What is claimed is:
1. A wide-angle, single focus lens comprising four lenses of negative, positive, negative, and positive refractive power, in sequential order from the object side, wherein:
the first lens is concave on the object side;
the second lens has at least one surface that is aspheric;
the fourth lens is convex on the image side and has at least one of its surfaces aspheric; and
the following conditions are satisfied
2.0<ff1<0.5 0.5<ff2<2.0 0.5<ff4<2.0
where
f is the focal length of the wide-angle, single focus lens,
f1 is the focal length of the first lens in order from the object side,
f2 is the focal length of the second lens in order from the object side, and
f4 is the focal length of the fourth lens, in order from the object side.
2. The wide-angle, single focus lens as described in claim 1, wherein the first, third and fourth lenses are each formed of a single lens element and the following conditions are also satisfied:
Nd1<1.65 Nd3>1.70 Nd4<1.65 Vd3<50 d4>50
where
Nd1 is the index of refraction, at the d line, of the first lens element,
Nd3 is the index of refraction, at the d line, of the third lens element,
Nd4 is the index of refraction, at the d line, of the fourth lens element,
d3 is the Abbe number, at the d line, of the third lens element, and
d4 is the Abbe number, at the d line, of the fourth lens element.
3. A wide-angle, single focus lens comprising four lenses of negative, positive, negative, and positive refractive power, in sequential order from the object side, wherein:
the first lens in order from the object side is concave on the object side;
the second lens in order from the object side has at least one surface that is aspheric; and
the fourth lens in order from the object side is convex on the image side and has at least one surface that is aspheric.
4. The wide-angle, single focus lens as described in claim 3, wherein the following condition is satisfied:
2.0<ff1<0.5
where
f is the focal length of the wide-angle, single focus lens, and
f1 is the focal length of the first lens in order from the object side.
5. The wide-angle, single focus lens as described in claim 3, wherein the following condition is satisfied:
0.5<ff2<2.0
where
f is the focal length of the wide-angle, single focus lens, and
f2 is the focal length of the second lens in order from the object side.
6. The wide-angle, single focus lens as described in claim 3, wherein the following condition is satisfied:
0.5<ff4<2.0
where
f is the focal length of the wide-angle, single focus lens, and
f4 is the focal length of the fourth lens in order from the object side.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. In a plasma reactor chamber containing a wafer support pedestal having an electrode and an RF bias power generator coupled through an impedance match circuit to the input end of a transmission line whose output end is coupled to the electrode, a method of measuring plasma ion energy or wafer voltage of a wafer on the pedestal during plasma processing of the wafer, comprising:
prior to plasma processing of the wafer, determining first and second constants characteristic of the plasma reactor chamber and storing said first and second constants in a memory;
during plasma processing of the wafer performing the following steps:
a. sampling an RF input current and an RF input voltage at said impedance match circuit;
b. multiplying said RF input voltage by said first constant to produce a first product;
c. multiplying said RF input current by said second constant to produce a second product; and
d. computing a sum of said first and second products.
2. The method of claim 1 wherein the group of steps comprising a, b, c and d is repeated periodically whereby said method provides a nearly continuous stream of measurement samples of wafer voltage.
3. The method of claim 1 wherein said first and second constants are functions of the design of the reactor.
4. The method of claim 3 wherein said first and second constants comprise different functions of the RF electrical characteristics of the transmission line.
5. The method of claim 4 wherein said RF electrical characteristics of the transmission line comprise complex loss coefficient, characteristic impedance and length.
6. The method of claim 5 wherein said electrode of said wafer support pedestal comprises a conductive grid coupled to the output end of said transmission line, said method further comprising:
multiplying said sum by a factor comprising an impedance at the wafer on the pedestal, Zwafer, divided by an impedance at the electrode, Zgrid.
7. The method of claim 6 wherein said wafer support pedestal comprises a lower dielectric layer separating said electrode from a base conductor layer and an upper dielectric layer separating said electrode from said wafer, and wherein:
said impedance at the electrode, Zgrid, is computed from electrical characteristics of said lower dielectric layer;
said impedance at the wafer on the pedestal, Zwafer, is computed from electrical characteristics of said upper dielectric layer.
8. In a plasma reactor chamber containing a wafer support pedestal having an internal electrode and an RF bias power generator coupled through an impedance match circuit to the input end of a transmission line whose output end is coupled to the electrode at a junction, a method of measuring plasma ion energy or wafer voltage of a wafer on the pedestal during plasma processing of the wafer, comprising:
prior to plasma processing of the wafer, determining first and second constants characteristic of the plasma reactor chamber and storing said first and second constants in a memory;
during plasma processing of the wafer performing the following steps:
a. sampling an RF input current and an RF input voltage at said impedance match circuit;
b. multiplying said RF input voltage by said first constant to produce a first product;
c. multiplying said RF input current by said second constant to produce a second product; and
d. transforming said RF input current and said RF input voltage at said input end of said transmission line to an electrical quantity at the output end of said transmission line by computing a sum of said first and second products.
9. The method of claim 8 wherein the group of steps comprising a, b, c and d is repeated periodically whereby said method provides a nearly continuous stream of measurement samples of wafer voltage.
10. The method of claim 8 wherein said first and second constants are functions of physical characteristics of the reactor.
11. The method of claim 10 wherein said first and second constants comprise different functions of the RF electrical characteristics of the transmission line.
12. The method of claim 11 wherein said RF electrical characteristics of the transmission line comprise complex loss coefficient, characteristic impedance and length.
13. The method of claim 12 wherein said wafer support pedestal comprises a lower dielectric layer separating said electrode from a base conductor layer and an upper dielectric layer separating said electrode from said wafer, said method further comprising:
transforming said electrical quantity at said junction across said upper dielectric layer by multiplying said sum by a factor comprising an impedance at the wafer on the pedestal, Zwafer, divided by an impedance at the electrode, Zgrid.
14. The method of claim 13 wherein:
said impedance at the electrode, Zgrid, is computed from electrical characteristics of said lower dielectric layer;
said impedance at the wafer on the pedestal, Zwafer, is computed from electrical characteristics of said upper dielectric layer.