All The Claims

1. In a metering environment configured with devices for executing computer-executable instructions, a method of securely accessing a meter from a mobile meter reader, the method comprising:
issuing a request for authorization to access the meter, the request for authorization being issued from the mobile meter reader to a host computing system;
if the mobile meter reader maintains sufficient rights to access the meter, receiving an authorization from the host computing system having a digital signature that uniquely identifies an authorized entity, the digital signature being provided without distributing a private key used for encoding the digital signature to the mobile meter reader; and
formulating and transmitting an authorization command to the meter from the mobile meter reader, wherein the authorization command includes the digital signature received from the host computing system.
2. The method as recited in claim 1, further comprising decoding the digital signature at the meter, determining whether the digital signature is authentic, and if the digital signature is authentic establishing a secure session between the meter and the mobile meter reader.
3. The method as recited in claim 2, wherein encrypted data is transmitted between the meter and mobile meter reader during the secure session.
4. The method as recited in claim 1, wherein the authorization command is formulated to leverage a public key on the meter used for authenticating communications performed over a fixed network to decode the digital signature.
5. The method as recited in claim 1, wherein issuing a request for authorization to access the meter from the mobile meter reader includes identifying a unique identifier associated with the meter that is scheduled to be accessed from the mobile meter reader.
6. The method as recited in claim 1, wherein the request for authorization is issued to the host computing system dynamically over an IP-based network connection.
7. The method as recited in claim 1, wherein the request for authorization is issued to the host computing system as a batch process that identifies multiple meters scheduled to be accessed.
8. The method as recited in claim 1, wherein the authorization to access the meter provided by the host computing system is configured to terminate after a pre-determined period of time.
9. The method as recited in claim 1, wherein the authorization provided by the host computing system is configured with an access level that defines which procedures on the meter that may be activated by the mobile meter reader.
10. A system to prevent an unauthorized entity from tampering with a meter, the system comprising:
at least one host computing device configured to receive a request for authorization to access the meter from a mobile meter reader and provide a digital signature to the mobile meter reader that uniquely identifies an authorized entity if the mobile meter reader has sufficient rights to access the meter;
a mobile meter reader operative to request authorization to access the meter, receive a digital signature generated by the host computing device, and formulate an authorization command for transmission to the meter to activate a secure procedure of the meter;
a meter configured to decode the digital signature and allow activation of the secure procedure if the digital signature is authentic; and
wherein activation of the secure procedure occurs without providing the mobile meter reader with access to a private key that is used to encode the digital signature.
11. The system as recited in claim 10, wherein the host computing device maintains a centralized data store for tracking which meters may be accessed by the mobile meter reader.
12. The system as recited in claim 10, wherein an access level is defined in the authorization provided by the host computer system and wherein the meter is further configured to determine whether the mobile meter reader has sufficient access rights to activate the secure procedure.
13. The system as recited in claim 10, wherein the authentication command includes a time stamp and wherein the meter is further configured to compare the time stamp provided by the mobile meter reader with a predetermined time window to determine whether the digital signature generated by the host computing system expired.
14. The system as recited in claim 10, wherein the authentication command formulated by the mobile meter reader includes a meter serial number and the meter is further configured to compare an actual serial number with the serial number provided by the mobile meter reader.
15. A mobile meter reader configured to exchange secure communications with a meter, comprising:
a processor;
an interface for communicating data between the mobile meter reader and a host computing system;
a radio-based communication device for communicating data between the mobile meter reader and a meter;
a computer-readable media having computer-executable instructions that, when executed by the processor, cause the mobile meter reader to:
request and receive authorization from the host computing system to access the meter;
formulate an authorization command for transmission to the meter having a digital signature encoded at the host computing system; and

establish a secure session with the meter, wherein a key used by the mobile meter reader to encode data during the secure session is separate from a private key used at the host computing system to encode the digital signature.
16. The mobile meter reader as recited in claim 15, wherein the authentication command formulated by the mobile meter reader is configured to leverage the asymmetric public key used for decoding communications received by the meter over a fixed network to decode the digital signature.
17. The mobile meter reader as recited in claim 15, wherein the digital signature for accessing the meter is obtained dynamically over an IP-based network in response to interacting with the meter in the field.
18. The mobile meter reader as recited in claim 15, wherein the digital signature for accessing the meter is obtained as a batch process that identifies multiple meters scheduled to be accessed.
19. The mobile meter reader as recited in claim 15, wherein to formulate the authorization command includes satisfying a password-protected login procedure with the meter.
20. The mobile meter reader as recited in claim 15, wherein the authorization command includes at least a current time stamp, an authorization level, and a unique identifier associated with the meter being accessed.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A manufacturing method of a semiconductor device comprising the steps of:
forming a first insulating film over a semiconductor substrate;
forming a first conductive film, a dielectric film, and a second conductive film in order on the first insulating film;
forming an upper electrode of a capacitor by patterning the second conductive film;
patterning the dielectric film to leave under the upper electrode;
forming a lower electrode of the capacitor by patterning the first conductive film;
covering the capacitor and the first insulating film with a second insulating film;
annealing at least one of the first insulating film and the second insulating film in an inert-gas atmosphere; and
exposing at least one of the first insulating film and the second insulating film, which is annealed, to an N2O plasma.
2. A manufacturing method of a semiconductor device according to claim 1, wherein the inert-gas atmosphere is an N2 atmosphere.
3. A manufacturing method of a semiconductor device according to claim 1, wherein an annealing temperature in annealing at least one of the first insulating film and the second insulating film in the inert-gas atmosphere is set in a range of 500 to 700\xb0 C.
4. A manufacturing method of a semiconductor device according to claim 1, wherein a pressure in the inert-gas atmosphere is an atmospheric pressure.
5. A manufacturing method of a semiconductor device according to claim 1, wherein the inert-gas atmosphere is formed in a furnace.
6. A manufacturing method of a semiconductor device according to claim 1, further comprising the step of:
planarizing at least one surface of the first insulating film and the second insulating film before annealing is executed in the inert-gas atmosphere.
7. A manufacturing method of a semiconductor device according to claim 6, wherein the surface is planarized by a chemical mechanical polishing method.
8. A manufacturing method of a semiconductor device according to claim 1, wherein an N2 plasma is contained in the N2O plasma.
9. A manufacturing method of a semiconductor device according to claim 1, wherein the semiconductor substrate is heated at 350 to 400\xb0 C. in exposing at least one of the first insulating film and the second insulating film to the N2O plasma.
10. A manufacturing method of a semiconductor device according to claim 1, wherein a pressure of the atmosphere in which the N2O plasma is generated is set in a range of 1 to 5 Torr.
11. A manufacturing method of a semiconductor device according to claim 1, wherein the dielectric film is a film that contains lead zirconate titanate or Bi-layered structure compound.
12. A manufacturing method of a semiconductor device according to claim 1, wherein a titanium film or a titanium oxide film is formed between the lower electrode and the first insulating film.
13. A manufacturing method of a semiconductor device according to claim 1, further comprising the step of:
forming a capacitor protection insulating film to cover the capacitor before the second insulating film is formed.
14. A manufacturing method of a semiconductor device according to claim 13, wherein the capacitor protection insulating film is formed of any one of a lead zirconate titanate film, an alumina film, and a titanium oxide film.
15. A manufacturing method of a semiconductor device according to claim 1, wherein a transistor that is covered with the first insulating film is formed on the semiconductor substrate.

1. An external system to detect an implanted lead coupled to an implanted neurostimulation device (INSD), the system comprising:
a handheld probe having electrodes configured to be positioned external to a surface of a patient and proximate to a region of the patient having the implanted lead for an INSD, the electrodes configured to measure a stimulation output from the implanted lead of the INSD, and the electrodes including first and second electrode inputs closely spaced proximate to one another to be moved along skin of the patient while locating the lead;
a controller coupled to the electrodes to receive measured signals from the electrodes, the measured signals representative of the stimulation output of the INSD, the controller processing the measured signals to obtain lead information;
an amplifier that compares the measured signals to obtain a difference signal, the difference signal increasing as the electrodes move closer to a source of the stimulation output; and
a user interface to present the lead information to a user, the lead information indicative of at least one of an operation of the lead and a position of the lead.
2. The system of claim 1, wherein the lead information includes at least one of discharge mode, pulse width and frequency for the stimulation output of the INSD.
3. The system of claim 2, wherein the lead information includes at least one a presence, signal strength, duration and shape for the stimulation output of the INSD.
4. The system of claim 3, wherein the lead information includes at least one electrical occurrence of, and electrical anomalies in, the stimulation output of the INSD.
5. The system of claim 4, wherein the lead information includes at least one of i) information to locate the lead in the patient and ii) information to identify improper operation of the lead.
6. A method to detect an implanted lead of an implanted neurostimulation device (INSD), the method comprising:
positioning a handheld probe having electrodes external to a surface of a patient and proximate to a region of the patient having the implanted lead for an INSD;
configuring the electrodes to measure a stimulation output from the implanted lead of the INSD;
receiving measured signals from the electrodes, the measured signals representative of the stimulation output of the INSD;
processing the measured signals to obtain INSD lead information, the processing step at least including comparing the measured signals with an amplifier to obtain a difference signal, the difference signal increasing as the electrodes move closer to a source of the stimulation output; and
presenting the lead information to a user, the lead information indicative of at least one of an operation of the lead and a position of the lead.
7. The method of claim 6, wherein the lead information includes at least one of discharge mode, pulse width and frequency for the stimulation output of the INSD.
8. The method of claim 6, wherein the lead information includes at least one a presence, signal strength, duration and shape for the stimulation output of the INSD.
9. The method of claim 6, wherein the lead information includes at least one electrical occurrence of, and electrical anomalies in, the stimulation output of the INSD.
10. The method of claim 6, wherein the lead information includes at least one of i) information to locate the lead in the patient and ii) information to identify improper operation of the lead.
11. The method of claim 6, wherein the presenting operation includes displaying to the user a graphical representation of the measured stimulation output including a pulse sequence having at least one pulse void therein corresponding to a location in the pulse sequence associated with a failed electrode.
12. The method of claim 6, wherein the presenting operation includes displaying to the user a graphical representation of a measured pulse sequence that includes a blank area in the pulse sequence where a pulse should have been measured, but did not occur due to a faulty electrode.
13. The method of claim 6, wherein the presenting operation includes co-displaying measured and programmed stimulation outputs for comparison by the user to determine where a fault exists.
14. A method to detect an implanted lead of an implanted neurostimulation device (INSD), the method comprising:
positioning a handheld probe having electrodes external to a surface of a patient and proximate to a region of the patient having the implanted lead for an INSD;
configuring the electrodes to measure a stimulation output from the implanted lead of the INSD;
receiving measured signals from the electrodes, the measured signals representative of the stimulation output of the INSD;
processing the measured signals to obtain INSD lead information, the processing step at least including comparing the measured signals with an amplifier to obtain a difference signal, the difference signal increasing as the electrodes move closer to a source of the stimulation output; and
presenting the lead information to a user, the lead information indicative of at least one of an operation of the lead and a position of the lead, the presenting step including at least one of displaying to the user a graphical representation of the measured stimulation output including a pulse sequence having at least one pulse void therein corresponding to a location in the pulse sequence associated with a failed electrode and displaying to the user a graphical representation of a measured pulse sequence that includes a blank area in the pulse sequence where a pulse should have been measured, but did not occur due to a faulty electrode.
15. The method of claim 14, wherein the lead information includes at least one of discharge mode, pulse width and frequency for the stimulation output of the INSD.
16. The method of claim 15, wherein the lead information includes at least one a presence, signal strength, duration and shape for the stimulation output of the INSD.
17. The method of claim 16, wherein the lead information includes at least one electrical occurrence of, and electrical anomalies in, the stimulation output of the INSD.
18. The method of claim 17, wherein the presenting operation includes co-displaying measured and programmed stimulation outputs for comparison by the user to determine where a fault exists.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

What is claimed is:

1. An apparatus for adhering a flexible film to a ventilated platen without air entrapment comprising:
a tool body having a cavity therein defined by a contiguous sidewall having a planar top surface and a bottom wall having at least one aperture, said cavity being adapted for receiving said ventilated platen and for exposing a top surface of said platen;
a tool lid having a shape substantially similar to a planar area of said tool body, said tool lid having an inner surface for mounting said flexible film thereon and a sealing means mounted on said inner surface along a peripheral edge of said lid; and
a hinge means connecting an edge of said tool body to an edge of said tool lid for sealingly engaging the two parts together in a clam-shell configuration with said sealing means on said tool lid engaging said planar top surface of said contiguous sidewall of the tool body and with a vacuum pulled from said at least one aperture in said bottom wall of the tool body such that said flexible film is transferred to and adheres on said top surface of the ventilated platen by an adhesive layer pre-deposited on said flexible film.
2. An apparatus for adhering a flexible film to a ventilated platen without air entrapment according to claim 1, wherein said tool body and said tool lid both have a circular shape.
3. An apparatus for adhering a flexible film to a ventilated platen without air entrapment according to claim 1, wherein said ventilated platen being a chamber lid for a plasma process chamber and said flexible film being an arc-resistant film.
4. An apparatus for adhering a flexible film to a ventilated platen without air entrapment according to claim 1, wherein said sealing means is an O-ring.
5. An apparatus for adhering a flexible film to a ventilated platen without air entrapment according to claim 1, wherein said ventilated platen having a plurality of vent holes therethrough in fluid communication with said at least one aperture in said bottom wall of the tool body.
6. An apparatus for adhering a flexible film to a ventilated platen without air entrapment according to claim 1, wherein said tool lid further comprises a handle means on an outer surface to facilitate said transfer of the flexible film from said tool lid to said ventilated platen.
7. An method for adhering a flexible film to a ventilated platen without air entrapment comprising the steps of:
providing a tool body having a cavity therein defined by a contiguous sidewall having a planar top surface and a bottom wall having at least one aperture;
positioning said ventilated platen in said cavity and exposing a top surface of said platen;
providing a tool lid having a shape substantially similar to a planar area of said tool body;
mounting said flexible film on an inner surface of said tool lid facing said tool body and a sealing means on said inner surface along a peripheral edge of said lid;
connecting a hinge means to an edge of said tool body and an edge of said tool lid for sealingly engaging the two parts together in a clam-shell configuration and engaging said sealing means on said tool lid to said planar top surface of said contiguous sidewall of the tool body; and
withdrawing air from said at least one aperture in said bottom wall of the tool body while engaging said tool lid to said tool body in a clam-shell manner and transferring said flexible film to said ventilated platen by an adhesive layer pre-deposited on said flexible film.
8. A method for adhering a flexible film to a ventilated platen without air entrapment according to claim 7 further comprising the step of mounting a sealing means of an O-ring on said inner surface along a peripheral edge of said lid.
9. A method for adhering a flexible film to a ventilated platen without air entrapment according to claim 7 further comprising the step of providing said tool body and said tool lid in a circular shape.
10. A method for adhering a flexible film to a ventilated platen without air entrapment according to claim 7 further comprising the step of supplying said flexible film in an arc-resistant film.
11. A method for adhering a flexible film to a ventilated platen without air entrapment according to claim 7 further comprising the step of providing said ventilated platen with a plurality of vent holes for establishing fluid communication with said at least one aperture in said bottom wall of the tool body.
12. A method for adhering a flexible film to a ventilated platen without air entrapment according to claim 7 further comprising the step of mounting a handle means on an outer surface of said tool lid.
13. A method for adhering a flexible film to a ventilated platen without air entrapment according to claim 7 further comprising the step of pushing down said tool lid by a handle means mounted thereon to engage said tool body.
14. A method for adhering a flexible film to a ventilated platen without air entrapment according to claim 7 further comprising the step of engaging said tool lid to said tool body from one edge of the tool body to an opposite edge of said tool body.
15. A method for adhering a flexible film to a ventilated platen without air entrapment according to claim 7 further comprising the step of coating an adhesive layer on one side of said flexible film.