1. An exposure apparatus which exposes a substrate by projecting an image of a pattern onto the substrate through a liquid, the exposure apparatus comprising:
a projection optical system which projects the image of the pattern onto the substrate;
a substrate stage which is movable and which holds the substrate;
a first detecting system which detects an alignment mark on the substrate held by the substrate stage and which detects a reference provided on the substrate stage; and
a second detecting system which detects the reference provided on the substrate stage via the projection optical system, wherein:
the reference includes a first reference and a second reference, and the first reference is detected not through the liquid by using the first detecting system and the second reference is detected via the projection optical system and the liquid by using the second detecting system to determine a positional relationship between a detection reference position of the first detecting system and a projection position of the image of the pattern.
2. The exposure apparatus according to claim 1, wherein the alignment mark is formed on the substrate as a plurality of alignment marks, and position information about the plurality of alignment marks is detected by using the first detecting system; and the substrate is positioned on the basis of the position information detected by using the first detecting system and the positional relationship between the detection reference position and the projection position to expose the substrate.
3. The exposure apparatus according to claim 1, wherein position information of the alignment mark is detected by the first detecting system not through the liquid.
4. The exposure apparatus according to claim 1, wherein the substrate stage includes a substrate holder which holds the substrate, and the second reference is detected by the second detecting system in a state in which the substrate or a dummy substrate is held by the substrate holder.
5. The exposure apparatus according to claim 1, wherein the first reference and the second reference are arranged separately in a predetermined positional relationship.
6. The exposure apparatus according to claim 5, wherein detection of the first reference by the first detecting system is performed simultaneously with detection of the second reference by the second detecting system.
7. The exposure apparatus according to claim 1, further comprising a nozzle member which has at least any one of a supply port to supply the liquid and a recovery port to recover the liquid, and a control unit which determines a movement locus of the substrate stage to arrange the alignment mark in a detection area of the first detecting system in accordance with a positional relationship between the first detecting system and the nozzle member.
8. The exposure apparatus according to claim 7, wherein the control unit determines the movement locus of the substrate stage so that the alignment mark does not pass across a position under the nozzle member before the alignment mark is arranged in the detection area of the first detecting system.
9. A method for producing a device, comprising using the exposure apparatus as defined in claim 1.
10. An exposure apparatus which exposes a substrate by projecting an image of a pattern onto the substrate through a liquid, the exposure apparatus comprising:
a projection optical system which projects the image of the pattern onto the substrate through the liquid covering only a portion of a surface of the substrate;
a substrate stage which has a substrate holder to hold the substrate and which is movable;
a first detecting system which detects an alignment mark on the substrate held by the substrate holder; and
a second detecting system which detects a reference provided on the substrate stage through the liquid, the reference being arranged away from the substrate holder,
wherein:
a dummy substrate is arranged on the substrate holder when the reference provided on the substrate stage is detected through the liquid by using the second detecting system.
11. The exposure apparatus according to claim 1, wherein the second detecting system detects the second reference provided on the substrate stage via the projection optical system and a mask having the pattern.
12. The exposure apparatus according to claim 1, wherein the second reference is formed on a reference member which is arranged on the substrate stage, and a space between an end surface of the projection optical system and an upper surface of the reference member is filled with the liquid when the second reference formed on the reference member is detected by the second detecting system.
13. The exposure apparatus according to claim 12, wherein at least a part of the upper surface of the reference member is liquid-repellent.
14. The exposure apparatus according to claim 12, wherein the upper surface of the reference member is free from any difference in height.
15. The exposure apparatus according to claim 10, wherein the second detecting system detects the reference provided on the substrate stage via the projection optical system and a mask having the pattern.
16. The exposure apparatus according to claim 10, wherein the reference is formed on a reference member which is arranged on the substrate stage, and a space between an end surface of the projection optical system and an upper surface of the reference member is filled with the liquid when the reference formed on the reference member is detected by the second detecting system.
17. The exposure apparatus according to claim 16, wherein the upper surface of the reference member is free from any difference in height.
18. The exposure apparatus according to claim 16, wherein at least a part of the upper surface of the reference member is liquid-repellent.
19. A method for producing a device, the method comprising:
exposing a substrate by projecting an image of a pattern onto the substrate through the projection optical system of the exposure apparatus as defined in claim 10; and
processing the exposed substrate to produce the device.
20. An exposure apparatus which exposes a substrate by projecting an image of a pattern onto the substrate through a liquid, the exposure apparatus comprising:
a projection optical system which projects the image of the pattern onto the substrate;
a reference member which has an upper surface having no difference in level, at least a part of the upper surface being liquid-repellent; and
a detecting system which detects a reference formed on the reference member in a state in which a space between an end surface of the projection optical system and the upper surface of the reference member is filled with the liquid.
21. The exposure apparatus according to claim 20, further comprising a stage which is movable on an image plane side of the projection optical system, wherein the reference member is arranged on the stage.
22. The exposure apparatus according to claim 21, wherein the stage holds the substrate.
23. A method for producing a device, the method comprising:
exposing a substrate by projecting an image of a pattern onto the substrate through the projection optical system of the exposure apparatus as defined in claim 20; and
processing the exposed substrate to produce the device.
24. An exposure apparatus which exposes a substrate by projecting an image of a pattern onto the substrate through a liquid, the exposure apparatus comprising:
a projection optical system which projects the image of the pattern onto the substrate;
a substrate stage which has a substrate holder to hold the substrate and which is movable;
a detector which detects whether or not the substrate or a dummy substrate is held by the substrate holder; and
a control unit which changes a movable area of the substrate stage depending on a detection result obtained by the detector.
25. The exposure apparatus according to claim 24, further comprising a nozzle member which has at least any one of a supply port to supply the liquid and a recovery port to recover the liquid, wherein the control unit sets the movable area of the substrate stage so that the substrate holder is not positioned under the nozzle member when the detector does not detect the substrate or the dummy substrate is held by the substrate holder.
26. The exposure apparatus according to claim 25, further comprising a liquid supply system which supplies the liquid to the nozzle member, wherein the control unit stops supply of the liquid by the liquid supply system when the detector does not detect that the substrate or the dummy substrate is held by the substrate holder.
27. The exposure apparatus according to claim 24, further comprising a substrate-attracting and holding system which attracts the substrate to the substrate holder, wherein the detector is a pressure detector which is in fluid communication with the substrate-attracting and holding system.
28. The exposure apparatus according to claim 24, further comprising a storage portion on which the dummy substrate is placed.
29. A method for producing a device, the method comprising:
exposing a substrate by projecting an image of a pattern onto the substrate through the projection optical system of the exposure apparatus as defined in claim 24; and
processing the exposed substrate to produce the device.
30. The exposure apparatus according to claim 24, wherein the dummy substrate has a shape and a size which are approximately same as those of the substrate, the substrate being usable to produce a device.
31. An exposure apparatus which exposes a substrate by projecting an image of a pattern onto the substrate through a liquid, the exposure apparatus comprising:
a projection optical system which projects the image of the pattern onto the substrate;
a substrate stage which has a substrate holder to hold the substrate and which is movable;
a liquid supply system which supplies the liquid;
a detector which detects whether or not the substrate or a dummy substrate is held by the substrate holder; and
a control unit which controls operation of the liquid supply system on the basis of a detection result obtained by the detector.
32. The exposure apparatus according to claim 31, further comprising a substrate-attracting and holding system which attracts the substrate to the substrate holder, wherein the detector is a pressure detector which is in fluid communication with the substrate-attracting and holding system.
33. The exposure apparatus according to claim 31, further comprising a storage portion on which the dummy substrate is placed.
34. A method for producing a device, the method comprising:
exposing a substrate by projecting an image of a pattern onto the substrate through the projection optical system of the exposure apparatus as defined in claim 31; and
processing the exposed substrate to produce the device.
35. The exposure apparatus according to claim 31, wherein the dummy substrate has a shape and a size which are approximately same as those of the substrate, the substrate being usable to produce a device.
36. The exposure apparatus according to claim 31, wherein
the liquid supply system includes a liquid flow passage via which the liquid is supplied onto the substrate stage, and an openingclosing mechanism which is arranged on the liquid flow passage and opens and closes the liquid flow passage, and
the control unit controls the openingclosing mechanism based on a detection result obtained by the detector.
37. An exposure apparatus which exposes a substrate by projecting an image of a pattern onto the substrate through a liquid, the exposure apparatus comprising:
a projection optical system which projects the image of the pattern onto the substrate;
a substrate stage which has a substrate holder to hold the substrate and which is movable;
a liquid supply system which supplies the liquid, and
a control unit connected to the substrate stage and the liquid supply system, the control unit controls the liquid supply system to supply the liquid onto the substrate stage under a condition of receiving information that the substrate or a dummy substrate is held by the substrate holder, wherein the dummy substrate is an alternative of the substrate.
38. The exposure apparatus according to claim 37, further comprising a storage portion on which the dummy substrate is placed.
39. A method for producing a device, the method comprising:
exposing a substrate by projecting an image of a pattern onto the substrate through the projection optical system of the exposure apparatus as defined in claim 37; and
processing the exposed substrate to produce the device.
40. The exposure apparatus according to claim 37, wherein when the substrate or the dummy substrate is not held by the substrate holder, the control unit prohibits the supply of the liquid onto the substrate stage by the liquid supply system.
41. The exposure apparatus according to claim 37, further comprising a detector which detects whether or not the substrate or the dummy substrate is held by the substrate holder.
42. The exposure apparatus according to claim 37, wherein the dummy substrate has a shape and a size which are approximately same as those of the substrate, the substrate being usable to produce a device.
43. The exposure apparatus according to claim 37, wherein
the liquid supply system includes a liquid flow passage for supplying the liquid onto the substrate stage, and an openingclosing mechanism which is arranged on the liquid flow passage and opens and closes the liquid flow passage, and
the control unit controls the openingclosing mechanism to open the liquid flow passage only when the substrate or the dummy substrate is held by the substrate holder.
44. An exposure apparatus which exposes a substrate by projecting an image of a pattern onto the substrate through a liquid, the exposure apparatus comprising:
a projection optical system which projects the image of the pattern onto the substrate;
a substrate stage which is movable;
a liquid immersion system which forms a liquid immersion area; and
a control unit connected to the substate stage and the liquid immersion area on the substrate stage under a condition of receiving information that the substrate or a dummy substrate is held by the substrate stage, wherein the dummy substrate is an alternative of the substrate.
45. The exposure apparatus according to claim 44, wherein the substrate stage has a flat portion which is disposed around the substrate or the dummy substrate held by the substrate stage and which is substantially flush with a surface of the substrate or the dummy substrate held by the substrate stage.
46. The exposure apparatus according to claim 45, further comprising a measuring member which is arranged on the flat portion of the substrate stage, and a detecting system which detects a light beam from the measuring member in a state in which the liquid immersion area is formed on at least a part of a surface of the measuring member.
47. The exposure apparatus according to claim 44, wherein the substrate stage has a recess in which the substrate is arrangeable and a flat portion arranged around the recess, and the flat portion is substantially flush with a surface of the substrate and a surface of the dummy substrate arranged in the recess.
48. The exposure apparatus according to claim 47, wherein the control unit prohibits formation of the liquid immersion area on the substrate stage when the substrate or the dummy substrate is not arranged in the recess.
49. The exposure apparatus according to claim 48, wherein the control unit stops supply of the liquid by the liquid immersion system when the substrate or the dummy substrate is not arranged in th recess.
50. The exposure apparatus according to claim 48, wherein the control unit controls movement of the substrate stage so that the substrate stage is not opposed to an optical element disposed at a terminal end of the projection optical system when neither the substrate nor the dummy substrate is arranged in the recess.
51. A method for producing a device, the method comprising:
exposing a substrate by projecting an image of a pattern onto the substrate through the projection optical system of the exposure apparatus as defined in claim 47; and
processing the exposed substrate to produce the device.
52. The exposure apparatus according to claim 47, further comprising a holding member which holds the object in the recess; and
a lifting mechanism which moves the holding member upwardly and downwardly in the recess,
wherein the liquid immersion area is formed on the substrate stage when a surface of the holding member, which is moved upwardly in the recess, is substantially flush with the flat portion.
53. The exposure apparatus according to claim 44, further comprising a storage portion on which the dummy substrate is placed.
54. A method for producing a device, the method comprising:
exposing a substrate by projecting an image of a pattern onto the substrate through the projection optical system of the exposure apparatus as defined in claim 44; and
processing the exposed substrate to produce the device.
55. The exposure apparatus according to claim 44, wherein when the substrate or the dummy substrate is not held by the substrate stage, the control unit prohibits a formation of the liquid immersion area on the substrate stage.
56. The exposure apparatus according to claim 44, further comprising a detector which detects whether or not the substrate or the dummy substrate is held by the substrate stage.
57. The exposure apparatus according to claim 44, further comprising an alignment mechanism which detects an alignment mark on the substrate held by the substrate stage,
wherein the liquid immersion system forms the liquid immersion area on the substrate stage after the alignment mechanism detects the alignment mark.
58. The exposure apparatus according to claim 44, further comprising a height-detecting system which detects a position information in a height direction of the substrate or the dummy substrate held by the substrate stage,
wherein the liquid immersion system forms the liquid immersion area on the substrate stage after the height-detecting system detects the position information in the height direction of the substrate or the dummy substrate.
59. The exposure apparatus according to claim 44, wherein the dummy substrate has a shape and a size which are approximately same as those of the substrate, the substrate being usable to produce a device.
60. The exposure apparatus according to claim 44, wherein
the liquid immersion system includes a liquid supply mechanism having a liquid flow passage via which the liquid is supplied onto the substrate stage, and an openingclosing mechanism which is arranged on the liquid flow passage and opens and closes the liquid flow passage, and
the control unit controls the openingclosing mechanism to open the liquid flow passage only when the substrate or the dummy substrate is held by the substrate holder.
61. An exposure apparatus which exposes a substrate by projecting an image of a pattern onto the substrate through a liquid, the exposure apparatus comprising:
a projection optical system which projects the image of the pattern onto the substrate;
a stage which is movable on an image plane side of the projection optical system;
a first detecting system which detects an alignment mark on the substrate and which detects a first reference provided on the stage; and
a second detecting system which detects a second reference provided on the stage via the projection optical system, wherein:
the first reference provided on the stage is detected not through the liquid by using the first detecting system, and the second reference provided on the stage is detected via the projection optical system and the liquid by using the second detecting system to determine a positional relationship between a detection reference position of the first detecting system and a projection position of the image of the pattern.
62. A method for producing a device, the method comprising:
exposing a substrate by projecting an image of a pattern onto the substrate through the projection optical system of the exposure apparatus as defined in claim 61; and
processing the exposed substrate to produce the device.
63. An exposure method for exposing a substrate by projecting an image of a pattern onto the substrate via a projection optical system and a liquid, the exposure method comprising:
detecting position information about an alignment mark on the substrate by using a first detecting system;
detecting position information about a first reference on a substrate stage which holds the substrate, by using the first detecting system; and
detecting a second reference on the substrate stage via the projection optical system and the liquid by using a second detecting system after completion of both of detection of the position information about the alignment mark and detection of the position information about the first reference on the substrate stage by the first detecting system,
wherein:
a relationship between a detection reference position of the first detecting system and a projection position of the image of the pattern is determined on the basis of a detection result of the position information about the alignment mark obtained by the first detecting system, a detection result of the position information about the first reference on the substrate stage obtained by the first detecting system, and a detection result of the position information about the second reference on the substrate stage obtained by the second detecting system, and the image of the pattern and the substrate are relatively moved to successively project the image of the pattern onto each of a plurality of shot areas on the substrate to expose the substrate.
64. The exposure method according to claim 63, wherein position information about an alignment mark on another substrate is detected by using the first detecting system without detecting the position information about the first reference on the substrate stage when the another substrate is held and exposed on the substrate stage after completion of exposure of the substrate, and the image of the pattern is successfully projected onto each of a plurality of shot areas on the another substrate to expose the another substrate on the basis of the position information about the alignment mark on the another substrate detected by using the first detecting system and the relationship between the detection reference position of the first detecting system and the projection position of the image of the pattern.
65. The exposure method according to claim 63, wherein the first reference and the second reference are arranged separately from each other in a predetermined positional relationship.
66. The exposure method according to claim 63, wherein detection of the position information about the first reference on the substrate stage by the first detecting system and detection of the position information about the second reference on the substrate stage by the second detecting system are performed in a state in which the substrate is held by the substrate stage after completion of exposure of the substrate, and the substrate is exported from the substrate stage after completion of the detection.
67. A method for producing a device, comprising using the exposure method as defined in claim 63.
68. An exposure apparatus which exposes a substrate by projecting an image of a pattern onto the substrate through a liquid, the exposure apparatus comprising:
a projection optical system which projects the image of the pattern onto the substrate;
a substrate stage which has a substrate holder to hold the substrate and which is movable; and
a control unit connected to the substrate stage, the control unit prohibits formation of a liquid immersion area on the substrate stage under a condition of receiving information that the substrate or a dummy substrate is not held by the holder.
69. The exposure apparatus according to claim 68, further comprising a detector which detects whether or not the substrate or a dummy substrate is held by the substrate holder.
70. The exposure apparatus according to claim 68, further comprising a detector which detects a mark through the liquid immersion area formed on the substrate stage.
71. The exposure apparatus according to claim 68, wherein the projection optical system projects the image of the pattern through the liquid immersion area formed on the substrate stage.
72. A method for producing a device, comprising using the exposure apparatus as defined in claim 68.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method for planning and executing a marketing communication using a computer-implemented system, the method comprising the steps of:
providing a user with interactive guided worksheets for inputting a plurality of campaign criteria data;
providing an intelligent planning engine for generating a plurality of alternative media plans based on the plurality of campaign criteria data and on a plurality of pricing information retrievable from a cost database;
allowing the user to manipulate the alternative plans until the user is satisfied and selects a user-approved plan; and
automating an approval for a purchase of a plurality of media classifications that are described in the user-approved plan.
2. The method of claim 1, wherein the cost database contains pricing information related to media in a selected local geographic region.
3. The method of claim 2, wherein the proprietary pricing information relates to discounted marketing pricing usually made available only to large purchasers.
4. The method of claim 1, wherein allowing the user to manipulate the alternative plans is facilitated by a dashboard interface.
5. The method of claim 1, wherein the plurality of alternative media plans includes different plans, each different plan placing emphasis on a different media type, wherein the media type is selected from a group including: radio, television, Internet advertising, direct mailing, outdoor advertising, sponsorship of promotional events, product sampling, and stadium signs.
6. The method of claim 1, wherein the plurality of alternative media plans includes a balanced plan.
7. The method of claim 1, wherein the plurality of alternative media plans includes different plans each related to a selected media type, each different plan based on a different geographic region type.
8. The method of claim 7, wherein the selected media type is direct mailing.
9. The method of claim 1, wherein the intelligent planning engine is driven by a set of decision rules.
10. The method of claim 1, further comprising providing a tool for collecting performance data from the media campaign accessible by the user.
11. A system for planning and executing a media campaign comprising: a storage device, a means for receiving data; memory; a program module; an output device; a cost database, and a processor responsive to a plurality of instructions from the program module, being operative to:
provide a user with interactive guided worksheets viewable on an output device and allowing the user to enters campaign criteria data into the interactive guided worksheets using the input device;
communicate with an intelligent planning engine to generate a plurality of alternative media plans to be displayed on the output device, the alternative media plans being based on the plurality of campaign criteria data and on a plurality of pricing information retrievable from the cost database;
allow the user to manipulate the alternative plans until the user is satisfied and selects a user-approved plan; and
automate an approval of a purchase of a plurality of media classifications that are described in the user-approved plan.
12. The system of claim 11, wherein the cost database contains pricing information related to media in a selected local geographic region.
13. The system of claim 12, wherein the pricing information relates to discounted marketing pricing usually made available only to large purchasers.
14. The system of claim 11, wherein the cost database is updated by importing from an external database of one or more vendors.
15. The system of claim 11, wherein to allow the user to manipulate the alternative plans is facilitated by a dashboard interface.
16. The system of claim 11, wherein the plurality of alternative media plans includes different plans, each different plan placing emphasis on a different media type, wherein the media type is selected from a group including: radio, television, Internet advertising, direct mailing, outdoor advertising, sponsorship of promotional events, product sampling, and stadium signs.
17. The system of claim 16, wherein the plurality of alternative media plans includes a balanced plan.
18. The system of claim 11, wherein the plurality of alternative media plans includes different plans each related a selected media type, each different plan based on a different geographic region type.
19. The system of claim 18, wherein the selected media type is direct mailing.
20. The system of claim 11, wherein the intelligent planning engine is driven by a set of decision rules.
21. The system of claim 11, further comprising providing a tool for collecting performance data from the media campaign accessible by the user.
22. A computer program product for use with a computer, said computer program product comprising:
a module for providing a user with interactive guided worksheets for inputting a plurality of campaign criteria data;
a module for providing an intelligent planning engine for generating a plurality of alternative media plans based on the plurality of campaign criteria data and on a plurality of pricing information retrievable from a cost database;
a module allowing the user to manipulate the alternative plans until the user is satisfied and selects a user-approved plan; and
a module for automating an approval of a purchase of a plurality of media classifications that are described in the user-approved.
23. The computer program product of claim 22, wherein the cost database contains pricing information related to media in a selected local geographic region.
24. The computer program product of claim 23, wherein the pricing information relates to discounted marketing pricing usually made available only to large purchasers.
25. The computer program product of claim 22, wherein the cost database is updated by importing from an external database of one or more vendors.
26. The computer program product of claim 22, wherein to allow the user to manipulate the alternative plans is facilitated by a dashboard interface.
27. The computer program product of claim 22, wherein the plurality of alternative media plans includes different plans, each different plan placing emphasis on a different media type, wherein the media type is selected from a group including: radio, television, Internet advertising, direct mailing, outdoor advertising, sponsorship of promotional events, product sampling, and stadium signs.
28. The computer program product of claim 27 wherein the plurality of alternative media plans includes a balanced plan.
29. The computer program product of claim 22, wherein the plurality of alternative media plans includes different plans each related to a selected media type, each different plan based on a different geographic region type.
30. The computer program product of claim 29, wherein the selected media type is direct mailing.
31. The computer program product of claim 22, wherein the intelligent planning engine is driven by a set of decision rules.
32. The computer program product of claim 22, further comprising providing a tool for collecting performance data from the media campaign accessible by the user.
33. A data signal embodied in a carrier wave comprising: instructions for receiving the objects transmitted by carrier wave and media planning data including:
compilable data that allows a user’s terminal to display an interactive guided worksheets and inputting a plurality of campaign criteria data in the interactive guided worksheets;
compilable data representing a plurality of alternative media plans based on the plurality of campaign criteria data and on a plurality of pricing information retrievable from a cost database;
compilable data that allows the user to manipulate the alternative plans until the user is satisfied and select a user-approved plan; and
compilable data for automating an approval of a purchase of a plurality of media classifications that are described in the user approved plan.
34. The data signal of claim 33, wherein the cost database contains pricing information related to media in a selected local geographic region.
35. The data signal of claim 34, wherein the pricing information relates to discounted marketing pricing usually made available only to large purchasers.
36. The data signal of claim 33, wherein the cost database is updated by importing from an external database of one or more vendors.
37. The data signal of claim 33, wherein to allow the user to manipulate the alternative plans is facilitated by a dashboard interface.
38. The data signal of claim 33, wherein the plurality of alternative media plans includes different plans, each different plan placing emphasis on a different media type, wherein the media type is selected from a group including: radio, television, Internet advertising, direct mailing, outdoor advertising, sponsorship of promotional events, product sampling, and stadium signs.
39. The data signal of claim 38 wherein the plurality of alternative media plans includes a balanced plan.
40. The data signal of claim 33, wherein the plurality of alternative media plans includes different plans each related to a selected media type, each different plan based on a different geographic region type.
41. The data signal of claim 40, wherein the selected media type is direct mailing.
42. The data signal of claim 33, wherein the intelligent planning engine is driven by a set of decision rules.
43. The data signal of claim 33, further comprising providing a tool for collecting performance data from the media campaign accessible by the user.
44. A method of populating a media campaign, the method comprising the following steps:
selecting a set of media types;
selecting a duration for the media campaign;
designating certain weeks in the media plan as hiatus weeks and certain weeks as active weeks;
setting a minimum and maximum weekly weight level of purchasing points for each active week; and
allocating purchasing points to each active week according to a selected order of priority.
45. The method of claim 44, wherein setting a minimum and maximum weekly weight level is based on a motivate action objective.
46. The method of claim 44 wherein setting a minimum and maximum weekly weight level is based on an enhance image objective.
47. The method of claim 44, wherein the order of priority is media-emphasis.
48. The method of claim 44, wherein the order of priority is balanced.