge spans between the support structure at an inboard end of the platform and the second structure at an outboard end of the platform, wherein the inboard end of the platform is pivotally connected to the support structure, and wherein the line raises and lowers the platform toward and away from the second structure in a vertical plane around a pivot axis of the connection between the platform and the support structure.
3. The bridge apparatus as claimed in claim 1, wherein the counterweight balances less than a weight of the platform.
4. The bridge apparatus as claimed in claim 1, wherein the counterweight balances 90% of a weight of the platform.
5. The bridge apparatus as claimed in claim 1, wherein the bridge remains connected between the support structure and the second structure as the support structure and second structure move relative to one another during use of the bridge apparatus.
6. The bridge apparatus as claimed in claim 1, wherein an inboard end of the bridge apparatus is connected to the support structure and remains in generally the same vertical position in relation to the support structure, and wherein an outboard end of the bridge apparatus extends toward the second structure and remains in generally the same vertical position relative to the second structure, and wherein a relative vertical movement between the support structure and the second structure is compensated for by the movement of the bridge between the support structure and the second structure.
7. The bridge apparatus as claimed in claim 1, wherein the platform is pivotally connected to a vessel at a pivot connection, and can pivot around more than one axis of the pivot connection.
8. The bridge apparatus as claimed in claim 7, wherein the platform can pivot around vertical and horizontal pivot axes, allowing pivotal movement of the bridge in the horizontal and vertical planes around respective vertical and horizontal pivot axes.
9. The bridge apparatus as claimed in claim 1, wherein the capstan is provided on a pedestal, and wherein the counterweight is provided behind and below the pedestal.
10. The bridge apparatus as claimed in claim 1, comprising at least one sensor configured to sense a position of an outboard end of the platform and to maintain a position of the platform relative to a target on the second structure.
11. The bridge apparatus as claimed in claim 1, wherein the platform is connected between one moving and one fixed structure.
12. The bridge apparatus as claimed in claim 1, wherein the platform is connected to a water craft.
13. The bridge apparatus according to claim 1, wherein the movement of the platform is controlled by a control mechanism having an active mode in which force is applied to the platform to move the platform into a desired position in relation to the second structure, and a passive mode in which the platform is located in the desired position in relation to the second structure, wherein the force applied to the platform to move the platform in the passive mode is less than the force applied to the platform when the control mechanism is in the active mode.
14. The bridge apparatus as claimed in claim 13, wherein when the control system is in the passive mode, the movement of the platform is reactive to relative movement of the support structure and the second structure.
15. The bridge apparatus as claimed in claim 1, having an alarm system configured to sound an alarm when the movement of the platform extends beyond a defined parameter.
16. A bridge apparatus mounted on a support structure and configured to span a gap between the support structure and a second structure, the bridge apparatus comprising:
a platform supported by at least one line;
at least a portion of the platform being moveable in a vertical plane by movement of said at least one line; and
wherein the at least one line extends from the platform to a capstan disposed above the platform, and from the capstan to a counterweight, wherein the counterweight balances less than a weight of the platform, wherein the platform has an axis and is extendable along the axis such that it may extend and retract in length, and wherein the capstan is motorised and pays out and recovers the at least one line to drive the movement of the platform in the vertical plane.
17. A method of operating bridge apparatus, the bridge apparatus comprising:
a platform supported by at least one line extending from the platform to a motorised mechanism disposed above the platform and from the motorised mechanism to a counterweight, the platform being moveable in a vertical plane;
wherein the platform comprises an axis and is extendable along the axis, such that the platform may extend and retract in length; the method comprising:
moving the platform in the vertical plane between a first structure and a second structure, by action of the motorised mechanism in an active mode, the first and second structures being movable relative to one another;
adjusting the length of the platform along the axis;
allowing the platform to move passively relative to the second structure to accommodate relative movement between the first and second structures; and
wherein the motorised mechanism comprises a motorised capstan and wherein the method includes driving the movement of the platform in the active mode in the vertical plane by paying out and recovering the line with the motorised capstan.
18. A bridge apparatus mounted on a support structure and spanning between the support structure and a second structure, the bridge comprising:
a platform having an inboard end and an outboard end, wherein the inboard end of the platform is pivotally connected to the support structure, and wherein the outboard end of the platform is connected to the second structure, wherein the platform is supported by at least one line extending between the support structure and the platform, the platform being moveable in at least one dimension;
a capstan connected to the support structure and disposed above the platform, and wherein the at least one line extends from the platform to the capstan, and from the capstan to a counterweight, wherein the platform comprises an axis and is extendable along the axis such that the platform may extend and retract in length, wherein at least a portion of the platform is moveable relative to the support structure in a vertical plane by movement of said at least one line, and wherein the capstan is a motorised capstan and pays out and recovers the line to raise and lower the platform toward and away from the second structure in a vertical plane around a pivot axis of the connection between the platform and the support structure; and
the motorised capstan being operable in an active mode when moving the platform, and in a passive mode when power is reduced to the motorised capstan and it reacts more to movement caused in use than when in the active mode.