All The Claims

1. A laser scanning microscope having a scanning mechanism for performing scanning on a sample with laser light emitted from a light source, comprising:
storage means that has a bit width wider than a bit width of drive data for driving the scanning mechanism and stores the drive data; and
setting means for setting a control signal for controlling a predetermined operation in a predetermined mechanism that has a strict time relationship with the scanning based on the drive data, in bits in the bit width of the storage means, excluding the bits used by the drive data,
the predetermined mechanism performing the predetermined operation based on the control signal that is read simultaneously when the drive data is read from the storage means.
2. The laser scanning microscope according to claim 1, characterized in that
the drive data is a table in which data corresponding to voltage values for driving the scanning mechanism is arranged in a time series, and
the setting means overwrites the content of the table at a predetermined timing.
3. The laser scanning microscope according to claim 1, characterized in that
the drive data is a table in which data corresponding to voltage values for driving the scanning mechanism is arranged in a time series, and
the storage means stores the content of the table as read only.
4. The laser scanning microscope according to claim 1, characterized in that the setting means sets the control signal in a predetermined upper bits or lower bits out of the bit width of the storage means.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A modularconfigurable rotary die for a rotary die cutter for making a corrugated carton blank, from which a carton having at least one quick closing continuous closure panel can be erected, from a stock sheet of corrugated material, the rotary die comprising:
a plurality of at least five interlocking modular die components which are capable of being combined in multiple configurations for producing multiple carton sizes, said die components being mountable directly on a roller of a rotary die cutter, the roller having a threaded hole pattern, where the die components are interlocked with one another, each die component having at least one blade thereon for at least one of scoring, creasing and cutting a corrugated sheet to cooperatively form a corrugated carton blank in a rotary die cutter from a stock sheet of corrugated material,
a plurality of adjustable die mounting clamps having means for securing the die components anywhere on the roller of the rotary die cutter regardless of the threaded hole pattern,
wherein said plurality of die components include, with reference to the three dimensions of the carton to be erected from the corrugated carton blank, at least one length die component which determines the length of the carton, at least one height die component which determines the height of the carton, and at least two closure panel die components which determine the width of the carton and produce respective fold-in panels of said at least one quick closing continuous closure panel,
wherein each of said closure panel die components includes:
two slitcut blades each arranged for slitting a 45 degree angled line on a fold-in panel of a quick closing continuous closure panel,
two perforation blades each arranged to cut and score the corrugated stock sheet to form a perforated straight line that is perpendicular to the length of the carton blank, and
one scoring blade arranged to score a straight line at the bottom of the fold-in panel, parallel to the length of the carton blank and between the two perforated lines formed by said two perforation blades.
2. The rotary die according to claim 1, wherein said means for securing of the adjustable die mounting clamps include slots with screws in the clamps for threading into threaded holes in the roller of a rotary die cutter.
3. The rotary die according to claim 1, wherein said plurality of die components include components having slots on their outer surfaces for receiving said adjustable die mounting clamps therein for securing the die components on the roller of the rotary die cutter.
4. The rotary die according to claim 1, wherein said plurality of die components include four of said closure panel die components which determine the width of the carton and cooperate to form a corrugated carton blank having two quick closing continuous closure panels that run parallel to each other end-to-end along the length of the carton blank on respective sides of the carton blank.
5. The rotary die according to claim 4, wherein said plurality of die components further include:
(a) four score die components that determine the length of a carton to be erected from the corrugated carton blank; and
(b) four crease die components that determine the height of the carton.
6. The rotary die according to claim 4, wherein said plurality of die components further include:
(a) two scorecrease panel die components that determine the height and the length of a carton to be erected from the corrugated carton blank; and
(b) one crease die component that determines the height of the carton.
7. The rotary die according to claim 4, wherein each of said closure panel die components further includes a curved cut blade that cuts the outline of a hide away handle on a fold-in panel of a quick closing closure panel formed on the corrugated carton blank.
8. The rotary die according to claim 1, wherein said plurality of die components cooperate to form a corrugated carton blank having one quick closing continuous closure panel that runs along the length of the carton blank on one side thereof and on an opposite side has a plurality of flaps with cut slots separating the flaps.
9. The rotary die according to claim 8, wherein said plurality of die components further include:
(a) four score die components that determine the length of a carton to be erected from the corrugated carton blank;
(b) four crease die components that determine the height of the carton; and
(c) two flap die components that determine the width of the carton and cut the slots for the flaps.
10. The rotary die according to claim 8, wherein said plurality of die components further include:
(a) two scorecrease panel die components which determine the height and the length of a carton to be erected from the corrugated carton blank;
(b) one crease die component that determines the height of the carton; and
(c) two flap die components that determine the width of the carton and cut the slots for the flaps.
11. The rotary die according to claim 8, wherein each of said closure panel die components further includes a curved cut blade that cuts the outline of a hide away handle on a fold in panel of a quick closing closure panel formed on the corrugated carton blank.
12. The rotary die according to claim 1, wherein said plurality of die components cooperate to form a corrugated carton blank having one quick closing continuous closure panel that runs along the length of the carton blank on one side thereof, which carton blank can be erected to form a telescope half carton.
13. The rotary die according to claim 12, wherein said plurality of die components further include:
(a) two scorecrease die components that determine the height and the length of the carton to be erected from the corrugated carton blank; and
(b) one crease die component that determines the height of the carton.
14. The rotary die according to claim 1, wherein said plurality of die components are pre-assembled in interlocking relation with one another on a brace for positioning the pre-assembled die components on a roller of a rotary die cuter.
15. The rotary die according to claim 1, wherein said plurality of die components are secured in position on a roller of a rotary die cutter.
16. A rotary die cutter for making a corrugated carton blank, from which a carton having at least one quick closing continuous closure panel can be erected, from a stock sheet of corrugated material, comprising:
a rotary die anvil roller;
a rotary die roller having a threaded hole pattern;
a rotary die mounted on the outer circumferential surface of the rotary die roller to form a rotary press with said rotary die anvil roller for producing a corrugated carton blank from a stock sheet of corrugated material fed between the rotary die and the anvil roller;
wherein the rotary die is formed with a plurality of at least five interlocking modular die components which are capable of being combined in multiple configurations for producing multiple carton sizes, said die components being mounted directly on said rotary die roller and interlocked with one another, each die component having at least one blade thereon for at least one of scoring, creasing and cutting a corrugated sheet fed between the rotary die and the anvil roller to cooperatively form a corrugated carton blank from a stock sheet of corrugated material,
a plurality of adjustable die mounting clamps having means for securing the die components anywhere on the roller of the rotary die cutter regardless of the threaded hole pattern,
wherein said plurality of die components include, with reference to the three dimensions of a carton to be erected from a corrugated carton blank, at least one length die component which determines the length of the carton, at least one height die component which determines the height of the carton, and at least two closure panel die components which determine the width of the carton and produce respective fold-in panels of said at least one quick closing continuous closure panel,
wherein each of said closure panel die components includes:
two slitcut blades each arranged for slitting a 45 degree angled line on a fold-in panel of a quick closing continuous closure panel,
two perforation blades each arranged to cut and score the corrugated stock sheet to form a perforated straight line that is perpendicular to the length of the carton blank, and
one scoring blade arranged to score a straight line at the bottom of the fold-in panel, parallel to the length of the carton blank and between the two perforated lines formed by said two perforation blades.
17. The rotary die cutter according to claim 16, wherein said at least one quick closing continuous closure panel formed by said die components runs end-to-end along the length of the carton blank.
18. The rotary die cutter according to claim 16, wherein the at least two closure panel die components each have a curved cut blade that cuts the outline of a hide away handle on fold-in panels formed on the carton blank.
19. The rotary die cutter according to claim 16, wherein said means for securing of the adjustable die mounting clamps include slots with screws in the clamps for threading into threaded holes in the roller of the rotary die cutter.
20. The rotary die cutter according to claim 16, wherein said plurality of die components include components having slots on their outer surfaces for receiving said adjustable die mounting clamps therein for securing the die components on the roller of the rotary die cutter.

1. A math operation practice and learning game comprising:
(a) a first set of cards each having at least one mathematical operation question thereon;
(b) a second set of cards each having at least one mathematical operation answer thereon that corresponds to at least one mathematical operation question on one of the cards in the first set of cards;
(c) a chart containing a list of the math operation answers which correspond to the math operation questions in the first set of cards;
(d) a timer device;
(e) a first flag having a first unique indicia thereon and being useable during game play to indicate when no cards in the second set of cards having a correct mathematical operation answer to a mathematical answer question on one of the first set of cards have been presented, and
(f) a second flag having a second unique indicia thereon and being useable during game play to indicate when an incorrect answer to a mathematical operation question on a card in the first set of cards has been given, wherein the object of the game is to be the first player to discard all of his or her cards in the second set of cards.
2. The math operation teaching game of claim 1 wherein said mathematical operation questions on said first set of cards are taken from the group consisting of addition, subtraction, multiplication and division.
3. The math operation teaching game of claim 2 wherein said mathematical operation questions on the first set of cards are related to multiplication.
4. The math operation teaching game of claim 2 wherein said mathematical operation questions are related to division.
5. The math operation teaching game of claim 2 wherein said mathematical functions are related to addition.
6. The math operation teaching game of claim 2 wherein said questions on the cards are related to subtraction.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A method of fabricating a semiconductor device, the method comprising:
forming an interlayer insulating layer on a semiconductor substrate;
forming a hard mask layer on the interlayer insulating layer;
forming a hard mask pattern in which a plurality of contact hole patterns are formed by patterning the hard mask layer at least two times;
conformally forming a supporting liner layer on the hard mask pattern, which supports the hard mask pattern during etching by reinforcing the thickness of the hard mask pattern;
forming a plurality of contact hole patterns in the interlayer insulating layer using the hard mask pattern on which the supporting liner layer is formed as an etching mask; and
forming contact plugs filling the plurality of contact hole patterns.
2. The method of claim 1, wherein the forming of the hard mask layer comprises forming a hard mask layer having a multi-layered structure on the interlayer insulating layer.
3. The method of claim 1, wherein the forming of the hard mask layer comprises forming a silicon oxide layer, a silicon nitride layer, a silicon oxy-nitride layer, or an amorphous carbon layer.
4. The method of claim 1, wherein the supporting liner layer is formed using atomic layer deposition (ALD) or plasma enhanced chemical vapor deposition (PECVD).
5. The method of claim 1, wherein the contact hole patterns are formed with a width of about 50 nm or less.
6. The method of claim 1, wherein the contact hole patterns are formed such that a distance between the contact hole patterns is about 50 nm or less.
7. The method of claim 1, wherein the forming of the hard mask pattern comprises:
forming a plurality of first contact hole patterns that are separated by a predetermined distance from each other by performing a first patterning process; and
forming second contact hole patterns between the first contact hole patterns by performing a second patterning process.
8. The method of claim 1, wherein the forming of the hard mask pattern comprises:
forming a first anti-reflective layer on the hard mask layer;
forming on the anti-reflective layer a first photoresist pattern that exposes the top of the anti-reflective layer and has the first contact hole pattern formed therein;
forming the plurality of first contact hole patterns separated by a predetermined distance in the hard mask layer using the first photoresist pattern as an etching mask;
removing the first photoresist pattern and the first anti-reflective layer, and forming a second anti-reflective layer covering the hard mask layer in which the first contact hole pattern is formed;
forming a second photoresist pattern that exposes the top of the second anti-reflective layer and in which the second contact hole patterns interspersed with the plurality of first contact hole patterns are formed; and
forming the second contact hole pattern in the hard mask layer in which the first contact hole patterns are formed using the second photoresist pattern as an etching mask.
9. A method of fabricating a semiconductor device, the method comprising:
forming an interlayer insulating layer on a semiconductor substrate;
forming a hard mask layer having a multi-layered structure on the interlayer insulating layer;
forming a top mask pattern layer in which a plurality of contact hole patterns are formed by patterning the top layer of the hard mask layer at least two times;
conformally forming on the top mask pattern layer a supporting liner layer that supports the top mask pattern layer during etching by reinforcing the thickness of the top mask patter layer;
completing the hard mask pattern having the multi-layered structure by patterning the top mask pattern layer in which the supporting liner layer is formed using an etching mask;
forming a plurality of contact hole patterns in the interlayer insulating layer using the hard mask pattern using an etching mask; and
forming contact plugs that fill the plurality of contact hole patterns.
10. The method of claim 9, wherein the forming of the hard mask layer comprises forming a silicon oxide layer, a silicon nitride layer, a silicon oxy-nitride layer, or an amorphous carbon layer.
11. The method of claim 9, wherein the forming of the supporting liner layer comprises forming the supporting liner layer using atomic layer deposition (ALD) or plasma enhanced chemical vapor deposition (PECVD).
12. The method of claim 9, wherein the forming of the contact hole patterns comprises forming the contact hole patterns with a width of about 50 nm or less.
13. The method of claim 9, wherein the forming of the contact hole patterns comprises forming the contact hole patterns such that a distance between the contact hole patterns is about 50 nm or less.
14. The method of claim 9, wherein the forming of the top mask pattern layer comprises:
forming a plurality of first contact hole patterns separated by a predetermined distance by performing a first patterning process on the top layer of the hard mask layer; and
forming second contact hole patterns between the plurality of first contact hole patterns by performing a second patterning process on the top layer of the hard mask layer in which the first contact hole patterns are formed.
15. The method of claim 9, wherein the forming of the top hard mask pattern comprises:
forming a first anti-reflective layer on the top layer of the hard mask layer;
forming on the first anti-reflective layer a first photoresist pattern that exposes the top of the first anti-reflective layer and in which the first contact hole patterns are formed;
forming the plurality of first contact hole patterns separated by a predetermined distance in the top layer of the hard mask layer using the first photoresist pattern as an etching mask;
removing the first photoresist pattern and the first anti-reflective layer;
forming a second anti-reflective layer covering the top layer of the hard mask layer in which the first contact hole patterns are formed;
forming a second photoresist pattern that exposes the top of the second anti-reflective layer and in which second contact hole patterns interspersed with the first contact hole patterns are formed; and
forming the second contact hole pattern in the top layer of the hard mask layer in which the first contact hole patterns are formed using the second photoresist pattern as an etching mask.