1. A semiconductor device, comprising:
a conductive well comprising a first conductive type impurity in a semiconductor substrate;
a device isolation film on one side of the conductive well; and
an insulating region below the device isolation film, including the first conductive type impurity and a second conductive type impurity.
2. The semiconductor device according to claim 1, wherein a concentration of the first conductive type impurity and a concentration of the second conductive impurity in the insulating region are substantially identical.
3. The semiconductor device according to claim 1, wherein the device isolation film includes a trench with a groove in and an inner side wall an insulating material to be filled in the inner side of the trench.
4. The semiconductor device according to claim 3, wherein the trench includes first side walls facing each other and second side walls angled from the first side walls.
5. The semiconductor device according to claim 4, wherein the trench includes a bottom surface, and a width of the bottom surface is greater than that of an opening of the trench.
6. The semiconductor device according to claim 1, wherein the device isolation film is over an entire vertical interface between the conductive well and the substrate, the substrate including a second conductive type impurity.
7. The semiconductor device according to claim 6, wherein the insulating region is entirely within a portion of the conductive well below device isolation film.
8. The semiconductor device according to claim 1, wherein the first conductive type impurity is an n type impurity.
9. The semiconductor device according to claim 8, wherein the second conductive type impurity is a p type impurity.
10. The semiconductor device according to claim 1, further comprising an NMOS transistor on the conductive well.
11. The semiconductor device according to claim 10, further comprising a PMOS transistor on the substrate in an active region adjacent to the device isolation.
12. The semiconductor device according to claim 11, wherein each of the NMOS transistor and the PMOS transistor comprises a gate electrode on a gate insulating layer, a spacer on a sidewall of the gate electrode, and n-type LDD regions and n+ type sourcedrain regions on opposite sides of the gate electrode.
13. A method of fabricating a semiconductor device comprising:
forming a trench in a semiconductor substrate;
forming an insulating region including a first conductive type impurity and a second conductive type impurity below the trench; and
filling the trench with an insulating material.
14. The method according to claim 13, wherein forming the trench includes:
forming a first trench by selectively etching the semiconductor substrate; and
forming a second trench which includes a lateral groove in the first trench by etching an inner surface of the first trench.
15. The method according to claim 14, wherein forming the second trench further includes:
forming a protective film on inner surfaces of the first trench;
removing a portion of the protective film; and
etching an exposed inner surface of the first trench using a remaining portion of the protective film as a mask.
16. The method according to claim 15, wherein the trench includes first side walls facing each other, second side walls angled away from the first side walls, and a bottom surface, the bottom surface having a width that is greater than that of an opening of the first trench.
17. The method according to claim 16, wherein etching the exposed inner surface of the first trench comprises wet etching.
18. The method according to claim 14, further comprising depositing a device isolation film in the trench.
19. The method according to claim 13, wherein forming the insulating region includes:
forming a conductive well by implanting the first conductive type impurity into the semiconductor substrate; and
forming the insulating region by implanting the second conductive impurity into a portion of the conductive well.
20. The method according to claim 19, wherein the second conductive type impurity has a concentration corresponding to or substantially equal to a concentration of the first conductive type impurity in the conductive well.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A voltage peak detector, comprising:
a first detector logic configured to detect a peak voltage of an input signal, the first detector logic having a circuit behavior that produces a leakage current that may alter the peak voltage;
a second detector logic configured to replicate the circuit behavior of the first detector logic including logic for detecting a replica peak voltage and being configured to produce a replica leakage current that is equivalent to the leakage current; and
the second detector logic being operably connected to the first detector logic to cause the replica leakage current to negate the leakage current.
2. The voltage peak detector of claim 1 where the second detector logic is identical to the flint detector logic.
3. The voltage peak detector of claim 1 further including a leak compensation circuit configured to operably connect the second detector logic to the first detector logic.
4. The voltage peak detector of claim 3 where the leak compensation circuit is a current minor.
5. The voltage peak detector of claim 1 where the first detector logic includes:
a capacitor configured to store the peak voltage of the input signal; and
a gate connected to the capacitor and being configured to control flow of the input signal to the capacitor where in an off state, the gate allows the leakage current to flow;
where the second detector logic includes:
a replica capacitor configured to store a replica peak voltage of a reference signal;
a replica gate connected to the replica capacitor and being configured to control flow of the reference signal to the replica capacitor, where in an off state, the replica gate allows the replica leakage current to flow that is identical to the leakage current; and
the replica leakage current being applied between the gate and the capacitor of the first detector logic to cancel effects of the leakage current.
6. The voltage peak detector of claim 5 where the gate and the replica gate are formed of one or more transistors.
7. The voltage peak detector of claim 1 where the first detector logic and the second detector logic are integrated circuits.
8. A system comprising:
a peak detector logic configured to detect a peak voltage of an input signal;
a replica peak detector logic configured to detect a replica peak voltage of a reference signal where the peak voltage and the replica peak voltage are substantially equal; and
a leak compensation logic configured to apply a replica leakage current from the replica peak detector logic to the peak detector logic that negates a leakage current from the peak detector logic to maintain the detected peak voltage at a desired peak value.
9. The system of claim 8 where the peak detector logic includes a storage device to store the peak voltage.
10. The system of claim 9 where the peak detector logic includes a gate connected to the storage device, the gate being configured to turn off when a desired peak voltage is stored in the storage device.
11. The system of claim 10 where the leak compensation logic is configured to apply the replica leakage current to a node between the gate and the storage device to negate the leakage current from the gate.
12. The system of claim 8 where the leak compensation logic is a current mirror circuit.
13. The system of claim 8 where the peak detector logic and the replica peak detector logic are equivalent circuits that are configured to produce an equivalent output voltage.
14. The system of claim 8 where:
the peak detector logic includes a means for detecting the peak voltage of the input signal;
the replica peak detector logic includes a means for detecting the replica peak voltage of the reference signal; and
the leak compensation logic includes a means for negating the leakage current.
15. The system of claim 8 where the system is embodied in an electronic device and operably connected to dynamically calibrate a clocking function.
16. The system of claim 15 where the electronic device includes a processor and where the system is operably connected to a clock that controls a receiving component of a point-to-point link.
17. The system of claim 8 where the system is processor chip.
18. A method of detecting a peak voltage, comprising:
detecting a first peak voltage of an input signal and producing a leakage current that may alter the peak voltage;
detecting a second peak voltage that replicates the detecting of the first peak voltage and producing a replica leakage current that is equivalent to the leakage current; and
negating the leakage current using the replica leakage current.
19. The method of claim 18 where the detecting the second peak voltage includes processing a second input signal having a desired peak voltage value.
20. The method of claim 18 where the method is implemented by a circuit and where:
the detecting the first peak voltage includes detecting with a first circuit having a circuit behavior that produces the leakage current after the peak voltage is detected; and
the detecting the second peak voltage includes detecting with a second circuit that replicates the circuit behavior of the first circuit including producing the replica leakage current that is used to negate the leakage current.
21. The method of claim 18 where the negating step is performed when the peak voltage is detected.
22. The method of claim 18 where the detecting includes storing the peak voltage in a capacitor.
23. The method of claim 18 further including calibrating a clocking function based on the peak voltage detected.
24. A computing system, comprising:
a processor configured to process executable instructions;
one or more memories configured to store at least the executable instructions;
one or more electronic components connected to each other with point-to-point links that communicate signals, the one or more electronic components including at least one receiver component configured to receive signals from a point-to-point link and being controlled by a clock;
a means for detecting a peak voltage of a voltage signal where the means for detecting the peak voltage may produce a leakage current that can affect the peak voltage, the means for detecting being configured for calibrating the clock using the peak voltage;
means for detecting a replica peak voltage that replicates the peak voltage;
a means for producing a replica leakage current from the means for detecting a replica peak voltage, the replica leakage current being equal to the leakage current; and
a means for negating the leakage current of the means for detecting the peak voltage with the replica leakage current so that the peak voltage is not affected by the leakage current.
25. A voltage detector system comprising:
a means for detecting a peak voltage of an input signal where a leakage current may be present; and
a means for replicating the means for detecting the peak voltage and for negating the leakage current using a replica leakage current that is equivalent to the leakage current.