1. A portable electronic housing for preventing foreign substances from entering thereto, comprising:
a first case;
a second case attachably coupled to the first case; and
an intercepting part arranged along a perimeter of the housing and integrally formed with at least one of the first case or the second case, wherein the intercepting part is sealingly engaged with the first case or the second case and is enclosed within a channel defined by interlocking edges of the first case and the second case that are in contact with each other and surround the intercepting part to form an interlocking boundary having the intercepting part in the channel there between to prevent the foreign substances from entering the housing and for waterproofing the housing.
2. The portable electronic housing as recited in claim 1, wherein the intercepting part includes at least one protrusion to be sealingly engaged with a coupling surface of the first case or a coupling surface of the second case.
3. The portable electronic housing as recited in claim 2, wherein the coupling surface of the second case is formed with a second stepped portion projecting outward from the second case, and wherein the intercepting part is integrally formed with the second stepped portion.
4. The portable electronic housing as recited in claim 2, wherein the coupling surface of the first case is formed with a first stepped portion extending inward to the first case, and wherein the protrusion is sealingly engaged with the first stepped portion.
5. The portable electronic housing as recited in claim 4, wherein the protrusion includes a first protrusion sealingly engaged with the coupling surface of the first stepped portion to prevent the foreign substances or water from being entered; and a second protrusion facing perpendicularly to the first protrusion and sealingly engaged with the other coupling surface of the first stepped portion to further prevent the foreign substances or water from being entered.
6. The portable electronic housing as recited in claim 1, wherein the intercepting part is formed with a soft rubber material.
7. The portable electronic housing as recited in claim 5, wherein the intercepting part is formed with one of the coupling surface of the first case or the second case via a double injection molding.
8. The portable electronic housing as recited in claim 1, wherein the intercepting part has at least two protruding edges that extend in substantially perpendicular directions to each other within the channel.
9. The portable electronic housing as recited in claim 8, wherein the at least two protruding edges of the intercepting part form respective seals from being elastically in contact with respective interior surfaces of the interlocking edges defining the channel.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An EUV target delivery system comprising:
a plasma source material passageway terminating in an output orifice;
a charging mechanism applying charge to a droplet forming jet stream or to individual droplets exiting the passageway along a selected path;
a droplet deflector intermediate the output orifice and a plasma initiation site periodically deflecting droplets from the selected path.
2. The apparatus of claim 1 further comprising:
the selected path corresponds to a path toward a plasma initiation site and the deflected droplets are deflected to a path such that the deflected droplets are sufficiently far from the plasma initiation site so as to not interfere with metrology andor interact with the plasma as formed at the plasma initiation site.
3. The apparatus of claim 1 further comprising:
the selected path corresponds to a path such that the droplets traveling along the selected path are sufficiently far from a plasma initiation site so as to not interfere with metrology andor interact with the plasma as formed at the plasma initiation site, and the deflected droplets travel on a path toward the plasma initiation site.
4. The apparatus of claim 1 further comprising:
the charging mechanism comprising a charging ring intermediate the output orifice and the droplet deflector.
5. An EUV target delivery system comprising:
a plasma source material for producing source material droplets along an initial path;
a charging subsystem applying charge to at least a portion of said source material; and
a droplet deflector deflecting a portion of said droplets from said initial path.
6. The system as recited in claim 5 wherein said charging subsystem comprises a charging ring.
7. The system as recited in claim 5 wherein said droplet deflector comprises at least one charge deflection plates.
8. The system as recited in claim 5 wherein said charging subsystem charges a portion of said source material.
9. The system as recited in claim 8 wherein a portion of said source material is charged by modulating a voltage applied to a charging plate.
10. The system as recited in claim 5 wherein said charging subsystem charges all of said source material.
11. The system as recited in claim 5 wherein said source material is selected from the group of source materials consisting of tin, lithium, tin compounds, lithium compounds, tin solutions, lithium solutions, tin suspensions and lithium suspensions.
12. The system as recited in claim 5 wherein said source material is charged before a break off point where the droplets begin to form.
13. The system as recited in claim 5 wherein said source material is charged after forming into droplets.
14. The system as recited in claim 5 wherein the target delivery system produces droplets using a droplet-on-demand mode.
15. The system as recited in claim 5 wherein the target delivery system produces droplets using a continuous mode.
16. A method of delivering EUV source material targets to an irradiation site, said method comprising the steps of:
producing a stream of source material droplets travelling along an initial path;
applying charge to at least a portion of said source material; and
deflecting a portion of said droplets from said initial path.
17. The method as recited in claim 16 wherein said initial path extends to said irradiation site.
18. The method as recited in claim 16 wherein said source material is deflected to said irradiation site.
19. The method as recited in claim 16 wherein a portion of said source material is charged by modulating a voltage applied to a charging plate.
20. The method as recited in claim 16 wherein said applying charge step applies a charge to all of said source material.