1. A locking member for a panel board device structured to be mounted in a panel board, said panel board including a housing assembly, said panel board housing assembly including a back plate, said back plate including number of generally opposed, inwardly extending mounting tabs, said panel board device including a body, said panel board device body defining a number of mounting passages, each mounting passage including an upper first end and a lower, second end, said locking member comprising:
a lock pin assembly including an elongated body with a first end and a second end;
a first radial extension disposed at said lock pin body second end;
said lock pin body structured to be rotatably disposed in said panel board device mounting passage;
said lock pin body structured to be moved between an unlocked, first radial position, wherein said first radial extension does not engage a panel board back plate mounting tab, and a locked, second radial position, wherein said first radial extension engages a panel board back plate mounting tab; and
wherein said lock pin body is an easy release locking coupling.
2. The locking member of claim 1 wherein said panel board device body includes a radial cavity, and wherein:
said lock pin body includes a first medial portion and a second medial portion;
said lock pin body includes a second radial extension disposed on said lock pin body second medial portion; and
wherein said second radial extension is structured to engage said radial cavity when said lock pin body is in said second radial position.
3. The locking member of claim 1 wherein said panel board device body includes a first biasing device mounting disposed about said mounting passage and wherein:
said lock pin assembly includes a biasing assembly;
said biasing assembly including a second biasing device mounting and a biasing device;
said biasing device including a first end and a second end;
said biasing device first end coupled to said first biasing device mounting;
said biasing device second end coupled to said second biasing device mounting; and
wherein said lock pin body is structured to be moved between an upper, first axial position and a lower, second axial position.
4. The locking member of claim 3 wherein said panel board device body mounting passage includes a first locking pocket disposed at said mounting passage second end and a second locking pocket disposed at said mounting passage second end, wherein said first and second locking pockets are radially spaced from each other, and wherein:
said lock pin body includes a radially extending locking lug, said locking lug corresponding to said first and second locking pockets;
wherein, when said lock pin body is in said first radial position and said first axial position, said locking lug is disposed in said first locking pocket;
wherein, when said lock pin body is in said second radial position and said first axial position, said locking lug is disposed in said second locking pocket; and
wherein when said lock pin body is in said second axial position, said locking lug is not disposed in either said first or second locking pocket.
5. The locking member of claim 3 wherein:
said biasing assembly biasing device is a compression spring; and
said second biasing device mounting includes a projection assembly disposed about said body at said body first medial portion.
6. The locking member of claim 1 wherein each said mounting tab is a generally planar member including a proximal end and a distal end, each said tab proximal end flexibly coupled to said panel board housing assembly back plate, wherein each said tab moves between a non-flexed, first position and a flexed, second position, and wherein:
said first radial extension includes an upper surface;
a cam surface disposed on said first radial extension upper surface; and
wherein, when said lock pin body is in said unlocked, first radial position, said cam surface does not engage said mounting tab, and, when said lock pin body is in said locked, second radial position, said cam surface engages said mounting tab and moves said tab into said flexed, second position.
7. A panel board device structured to be mounted in a panel board, said panel board including a housing assembly, said panel board housing assembly including a back plate, said panel board back plate including generally opposed, inwardly extending mounting tabs, said panel board device comprising:
a body, said panel board device body defining a number of mounting passages;
each mounting passage including an upper first end and a lower, second end;
a number of a lock pin assemblies each including an elongated body with a first end and a second end;
a first radial extension disposed at each lock pin body second end;
each said lock pin body rotatably disposed in an associated panel board device body mounting passage;
each said lock pin body movable between an unlocked, first radial position, wherein said first radial extension does not engage a panel board back plate mounting tab, and a locked, second radial position, wherein said first radial extension engages a panel board back plate mounting tab; and
wherein said lock pin body is an easy release locking coupling.
8. The panel board device of claim 7 wherein:
each said panel board device body mounting passage includes a radial cavity;
each said lock pin body includes a first medial portion and a second medial portion;
each said lock pin body includes a second radial extension disposed on said lock pin body second medial portion; and
wherein each said second radial extension is structured to engage an associated radial cavity when each said lock pin body is in said second radial position.
9. The panel board device of claim 7 wherein:
said panel board device body includes a first biasing device mounting disposed about said mounting passage;
each said lock pin assembly includes a biasing assembly;
each said biasing assembly includes a second biasing device mounting and a biasing device;
each said biasing device includes a first end and a second end;
wherein each said biasing device first end is coupled to said first biasing device mounting;
wherein said biasing device second end is coupled to said second biasing device mounting; and
wherein said lock pin body moves between an upper, first axial position and a lower, second axial position.
10. The panel board device of claim 9 wherein:
each said panel board device body mounting passage includes a first locking pocket disposed at said mounting passage second end and a second locking pocket disposed at said mounting passage second end;
wherein said first and second locking pockets are radially spaced from each other;
each said lock pin body includes a radially extending locking lug, said locking lug corresponding to said first and second locking pockets;
wherein, when each said lock pin body is in said first radial position and said first axial position, each said locking lug is disposed in an associated first locking pocket;
wherein, when each said lock pin body is in said second radial position and said first axial position, said locking lug is disposed in an associated second locking pocket; and
wherein when each said lock pin body is in said second axial position, each said locking lug is not disposed in either associated said first or second locking pocket.
11. The panel board device of claim 9 wherein:
each said biasing assembly biasing device is a compression spring; and
each said second biasing device mounting includes a projection assembly disposed about said lock pin body at said lock pin body first medial portion.
12. The panel board device of claim 7 wherein:
said panel board device body is elongated;
said panel board device body includes a first mounting passage and a second mounting passage;
said number of lock pins includes a first lock pin assembly and a second lock pin assembly;
said first lock pin assembly rotatably disposed in said panel board device body first mounting passage; and
said second lock pin assembly rotatably disposed in said panel board device body second mounting passage.
13. The panel board device of claim 7 wherein each said mounting tab is a generally planar member including a proximal end and a distal end, each said tab proximal end flexibly coupled to said panel board housing assembly back plate, wherein each said tab moves between a non-flexed, first position and a flexed, second position, and wherein:
said first radial extension includes an upper surface;
a cam surface disposed on said first radial extension upper surface;
wherein, when said lock pin body is in said unlocked, first radial position, said cam surface does not engage said mounting tab, and, when said lock pin body is in said locked, second radial position, said cam surface engages said mounting tab and moves said tab into said flexed, second position.
14. A panel board comprising:
a housing assembly including a back plate, said panel board back plate including generally opposed, inwardly extending mounting tabs, each said mounting tab is a generally planar member including a proximal end and a distal end, each said tab proximal end flexibly coupled to said panel board housing assembly back plate, wherein each said mounting tab moves between a non-flexed, first position and a flexed, second position;
panel board device including a body and a number of a lock pin assemblies;
said panel board device body defining a number of mounting passages;
each mounting passage including an upper first end and a lower, second end;
each lock pin assembly including an elongated body with a first end and a second end;
a first radial extension disposed at each lock pin body second end;
each said lock pin body rotatably disposed in an associated panel board device body mounting passage;
each said lock pin body movable between an unlocked, first radial position, wherein said first radial extension does not engage a panel board back plate mounting tab, and a locked, second radial position, wherein said first radial extension engages a panel board back plate mounting tab; and
wherein said lock pin body is an easy release locking coupling.
15. The panel board of claim 14 wherein:
each said panel board device body mounting passage includes a radial cavity;
each said lock pin body includes a first medial portion and a second medial portion;
each said lock pin body includes a second radial extension disposed on said lock pin body second medial portion; and
wherein each said second radial extension is structured to engage an associated radial cavity when each said lock pin body is in said second radial position.
16. The panel board of claim 14 wherein:
said panel board device body includes a biasing device mounting disposed about said mounting passage;
each said lock pin assembly includes a biasing assembly;
each said biasing assembly includes a biasing device mounting and a biasing device;
each said biasing device includes a first end and a second end;
wherein each said biasing device first end is coupled to said first biasing device mounting;
wherein said biasing device second end is coupled to said second biasing device mounting; and
wherein said lock pin body moves between an upper, first axial position and a lower, second axial position.
17. The panel board of claim 16 wherein:
each said panel board device body mounting passage includes a first locking pocket disposed at said mounting passage second end and a second locking pocket disposed at said mounting passage second end;
wherein said first and second locking pockets are radially spaced from each other;
each said lock pin body includes a radially extending locking lug, said locking lug corresponding to said first and second locking pockets;
wherein, when each said lock pin body is in said first radial position and said first axial position, each said locking lug is disposed in an associated first locking pocket;
wherein, when each said lock pin body is in said second radial position and said first axial position, said locking lug is disposed in an associated second locking pocket; and
wherein when each said lock pin body is in said second axial position, each said locking lug is not disposed in either associated said first or second locking pocket.
18. The panel board of claim 16 wherein:
each said biasing assembly biasing device is a compression spring; and
each said second biasing device mounting includes a projection assembly disposed at said lock pin body first medial portion.
19. The panel board of claim 14 wherein:
said panel board device body is elongated;
said panel board device body includes a first mounting passage and a second mounting passage;
said number of lock pins includes a first lock pin assembly and a second lock pin assembly;
said first lock pin assembly rotatably disposed in said panel board device body first mounting passage; and
said second lock pin assembly rotatably disposed in said panel board device body second mounting passage.
20. The panel board of claim 14 wherein each said mounting tab is a generally planar member including a proximal end and a distal end, each said tab proximal end flexibly coupled to said panel board housing assembly back plate, wherein each said tab moves between a non-flexed, first position and a flexed, second position, and wherein:
said first radial extension includes an upper surface;
a cam surface disposed on said first radial extension upper surface; and
wherein, when said lock pin body is in said unlocked, first radial position, said cam surface does not engage said mounting tab, and, when said lock pin body is in said locked, second radial position, said cam surface engages said mounting tab and moves said tab into said flexed, second position.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A processing system for chemically treating a substrate comprising:
a temperature controlled chemical treatment chamber;
a temperature controlled substrate holder mounted within said chemical treatment chamber and configured to be substantially thermally isolated from said chemical treatment chamber;
a vacuum pumping system coupled to said chemical treatment chamber; and
a gas distribution system coupled to said chemical treatment chamber and configured to introduce one or more process gases to said chemical treatment chamber in order to chemically alter exposed surface layers on said substrate, wherein said gas distribution system comprises a temperature controlled portion exposed to said one or more process gases in said chemical treatment chamber,
wherein said gas distribution system comprises at least one gas distribution plate, said gas distribution plate comprises one or more gas injection orifices.
2. The processing system as recited in claim 1 further comprising a controller coupled to at least one of said temperature controlled chemical treatment chamber, said temperature controlled substrate holder, said vacuum pumping system, and said gas distribution system, and configured to perform at least one of setting, monitoring, and adjusting at least one of a chemical treatment chamber temperature, a chemical treatment substrate holder temperature, a chemical treatment substrate temperature, a chemical treatment gas distribution system temperature, a chemical treatment processing pressure for said vacuum pumping system, and a chemical treatment mass flow rate of said process gas for said gas distribution system.
3. The processing system as recited in claim 2, wherein said controller is configured to set said gas distribution system temperature at a temperature greater than said chemical treatment chamber temperature.
4. The processing system as recited in claim 1, wherein said chemical treatment system is coupled to another processing system.
5. The processing system as recited in claim 1, wherein said chemical treatment system is coupled to at least one of a thermal treatment system and a substrate rinsing system.
6. The processing system as recited in claim 1, wherein said chemical treatment system is coupled to a transfer system.
7. The processing system as recited in claim 1, wherein said temperature controlled substrate holder comprises at least one of an electrostatic clamping system, a back-side gas supply system, and one or more temperature control elements.
8. The processing system as recited in claim 7, wherein said one or more temperature control elements comprise at least one of a cooling channel, a heating channel, a resistive heating element, a radiant lamp, and a thermo-electric device.
9. The processing system as recited in claim 1, wherein said temperature controlled chemical treatment chamber comprises at least one of a cooling channel, a heating channel, a resistive heating element, a radiant lamp, and a thermo-electric device.
10. The processing system as recited in claim 1, wherein said gas distribution system comprises at least one gas distribution plenum.
11. The processing system as recited in claim 1, wherein said one or more process gases comprise at least one of HF and NH3.
12. The processing system as recited in claim 1, wherein said one or more process gases comprise a first gas and a second gas different from said first gas.
13. The processing system as recited in claim 12, wherein said gas distribution system comprises a first gas distribution plenum and a first gas distribution plate having a first array of one or more orifices and a second array of one or more orifices for coupling said first gas to said process space through said first array of one or more orifices in said first gas distribution plate, and a second gas distribution plenum and a second gas distribution plate having passages therein for coupling said second gas to said process space through said passages in said second gas distribution plate and said second array of one or more orifices in said first gas distribution plate.
14. The processing system as recited in claim 12, wherein said first gas is HF and said second gas is NH3.
15. The processing system of claim 1, wherein said gas distribution system performs at least one of partial mixing and full mixing of said first gas and said second gas prior to introducing said first and second gases to said process space.
16. The processing system as recited in claim 1, wherein said first gas and said second gas are independently introduced to said process space without any interaction except in said process space.
17. A method of operating a processing system to chemically treat a substrate comprising:
transferring said substrate into a chemical treatment system comprising a temperature controlled chemical treatment chamber, a temperature controlled substrate holder mounted within said chemical treatment chamber and configured to be substantially thermally insulated from said chemical treatment chamber, a vacuum pumping system coupled to said chemical treatment chamber, a gas distribution system configured to introduce one or more process gases into said chemical treatment chamber and having a temperature controlled portion exposed to said one or more process gases in said chemical treatment chamber, and a controller coupled to said chemical treatment system;
setting chemical processing parameters for said chemical treatment system using said controller, wherein said chemical processing parameters comprise a chemical treatment processing pressure, a chemical treatment chamber temperature, a chemical treatment substrate temperature, a chemical treatment substrate holder temperature, and a chemical treatment gas flow rate; and
processing said substrate in said chemical treatment system using said chemical processing parameters in order to chemically alter exposed surface layers on said substrate,
wherein said gas distribution system comprises at least one gas distribution plate, said gas distribution plate comprises one or more gas injection orifices.
18. The method as recited in claim 17, wherein said one or more process gases comprise a first gas having HF and a second gas having NH3.
19. The method as recited in claim 17, wherein said temperature controlled substrate holder comprises at least one of an electrostatic clamping system, a back-side gas supply system, and one or more temperature control elements.
20. The method as recited in claim 19, wherein said one or more temperature control elements comprise at least one of a cooling channel, a heating channel, a resistive heating element, a radiant lamp, and a thermo-electric device.
21. The method as recited in claim 17, wherein said temperature controlled chemical treatment chamber comprises at least one of a cooling channel, a heating channel, a resistive heating element, a radiant lamp, and a thermo-electric device.
22. The method as recited in claim 17, wherein said gas distribution system comprises at least one gas distribution plenum.
23. The method as recited in claim 17, wherein said gas distribution system comprises a first gas distribution plenum and a first gas distribution plate having a first array of one or more orifices and a second array of one or more orifices for coupling said first gas to said process space through said first array of one or more orifices in said first gas distribution plate, and a second gas distribution plenum and a second gas distribution plate having passages therein for coupling said second gas to said process space through said passages in said second gas distribution plate and said second array of one or more orifices in said first gas distribution plate.
24. The method as recited in claim 17, wherein said gas distribution system performs at least one of partial mixing and full mixing of said first gas and said second gas prior to introducing said first and second gases to said process space.
25. The method as recited in claim 17, wherein said first gas and said second gas are independently introduced to said process space without any interaction except in said process space.
26. The method as recited in claim 17, wherein said setting said chemical treatment chamber temperature includes heating said chemical treatment chamber using a wall temperature control unit and monitoring said chemical treatment chamber temperature.
27. The method as recited in claim 26, wherein said chemical treatment chamber temperature ranges from about 10\xb0 about 200\xb0 C.
28. The method as recited in claim 17, wherein said setting said chemical treatment substrate holder temperature includes adjusting at least one of said one or more temperature control elements and monitoring said chemical treatment substrate holder temperature.
29. The method as recited in claim 28, wherein said chemical treatment substrate holder temperature ranges from about 10\xb0 C. to about 50\xb0 C.
30. The method as recited in claim 17, wherein said setting said chemical treatment substrate temperature includes adjusting at least one of said one or more temperature control elements, said backside gas supply system, and said clamping system, and monitoring said chemical treatment substrate temperature.
31. The method as recited in claim 30, wherein said chemical treatment substrate temperature ranges from about 10\xb0 C. to about 50\xb0 C.
32. The method as recited in claim 17, wherein said setting said chemical treatment processing pressure includes adjusting at least one of said vacuum processing system and said gas distribution system, and monitoring said chemical treatment processing pressure.
33. The method as recited in claim 32, wherein said chemical treatment processing pressure ranges from about 1 to about 100 mTorr.
34. The method as recited in claim 17, wherein said one or more chemical processing parameters further comprises a chemical treatment gas distribution system temperature.
35. The method as recited in claim 34, wherein said setting said chemical treatment gas distribution system temperature includes heating said gas distribution system using a gas distribution system temperature control unit and monitoring said chemical treatment gas distribution system temperature.
36. The method as recited in claim 35, wherein said chemical treatment gas distribution system temperature ranges from about 10\xb0 to about 200\xb0 C.