Author: claimsbot

1. A method for forming a replacement metal gate (RMG) of a semiconductor device, the method comprising:
providing a set of field effect transistors (FET) formed over a substrate, each of the set of FETs having a recess formed therein;
forming a high-k layer over the semiconductor device and within each recess;
forming a barrier layer over the high-k layer;
forming an organic dielectric layer (ODL) within each recess;
recessing the ODL to a desired height within each recess;
removing the high-k layer and the barrier layer from atop the semiconductor device selective to the ODL within each recess;
removing the ODL from within each recess;
selectively growing a work-function metal (WFM) within one of the recesses; and
forming a metal material within each recess.
2. The method according to claim 1, further comprising forming a second barrier layer within each recess after the WFM is selectively grown within the one of the recesses.
3. The method according to claim 1, wherein the high-k layer comprises hafnium oxide, and wherein the barrier layer comprises titanium nitride.
4. The method according to claim 1, further comprising forming a metal layer over the barrier layer.
5. The method according to claim 4, further comprising removing the metal layer from another one of the recesses after the ODL is removed from each of the recesses.
6. The method according to claim 4, the metal layer comprising a single element metal.
7. The method according to claim 5, the set of FETs comprising a p-channel FET and an n-channel FET, wherein the one of the recesses is formed within the n-channel FET, and wherein the another one of the recesses is formed in the p-channel FET.
8. The method according to claim 1, further comprising forming a set of spacers formed over the substrate, wherein each recess is formed between each of the set of spacers.
9. A method for selectively growing a work-function metal (WFM) within a replacement metal gate (RMG) of a semiconductor device, the method comprising:
providing a p-channel field effect transistor (p-FET) and an n-channel field effect transistor (n-FET) formed over a substrate, the p-FET and the n-FET each having a recess formed therein;
forming a high-k layer over the semiconductor device and within each recess;
forming a barrier layer over the high-k layer;
forming an organic dielectric layer (ODL) within each recess;
recessing the ODL to a desired height within each recess;
removing the high-k layer and the barrier layer from atop the semiconductor device selective to the ODL within each recess;
removing the ODL from within each recess; and
selectively growing a work-function metal (WFM) within one of the recesses.
10. The method according to claim 9, further comprising:
forming a second barrier layer within each recess after the WFM is selectively grown within the recess of the n-FET; and
forming a metal material within each recess.
11. The method according to claim 9, wherein the high-k layer comprises hafnium oxide, and wherein the barrier layer comprises titanium nitride.
12. The method according to claim 9, further comprising forming a metal layer over the barrier layer.
13. The method according to claim 12, further comprising removing the metal layer from the recess of the p-FET after the ODL is removed from within each recess.
14. The method according to claim 12, the metal layer comprising a single element metal.
15. The method according to claim 9, further comprising forming a set of spacers over the substrate, wherein each recess is formed between each of the set of spacers.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. An optically transparent, electrically conductive hybrid film consisting essentially of:
a carbon nanotube (CNT) network, and
a population of indium tin oxide particles distributed throughout the carbon nanotube network to provide a conductive transparent nanoscale hybrid film,
wherein the hybrid film has a surface resistance that is less than 106 Ohmsquare and the optical transparency of the hybrid film is greater than about 70%,
wherein the hybrid film is prepared by the process comprising
providing a first suspension of carbon nanotubes in a first solvent;
providing a second suspension of indium tin oxide particles in a second solvent;
applying the first suspension of carbon nanotubes to a substrate to form a carbon nanotube network;
applying the second suspension of indium tin oxide particles to the substrate; and
repeating said applying first suspension and said applying the second suspension to form a population of indium tin oxide particles distributed throughout the carbon nanotube network,
wherein the carbon nanotubes in the first suspension and the indium tin oxide particles in the second suspension carry opposite electrical charge.
2. The hybrid film of claim 1, wherein the carbon nanotubes are chemically derivatized.
3. The hybrid film of claim 1, wherein the indium tin oxide particles are pristine or chemically derivatized.
4. The hybrid film of claim 1, further comprising:
a coating of colloidal transparent conductive inorganic-disposed on the upper surface of the hybrid film, said colloidal transparent conductive nanoparticles having a particle size less than the indium tin oxide particles.
5. The hybrid film of claim 4, wherein the RMS surface roughness of the hybrid film is less than about 2 nm.
6. The hybrid film of claim 1, wherein the indium tin oxide particles have an aspect ratio of about 1 to about 5.
7. The hybrid film of claim 1, wherein the indium tin oxide particles are spherical, oblong, prismatic, ellipsoidal, rods, and irregularly shaped.
8. The hybrid film of claim 1, wherein the optical transparency of the hybrid film is between about 75-95% and the surface resistance of the hybrid film is about 10-2000 ohmssquare.
9. The hybrid film of claim 1, wherein the ratio of the amount of CNT:indium tin oxide particles range from about 10:90 to about 90:10 by weight.
10. The hybrid film of claim 1, wherein the thickness of the hybrid film range from about 2 nm to about 100 nm.
11. The hybrid film of claim 1, wherein the surface coverage of the hybrid film is greater than about 10%.
12. A hybrid film of claim 1, wherein the hybrid film further comprises a coating of the colloidal transparent conductive inorganic nanoparticles disposed on the upper surface of the hybrid film.
13. The hybrid film of claim 1, wherein the hybrid film has a surface resistance that is less than 2000 Ohmsquare.
14. The hybrid film of claim 1, wherein the indium tin oxide particles are in the size range of about 2 nm-100 nm.
15. The hybrid film of claim 1, wherein the carbon nanotubes are single walled carbon nanotubes.
16. A method of preparing a hybrid film, the method comprising:
providing a first suspension of carbon nanotubes in a first solvent;
providing a second suspension of indium tin oxide particles in a second solvent;
applying the first suspension of carbon nanotubes to a substrate to form a carbon nanotube network; and
applying the second suspension of indium tin oxide particles to the substrate
repeating said applying the first suspension and said applying the second suspension to form a population of indium tin oxide particles distributed throughout the carbon nanotube network,
wherein the carbon nanotubes in the first suspension and the indium tin oxide particles in the second suspension are oppositely charged; and
wherein the hybrid film has a surface resistance that is less than 106 Ohmsquare and the optical transparency of the hybrid film is greater than about 70%.
17. The method of claim 16, wherein the second suspension is applied after deposition of the first suspension.
18. The method of claim 16, further comprising applying a suspension of colloidal transparent conductive inorganic nanoparticles on the upper surface of the hybrid film, said colloidal transparent conductive nanoparticles having a particle size less than the indium tin oxide particles.
19. A method of preparing a hybrid film, the method comprising:
providing a first suspension of carbon nanotubes in a first solvent;
providing a second suspension of indium tin oxide particles in a second solvent;
providing a third suspension or solution of a binder material capable of attracting the carbon nanotubes and indium tin oxide particles;
applying the first suspension of carbon nanotubes to a substrate to form a carbon nanotube network; and
applying the second suspension of indium tin oxide particles;
applying the third suspension or solution of a binder material between said applying the first suspension of carbon nanotubes and said applying the second suspension of indium tin oxide particles;
repeating said applying the first suspension, said applying the second suspension, and said applying the third suspension to form a population of indium tin oxide particles distributed throughout the carbon nanotube network; and
rinsing away the binder material;
wherein the carbon nanotubes in the first suspension and the indium tin oxide particles in the second suspension carry the same electrical charge and the binder material in the third suspension or solution carry opposite electrical charge from the electrical charges of the carbon nanotubes in the first suspension and the indium tin oxide particles in the second suspension; and
wherein the hybrid film has a surface resistance that is less than 106 Ohmsquare and the optical transparency of the hybrid film is greater than about 70%.
20. The method of claim 19, further comprising applying a suspension of colloidal transparent conductive inorganic nanoparticles on the upper surface of the hybrid film, said colloidal transparent conductive nanoparticles having a particle size less than the indium tin oxide particles.
21. An optically transparent, electrically conductive hybrid film consisting essentially of:
a carbon nanotube (CNT) network, and
a population of indium tin oxide particles distributed throughout the carbon nanotube network to provide a conductive transparent nanoscale hybrid film,
wherein the hybrid film has a surface resistance that is less than 106 Ohmsquare and the optical transparency of the hybrid film is greater than about 70%,
wherein the hybrid film is prepared by the process comprising
providing a first suspension of carbon nanotubes in a first solvent;
providing a second suspension of indium tin oxide particles in a second solvent;
providing a third suspension or solution of a binder material capable of attracting the carbon nanotubes and the indium tin oxide particles;
applying the first suspension of carbon nanotubes to a substrate to form a carbon nanotube network; and
applying the second suspension of indium tin oxide particles,
applying the third suspension or solution of a binder material between said applying the first suspension of carbon nanotubes and said applying the second suspension of indium tin oxide particles;
repeating said applying the first suspension, said applying the second suspension, and said applying the third suspension to form a population of indium tin oxide particles distributed throughout the carbon nanotube network; and
rinsing away the binder material,
wherein the carbon nanotubes in the first suspension and -indium tin oxide particles in the second suspension carry the same electrical charge and the binder material in the third suspension or solution carry opposite electric charge from the electric charges of the carbon nanotubes in the first suspension and the indium tin oxide particles in the second suspension.
22. A hybrid film of claim 21, wherein the hybrid film further comprises a coating of the colloidal transparent conductive inorganic nanoparticles disposed on the upper surface of the hybrid film.
23. The hybrid film of claim 21, wherein the indium tin oxide particles are in the size range of about 2 nm-100 nm.
24. The hybrid film of claim 21, wherein the carbon nanotubes are single walled carbon nanotubes.
25. An optically transparent, electrically conductive hybrid film consisting essentially of:
a carbon nanotube (CNT) network, and
a population of indium tin oxide particles distributed throughout the carbon nanotube network to provide a conductive transparent nanoscale hybrid film,
wherein the optical transparency of the hybrid film is between about 75-95% and the surface resistance of the hybrid film is about 10-2000 ohmssquare;
wherein the hybrid film is prepared by the process comprising
providing a first suspension of carbon nanotubes in a first solvent;
providing a second suspension of indium tin oxide particles in a second solvent;
applying the first suspension of carbon nanotubes to a substrate to form a carbon nanotube network;
applying the second suspension of indium tin oxide particles; and
repeating said applying first suspension and said applying the second suspension to form a population of indium tin oxide particles distributed throughout the carbon nanotube network,
wherein the carbon nanotubes in the first suspension and indium tin oxide particles in the second suspension carry opposite electrical charge.
26. The hybrid film of claim 25, wherein the indium tin oxide particles have an aspect ratio of about 1 to about 5.
27. The hybrid film of claim 25, wherein the indium tin oxide particles are spherical, oblong, prismatic, ellipsoidal, rods, and irregularly shaped.

1. An olefin polymerization catalyst comprising:
(A) a solid catalyst component comprising magnesium, titanium, halogen and an electron-donating compound selected from ether compounds having at least two ether groups and that, under standard conditions, are capable of forming complexes with anhydrous magnesium chloride for less that 60 mmoles per 100 g of chloride and that they do not undergo substitution reactions with TiCl4, or they only do so for less than 50% in moles;
(B) an organic aluminum compound; and
(C) an alkoxyester compound represented by the general formula (I):
(R1O)i(R2O)j(R3O)kZCOOR4 (I)
in which each of R1, R2, R3 and R4 is, independently, an aliphatic hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, a polycyclic hydrocarbon group or a heterocyclic compound group, z is an aliphatic or alicyclic hydrocarbon group which may be substituted with an aromatic group or a polycyclic group, and i, j and k each are integers from 0 to 3 with the proviso that the sum of i, j and k is at least 1:
2. Catalyst according to claim 1 in which the solid catalyst component A comprises a titanium compound containing at least a Ti-halogen bond supported on a magnesium halide.
3. Catalyst according to claim 2 in which the Ti compound having at least one Ti-halogen bond is TiCl4,TiCl3 or Ti-haloalcoholates of formula Ti(OR)n-yXy where n is the valence of titanium, y is a number between 1 and n-1 X is halogen and R is a hydrocarbon radical having from 1 to 10 carbon atoms.
4. Catalyst according to claim 1 in which, in the solid catalyst component (A), the ether compounds having at least two ether groups belong to the class of the 1,3-diethers of formula (II)
4
where RI and RII are the same or different and are hydrogen or linear or branched C1-C18 hydrocarbon groups which can also form one or more cyclic structures; RIII groups, equal or different from each other, are hydrogen or C1-C18 hydrocarbon groups; RIV groups equal or different from each other, have the same meaning of RIII except that they cannot be hydrogen; each of RI to RIV groups can contain heteroatoms selected from halogens, N, O, S and Si.
5. Catalyst according to anyone of claims 1 in which in the solid catalyst component A the ether compounds having at least two ether groups belong to the class of cyclopolyenic 1,3-diether in which the carbon atom in position 2 belongs to a cyclic or polycyclic structure made up of 5, 6, or 7 carbon atoms, or of 5-n or 6-n carbon atoms, and respectively n nitrogen atoms and n heteroatoms selected from the group consisting of N, O, S and Si, where n is 1 or 2 and n is 1, 2 or 3, said structure containing two or three unsaturations (cyclopolyenic structure), and optionally being condensed with other cyclic structures, or substituted with one or more substitutes selected from the group consisting of linear or branched alkyl radicals: cycloalkyl, aryl, aralkyl, alkaryl radicals and halogens, or being condensed with other cyclic structures and substituted with one or more of the above mentioned substitutes selected that can also be bonded to the condensed cyclic structures; one or more of the above mentioned alkyl, cycloalkyl, aryl, aralkyl, or alkaryl radicals and the condensed cyclic structures optionally containing one or more heteroatoms as substitutes for carbon or hydrogen atoms, or both.
6. Catalyst according to claim 5 in which cyclopolyenic 1,3-diether belong to the formula (III):
5
where the R groups, equal or different, are hydrogen, halogens preferably Cl and F; C1-C20 alkyl groups, linear or branched, C3-C20 cycloalkyl, C6-C20 aryl, C7-C20 alkylaryl or C7-C20 aralkyl groups, optionally containing one or more heteroatoms selected from the group consisting of N, O, S, P, Si and halogens, in particular Cl and F, as substitutes for carbon or hydrogen atoms, or both; the groups RI, same or different to each other, are selected from the group consisting of hydrogen, halogens preferably Cl and F, C1-C20 alkyl groups, linear or branched; C3-C20 cycloalkyl, C6-C20 aryl, C7-C20 alkaryl and C7-C20 aralkyl groups, the RII groups, same or different to each other, are selected from the group consisting of C1-C20 alkyl groups, linear or branched; C3-C20 cycloalkyl, C6-C20 aryl, C7-C20 alkaryl and C7-C20 aralkyl groups.
7. Catalyst according to claim 6 in which the diether is 9,9-bis (methoxymethyl)-fluorene.
8. Catalyst according to claim 1 in which the aluminum alkyl cocatalyst (B) belong to those of formula (IV):
AlR5R6R7 (IV)
in which R5, R6 and R7 may be the same or different and each represents a hydrocarbon group having 12 or less carbon atoms, a halogen atom or a hydrogen atom, provided that at least one of R5, R6 and R7 is a hydrocarbon group.
9. Catalyst according to claim 8 in which the aluminum alkyl is a trialkyl aluminum.
10. Catalyst according to claim 1 in which the alkoxyester (C) belong to the formula (V)
6
in which each of R14 and R16 independently represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms; each of R13 and R15 independently represents a hydrogen atom or an aliphatic hydrocarbon group having 1 to 20 carbon atoms and Y represents a divalent linear hydrocarbon group having 1 to 4 carbon atoms, which is substituted with an aliphatic hydrocarbon group, an aromatic hydrocarbon group or a polycylic hydrocarbon group, or an alicyclic hydrocarbon group having 6 to 12 carbon atoms.
11. Catalyst according to claim 10 in which the alkoxyester has a bulky substituting group with at least 3 carbon atoms at the second or third position counted from the carboxyl group, and Y represents a linear hydrocarbon group.
12. Catalyst according to claim 10 in which the alkoxyester has 4- to 8-membered cycloalkane at the second or third position counted from the carboxyl group
13. Catalyst according to claim 1 or 10 in which the alkoxyester is 3-ethoxy-2-tert-butyl-ethylpropionate, 3-ethoxy-ethylpropionate, 3-ethoxy-2-iso-propylethylpropionate, 3-ethoxy-2-phenyl-ethylpropionate, 3-methoxy-2-tert-butyl-ethylpropionate, 4-ethoxy-ethylbutyrate, or 4-ethoxy-ethyl-cyclohexanecarboxynate.
14. Process for the polynerization of olefins of formula CH2CHR, in which R is hydrogen or a hydrocarbyl radical with 1-12 carbon atoms, carried out in the presence of a catalyst comprising:
(A) a solid catalyst component comprising magnesium, titanium, halogen and an electron-donating compound selected from ether compounds having at least two ether groups and that that, under standard conditions, are capable of forming complexes with anhydrous magnesium chloride for less that 60 mmoles per 100 g of chloride and that they do not undergo substitution reactions with TiCl4, or they only do so for less than 50% in moles;
(D) an organic aluminum compound; and
(E) an alkoxyester compound represented by the general formula (I):
(R1O)i(R2O)j(R3O)kZCOOR4 (I)
in which each of R1, R2, R3 and R4 independently represents a group selected from the group consisting of an aliphatic hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, a polycyclic hydrocarbon group and a heterocyclic compound group, Z represents an aliphatic or alicyclic hydrocarbon group which may be substituted with an aromatic group or a polycyclic group, and i, j and k each are integers from 0 to 3 with the proviso that the sum of i, j and k is at least 1.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. An apparatus for implementation of a panoptic visualization document database system, the apparatus comprising a processor and a memory storing executable instructions that in response to execution by the processor cause the apparatus to implement at least:
a database management system engine configured to manage a database having stored therein a panoptic visualization document collection of a plurality of document components that are groupings of media content of one or more electronic documents between basic breaking points, each document component including respective media content, and having associated metadata providing structured information about the document component, the document components and metadata being stored in respective records of the database, the document components being stored as strings in the form of binary large objects;
a data manipulation subsystem coupled to the database management system engine and including a query language engine configured to receive a request for the respective records of a subset of the document components and associated metadata from the database, wherein the database management system engine is configured to execute the request, including being configured to retrieve the requested, respective records from the database; and
a layout engine of the query language engine or coupled to the query language engine, the layout engine being configured to generate a layout of panoptically-arranged images of document components including the subset of the document components stored in the retrieved, respective records according to a layout model, and the retrieved, respective records of the subset of the document components and associated metadata, the images of document components including images of the respective media content thereof,
wherein the query language engine is configured to communicate the layout and retrieved, respective records of the associated metadata.
2. The apparatus of claim 1, wherein the layout engine is configured to select the layout model from a plurality of layout models, the layout model being selected according to the retrieved, respective records of the associated metadata.
3. The apparatus of claim 1, wherein the associated metadata for the subset of the document components provides structured information about a type of the one or more electronic documents of the panoptic visualization document collection, the layout engine being configured to select the layout model according to the type of the one or more electronic documents.
4. The apparatus of claim 1, wherein the associated metadata for the subset of the document components provides structured information about the media content of the subset of the document components, the layout engine being configured to select the layout model according to the media content of the subset of the document components.
5. The apparatus of claim 1, wherein the associated metadata for each document component of the subset of the document components provides structured information specifying one or more of a size, location or depth of the image of the document component in the layout, and
wherein for each document component of the subset of the document components, the layout engine is configured to generate the layout according to the one or more of the size, location or depth specified by the structured information provided in the associated metadata.
6. The apparatus of claim 5, wherein for each document component of one or more document components of the subset of the document components, the one or more of the size, location or depth is specified relative to one or more others of the subset of the document components.
7. The apparatus of Claim 1, wherein the query language engine is configured to communicate the layout and retrieved, respective records of the associated metadata to a graphical user interface for simultaneous display of the layout and retrieved, respective records thereby.
8. A method comprising:
managing a database having stored therein a panoptic visualization document collection of a plurality of document components that are groupings of media content of one or more electronic documents between basic breaking points, each document component including respective media content, and having associated metadata providing structured information about the document component, the document components and metadata being stored in respective records of the database, the document components being stored as strings in the form of binary large objects;
receiving a request for the respective records of a subset of document components and associated metadata from the database, and executing the request, including retrieving the requested, respective records from the database;
generating a layout of panoptically-arranged images of document components including the subset of the document components stored in the retrieved, respective records according to a layout model, and the retrieved, respective records of the subset of the document components and associated metadata, the images of document components including images of the respective media content thereof; and
communicating the layout and retrieved, respective records of the associated metadata.
9. The method of claim 8 further comprising selecting the layout model from a plurality of layout models, the layout model being selected according to the retrieved, respective records of the associated metadata.
10. The method of claim 8, wherein the associated metadata for the subset of the document components provides structured information about a type of the one or more electronic documents of the panoptic visualization document collection, the layout model being selected according to the type of the one or more electronic documents.
11. The method of claim 8, wherein the associated metadata for the subset of the document components provides structured information about the media content of the subset of the document components, the layout model being selected according to the media content of the subset of the document components.
12. The method of claim 8, wherein the associated metadata for each document component of the subset of the document components provides structured information specifying one or more of a size, location or depth of the image of the document component in the layout, and
wherein for each document component of the subset of the document components, the layout is generated according to the one or more of the size, location or depth specified by the structured information provided in the associated metadata.
13. The method of claim 12, wherein for each document component of one or more document components of the subset of the document components, the one or more of the size, location or depth is specified relative to one or more others of the subset of the document components.
14. The method of claim 1, wherein the layout and retrieved, respective records of the associated metadata are communicated to a graphical user interface for simultaneous display of the layout and retrieved, respective records thereby.
15. A computer-readable storage medium that is non-transitory and has computer-readable program code portions stored therein that, in response to execution by a processor, cause an apparatus to at least:
manage a database having stored therein a panoptic visualization document collection of a plurality of document components that are groupings of media content of one or more electronic documents between basic breaking points, each document component including respective media content, and having associated metadata providing structured information about the document component, the document components and metadata being stored in respective records of the database, the document components being stored as strings in the form of binary large objects;
receive a request for the respective records of a subset of the document components and associated metadata from the database, and execute the request, including the apparatus being caused to retrieve the requested, respective records from the database;
generate a layout of panoptically-arranged images of document components including the subset of the document components stored in the retrieved, respective records according to a layout model, and the retrieved, respective records of the subset of the document components and associated metadata, the images of document components including images of the respective media content thereof; and
communicate the layout and retrieved, respective records of the associated metadata.
16. The computer-readable storage medium of claim 15, wherein the computer-readable storage medium has further computer-readable program code portions stored therein that, in response to execution by the processor, cause the apparatus to further select the layout model from a plurality of layout models, the layout model being selected according to the retrieved, respective records of the associated metadata.
17. The computer-readable storage medium of claim 15, wherein the associated metadata for the subset of the document components provides structured information about a type of the one or more electronic documents of the panoptic visualization document collection, the layout model being selected according to the type of the one or more electronic documents.
18. The computer-readable storage medium of claim 15, wherein the associated metadata for the subset of the document components provides structured information about the media content of the subset of the document components, the layout model being selected according to the media content of the subset of the document components.
19. The computer-readable storage medium of claim 15, wherein the associated metadata for each document component of the subset of the document components provides structured information specifying one or more of a size, location or depth of the image of the document component in the layout, and
wherein for each document component of the subset of the document components, the apparatus being caused to generate the layout includes being caused to generate the layout according to the one or more of the size, location or depth specified by the structured information provided in the associated metadata.
20. The computer-readable storage medium of claim 19, wherein for each document components of one or more document components of the subset of the document components, the one or more of the size, location or depth is specified relative to one or more others of the subset of the document components.
21. The computer-readable storage medium of claim 15, wherein the apparatus is caused to communicate the layout and retrieved, respective records of the associated metadata to a graphical user interface for simultaneous display of the layout and retrieved, respective records thereby.
22. The apparatus of claim 1, wherein the document components of the layout include an identified document component and one or more other document components identified according to the associated metadata of the identified document component, and
wherein the associated metadata of the identified document component includes information identifying one or more links between the identified document component and respective one or more other document components, and including a unique identifier for each of the respective one or more other document components.