What is claimed is:
1. A method of forming a micro-aperture comprising steps of:
forming a projection or a dent on a substrate;
forming a film on the surface of said projection or of the opposite side of said dent so as to make the film thin at and near the tip of said projection or said dent;
etching said film to expose said tip; and
producing a micro-aperture by etching the exposed tip.
2. A method of forming a micro-aperture according to claim 1, wherein
the step of forming a dent on the surface of the substrate is carried out by forming an inverted-pyramid-shaped dent on a single crystal silicon substrate by crystal-axis-anisotropic etching.
3. A method of forming a micro-aperture according to claim 1, wherein said film is formed by forming a film of a plastic material.
4. A method of forming a micro-aperture according to claim 3, wherein said plastic material is subsequently heat treated to produce a viscous flow of the material.
5. A method of forming a micro-aperture according to claim 3, wherein said plastic material is glass.
6. A method of forming a micro-aperture according to claim 3, wherein said plastic material is phospho-silicate glass.
7. A method of forming a micro-aperture according to claim 1, wherein a plurality of micro-apertures are formed on the substrate.
8. A projection having a micro-aperture formed according to claim 1.
9. A probe having a projection according to claim 8.
10. A multi-probe comprising a plurality of probes according to claim 9 and formed on a substrate.
11. A surface scanner comprising a probe according to claim 9 or a multi-probe according to claim 10.
12. A surface scanner according to claim 11, wherein each of said probes comprises a light emitting device and a light receiving device as integral parts thereof.
13. An aligner comprising a probe according to claim 9 or a multi-probe according to claim 10.
14. An information processor comprising a probe according to claim 9 or a multi-probe according to claim 10.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1-20. (canceled)
21. A method, comprising:
receiving, by a device, an input that identifies a domain;
retrieving, by the device and based on the identified domain, a map from a plurality of domain-specific reference application maps,
the retrieved map including a plurality of modules;
generating, by the device, a list of suggested modules, from the plurality of modules of the retrieved map, to include in a workflow;
receiving, by the device, a selection of a particular suggested module, from the list of the suggested modules, to include in the workflow;
determining, by the device, at least one of the suggested modules, from the list of suggested modules, that has not been selected as the particular suggested module;
providing, by the device and for display, the at least one non-selected module on a visual representation of the workflow;
providing, by the device and for display, an indication that the at least one non-selected module is relevant to the workflow;
determining, by the device, the workflow from the particular suggested module and the at least one non-selected module; and
generating, by the device, an end-to-end test script based on the workflow.
22. The method of claim 21, where generating the end-to-end test script comprises:
identifying modules from the workflow;
retrieving test scripts for the identified modules; and
combining the retrieved test scripts to generate the end-to-end test script.
23. The method of claim 22, where retrieving the test scripts comprises:
performing a lookup on an index using a module identifier for a module identified for the workflow; and
retrieving the test scripts according to the lookup.
24. The method of claim 21, where the visual representation of the workflow comprises a plurality of paths with the at least one non-selected module being on one of the plurality of paths.
25. The method of claim 21, where each of the plurality of domain-specific reference application maps includes another plurality of modules and associations between the other plurality of modules describing an order of execution of the other plurality of modules.
26. The method of claim 25, where the order of execution comprises a plurality of paths including at least one branch from a main path in the order of execution.
27. The method of claim 21, where each domain of the plurality of domain-specific reference application maps is industry specific and the map for each domain describes a process performed for the industry within the corresponding domain.
28. A device comprising:
a memory to store a plurality of domain-specific reference application maps, each map including a plurality of modules; and
one or more processors to:
receive an input that identifies a domain;
retrieve one of the plurality of domain-specific reference application maps from the memory based on the identified domain;
generate a recommendation of suggested modules, from the plurality of modules associated with the retrieved map, to include in a workflow;
receive a selection of a particular suggested module, from the recommendation of the suggested modules, to include in the workflow;
determine at least one of the suggested modules, from the recommendation of the suggested modules, that has not been selected as the particular suggested module;
provide, for display, the at least one non-selected module on a visual representation of the workflow;
provide, for display, an indication that the at least one non-selected module is relevant to the workflow;
determine the workflow from the particular suggested module and the at least one non-selected module; and
generate an end-to-end test script based on the workflow.
29. The device of claim 28, where, when generating the end-to-end test script, the one or more processors are further to:
identify modules from the workflow;
retrieve test scripts from the memory for the identified modules; and
combine the retrieved test scripts to generate the end-to-end test script.
30. The device of claim 29, where, when retrieving the test scripts, the one or more processors are further to:
perform a lookup on an index using a module identifier for a module identified for the workflow; and
retrieve the test scripts from the memory according to the lookup.
31. The device of claim 28, where the visual representation of the workflow comprises a plurality of paths with the at least one non-selected module being on one of the plurality of paths.
32. The device of claim 28, where each of the plurality of domain-specific reference application maps includes another plurality of modules and associations between the other plurality of modules describing an order of execution of the other plurality of modules.
33. The device of claim 32, where the order of execution comprises a plurality of paths including at least one branch from a main path in the order of execution.
34. The device of claim 28, where each domain of the plurality of domain-specific reference application maps is industry specific and the map for each domain describes a process performed for the industry within the corresponding domain.
35. A non-transitory computer-readable medium storing instructions, the instructions comprising:
one or more instructions that, when executed by one or more processors of a device, cause the one or more processors to:
receive an input that identifies a domain;
retrieve, based on the identified domain, a map from a plurality of domain-specific reference application maps,
the retrieved map including a plurality of modules;
generate a list of suggested modules, from the plurality of modules of the retrieved map, to include in a workflow;
receive a selection of a particular suggested module, from the list of the suggested modules, to include in the workflow;
determine at least one of the suggested modules, from the list of suggested modules, that has not been selected as the particular suggested module;
determine the workflow from the particular suggested module and the at least one non-selected module; and
generate an end-to-end test script based on the workflow.
36. The non-transitory computer-readable medium of claim 35, where the one or more instructions that cause the one or more processors to generate the end-to-end test script, further cause the one or more processors to:
identify modules from the workflow;
retrieve test scripts for the identified modules; and
combine the retrieved test scripts to generate the end-to-end test script.
37. The non-transitory computer-readable medium of claim 36, where the one or more instructions that cause the one or more processors to retrieve the test scripts, further cause the one or more processors to:
perform a lookup on an index using a module identifier for a module identified for the workflow; and
retrieve the test scripts according to the lookup.
38. The non-transitory computer-readable medium of claim 35, where the one or more instructions further cause the one or more processors to:
provide the at least one non-selected module for display; and
provide, for display, an indication that the at least one non-selected module is relevant to the workflow.
39. The non-transitory computer-readable medium of claim 38, where the at least one non-selected module is provided for display on a visual representation of the workflow, and the indication that the at least one non-selected module is relevant to the workflow is provided for display on the visual representation of the workflow.
40. The non-transitory computer-readable medium of claim 39, where the visual representation of the workflow comprises a plurality of paths with the at least one non-selected module being on one of the plurality of paths.