All The Claims

1. A liquid crystal display device comprising:
a liquid crystal panel including,
(A) a first substrate,
(B) a second substrate opposite to and spaced from the first substrate,
(C) a color filter having a first plurality of grooves spaced from each other along a surface of the color filter; and
(D) a liquid crystal layer provided in a space between the first substrate and the second substrate, the liquid crystal layer having a built-in touch sensor switch in a display area operable to cause an image to be displayed by the liquid crystal panel, the touch sensor switch including (i) a first touch electrode provided on a surface of the first substrate facing the second substrate, and (ii) a second touch electrode provided on a surface of the second substrate facing the first substrate and spaced from and facing the first touch electrode,
wherein,
the first touch electrode and the second touch electrode are operable to contact each other when the liquid crystal panel is deformed by an external pressure,
liquid crystal molecules in the liquid crystal layer are oriented by (i) a first liquid crystal orientation film provided on the surface of the first substrate facing the second substrate and (ii) a second liquid crystal orientation film provided on the surface of the second substrate facing the first substrate,
the first touch electrode is provided on the surface of the first substrate facing the second substrate and covering a surface of a concave and convex area of an inter-layer insulating film, the concave and convex area including a second plurality of grooves spaced from each other along the concave and convex area, the second plurality of grooves being complementary to the first plurality of grooves in the surface of the color filter, and
the surface of the first touch electrode includes an orientation material, the orientation material exposing a top face of a convex part of the concave and convex area in the first touch electrode.
2. The liquid crystal display device according to claim 1, wherein the second touch electrode is provided on the surface of the second substrate facing the first substrate and covers at least a top face of an elastic member protruding convexly.
3. The liquid crystal display device according to claim 2, wherein,
the liquid crystal panel includes a column spacer provided in the space between the first substrate and the second substrate, and
a height of the elastic member provided on the second substrate is lower than the column spacer.
4. The liquid crystal display device according to claim 1, wherein in a state where the first touch electrode is covered on the concave and convex area, a width of the convex part is 0.5 to 5.0 \u03bcm, and a distance between the top face of the convex part and a bottom face of the concave part is 0.5 to 2.0 \u03bcm.
5. A manufacturing method of a liquid crystal display device, the method comprising the step of:
forming a liquid crystal panel including a first substrate, a second substrate opposite to and spaced from the first substrate, a color filter having a first plurality of grooves spaced from each other along a surface of the color filter, and a liquid crystal layer provided in a space between the first substrate and the second substrate,

wherein,
the liquid crystal panel forming step includes the steps of,
(A) forming a touch sensor switch in a display area operable to cause an image to be displayed in the liquid crystal panel;
(B) forming a first liquid crystal orientation film on a surface of the first substrate facing the second substrate, and
(C) forming a second liquid crystal orientation film on a surface of the second substrate facing the first substrate,

the touch sensor switch forming step includes the steps of,
(A) forming a first touch electrode on the surface of the first substrate facing the second substrate, and
(B) forming a second touch electrode on the surface of the second substrate facing the first substrate, the second touch electrode spaced from and facing the first touch electrode,

in the first touch electrode forming step, the first touch electrode is formed on the surface of the first substrate facing the second substrate and covering a surface of a concave and convex area of an inter-layer insulation film, the concave and convex area including a second plurality of grooves spaced from each other along the concave and convex area the second plurality of grooves being complementary to the first plurality of grooves in the surface of the color filter, and
in the first liquid crystal orientation film forming step, the first liquid crystal orientation film is formed by applying an orientation material such that a surface of a top face of a convex part of the concave and convex area in the first touch electrode is exposed.
6. A display device comprising:
a display panel including a first substrate, a second substrate spaced from and opposite to the first substrate, a color filter having a first plurality of grooves spaced from each other along a surface of the color filter, and a touch sensor switch, the touch sensor switch including (i) a first touch electrode provided on a surface of the first substrate facing the second substrate, and (ii) a second touch electrode provided on a surface of the second substrate facing the first substrate and spaced from and facing the first touch electrode,
wherein,
the first touch electrode and the second touch electrode are operable to contact each other when the touch panel is deformed by an external pressure, and
the first touch electrode is provided on the surface of the first substrate facing the second substrate and covering a surface of a concave and convex area of an inter-layer insulation film, the concave and convex area including a second plurality of grooves spaced from each other along the concave and convex area, the second plurality of grooves corresponding to the first plurality of grooves in the surface of the color filter, and
the surface of the first touch electrode includes an application film formed to expose a surface of a top face of a convex part of the concave and convex area in the first touch electrode.
7. An information input device comprising:
a touch panel including a first substrate, a second substrate spaced from and opposite to the first substrate, a color filter having a first plurality of grooves spaced from each other along a surface of the color filter, and a touch sensor switch, the touch sensor switch including (i) a first touch electrode provided on a surface of the first substrate facing the second substrate, and (ii) a second touch electrode provided on a surface of the second substrate facing the first substrate and spaced from and facing the first touch electrode,
wherein,
the first touch electrode and the second touch electrode are operable to contact each other when the touch panel is deformed by an external pressure, and
the first touch electrode is provided on the surface of the first substrate facing the second substrate and covering a surface of a concave and a convex area, the concave and convex area including a second plurality of grooves spaced from each other along the concave and convex area, the second plurality of grooves being complementary to the first plurality of grooves in the surface of the color filter, and

the surface of the first touch electrode includes an application film formed to expose a surface of a top face of a convex part of the concave and convex area in the first touch electrode.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

I claim:

1. An installation for processing wafers in at least one clean room, comprising:
a multiplicity of production units for carrying out individual production steps on the wafers;
a measuring station having at least one measuring unit for inspecting the wafers and an unloading station;
a transport system connecting said production units to said measuring station, said transport system feeding and removing the wafers to and from said production units and said measuring units, said unloading station delivering the wafers to said transport system; and
transport containers transportable on said transport system including first transport containers for filling with defect free wafers from said measuring station, second transport containers for filling with the wafers to be reworked, and third transport containers for filling with rejected wafers, said first, second and third transport containers being marked differently, said first, second and third transport containers able to be loaded from said measuring station separately from one another via said unloading station, and said second transport containers filled with the wafers to be reworked can be fed to said production units for carrying out reworking processes.
2. The installation according to claim 1, wherein said unloading station has separate unloading ports and said first, second and third transport containers can be loaded via said separate unloading ports.
3. The installation according to claim 2, wherein said first, second and third transport containers are marked with different colors.
4. The installation according to claim 3, wherein said first transport containers are marked with a green color, said second transport containers are marked with a yellow color, and said third transport containers are marked with a red color.
5. The installation according to claim 3, wherein said unloading ports are marked with said different colors of said transport containers assigned to said unloading ports.
6. The installation according to claim 1, including a storage system for temporarily storing at least one of said second transport containers and said third transport containers.
7. The installation according to claim 6, wherein said storage system has storage devices and said second and third transport containers are temporarily stored in separate ones of said storage devices.
8. The installation according to claim 6, wherein at least one of the wafers to be reworked in said second transport containers and the rejected wafers in said third transport containers are removed from storage manually at said unloading ports of said unloading stations.
9. The installation according to claim 1, wherein the wafers have markings for identifying them.
10. The installation according to claim 9, wherein the wafers supplied in predetermined batch sizes to said measuring station are singularized in said measuring station.
11. The installation according to claim 10, wherein the wafers are processed individually in said measuring station, and said at least one measuring unit is one of a plurality of measuring units.
12. The installation according to claim 1, wherein said measuring station is one of a plurality of measuring stations.

What is claimed is:

1. An air suspension for a vehicle, comprising:
at least one air spring per wheel of at least one vehicle axle;
at least one accumulator;
a pump having a pressure side connected to one of the accumulator and the air spring;
a circuit arrangement connecting the air spring, the pump and the accumulator;
an integrated pressure sensor; and
at least one valve connecting an intake side of the pump to one of the accumulator and the air spring to form a closed compressed-air system;
wherein the pump includes air-guided interior pump chambers arranged between the intake side and the pressure side having a pressure-tight configuration.
2. The air suspension according to claim 1, wherein fresh air is configured to be drawn in between the intake side of the pump and the valve.
3. The air suspension according to claim 2, further comprising one of a non-return valve configured to draw in the fresh air and to open in a suction direction and a discharge valve configured to draw in the fresh air.
4. The air suspension according to claim 1, wherein the compressed-air system is configured to be precharged to a basic pressure corresponding to an average vehicle load.
5. The air suspension according to claim 1, wherein the valve includes a 42 directional control valve configured to connect the accumulator to the pressure side of the pump and the air spring to the intake side of the pump in a flow-through, neutral position and to connect the accumulator to the intake side of the pump and the air spring to the pressure side of the pump in an externally actuated, flow-through position.
6. The air suspension according to claim 1, further comprising a pressure tank, the pump being integrated in the pressure tank.
7. The air suspension according to claim 1, further comprising a connecting line including an integrated bypass line arranged between the intake side of the pump and the pressure side of the pump, the bypass valve being configured to at least intermittently open the connecting line during an acceleration operation of a pump drive.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. An electrically tunable inductive device comprising:
an electromagnet comprising a silicon-steel electromagnet core and a bias coil cooperating therewith to define opposing magnetic poles for generating a variable magnetic field;
said electromagnet core comprising a pair of opposing legs and a bight portion therebetween defining a horseshoe shape; and
an inductor being tunable based upon the variable magnetic field within the inductor and comprising
an inductor core having a toroidal shape and fixed at a position adjacent the opposing magnetic poles of said electromagnet, and
an inductor coil around at least a portion of the inductor core.
2. The electrically tunable inductive device of claim 1, wherein said inductor core is positioned between ends of the opposing legs of said electromagnet core.
3. The electrically tunable inductive device of claim 2, wherein said bias coil surrounds said bight portion of said core.
4. The electrically tunable inductive device of claim 1, wherein the inductor core comprises a ferrite core.
5. The electrically tunable inductive device of claim 1, wherein the inductor core comprises a nickel zinc ferrite core.
6. The electrically tunable inductive device of claim 1, wherein the inductor core comprises a powdered iron core.
7. The electrically tunable inductive device of claim 1, further comprising a radio frequency (RF) feed connected to the inductor coil and a capacitor connected therebetween.
8. An electrically tunable inductive device comprising:
an electromagnet comprising an electromagnet core and a bias coil cooperating therewith to define opposing magnetic poles for generating a variable magnetic field, said electromagnet core comprising a pair of opposing legs and a bight portion therebetween defining a horseshoe shape, said bias coil surrounding said bight portion of said electromagnet core; and
an inductor being tunable based upon the variable magnetic field and comprising
a ferrite inductor core fixed at a position between ends of the opposing legs of said electromagnet core; and
an inductor coil around at least a portion of the inductor core.
9. The electrically tunable inductive device of claim 8, wherein said inductor core has a toroidal shape.
10. The electrically tunable inductive device of claim 8, wherein the electromagnet core comprises a silicon-steel core.
11. The electrically tunable inductive device of claim 8, further comprising a radio frequency (RF) feed connected to the inductor coil and a capacitor connected therebetween.
12. A band-stop tunable filter comprising:
an electrically tunable inductive device including
an electromagnet comprising an electromagnet core and a bias coil cooperating therewith to define opposing magnetic poles, and
a tunable inductor comprising
an inductor core having a toroidal shape and fixed at a position adjacent the opposing magnetic poles of said electromagnet, and
an inductor coil around at least a portion of said inductor core;
a radio frequency (RF) feed connected to said inductor coil; and
a control signal feed connected to said bias coil.
13. The band-stop tunable filter of claim 12, wherein said electromagnet core comprises a pair of opposing legs and a bight portion therebetween defining a horseshoe shape.
14. The band-stop tunable filter of claim 13, wherein said inductor core is positioned between ends of the opposing legs of said electromagnet core.
15. The band-stop tunable filter of claim 14, wherein said bias coil surrounds said bight portion of said electromagnet core.
16. The band-stop tunable filter of claim 12, wherein said electromagnet core comprises a silicon-steel core.
17. A method of making an electrically tunable inductive device comprising:
providing an electromagnet comprising a silicon-steel electromagnet core and a bias coil cooperating therewith to define opposing magnetic poles for generating a variable magnetic field by at least forming the electromagnet core with a pair of opposing legs and a bight portion therebetween defining a horseshoe shape; and
providing an inductor being tunable based upon the variable magnetic field and comprising
an inductor core having a toroidal shape and fixed at a position adjacent the opposing magnetic poles of the electromagnet, and
an inductor coil around at least a portion of the inductor core.
18. The method of claim 17 wherein providing the inductor includes positioning the inductor core between ends of the opposing legs of the electromagnet core.
19. The method of claim 18, wherein providing the electromagnet includes wrapping the bight portion of the electromagnet core with the bias coil.
20. The method of claim 17, further comprising connecting a radio frequency (RF) feed to the inductor coil and a capacitor therebetween.
21. A method of making an electrically tunable inductive device comprising:
providing an electromagnet comprising an electromagnet core and a bias coil cooperating therewith to define opposing magnetic poles for generating a variable magnetic field;
providing an inductor being tunable based upon the variable magnetic field and comprising
an inductor core having a toroidal shape and fixed at a position adjacent the opposing magnetic poles of the electromagnet, and
an inductor coil around at least a portion of the inductor core; and

connecting a radio frequency (RF) feed to the inductor coil and a capacitor therebetween.