1. A method for fabricating a surface acoustic wave device, comprising steps of:
(a) providing a substrate;
(b) forming an insulating layer on said substrate;
(c) forming a silicon layer on said insulating layer;
(d) dividing said silicon layer into a first portion and a second portion;
(e) removing a portion of said insulating layer so as to form an indentation thereon, wherein said second portion of said silicon layer is suspended above said indentation;
(f) forming a piezoelectric layer on said first and said second portions of said silicon layer; and
(g) forming at least an electrode on said piezoelectric layer.
2. The method according to claim 1, wherein said substrate is a silicon substrate.
3. The method according to claim 1, wherein said insulating layer is a silica layer.
4. The method according to claim 1, wherein in the step (d), said silicon layer is divided by an etched window formed thereon.
5. The method according to claim 4, wherein said step (d) further comprises steps of:
(d1) applying a photoresist on said silicon layer;
(d2) defining a position for said etched window by means of a lithography process;
(d3) performing an etching process so as to form said etched window;
and
(d4) removing said photoresist.
6. The method according to claim 1, wherein in said step (e), said portion of said insulating layer is removed with a hydrofluoric acid.
7. The method according to claim 1, wherein in said step (f), said piezoelectric layer is formed by means of a chemical deposition process.
8. The method according to claim 1, wherein in said step (f), said piezoelectric layer is formed by means of a physical deposition process.
9. The method according to claim 1, wherein said electrode is a metallic and interdigital-shaped electrode.
10. The method according to claim 9, wherein said step (g) further comprises steps of:
(g1) forming a metallic layer on said piezoelectric layer; and
(g2) removing a portion of said metallic layer so as to form said electrode.
11. The method according to claim 10, wherein in said step (g2), said portion of said metallic layer is removed by means of an etching process.
12. The method according to claim 1, wherein said step (g) further comprises steps of:
(g1) forming a metallic layer on said piezoelectric layer; and
(g2) lifting off said metallic layer so as to form said electrode.
13. A method for fabricating a surface acoustic wave device, comprising steps of:
(a) providing an SOI substrate with an insulating layer;
(b) forming a silicon layer on said insulating layer;
(c) forming an etched window on said silicon layer, so as to divide said silicon layer into a first portion and a second portion;
(d) forming an indentation on said insulating layer; wherein said second portion of said silicon layer is suspended above said indentation.
(e) forming a piezoelectric layer on said first and said second portions of said silicon layer; and
(f) forming at least an electrode on said piezoelectric layer.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An electric power relaying unit of an image forming apparatus which transmits an alternating current electric power output from an external power supply to an image forming apparatus main body, the electric power relaying unit of the image forming apparatus comprising:
an electric power input unit which is connected to the external power supply, and receives an alternating current electric power from the external power supply;
an electric power output unit which is connected to an electric power input terminal of the image forming apparatus main body, and outputs the input alternating current electric power to the image forming apparatus main body; and
an electric power blocking unit which selectively blocks the alternating current electric power output from the electric power input unit to be input to the electric power output unit,
the electric power blocking unit comprising
a switching unit which switches an input of the alternating current electric power with respect to the electric power output unit;
an electric power detecting unit which detects an electric power property of the alternating current electric power;
a memory unit in which a predetermined electric power property information is stored; and
a control unit which compares an electric power property detected by the electric power detecting unit with an electric power property information stored in the memory unit, and controls a switching operation of the switching unit if determining that the detected electric power property corresponds to a predetermined electric power property in a failure of the image forming apparatus main body from a comparison result.
2. The electric power relaying unit of the image forming apparatus according to claim 1, wherein, if the alternating current electric power corresponds to an abnormal electric power predetermined to correspond to an operating environment of the image forming apparatus main body, the control unit determines that the alternating current electric power corresponds to an electric power property in a failure of the image forming apparatus main body.
3. The electric power relaying unit of the image forming apparatus according to claim 1, wherein the memory unit stores a profile of a predetermined abnormal electric power pattern, and
if an electric power pattern detected by the electric power detecting unit corresponds to the profile of the abnormal electric power stored in the memory unit, the control unit determines that the alternating current electric power corresponds to an electric power property in a failure of the image forming apparatus main body.
4. The electric power relaying unit of the image forming apparatus according to claim 3, wherein the electric power blocking unit further comprises an interface unit which is provided to be accessible to the memory unit from an outside so that the profile of the electric power pattern stored in the memory unit can be updated.
5. The electric power relaying unit of the image forming apparatus according to claim 4, wherein the interface unit comprises at least one of a memory port to which an external memory is mounted, and a communication port allowing a local communication or a network communication.
6. The electric power relaying unit of the image forming apparatus according to claim 3, wherein the electric power blocking unit further comprises a display unit which displays that an output of the alternating current electric power is blocked by the switching unit.
7. The electric power relaying unit of the image forming apparatus according to claim 3, wherein the electric power output unit is provided to allow a plurality of image forming apparatus main bodies to be connected thereto so that the plurality of image forming apparatus main bodies can respectively receive the alternating current electric power.
8. The electric power relaying unit of the image forming apparatus according to claim 7, wherein the alternating current electric power output from the switching unit diverges to respectively corresponds to the plurality of image forming apparatus main bodies.
9. The electric power relaying unit of the image forming apparatus according to claim 7, wherein the electric power blocking unit is disposed in plural to correspond to each alternating current electric power diverging to respectively corresponding to the plurality of image forming apparatus main bodies from the electric power input unit.
10. The electric power relaying unit of the image forming apparatus according to claim 3, further comprising a user input unit,
wherein the switching unit switches the alternating current electric power to correspond to an input command of the user input unit.
11. The electric power relaying unit of the image forming apparatus according to claim 3, further comprising a user input unit,
wherein if a predetermined time is input through the user input unit, the control unit controls a switching operation of the switching unit to correspond to an elapse of the input time.
12. An image forming apparatus, comprising:
an image forming apparatus main body; and
an electric power relaying unit according to claim 1 which transmits an alternating current electric power output from an external power supply to the image forming apparatus main body.
13. An electric power relaying unit which transmits an alternating current electric power output from an external power supply to an electronic device, the electric power relaying unit comprising:
an electric power input unit which is connected to the external power supply, and receives an alternating current electric power from the external power supply;
an electric power output unit which is connected to an electric power input terminal of the electronic device, and outputs the input alternating current electric power to the electronic device; and
an electric power blocking unit which selectively blocks the alternating current electric power output from the electric power input unit to be input to the electric power output unit,
the electric power blocking unit comprising
a switching unit which switches an input of the alternating current electric power with respect to the electric power output unit;
an electric power detecting unit which detects an electric power property of the alternating current electric power;
a memory unit in which a predetermined electric power property information is stored; and
a control unit which compares an electric power property detected by the electric power detecting unit with an electric power property information stored in the memory unit, and controls a switching operation of the switching unit if determining that the detected electric power property corresponds to a predetermined electric power property in a failure of the electronic device from a comparison result.
14. An the electric power blocking unit for use in an electric power relaying unit which transmits an alternating current electric power output from an external power supply to an electronic device, the electric power blocking unit comprising:
a switching unit to switch input of the alternating current electric;
an electric power detecting unit to detects an electric power property of the alternating current electric power;
a memory unit in to store information of predetermined electric power property information; and
a control unit to compare the electric power property detected by the electric power detecting unit with predetermined electric power property information stored in the memory unit, and controls a switching operation of the switching unit if determining that the detected electric power property corresponds to a predetermined electric power property in a failure of the electronic device from a comparison result.
15. The electric power blocking unit according to claim 14, wherein the memory unit stores a profile of a predetermined abnormal electric power pattern, and
if an electric power pattern detected by the electric power detecting unit corresponds to the profile of the abnormal electric power stored in the memory unit, the control unit determines that the alternating current electric power corresponds to an electric power property in a failure of the image forming apparatus main body.
16. The electric power blocking unit according to claim 15, further comprising an interface unit, the interface unit being accessible to the memory unit from an outside so that the profile of the electric power pattern stored in the memory unit can be updated.
17. The electric power blocking unit according to claim 16, wherein the interface unit comprises at least one of a memory port to which an external memory is mounted, and a communication port allowing a local communication or a network communication.
18. The electric power blocking unit according to claim 16, wherein the interface unit is connected to a universal serial bus (USB) memory in which an electric power pattern profile for updating is stored to automatically update the control unit.
19. The electric power blocking unit according to claim 15, further comprising a display unit which displays that an output of the alternating current electric power is blocked by the switching unit.