1. A method for manufacturing a one-time electrically programmable read only memory, comprising the steps of:
providing a substrate;
forming a tunneling dielectric layer over the substrate;
forming a first conductive layer over the tunneling dielectric layer;
forming a first patterned mask layer over the first conductive layer;
removing a portion of the first conductive layer, the tunneling dielectric layer and the substrate using the first patterned mask layer as a mask and forming a device isolation structure therein;
removing a portion of the first patterned mask layer to expose a portion of the first conductive layer destined to form a floating gate;
forming a cap layer over the exposed first conductive layer;
removing the first patterned mask layer;
forming a second conductive layer over the substrate;
forming a second patterned mask layer over the second conductive layer;
removing a portion of the second conductive layer and the first conductive layer using the second patterned mask layer and the cap layer as a mask to form a word line and a floating gate;
removing the second patterned mask layer; and
forming doped regions in the substrate on both the outer sides of the word line and the floating gate and also between the word line and the floating gate.
2. The method of claim 1, wherein the step of forming the tunneling dielectric layer includes performing a thermal oxidation process.
3. The method of claim 1, wherein the step of forming the cap layer includes performing a thermal oxidation process.
4. The method of claim 1, wherein after removing the second patterned mask layer, further comprises a step of forming lightly doped regions in the substrate on both outer sides of the word line and the floating gate and also between the word line and the floating gate.
5. The method of claim 4, wherein after forming the lightly doped regions, further comprises a step of forming spacers on the sidewalls of both the word line and the floating gate.
6. The method of claim 5, wherein the step for forming the spacers comprises:
forming an insulating material layer over the substrate; and
performing an anisotropic etching process to remove a portion of the insulating material layer.
7. The method of claim 4, wherein before forming the lightly doped regions, further comprises a step of forming insulation layers on the sidewalls of both the word line and the floating gate.
8. The method of claim 7, wherein the step for forming the insulation layers includes performing a thermal oxidation process.
9. The method of claim 7, wherein the doped regions are p-type doped regions.
10. A method for manufacturing a one-time electrically programmable read only memory, comprising the steps of:
providing a substrate having a device isolation structure for defining an active region, wherein a tunneling dielectric layer, a first conductive layer and a first mask layer are formed in sequence thereon and the device isolation structure cuts the first conductive layer up to produce a linear strip;
patterning the first mask layer to expose a portion of the first conductive layer destined to formed a floating gate;
forming a cap layer over the exposed first conductive layer;
removing the first mask layer;
forming a second conductive layer over the substrate;
forming a second patterned mask layer over the second conductive layer;
removing a portion of the second conductive layer and the first conductive layer using the second patterned mask layer and the cap layer as a mask to form a word line and a floating gate;
removing the second patterned mask layer;
forming insulation layers on the sidewalls of the word line and the floating gate; and
forming doped regions in the substrate on both outer sides of the word line and the floating gate and also between the word line and the floating gate.
11. The method of claim 10, wherein the step of forming the tunneling dielectric layer includes performing a thermal oxidation process.
12. The method of claim 10, wherein the step of forming the cap layer includes performing a thermal oxidation process.
13. The method of claim 12, wherein after forming the insulation layers, further comprises a step of forming lightly doped regions in the substrate on both outer sides of the word line and the floating gate and also between the word line and the floating gate.
14. The method of claim 13, wherein after forming the lightly doped regions, further comprises a step of forming spacers on the sidewalls of both the word line and the floating gate.
15. The method of claim 14, wherein the step for forming the spacers comprises:
forming an insulating material layer over the substrate; and
performing an anisotropic etching process to remove a portion of the insulating material layer.
16. The method of claim 10, wherein the step for forming the insulation layers includes performing a thermal oxidation process.
17. The method of claim 10, wherein the doped regions are p-type doped regions.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An antenna for a vehicle comprising:
a substrate; and
a case configured to cover the substrate,
wherein one or more radiator is disposed on an outer surface of the case, and a power is fed to the radiator from the substrate.
2. The antenna of claim 1, wherein a first coupling side connected electrically to the radiator is formed on the outer surface of the case, and a second coupling side connected electrically to the substrate is formed on an inner surface of the case,
and wherein the power fed from the substrate is provided to the radiator through the coupling sides according to a coupling method.
3. The antenna of claim 1, wherein the radiator is formed on the outer surface of the case with spiral shape or zigzag shape.
4. The antenna of claim 1, further comprising:
a feeding member longitudinal-extended from the substrate in the direction to the case from the substrate; and
a connection member longitudinal-extended from an inner surface to the outer surface of the case, and connected electrically to the radiator,
wherein the connection member is electrically connected to the feeding member on the inner surface of the case.
5. The antenna of claim 1, further comprising:
a feeding member longitudinal-extended from the substrate in the direction to the case from the substrate,
wherein a hole is formed through the case, and the feeding member is electrically connected to the radiator through the hole.
6. The antenna of claim 1, wherein a hole is formed through the case and is filled with a metal member,
and wherein one end of the metal member is electrically connected to the radiator, and the other end of the metal member is electrically connected to a feeding member extended from the substrate.
7. An antenna for a vehicle comprising:
a case;
a first radiator disposed on an outer surface of the case; and
a second radiator disposed on the outer surface of the case and separated electrically from the first radiator.
8. The antenna of claim 7, wherein a first coupling side is formed on the outer surface of the case, and a second coupling side is formed on an inner surface of the case,
and wherein a power is fed to the first radiator through the coupling sides according to an electromagnetic coupling method.
9. The antenna of claim 8, further comprising:
a substrate; and
a feeding member longitudinal-extended from the substrate in the direction to the case from the substrate,
wherein the second radiator is directly connected to the feeding member through a hole of the case or is electrically connected to the feeding member through a connection member or a metal member.
10. The antenna of claim 7, wherein the first radiator is formed on the outer surface of the case with spiral shape or zigzag shape.