1. A method for forming a head suspension assembly, comprising:
forming a trench extending into a substrate;
forming a first layer comprising a sacrificial layer in the trench;
forming a second layer comprising a resin across the trench;
forming a third layer comprising a photoresist layer on the second layer and patterning the photoresist layer on top of the second layer;
transferring an image of the patterned photoresist layer through the second layer;
removing the patterned photoresist layer;
removing the sacrificial layer to form a cavity extending a distance into the substrate; and
positioning a slider on the second layer after the removing the sacrificial layer.
2. The method as in claim 1, wherein the second layer includes silicon.
3. The method as in claim 1, wherein the transferring the image of the patterned photoresist layer through the second layer is done using reactive ion etching.
4. The method as in claim 1, wherein the substrate comprises silicon and the sacrificial layer is formed by etching the trench in the substrate and filling the trench with a metal.
5. The method as in claim 4, wherein removing the sacrificial layer comprises etching the metal from the trench after the removing the patterned photoresist layer.
6. The method as in claim 1, wherein the substrate comprises silicon and the resin comprises polysilsesquioxone.
7. The method as in claim 1, wherein the cavity extends a width that is no greater than that of the substrate and the cavity extends a depth that is less than a depth of the substrate.
8. The method as in claim 1, further comprising forming a fourth layer comprising an adhesion layer between the substrate and the second layer.
9. The method as in claim 1, wherein, prior to the patterning the photoresist layer, the film is at least one of cured, cross-linked, and oxidized.
10. A method for forming a head suspension assembly, comprising:
forming a sacrificial layer in or on a portion of a substrate;
forming a polysilsesquioxone layer on the substrate and on at least part of the sacrificial layer;
forming a photoresist layer on the polysilsesquioxone layer;
patterning the photoresist layer;
etching the polysilsesquioxone layer using the patterned photoresist layer as a mask;
removing the patterned photoresist layer to expose remaining polysilsesquioxone layer;
removing the sacrificial layer to form a cavity extending a distance into the substrate; and
positioning a slider on the remaining polysilsesquioxone layer.
11. The method of claim 10, further comprising curing the polysilsesquioxone layer.
12. The method of claim 11, wherein the curing is carried out prior to the positioning a slider on the remaining polysilsesquioxone layer.
13. The method of claim 11, wherein the curing is controlled so that cross-linking of the polysilsesquioxone layer occurs.
14. The method of claim 10, further comprising cross-linking the polysilsesquioxone layer.
15. The method of claim 10, further comprising oxidizing the polysilsesquioxone layer.
16. The method of claim 10, further comprising positioning the slider to be on a part of the remaining polysilsesquioxone layer that is positioned over the cavity.
17. A method for forming a head suspension assembly, comprising:
forming a sacrificial layer extending a distance into a substrate;
forming a resin layer on the substrate and on at least part of the sacrificial layer;
forming a photoresist layer on the resin layer;
patterning the photoresist layer;
etching the resin layer using the patterned photoresist layer as a mask;
removing the patterned photoresist layer to expose remaining resin layer;
removing the sacrificial layer to form a cavity between at least part of the remaining resin layer and the substrate; and
positioning a slider on the remaining resin layer.
18. The method of claim 17, further comprising heating the resin layer prior to the forming a photoresist layer on the resin layer.
19. The method of claim 18, wherein resin layer comprises polysilaesquioxone.
20. The method of claim 18, further comprising cross-linking at least part of the resin layer prior to the forming the photoresist layer on the resin layer.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An occupant protection apparatus for protecting a front seat passenger of a vehicle, wherein the protection apparatus includes an airbag module configured to be mounted in an instrument panel of a vehicle in front of the front seat passenger, wherein the module comprises an airbag and a gas generator, and the airbag includes a central panel and left and right inflatable lobes separated by a central gap;
wherein each of the inflatable lobes is bounded by an outer panel forming an outer surface of the lobe and an inner panel forming an inner surface of the lobe;
wherein a lower edge portion of each of the outer panels is connected to a lower edge portion of one of the inner panels;
wherein the inner panels face each other and are connected together along upper edge portions to define the central gap, wherein the central gap is positioned between lower portions of the left and right inflatable lobes; and
wherein the central panel is connected to upper edge portions of the outer panels and is configured to extend to a leading-most end of the airbag when deployed.
2. The protection apparatus of claim 1, further comprising a lateral tether extending across one of the left and right inflatable lobes between the inner and outer panels.
3. The protection apparatus of claim 1, further comprising a substantially vertical tether positioned in the airbag between the gap and the gas generator.
4. The protection apparatus of claim 1, wherein each of the inner panels is oblong-shaped.
5. The protection apparatus of claim 1, wherein each of the inner panels is D-shaped.
6. An occupant protection apparatus comprising:
an airbag including a pair of outer panels and a pair of inner panels;
wherein each of the outer and inner panels includes an upper edge portion and a lower edge portion;
wherein the upper edge portion of each of the outer panels is connected to a central panel spanning between the outer panels;
wherein the lower edge portion of each of the outer panels is connected to the lower edge portion of one of the inner panels;
wherein the upper edge portion of each of the inner panels is connected to the upper edge portion of the other inner panel and to the central panel to thereby form a downward facing central gap between the inner panel, and wherein the central panel is configured to extend to a leading-most end of the airbag when deployed.
7. The protection apparatus of claim 6, further comprising a lateral tether extending between the inner and outer panels.
8. The protection apparatus of claim 6, further comprising a vertical tether extending between the upper edge portions of the inner panels and the central panel.
9. The protection apparatus of claim 6, further comprising:
a first lateral tether positioned in a cross-car direction between one of the outer panels and the inner panel to which the one of the outer panels is connected.
10. The protection apparatus of claim 6, wherein each of the inner panels is oblong-shaped.
11. The protection apparatus of claim 6, wherein each of the inner panels is D-shaped.