What is claimed is:
1. A memory device, comprising:
a substrate;
a first region and a second region in the substrate;
a first insulation layer formed on the substrate;
a first conductive layer formed on a portion of the first insulation layer;
first and second conductive sidewall spacers positioned adjacent to first and second sidewalls of the first conductive layer, respectively;
a second insulation layer formed on the first and second conductive sidewall spacers; and
a second conductive layer formed on the insulation layer, the second conductive layer conductively coupled to the first conductive layer.
2. The device of claim 1, wherein the first and second regions are source and drain regions, respectively, the source and drain regions each include a low density doping region and a high density doping region.
3. The device of claim 1, wherein portions of the first insulation layer are formed over the first and second regions.
4. The device of claim 3, wherein the portions of the first insulation layer formed over the first and second regions are thinner than the portion of the first insulation layer on which the first conductive layer is formed.
5. The device of claim 1, wherein the second insulation layer comprises portions that extend between the sidewall spacers and the first conductive layer.
6. The device of claim 1, wherein the second insulation layer comprises portions formed between the sidewall spacers and the third conductive layer.
7. The device of claim 1, wherein portions of the second insulation layer project above an upper surface of the first conductive layer pattern.
8. The device of claim 1, wherein the first and third conductive layers form control gates.
9. The device of claim 1, wherein the first and second conductive sidewall spacers form a floating gate.
10. The device of claim 1, wherein the first and third conductive layers and the first and second conductive layer sidewall spacers are polysilicon.
11. A method of making a memory device, comprising the steps of:
forming a first insulation layer on a substrate;
forming a first conductive layer pattern on a portion of the first insulation layer;
forming impurity regions in the substrate;
forming a second insulation layer on sidewalls of the first conductive layer pattern;
forming, on each of two sides of the first conductive layer pattern, a conductive sidewall spacer on the second insulation layer and the first insulation layer;
forming a third insulation layer that covers the conductive sidewall spacers; and
forming a third conductive layer pattern on the first, second and third insulation layers, the third conductive layer pattern conductively coupled to the first conductive layer pattern.
12. The method of claim 11, wherein the third insulation layer is formed so that it contacts the first and second insulation layers.
13. The method of claim 11, wherein the step of forming impurity regions in the substrate comprises the steps of:
forming low density impurity regions in the substrate; and
forming high density impurity regions in the substrate.
14. The method of claim 13, wherein the step of forming low density impurity regions comprises:
forming a nitride film pattern on the first conductive layer pattern;
ion-implanting impurities in the substrate while using the nitride film patterns as a mask; and
removing the nitride film pattern.
15. The method of claim 13, wherein the step of forming high density impurity regions comprises:
forming a nitride film pattern on the first conductive layer pattern;
ion-implanting impurities in the substrate while using the nitride film pattern and the conductive sidewall spacers as a mask; and
removing the nitride film pattern.
16. The method of claim 11, wherein the first and third conductive layer patterns form control gates.
17. The method of claim 11, wherein the conductive sidewall spacers form a floating gate.
18. The method of claim 11, wherein the first and third conductive layer patterns and the conductive sidewall spacers are polysilicon.
19. The method of claim 11, wherein the second insulation layer is formed between the conductive sidewall spacers and the first conductive layer pattern.
20. The method of claim 11, wherein the third insulation layer is formed between the conductive layer sidewall spacers and the third conductive layer pattern.
21. The method of claim 11, wherein portions of the second insulation layer and the third insulation layer, which cover the conductive sidewall spacers, project above an upper surface of the first conductive layer pattern.
22. The method of claim 13, wherein a first low density impurity region and a first high density impurity region together form a source region, and wherein a second low density impurity region and a second high density impurity region together form a drain region.
23. The method of claim 22, wherein portions of the first insulation layer are formed over the source and drain regions.
24. The method of claim 23, wherein the portions of the first insulation layer formed over the source and drain regions are thinner than the portion of the first insulation layer on which the first conductive layer is formed.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
Having thus described the invention, what is claimed as new and desired to be secured by Letters Patent is as follows:
1. An apparatus for forming a solid from a liquid comprising:
a generally horizontal flat plate work surface maintained at a temperature selected to remove sufficient heat from a liquid to change said liquid generally into a solid,
a dispenser to distribute said liquid on said work surface, and
a scraper to remove said solid from said work surface.
2. The apparatus as claimed in claim 1 further comprising at least one void in said plate for circulation of a coolant therein to maintain said work surface at said selected temperature.
3. The apparatus as claimed in claim 1 wherein said dispenser moves across said work surface.
4. The apparatus as claimed in claim 1 wherein said scraper is a blade which moves across said work surface.
5. The apparatus as claimed in claim 1 further comprising a solids applicator to distribute a preexisting solid on said work surface.
6. The apparatus as claimed in claim 5 further comprising a carriage mounted above said work surface for reciprocating movement thereacross, said carriage having said solids applicator mounted thereon.
7. The apparatus as claimed in claim 5 or 6 wherein said preexisting solid has a melting point of at least 120 degrees Fahrenheit.
8. The apparatus as claimed in claim 1 further comprising a carriage mounted above said work surface for reciprocating movement thereacross, said carriage having said dispenser andor said scraper andor said solids applicator mounted thereon.
9. The apparatus as claimed in claim 8 wherein said dispenser applies said liquid onto said work surface as said carriage moves across said work surface and said scraper removes from said work surface said solid formed from a dispensing of said liquid as said carriage moves across said work surface.
10. The apparatus as claimed in claim 9 further comprising a second carriage mounted above said work surface for reciprocating movement thereacross said second carriage having said solids applicator mounted thereon.
11. The apparatus method as claimed in claim 1 wherein said liquid comprises a liquid edible oil or liquid fat or liquid emulsifier having a melting point of less than about 105 degrees Fahrenheit.
12. The method as claimed in claim 1 wherein said liquid comprises a liquid edible oil or liquid fat or liquid emulsifier having a SFI of approximately 50% at 50 degrees Fahrenheit and approximately 30% and 70 degrees Fahrenheit.
13. An apparatus for forming a solid from a liquid comprising:
a generally horizontal flat plate,
a work surface on said plate,
a circulation system,
a dispenser to distribute a liquid on said work surface,
a coolant pumped through said circulation system to maintain said plate work surface at a temperature to remove sufficient heat from said liquid to form said liquid generally into its solid phase, and
a scraper to remove said formed solid from said work surface.
14. The apparatus as claimed in claim 13 wherein said dispenser moves across said work surface.
15. The apparatus as claimed in claim 13 wherein said scraper is a blade which moves across said work surface.
16. The apparatus as claimed in claim 13 further comprising a solids applicator to distribute a preexisting solid on said work surface.
17. The apparatus as claimed in claim 16 further comprising a carriage mounted above said work surface for reciprocating movement thereacross, said carriage having said solids applicator thereon.
18. The apparatus as claimed in claim 16 or 17 wherein said preexisting solid comprises a solid having a melting point of at least 120 degrees Fahrenheit.
19. The apparatus as claimed in claim 13 further comprising a carriage mounted above said work surface for reciprocating movement thereacross, said carriage having said dispenser andor said scraper andor said solids applicator attached thereto.
20. The apparatus as claimed in claim 19 wherein said dispenser applies said liquid onto the work surface as said carriage moves across said work surface and said scraper removes from said work surface the solid formed from a dispensing of the liquid.
21. The apparatus as claimed in claim 13, wherein said circulation system comprises a void in said plate.
22. The apparatus method as claimed in claim 13 wherein said liquid comprises a liquid edible oil or liquid fat or liquid emulsifier having a melting point of less than about 105 degrees Fahrenheit.
23. The method as claimed in claim 13 wherein said liquid comprises a liquid edible oil or liquid fat or liquid emulsifier having a SFI of approximately 50% at 50 degrees Fahrenheit and approximately 30% and 70 degrees Fahrenheit.
24. An apparatus for forming a solid from a liquid comprising:
a generally horizontal flat plate,
a work surface on said plate,
a liquid comprising a liquid edible oil or liquid fat or liquid emulsifier having a SFI of approximately 50% at 50 degrees Fahrenheit and approximately 30% and 70 degrees Fahrenheit,
means for cooling said work surface to maintain said work surface at a temperature selected to remove sufficient heat from said liquid to form said liquid generally into a solid,
a dispenser for applying said liquid to said work surface, and
a scraper to remove said formed solid from said work surface.
25. The apparatus method as claimed in claim 24 wherein said means for cooling comprises a circulation system for circulating a coolant in said plate.
26. The apparatus as claimed in claim 25, wherein said circulation system comprises a void in said plate for circulating said coolant therein.
27. The apparatus as claimed in claim 24 wherein said dispenser moves across said work surface.
28. The apparatus as claimed in claim 24 wherein said scraper is a blade which moves across said work surface.
29. The apparatus as claimed in claim 24 further comprising a solids applicator to distribute a preexisting solid on said work surface.
30. The apparatus as claimed in claim 29 further comprising a carriage mounted above said work surface for reciprocating movement thereacross, said carriage having said solids applicator thereon.
31. The apparatus as claimed in claim 29 or 30 wherein said preexisting solid comprises a solid having a melting point of at least 120 degrees Fahrenheit.
32. The apparatus as claimed in claim 24 further comprising a carriage for traversing said work surface, said carriage having said dispenser andor said scraper andor said solids applicator mounted thereon.
33. A method for forming a solid from a liquid comprising:
adjusting a generally horizontal flat plate work surface to temperature sufficient to change a liquid generally into a solid form of said liquid,
dispensing said liquid onto said work surface,
allowing said solid to form from said liquid, and
scraping said formed solid from said work surface.
34. The method as claimed in claim 33 wherein said liquid comprises a liquid edible oil or liquid fat or liquid emulsifier having a melting point of less than about 105 degrees Fahrenheit.
35. The method as claimed in claim 33 further comprising the step of applying a preexisting solid to said work surface.
36. The method as claimed in claim 35 where in said preexisting solid has a melting point of at least 120 degrees Fahrenheit.
37. The method as claimed in claim 33 wherein said liquid comprises a liquid edible oil or liquid fat or liquid emulsifier having a SFI of approximately 50% at 50 degrees Fahrenheit and approximately 30% and 70 degrees Fahrenheit.
38. A method for forming a solid from a liquid comprising:
circulating a coolant through voids in a generally horizontal flat plate having a work surface thereon,
adjusting said work surface temperature with said circulating coolant to a temperature sufficient to change a liquid generally into a solid form of said liquid,
moving a dispenser between a first end and a second end of said work surface
dispensing a layer of said liquid onto said work surface,
allowing said dispensed liquid layer to form into said solid,
moving a scraper between said first and second ends of said work surface, and
contacting said work surface with said scraper during said scraper moving step to remove said formed solid from said work surface.
39. The method as claimed in claim 38 wherein said liquid comprises a liquid edible oil or liquid fat or liquid emulsifier having a melting point of less than about 105 degrees Fahrenheit.
40. The method as claimed in claim 38 wherein said liquid comprises a liquid edible oil or liquid fat or liquid emulsifier having a SFI of approximately 50% at 50 degrees Fahrenheit and approximately 30% and 70 degrees Fahrenheit.
41. The method as claimed in claim 38 further comprising the step of applying a preexisting solid to said work surface.
42. The method as claimed in claim 41 where in said preexisting solid has a melting point of at least 120 degrees Fahrenheit.
43. A method for forming a solid from a liquid comprising:
adjusting a generally horizontal flat plate work surface to a temperature sufficient to change a liquid generally into a solid form of said liquid,
reciprocating a carriage between a first end and a second end of said work surface, said carriage having a dispenser and a scraper thereon,
dispensing said liquid onto said work surface during said reciprocation step,
allowing said dispensed liquid to form said solid, and
scraping said formed solid off said work surface.
44. The method as claimed in claim 43 wherein said liquid comprises a liquid edible oil or liquid fat or liquid emulsifier having a melting point of less than about 105 degrees Fahrenheit.
45. The method as claimed in claim 43 further comprising the step of applying a preexisting solid to said work surface.
46. The method as claimed in claim 45 further comprising the step of moving a second carriage across said work surface said second carriage having a solids applicator for applying said preexisting solid.
47. The method as claimed in claim 45 or 46 where in said preexisting solid has a melting point of at least 120 degrees Fahrenheit.
48. The method as claimed in claim 43 wherein said liquid comprises a liquid edible oil or liquid fat or liquid emulsifier having a SFI of approximately 50% at 50 degrees Fahrenheit and approximately 30% and 70 degrees Fahrenheit.
49. A method for forming a solid from a liquid comprising:
circulating a coolant through voids in a generally horizontal flat plate work surface having a first end and a second end,
adjusting said work surface temperature with said coolant to a temperature sufficient to change a liquid generally into its solid,
moving a nozzle between said first end and said second end of said work surface to dispense a layer of said liquid onto said work surface,
moving a solids applicator between a first end and a second end of said work surface to dispense a preexisting solid,
allowing said dispensed liquid layer to form the solid,
moving a blade between said first and second ends of said work surface, and
contacting said work surface with said blade during said blade moving step to scrape the formed solid from said work surface.
50. The method as claimed in claim 49 wherein said liquid comprises a liquid edible oil or liquid fat or liquid emulsifier having a melting point of less than about 105 degrees Fahrenheit.
51. The method as claimed in claim 49 where in said preexisting solid has a melting point of at least 120 degrees Fahrenheit.
52. The method as claimed in claim 49 wherein said liquid comprises a liquid edible oil or liquid fat or liquid emulsifier having a SFI of approximately 50% at 50 degrees Fahrenheit and approximately 30% and 70 degrees Fahrenheit.
53. A method for forming a solid from a liquid comprising:
adjusting a generally horizontal flat plate work surface to a temperature sufficient to change the liquid into the solid,
reciprocating a carriage between a first end and a second end of said work surface, said carriage having a nozzle for dispensing the liquid onto the work surface and said carriage having a blade for scraping the work surface
dispensing a layer of the liquid onto the work surface during a reciprocation of said carriage,
applying a preexisting solid,
allowing said dispensed liquid layer to form the solid, and
scraping the formed solid off said work surface during a reciprocation of said carriage,
54. The method as claimed in claim 53 wherein said liquid comprises a liquid edible oil or liquid fat or liquid emulsifier having a melting point of less than about 105 degrees Fahrenheit.
55. The method as claimed in claim 53 where in said preexisting solid has a melting point of at least 120 degrees Fahrenheit.
56. The method as claimed in claim 53 wherein said liquid comprises a liquid edible oil or liquid fat or liquid emulsifier having a SFI of approximately 50% at 50 degrees Fahrenheit and approximately 30% and 70 degrees Fahrenheit.