1.-25. (canceled)
26. A method comprising:
determining a distance between a measuring point of a scanning probe microscope and an optical axis of a scanning particle microscope,
wherein:
the scanning particle microscope and the scanning probe microscope being spaced with respect to each other in a common vacuum chamber so that the distance between the optical axis of the scanning particle microscope and the measuring point of the scanning probe microscope in a direction perpendicular to the optical axis of the scanning particle microscope is larger than a maximum field of view of both the scanning probe microscope and the scanning particle microscope.
27. The method of claim 26, comprising exchanging the probe of the scanning probe microscope, and then automatically determining the distance between the measuring point of the scanning probe microscope and the optical axis of the scanning particle microscope.
28. The method of claim 27, comprising using an exchange mask to exchange the probe, wherein the exchange mask comprises a probe and a locator chip having a structure which simultaneously at least partially covers a measuring area of the scanning probe microscope and the field of view of the scanning particle microscope.
29. The method of claim 28, wherein the locater chip comprises mechanical and electrical components which manage the exchange of the probe.
30. The method of claim 28, wherein the locater chip comprises a microstructured cell mesh which can be measured by both the scanning particle microscope and the scanning probe microscope.
31. The method of claim 30, wherein the locator chip comprises coordinates for a respective cell of the cell mesh in at least one portion of the cells which are coded in a microstructured surface structure of the locater chip.
32. The method of claim 31, wherein the coordinates of the cells are numerically coded.
33. The method of claim 31, wherein the size of a cell of the cell mesh is smaller than the field of view of the scanning particle microscope and the scanning probe microscope.
34. The method of claim 31, wherein a size of a cell of the cell mesh is less than 10 \u03bcm.
35. The method of claim 31, wherein a smallest dimension of a structural element of a cell of the cell mesh is not smaller than 500 nm.
36. The method of claim 31, wherein:
determining the distance between the measuring point of the scanning probe microscope and the optical axis of the scanning particle microscope comprises determining a code of a first cell by the scanning particle microscope; and
determining the code of a second cell by the scanning probe microscope.
37. The method of claim 31, wherein a cell comprises:
a reference point;
a barcode to identify a first coordinate;
a barcode to identify a second coordinate; and
a specification of the first coordinate andor a specification of the second coordinate.
38. The method of claim 31, comprising automatically determining the distance between the measuring point of the scanning probe microscope and the optical axis of the scanning particle microscope in regular intervals.
39. An apparatus, comprising:
a vacuum chamber;
a scanning particle microscope in the vacuum chamber;
a scanning probe microscope in the vacuum chamber; and
a control element,
wherein:
a distance between an optical axis of the scanning particle microscope and a measuring point of the scanning probe microscope in a direction perpendicular to the optical axis of the scanning particle microscope is larger than a maximum field of view of both the scanning probe microscope and the scanning particle microscope; and
the control element is configured to automatically determine the distance between the measuring point of the scanning probe microscope and the optical axis of the scanning particle microscope.
40. The apparatus of claim 39, further comprising an exchange mask configured to exchange the probe, wherein the exchange mask comprises at least one exchange probe and a locater chip having a structure which simultaneously at least partially covers a respective measurement range of the scanning probe microscope and the field of view of the scanning particle microscope.
41. The apparatus of claim 40, wherein the locater chip comprises mechanical and electrical components managing the change of the probe.
42. The apparatus of claim 40, wherein the locater chip comprises a micro-structured cell mesh which is measurable by the scanning particle microscope and the scanning probe microscope.
43. The apparatus of claim 42, wherein the locater chip comprises coordinates for the respective cell of the cell mesh in at least one portion of the cells, which are coded in a microstructured surface structure of the locater chip.
44. A locater chip, comprising:
a cell mesh having a microstructured surface structure in which information is coded which can be determined by both a scanning particle microscope and the a scanning probe microscope,
wherein:
the locator chip is configured to determine a distance between a measuring point of the scanning particle microscope and a measuring point of the scanning probe microscope; and
a portion of the cells of the cell mesh comprises a coordinate for a respective cell which is coded in a microstructured surface structure of the locater chip.
45. The locater chip of claim 44, wherein the coordinates of the cells are numerically coded.
46. The locater chip of claim 44, wherein a size of a cell of the cell mesh is less than the field of view of the scanning particle microscope and the field of view of the scanning probe microscope.
47. The locater chip of claim 44, wherein a size of a cell of the cell mesh is less than 10 \u03bcm.
48. The locater chip of claim 44, wherein a smallest dimension of a structural element of a cell of the cell mesh is not less than 500 nm.
49. The locater chip of claim 44, wherein a cell comprises:
a reference point;
a barcode to identify a first coordinate;
a barcode to identify a second coordinate; and
a specification of a numerical value for the first coordinate and the second coordinate.
50. The locater chip of claim 49, wherein the cell mesh comprises rectangular cells capable of being periodically arranged, the reference point comprises an initial identification, and the first coordinate comprises an x-axis and the second coordinate comprises an y-axis.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method for operating a vehicle comprising:
measuring a torsional angle at at least one drive shaft of the vehicle;
ascertaining a torque transmitted via the at least one drive shaft as a function of the measured torsional angle;
ascertaining a first phase at one transmission output shaft of the vehicle;
ascertaining a second phase at at least one wheel drive shaft of the vehicle; and
determining the torsional angle from a phase displacement between the first phase and the second phase.
2. A method for operating a vehicle comprising:
measuring a torsional angle at at least one drive shaft of the vehicle;
ascertaining a torque transmitted via the at least one drive shaft as a function of the measured torsional angle;
ascertaining a first phase at one transmission output shaft of the vehicle;
ascertaining a second phase at least one wheel drive shaft of the vehicle;
determining the torsional angle from a phase displacement between the first phase and the second phase;
ascertaining a third phase at a first wheel drive shaft of the vehicle;
ascertaining a fourth phase at a second wheel drive shaft of the vehicle; and
forming the second phase by averaging values of the third phase and the fourth phase.
3. The method according to claim 2, wherein a first wheel of the vehicle driven by the first wheel drive shaft is situated opposite a second wheel of the vehicle driven by the second wheel drive shaft.
4. The method according to claim 1, further comprising measuring at least one of the phases by a phase detector at a gearwheel on a corresponding drive shaft.
5. The method according to claim 1, wherein the transmission output shaft and at least two wheel drive shafts are rigidly connected to one another, via a differential.
6. The method according to claim 1, wherein the torque is ascertained proportional to the torsional angle in a first region of the torsional angle.
7. The method according to claim 1, further comprising assigning a fixed value for the torque to the torsional angle in a second region of the torsional angle.
8. The method according to claim 7, wherein the fixed value is zero.
9. The method according to claim 1, wherein the torque is ascertained from the torsional angle on a uniform time basis.
10. A device for operating a vehicle comprising:
a torque detection unit for ascertaining a torque of the vehicle;
a measuring device for measuring a torsional angle at at least one drive shaft of the vehicle; and
an ascertainment unit for ascertaining the torque transmitted via the at least one drive shaft as a function of the measured torsional angle, the ascertainment unit further configured to
ascertain a first phase at one transmission output shaft of the vehicle,
ascertain a second phase at least one wheel drive shaft of the vehicle, and
determine the torsional angle from a phase displacement between the first phase and the second phase.