Author: claimsbot

1. A method for operating a system having an engine with an emission control system, the emission control system including a lean NOx trap and a particulate filter, the method comprising:
after lean exhaust gas air-fuel ratio regeneration of the particulate filter at an elevated regeneration temperature, providing a rich or intermittently rich exhaust air-fuel ratio for a duration lasting until LNT temperature falls to a minimum threshold, where said rich or intermittently rich operation reactivates catalytic materials in the LNT and reverses deactivation caused by the elevated temperature lean operation associated with previous particulate filter regeneration.
2. The method of claim 1 where the rich or intermittently rich operation is provided in response to an engine shut-down during DPF regeneration.
3. The method of claim 1 where the particulate filter is coupled downstream of the lean NOx trap, the method further comprising routing exhaust gases from the lean NOx trap to the particulate filter.
4. The method of claim 3 where said rich or intermittently rich air-fuel ratio is adjusted based on particulate filter regeneration temperature.
5. The method of claim 3 where said rich or intermittently rich air-fuel ratio is adjusted based on a duration of particulate filter regeneration.
6. The method of claim 5 wherein the minimum threshold temperature is adjusted based on particulate filter regeneration temperature.
7. The method of claim 5 wherein the minimum threshold temperature is adjusted based on a duration of particulate filter regeneration.
8. The method of claim 1 further comprising regenerating the particulate filter by increasing exhaust gas temperature above a regeneration temperature.
9. The method of claim 1 further comprising ending the particulate filter regeneration by reducing exhaust gas temperature below a regeneration temperature.
10. The method of claim 1 where the catalytic material reactivated includes one or more of platinum group metals and one or more rare earth oxides.
11. A method for operating a system having an engine with an emission control system, the emission control system including a lean NOx trap and a particulate filter, the method comprising:
during a first operating mode, after lean exhaust gas air-fuel ratio regeneration of the particulate filter at an elevated regeneration temperature, providing a rich or intermittently rich exhaust air-fuel ratio for a duration lasting until LNT temperature falls to a minimum threshold, where said rich or intermittently rich operation reactivates catalytic materials in the LNT and reverses deactivation caused by the elevated temperature lean operation associated with previous particulate filter regeneration; and
during a second operating mode, after lean exhaust gas air-fuel ratio regeneration of the particulate filter at said elevated regeneration temperature, continuing lean operation based on operating conditions.
12. The method of claim 11 where the rich or intermittently rich operation is provided in response to an engine shut-down during DPF regeneration.
13. The method of claim 11 where the particulate filter is coupled downstream of the lean NOx trap, the method further comprising routing exhaust gases from the lean NOx trap to the particulate filter, and where selection between the first and second operating mode is based on temperature reached during the particulate filter regeneration and a duration of the particulate filter regeneration.
14. The method of claim 13 where said rich or intermittently rich air-fuel ratio is adjusted based on particulate filter regeneration temperature.
15. The method of claim 14 where said rich or intermittently rich air-fuel ratio is adjusted based on a duration of particulate filter regeneration.
16. The method of claim 15 wherein the minimum threshold temperature is adjusted based on particulate filter regeneration temperature.
17. The method of claim 16 wherein the minimum threshold temperature is adjusted based on a duration of particulate filter regeneration.
18. The method of claim 17 further comprising regenerating the particulate filter by increasing exhaust gas temperature above a regeneration temperature.
19. The method of claim 18 further comprising ending the particulate filter regeneration by reducing exhaust gas temperature below a regeneration temperature.
20. A system having an engine with an emission control system, comprising:
a lean NOx trap;
a particulate filter coupled downstream of the lean NOx trap,
a control system for:
during a first operating mode, after lean exhaust gas air-fuel ratio regeneration of the particulate filter at an elevated regeneration temperature, providing a rich or intermittently rich exhaust air-fuel ratio for a duration lasting until LNT temperature falls to a minimum threshold, where said rich or intermittently rich operation reactivates catalytic materials in the LNT and reverses deactivation caused by the elevated temperature lean operation associated with previous particulate filter regeneration;
during a second operating mode, after lean exhaust gas air-fuel ratio regeneration of the particulate filter at said elevated regeneration temperature, continuing lean operation based on operating conditions; and
selecting between the first and second operating mode based on temperature reached during the particulate filter regeneration and a duration of the particulate filter regeneration

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. An insulated structure comprising:
a backing surface;
a bar coupled to and extending generally parallel to said backing surface;
a plurality of insulating blankets coupled to said bar, each insulating blanket being folded about itself to form a crease;
a clip coupled to said bar, said clip being slidably yet releasably attachable to said bar at any of a plurality of locations substantially along the entire length of said bar; and
a plurality of rods, each rod being located in the crease of one of said insulating blankets, wherein said clip is directly releasably attachable to said bar and is not directly coupled to any of said rods.
2. An insulated structure comprising:
a backing surface;
a bar coupled to and extending generally parallel to said backing surface;
a plurality of insulating blankets coupled to said bar, each blanket having a pair of generally parallel major outer surfaces, each major outer surface being spaced apart from any other major outer surface of that blanket and being located on an outer periphery of the blanket; and
a clip coupled to said bar, said clip and said bar each being shaped or configured such that said clip and said bar can interact such that said clip is attachable to said bar at any of a plurality of locations along the length of said bar wherein said clip engages a major outer surface of a blanket and compresses said blanket along the direction of said bar.
3. An insulated structure comprising:
a backing surface;
a bar coupled to and extending generally parallel to said backing surface;
a plurality of insulating blankets coupled to said bar, each insulating blanket having a width, each blanket being folded about itself and having a pair of major outer surfaces and a pair of major inner surfaces, said major inner surfaces facing each other and being pressed together; and
a plurality of clips slidably coupled to said bar, said clip being attachable to said bar at any of a plurality of locations along the length of said bar such that said clip can slide along said bar a distance at least equal to said width of said blanket to compress an adjacent blanket along a direction of said bar to press said major inner surfaces together, wherein at least one insulating blanket is located between at least two clips, and wherein each clip engages and presses against a major outer surface of an installed blanket.
4. A method for assembling an insulated structure comprising the steps of:
providing a backing surface having a bar coupled thereto;
providing a plurality of insulating blankets, each insulating blanket having a width;
coupling said insulating blankets to said bar such that each blanket has an outer surface in its coupled position;
sliding a clip along said bar until said clip engages an outer surface of a blanket and compresses one of said insulating blankets; and
releasing said clip, wherein said clip and said bar cooperate to block said clip from significantly sliding along said bar.
5. The method of claim 4 wherein said sliding step includes sliding said clip until said clip engages said one of said insulating blankets.
6. The method of claim 4 further comprising the steps of, after said second providing step, folding each insulating blanket about itself and locating each insulating blanket such that the crease of each insulating blanket is located adjacent said backing surface.
7. The method of claim 6 further comprising the step of providing a plurality of rods and locating each rod in the fold of one of said insulating blankets.
8. The method of claim 6 wherein each rod extends generally parallel to said backing surface and generally perpendicular to each bar, and wherein each rod is located between said bar and said backing surface.
9. The method of claim 4 wherein coupling step includes impaling each blanket on said bar.

1. A power circuit for feeding a load current to a load in which said load current repeats periodically and alternates a burst flow in a burst period and a non-burst flow in a non-burst period comprising:
a power source section made up of a direct current power source having one terminal connected to a negative polarity;
a source power controlling section to control a current fed from a second terminal of said power source section connected to an input terminal to limit voltage drop in said power source section and to feed said current to a load connected to an output terminal; and
an energy storing section having a storage capacitor connected between said output terminal and a negative polarity;
wherein said source power controlling section is provided with a current controlling circuit to control a resistance value of a detecting resistor section, said detecting resistor section having one terminal connected to said negative polarity, according to a result of detection of a voltage input from said power source section, and a switching circuit which has a circuit part comprising a switching device connected between an input terminal and an output terminal of said source power controlling section and a capacitor connected between said output terminal of said source power controlling section and a negative polarity, and which controls a flowing period of an output current by exerting control on said switching device according to a control signal produced by detecting a change in an input power voltage using a voltage value occurring at another terminal of said detecting resistor; and
wherein a circuit constant of said source power controlling section, electrostatic capacity and internal resistance of said storage capacitor are determined by following equations:
T1+T2\u2266Tload
\u2003where \u201cT1+T2\u201d denotes a flowing period (Sec) of a power current and \u201cTload\u201d denotes a load period (Sec):
Vo2\u2267IC\xd7{Rc+(Tload\xd7Don)(C\xd7100)}=Vo3
\u2003where \u201cVo\u201d denotes a voltage (V) of said storage capacitor when there is no load current, \u201cIC\u201d denotes a current (A) of said storage capacitor, \u201cRc\u201d denotes an internal resistance (\u03a9) of said storage capacitor, \u201cDon\u201d denotes a duty ratio (%) of a load, \u201cC\u201d denotes a capacity (F) of a storage capacitor, and \u201cVo3\u201d denotes an amount of a voltage drop (V) of a storage capacitor voltage occurring during a burst period.
2. The power circuit according to claim 1, wherein said power source section comprises a secondary cell connected between an output terminal and said negative polarity and connected to a charging power source through a charging circuit, and a primary cell being connected to said negative polarity and to said output terminal through a charging preventing circuit used to prevent charging from said charging power source.
3. The power circuit according to claim 1, wherein said power source section comprises a secondary cell connected between an output of a charging circuit and said negative polarity and connected to an output terminal through a charging preventing switch, and a primary cell being connected between said output terminal and said negative polarity.
4. The power circuit according to claim 1, wherein said power source section comprises a fuel tank, a fuel cell to generate power using fuel fed from said fuel tank, and a direct current smoothing controlling section to stabilize a voltage output from said fuel cell and to feed it to an output terminal.
5. The power circuit according to claim 1, wherein said power source section comprises a current setting resistor to set a value of an output current, an operational amplifier to amplify a detected voltage of said current setting resistor, and a switching circuit to control a power current according to an output of said operational amplifier.
6. The power circuit according to claim 1, wherein a storage capacitor in said energy storing section comprises an electric double layer capacitor.
7. The power circuit according to claim 6, wherein said storage capacitor has a capacitor discharging circuit used to cause a charge of said storage capacitor to be shorted through a discharging resistor when a predetermined relationship, determined by comparing a terminal voltage of said storage capacitor with a power voltage, exists.
8. A power circuit for feeding a load current to a load in which said load current repeats periodically and alternately a burst flow in a burst period and a non-burst flow in a non-burst period comprising:
a power source section made up of a direct current power source having one terminal connected to a negative polarity;
a source power controlling section to control a current fed from a second terminal of said power source section being connected to an input terminal to limit voltage drop in said power source section and to feed said current to a load connected to an output terminal; and
an energy storing section having a storage capacitor connected between said output terminal and a negative polarity;
wherein said source power controlling section is provided with a current controlling circuit to control a resistance value of a detecting resistor section, said detecting resistor section having one terminal connected to said negative polarity, according to a result of detection of a voltage input from said power source section, and a switching circuit which has a step-up DC\u2014DC (direct current to direct current) converter circuit comprising a voltage detecting circuit to detect a voltage of an output terminal, a coil and diode connected in series between an input terminal and an output terminal of said source power controlling section, a capacitor connected between said output terminal of said source power controlling section and a negative polarity, and a switching device connected between a connection point of said coil and said diode and another terminal of said detecting resistor section, and which controls a flowing period of an output current by exerting control on said switching device according to a control signal produced by detecting a change in a current through said switching device using a voltage value at said other terminal of said detecting resistor section and a voltage at said output terminal; and
wherein a circuit constant of said source power controlling section, electrostatic capacity and internal resistance of said storage capacitor are determined by following equations:
T1+T2\u2266Tload
\u2003where \u201cT1+T2\u201d denotes a flowing period (Sec) of a power current and \u201cTload\u201d denotes a load period (Sec):
Vo2\u2267IC\xd7{Rc+(Tload\xd7Don)(C\xd7100)}=Vo3
\u2003where \u201cVo\u201d denotes a voltage (V) of said storage capacitor when there is no load current, \u201cIC\u201d denotes a current (A) of said storage capacitor, \u201cRc\u201d denotes an internal resistance (\u03a9) of said storage capacitor, \u201cDon\u201d denotes a duty ratio (%) of a load, \u201cC\u201d denotes a capacity (F) of a storage capacitor, and \u201cVo3\u201d denotes an amount of a voltage drop (V) of a storage capacitor voltage occurring during a burst period.
9. The power circuit according to claim 8, wherein said power source section comprises a secondary cell being connected between an output terminal and said negative polarity and being connected to a charging power source through a charging circuit, and of a primary cell being connected to said output terminal and said negative polarity through a charging preventing circuit used to prevent charging caused by an output from said charging power source.
10. The power circuit according to claim 8, wherein said power source section comprises a secondary cell being connected between an output of a charging circuit and said negative polarity and being connected to an output terminal through a charging preventing switch and of a primary cell being connected between said output terminal and said negative polarity.
11. The power circuit according to claim 8, wherein said power source section comprises a fuel tank, a fuel cell to generate power using fuel fed from said fuel tank, and a direct current smoothing controlling section to stabilize a voltage output from said fuel cell and to feed it to an output terminal.
12. The power circuit according to claim 8, wherein said power source section comprises a current setting resistor to set a value of an output current, an operational amplifier to amplify a detected voltage of said current setting resistor, and a switching circuit to control a power current according to an output of said operational amplifier.
13. The power circuit according to claim 8, wherein a storage capacitor in said energy storing section comprises an electric double layer capacitor.
14. The power circuit according to claim 13, wherein said storage capacitor has a capacitor discharging circuit used to cause a charge of said storage capacitor to be shorted through a discharging resistor when a predetermined relationship, determined by comparing a terminal voltage of said storage capacitor with a power voltage, exists.
15. A power circuit for feeding a load current to a load in which said load current repeats periodically and alternately a burst flow in a burst period and a non-burst flow in a non-burst period comprising:
a power source section made up of a direct current power source-having one terminal connected to a negative polarity;
a source power controlling section to control a current fed from a second terminal of said power source section connected to an input terminal to limit voltage drop in said power source section and to feed said current to a load connected to an output terminal;
an energy storing section having a storage capacitor connected between said output terminal and a negative polarity; and
wherein said source power controlling section is provided with a current controlling circuit to control a resistance value of a detecting resistor section, said detecting resistor section having one terminal connected to an input terminal of said source power controlling section, according to a result of detection of a voltage input from said power source section, and a switching circuit which has a step-down DC\u2014DC converter circuit comprising a voltage detecting circuit for detecting a voltage of an output terminal, a switching device and a coil connected in series between another terminal of said detecting resistor section and an output terminal, a capacitor connected between the output terminal and said negative polarity, and a diode connected between said negative polarity and a connection point between said switching device and said coil, and which controls a flowing period of an output current by exerting control on said switching device according to a control signal produced by detecting a change in an input current based on a voltage across said detecting resistor section, and a voltage at said output terminal; and
wherein a circuit constant of said source power controlling section, electrostatic capacity and internal resistance of said storage capacitor are determined by following equations:
T1+T2\u2266Tload
\u2003where \u201cT1+T2\u201d denotes a flowing period (Sec) of a power current and \u201cTload\u201d denotes a load period (Sec):
Vo2\u2267IC \xd7{Rc+(Tload\xd7Don)(C\xd7100)}=Vo3
\u2003where \u201cVo\u201d denotes a voltage (V) of said storage capacitor when there is no load current, \u201cIC\u201d denotes a current (A) of said storage capacitor, \u201cRc\u201d denotes an internal resistance (\u03a9) of said storage capacitor, \u201cDon\u201d denotes a duty ratio (%) of a load, \u201cC\u201d denotes a capacity (F) of a storage capacitor, and \u201cVo3\u201d denotes an amount of a voltage drop (V) of a storage capacitor voltage occurring during a burst period.
16. The power circuit according to claim 15, wherein said power source section comprises a secondary cell being connected between an output terminal and said negative polarity and being connected to a charging power source through a charging circuit, and of a primary cell being connected to said output terminal and said negative polarity through a charging preventing circuit used to prevent charging caused by an output from said charging power source.
17. The power circuit according to claim 15, wherein said power source section comprises a secondary cell being connected between an output of a charging circuit and said negative polarity and being connected to an output terminal through a charging preventing switch and of a primary cell being connected between said output terminal and said negative polarity.
18. The power circuit according to claim 15, wherein said power source section comprises a fuel tank, a fuel cell to generate power using fuel fed from said fuel tank, and a direct current smoothing controlling section to stabilize a voltage output from said fuel cell and to feed it to an output terminal.
19. The power circuit according to claim 15, wherein said power source section comprises a current setting resistor to set a value of an output current, an operational amplifier to amplify a detected voltage of said current setting resistor, and a switching circuit to control a power current according to an output of said operational amplifier.
20. The power circuit according to claim 15, wherein a storage capacitor in said energy storing section comprises an electric double layer capacitor.
21. The power circuit according to claim 20, wherein said storage capacitor has a capacitor discharging circuit used to cause a charge of said storage capacitor to be shorted through a discharging resistor when a predetermined relationship, determined by comparing a terminal voltage of said storage capacitor with a power voltage, exists.
22. A method for controlling a power circuit to feed a load current to a load, in which said load current repeats periodically and alternately a burst flow in a burst period and a non-burst flow in a non-burst period, which has a power source section made up of a direct current power source with one terminal connected to a negative polarity, a source power controlling section to control a current fed from said power source section, connected to an input terminal, and to feed said current to a load connected to an output terminal, and an energy storing section having a storage capacitor connected between said output terminal and a negative polarity, said method comprising:
a step of controlling a resistance value of a detecting resistor section, said detecting resistor section having one terminal connected to said negative polarity, according to a result of detection of a voltage input from said power source section; and
a step of controlling a flowing period of an output current by exerting control on a switching device in response to a control signal produced by detecting a change in an input power voltage using a voltage value occurring at another terminal of said detecting resistor section, wherein said switching device is connected between an input terminal and an output terminal and a capacitor is connected between said output terminal and a negative polarity; and
wherein a circuit constant of said source power controlling section, electrostatic capacity and internal resistance of said storage capacitor are determined by following equations:
T1+T2\u2266Tload
\u2003where \u201cT1+T2\u201d denotes a flowing period (Sec) of a power current and \u201cTload\u201d denotes a load period (Sec):
Vo2\u2267IC\xd7{Rc+(Tload\xd7Don)(C\xd7100)}=Vo3
where \u201cVo\u201d denotes a voltage (V) of said storage capacitor when there is no load current, \u201cIC\u201d denotes a current (A) of said storage capacitor, \u201cRc\u201d denotes an internal resistance (\u03a9) of said storage capacitor, \u201cDon\u201d denotes a duty ratio (%) of a load, \u201cC\u201d denotes a capacity (F) of a storage capacitor, and \u201cVo3\u201d denotes an amount of a voltage drop (V) of a storage capacitor voltage occurring during a burst period.
23. A method for controlling a power circuit to feed a load current to a load, in which said load current repeats periodically and alternately a burst flow in a burst period and a non-burst flow in a non-burst period, which has a power source section made up of a direct current power source having one terminal connected to a negative polarity, a source power controlling section to control a current fed from said power source section and connected to an input terminal of said source power controlling section, and to feed said current to a load connected to an output terminal of said source power controlling section, and an energy storing section having a storage capacitor connected between said output terminal and a negative polarity, said method comprising:
a step of controlling a resistance value of a detecting resistor section having one terminal connected to said negative polarity, according to a result of detection of a voltage input from said power source section; and
a step of controlling a flowing period of an output current by exerting control on a switching device according to a control signal produced by detecting a change in a current of said switching device using a voltage value at another terminal of said detecting resistor section, and a voltage at said output terminal in a step-up DC\u2014DC converter circuit comprising a coil and diode connected in series between an input terminal and an output terminal, a capacitor connected between said output terminal and a negative polarity, and a switching device connected between a connection point of said coil and said diode and said other terminal of said detecting resistor section; and
wherein a circuit constant of said source power controlling section, electrostatic capacity and internal resistance of said storage capacitor are determined by following equations:
T1+T2\u2266Tload
\u2003where \u201cT1+T2\u201d denotes a flowing period (Sec) of a power current and \u201cTload\u201d denotes a load period (Sec):
Vo2\u2267IC\xd7{Rc+(Tload\xd7Don)(C\xd7100)}=Vo3
\u2003where \u201cVo\u201d denotes a voltage (V) of said storage capacitor when there is no load current, \u201cIC\u201d denotes a current (A) of said storage capacitor, \u201cRc\u201d denotes an internal resistance (\u03a9) of said storage capacitor, \u201cDon\u201d denotes a duty ratio (%) of a load, \u201cC\u201d denotes a capacity (F) of a storage capacitor, and \u201cVo3\u201d denotes an amount of a voltage drop (V) of a storage capacitor voltage occurring during a burst period.
24. A method for controlling a power circuit to feed a load current to a load, in which said load current repeats periodically and alternately a burst flow in a burst period and a non-burst flow in a non-burst period, which has a power source section made up of a direct current power source having one terminal connected to a negative polarity, a source power controlling section to control a current fed from said power source section connected to an input terminal of said power controlling section, and to feed said current to a load connected to an output terminal of said power controlling section, and an energy storing section having a storage capacitor connected between said output terminal and said negative polarity, said method comprising:
a step of controlling a resistance value of a detecting resistor section having one terminal connected to an input terminal according to a result of detection of a voltage input from said power source section; and
a step of controlling a flowing period of an output current by exerting control on a switching device according to a control signal produced by detecting a change in an input current based on a voltage across said detecting resistor section, and a voltage at said output terminal of a step-down DC\u2014DC converter circuit comprising a switching device and a coil connected in series between another terminal of said detecting resistor and an output terminal, a capacitor connected between the output terminal and said negative polarity, and a diode connected between a connection point between said switching device and said coil and said negative polarity; and
wherein a circuit constant of said source power controlling section, electrostatic capacity and internal resistance of said storage capacitor are determined by following equations:
T1+T2\u2266Tload
\u2003where \u201cT1+T2\u201d denotes a flowing period (Sec) of a power current and \u201cTload\u201d denotes a load period (Sec):
Vo2\u2267IC\xd7{Rc+(Tload\xd7Don)(C\xd7100)}=Vo3
\u2003where \u201cVo\u201d denotes a voltage (V) of said storage capacitor when there is no load current, \u201cIC\u201d denotes a current (A) of said storage capacitor, \u201cRc\u201d denotes an internal resistance (\u03a9) of said storage capacitor, \u201cDon\u201d denotes a duty ratio (%) of a load, \u201cC\u201d denotes a capacity (F) of a storage capacitor, and \u201cVo3\u201d denotes an amount of a voltage drop (V) of a storage capacitor voltage occurring during a burst period.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A method of imprint lithography, comprising:
imprinting, via a patterned mask, a pattern into a resist layer on a substrate; and
overlaying a cladding layer over said imprinted resist layer,
wherein a portion of the cladding layer is used as a hard mask for a subsequent processing.
2. The method of claim 1, where said overlaying comprises spinning-on said cladding layer on top of said imprinted resist layer.
3. The method of claim 1, wherein said overlaying comprises depositing the cladding layer by evaporation.
4. The method of claim 1, wherein said overlaying comprises depositing the cladding layer by sputtering.
5. The method of claim 1, further comprising:
adjusting a thickness of the cladding layer via chemical mechanical polishing (CMP).
6. The method of claim 1, wherein said cladding layer comprises a planarizing cladding layer.
7. The method of claim 1, wherein a transfer of the imprinted pattern is performed in a plurality of etches,
wherein a first etch, which is selective to the cladding layer, partially etches the cladding layer to expose elevated portions of the imprint layer,
wherein said first etch comprises one of a reactive ion etch, sputter etch, plasma etch, wet chemical etch and a chemical downstream etch,
wherein a second etch, which is selective to the imprint layer and not selective to the cladding layer, etches the portions of the imprint layer that were exposed in the first etch to a substrate under said cladding layer, and
wherein said second etch comprises one of a reactive ion etch, sputter etch, plasma etch, a wet chemical etch and a chemical downstream etch.
8. The method of claim 7, wherein a third process modifies the substrate, said third process comprising a further processing comprising one of an etch, a deposit, and an implanting of a material.
9. The method of claim 1, wherein said imprint resist comprises a cross-linked organic acrylate, and wherein said cladding layer comprises a silated planarizing resist.
10. The method of claim 1, wherein the cladding layer is applied in a liquid form.
11. The method of claim 7, wherein said first etch comprises one of a reactive ion etch (ME) and an isotropic etch, thereby to etch the cladding layer to expose tops of imprinted features.
12. The method of claim 7, wherein said second etch comprises a deeper etch than said first etch.
13. The method of claim 1, further comprising:
supporting said patterned mask by a plurality of feet.
14. The method of claim 13, wherein said feet comprise support spacers placed on the mask surface in unpatterned regions thereof.
15. The method of claim 13, wherein said feet are placed by one of evaporating and sputtering a mechanically stable material through a mask, a thickness of the feet being within a range of about 3 to about 5 times a minimum feature size being printed.
16. An imprint lithography method, comprising:
placing a planarizing, cladding layer over an imprinted layer,
wherein a portion of said cladding layer is used as a hard mask for a subsequent processing.
17. The method of claim 16, wherein said imprinted layer is placed using
an imprint process wherein the imprint mask is mechanically supported with a plurality of feet.