1. A cleaning liquid used in a process for forming a dual damascene structure comprising steps of etching a low dielectric layer accumulated on a substrate having thereon a metallic layer to form a first etched-space; charging a sacrifice layer in the first etched-space; partially etching the low dielectric layer and the sacrifice layer to form a second etched-space connected to the first etched-space; and removing the sacrifice layer remaining in the first etched-space with the cleaning liquid,
wherein the cleaning liquid comprises (a) 1-25 mass % of a quaternary ammonium hydroxide represented by the following general formula (I), (b) 30-70 mass % of a water soluble organic solvent, (c) 20-60 mass % of water, and (d) a mercapto group-containing compound:
wherein R1, R2, R3 and R4 each independently represents an alkyl group having 1-4 carbon atoms or a hydroxyalkyl group having 1-4 carbon atoms.
2. The cleaning liquid as claimed in claim 1, wherein the sacrifice layer comprises a spin-on-glass material.
3. The cleaning liquid as claimed in claim 2, wherein the spin-on-glass material contains a light absorbing substance.
4. The cleaning liquid as claimed in claim 1, wherein component (a) is tetramethylammonium hydroxide andor (2-hydroxyethyl)trimethylammonium hydroxide.
5. The cleaning liquid as claimed in claim 1, wherein component (b) is dimethyl sulfoxide.
6. The cleaning liquid as claimed in claim 1, wherein the cleaning liquid comprises 8-12 mass % of component (a), 40-60 mass % of component (b), and 30-50 mass % of component (c).
7. The cleaning liquid as claimed in claim 1, wherein the cleaning liquid further comprises (e) a quaternary ammonium hydroxide represented by the following general formula (II), with the proviso that component (e) differs from component (a):
wherein R5, R6, R7 and R8 each independently represents an alkyl group having 1-20 carbon atoms or ahydroxyalkyl group having 1-20 carbon atoms, provided that at least one of R5, R6, R7 and R8 represents an alkyl group having 10 or more carbon atoms, or at least two of R5, R6, R7 and R8 each independently represents a hydroxyalkyl group having 2-5 carbon atoms.
8. A process for treating a substrate having a dual damascene structure comprising steps of: etching a low dielectric layer accumulated on a substrate having thereon a metallic layer to form a first etched-space; charging a sacrifice layer in the first etched-space; partially etching the low dielectric layer and the sacrifice layer to form a second etched-space connected to the first etched-space; and bringing the sacrifice layer remaining in the first etched-space in contact with a cleaning liquid as claimed claim 1 to remove the sacrifice layer.
9. A process for treating a substrate having a dual damascene structure comprising steps of: etching a low dielectric layer accumulated on a substrate having thereon a metallic layer to form a first etched-space; charging a sacrifice layer in the first etched-space; partially etching the low dielectric layer and the sacrifice layer to form a second etched-space connected to the first etched-space; and bringing the sacrifice layer remaining in the first etched-space in contact with a cleaning liquid as claimed claim 8 to remove the sacrifice layer.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A tissue repair implant comprising:
a tissue carrier matrix in the form of an injectable suspension, the tissue carrier matrix comprising a plurality of biocompatible, bioresorbable granules and at least one tissue fragment in association with the tissue carrier matrix, the at least one tissue fragment having an effective amount of viable cells that can migrate out of the tissue fragment and populate the tissue carrier matrix, the granules having an average outer diameter in a range of about 150 to about 600 \u03bcm, the granules comprising at least one of aliphatic polyesters, copoly(ether-esters), solid copolymers of fatty acid esters of glycerol and succinic acid, polyoxaesters, collagen, gelatin, albumin, hyaluronate, glycosaminoglycans, polyanhydrides, polysaccharides, polyphosphazines, subintestinal mucosa, and acellular tissues.
2. The implant of claim 1, wherein the tissue carrier matrix comprises at least one of a proteoglycan, heparan sulfate, heparin, chondroitin sulfate, dermatan sulfate, keratan sulfate, and hyaluronan.
3. The implant of claim 1, wherein the at least one tissue fragment is obtained from a connective tissue type selected from the group consisting of cartilage, meniscus, tendon, ligament, dermis, bone, fat, synovial tissue, muscle tissue, and combinations thereof.
4. The implant of claim 1, wherein the at least one tissue fragment has a particle size in the range of about 0.1 to about 2 mm3.
5. The implant of claim 1, wherein the granules comprise a polymer blend.
6. A tissue repair implant comprising: a tissue carrier matrix in the form of an injectable suspension, the tissue carrier matrix comprising a plurality of biocompatible, bioresorbable granules and at least one tissue fragment in association with the tissue carrier matrix, the at least one tissue fragment having an effective amount of viable cells that can migrate out of the tissue fragment and populate the tissue carrier matrix, the at least one tissue fragment having a particle size in the range of about 0.1 to about 2 mm3, and wherein the biocompatible, bioresorbable granules have an average outer diameter in a range of about 150 to about 600 \u03bcm.
7. The implant of claim 6, wherein the granules comprise at least one of aliphatic polyesters, copoly(ether-esters), solid copolymers of fatty acid esters of glycerol and succinic acid, polyoxaesters, collagen, gelatin, albumin, hyaluronate, glycosaminoglycans, polyanhydrides, polysaccharides, polyphosphazines, subintestinal mucosa, and acellular tissues.
8. The implant of claim 6, wherein the tissue carrier matrix comprises at least one of a proteoglycan, heparan sulfate, heparin, chondroitin sulfate, dermatan sulfate, keratan sulfate, and hyaluronan.
9. The implant of claim 6, wherein the at least one tissue fragment is obtained from a connective tissue type selected from the group consisting of cartilage, meniscus, tendon, ligament, dermis, bone, fat, synovial tissue, muscle tissue, and combinations thereof.
10. The implant of claim 6, wherein the at least one tissue fragment comprises a tissue selected from the group consisting of autogenic tissue, allogeneic tissue, xenogeneic tissue, and combinations thereof.
11. The implant of claim 6, wherein the granules comprise an aliphatic polyester selected from the group consisting of homopolymers or copolymers of lactides, glycolides, \u03b5-caprolactone, p-dioxanone (1,4-dioxan-2-one), trimethylene carbonate (1,3-dioxan-2-one), and combinations thereof.
12. The implant of claim 6, wherein the granules comprise a polymer blend.
13. The implant of claim 6, wherein the granules are porous.
14. The implant of claim 6, further including a binding agent in association with the tissue carrier matrix.
15. The implant of claim 14, wherein the binding agent is selected from the group consisting of shark cartilage, alginate, hyaluronic acid, collagen gel, fibrin glue, fibrin clot, poly(N-isopropylacrylamide), agarose, chitin, chitosan, cellulose, polysaccharides, poly(oxyalkylene), a copolymer of poly(ethylene oxide)-poly(propylene oxide), poly(vinyl alcohol), polyacrylate, platelet rich plasma (PRP) clot, platelet poor plasma (PPP) clot, Matrigel, blood clot, gelatin-resorcin-formalin adhesives, mussel-based adhesives, dihydroxyphenylalanine (DOPA) based adhesives, transglutaminase, poly(amino acid)-based adhesives, cellulose-based adhesives, polysaccharide-based adhesives, synthetic acrylate-based adhesives, liquid and semi-solid fatty acid esters of glycerol and succinic acid (MGSA), MGSApolyethylene glycol (MGSAPEG) copolymers, polyvinylpyrolidone (PVP), PVP copolymers, gelatin, albumin, monoglycerides, diglycerides, triglycerides, laminin, elastin, proteoglycans, and combinations thereof.
16. The implant of claim 14, further including a curing agent that crosslinks the binding agent to enable the implant to set.
17. The implant of claim 16, wherein the curing agent is selected from the group consisting of thrombin, calcium, divinyl sulfone (DVS), polyethylene glycol divinyl sulfone (VS-PEG-VS), hydroxyethyl methacrylate divinyl sulfone (HEMA-DIS-HEMA), formaldehyde, glutaraldehyde, aldehydes, isocyanates, alkyl and aryl halides, imidoesters, N-substituted maleimides, acylating compounds, carbodiimide, hydroxychloride, N-hydroxysuccinimide, light, pH, temperature, metal ions, and combinations thereof.
18. The implant of claim 6, wherein the tissue carrier matrix further comprises at least one biological component selected from the group consisting of antibiotics, antimicrobial agents, anti-inflammatory agents, growth factors, growth factor fragments, small-molecule wound healing stimulants, hormones, cytokines, proteins, peptides, antibodies, enzymes, isolated cells, glycosaminoglycans, immunosuppressants, nucleic acids, analgesics, platelets, an activator of platelets, viruses, virus particles, and combinations thereof.
19. The implant of claim 18, wherein the activator of platelets is selected from the group consisting of thrombin, calcium, adenosine di-phosphate (ADP), collagen, epinephrine, arachidonic acid, prostaglandin, ristocetin, retinoids, ascorbate, antioxidants, and combinations thereof.
20. The implant of claim 18, wherein the at least one biological component is an isolated cell selected from the group consisting of osteocytes, fibroblasts, stem cells, pluripotent cells, chondrocyte progenitors, chondrocytes, osteocytes, osteoclasts, osteoblasts, endothelial cells, macrophages, adipocytes, monocytes, plasma cells, mast cells, umbilical cord cells, leukocytes, stromal cells, mesenchymal stem cells, epithelial cells, myoblasts, tenocytes, ligament fibroblasts, and bone marrow cells.
21. The implant of claim 18, wherein the at least one biological component is contained within the granules.
22. The implant of claim 18, wherein the at least one biological component is contained within a coating covering the granules.