1.-91. (canceled)
92. A compound having the formula
in which:
R1 is
(a) substituted or unsubstituted alkyl;
(b) substituted or unsubstituted cycloalkyl;
(c) substituted or unsubstituted alkenyl;
(d) adamantyl;
(e) substituted or unsubstituted phenyl;
(f) a 5- or 6-membered optionally substituted saturated or unsaturated heterocyclic group having from one to three heteroatoms selected from nitrogen, oxygen and sulfur;
(g) substituted or unsubstituted benzyl;
(h) a saturated or unsaturated fused ring carbocyclic group having from 8 to 10 ring atoms; or
(i) CH2XR5, where X is oxygen, sulfur, \u2014NH\u2014 or \u2014CH2\u2014 and R5 is substituted or unsubstituted alkyl; substituted or unsubstituted cycloalkyl; substituted or unsubstituted phenyl; substituted or unsubstituted benzyl; 2-carbamide-indolyl; or a 5- to 9-membered optionally substituted saturated or unsaturated heterocyclic group having from one to three heteroatoms selected from nitrogen, oxygen and sulfur;
R2 is
(a) substituted or unsubstituted alkyl;
(b) substituted or unsubstituted cycloalkyl;
(c) substituted or unsubstituted alkenyl;
(d) substituted or unsubstituted alkoxyalkyl
(e) a 5- or 6-membered optionally substituted saturated or unsaturated heterocyclic group having from one to three heteroatoms selected from nitrogen, oxygen and sulfur;
(f) \u2014(CH2)nR3, where R3 is (i) a 5- to 9-membered optionally substituted saturated or unsaturated heterocyclic group having from one to three heteroatoms selected from nitrogen, oxygen and sulfur; (ii) \u2014NR6R7 where R6 and R7 are independently selected from hydrogen, methyl, ethyl and benzyl; or (iii) COOR8 where R8 is alkyl; and n is 2 or 3;
(h) substituted or unsubstituted phenyl;
(i) substituted or unsubstituted benzyl;
(j) a saturated or unsaturated fused ring carbocyclic group having from 8 to 10 ring atoms; or
(k) methylene-1-naphthyl;
and R4 is
(a) (CH2)mCOOR15 where R15 is alkyl or substituted alkyl; and m is 0, 1 or 2
(b) CONR16R17 where R16 and R17 are independently (i) hydrogen; (ii) alkyl or substituted alkyl; (iii) cycloalkyl; (iv) alkoxyalkyl; (v) a 5- to 10-membered optionally substituted saturated or unsaturated heterocyclic group having from one to three heteroatoms selected from nitrogen, oxygen and sulfur; (vi) a saturated or unsaturated fused ring carbocyclic group having from 8 to 10 ring atoms; (vii) substituted or unsubstituted phenyl; (viii) (CH2)pR18 where R18 is a 5- or 6-membered optionally substituted saturated or unsaturated heterocyclic group having from one to three heteroatoms selected from nitrogen, oxygen and sulfur, and p is 1, 2 or 3; (ix) optionally substituted benzyl; or (x) an aralkyl group comprising a chain of from 1 to 4 methylene groups substituted by one or two phenyl groups;
(c) C1-C4 alkoxy;
(d) optionally substituted phenoxy;
(e) SO2NR19R20 where R19 and R20 are independently hydrogen, optionally substituted alkyl or phenyl;
(f) NR21R22;
(g) COR23 where R23 is alkyl or is NR21R22;
(h) COOR23 where R23 is hydrogen, alkyl, or benzyl; or
(i) SO2R25 where R25 is alkyl or NR21R22;
wherein R21 and R22 are independently hydrogen, alkyl, optionally substituted phenyl or optionally substituted benzyl;
or a pharmaceutically acceptable salt thereof.
93. A compound having the formula
in which R1 is phenoxymethyl, R2 is 4-fluorobenzyl, 4-methoxybenzyl, 2-(N-piperido)ethyl, octyl, 1-naphthylmethyl, n-undecyl, benzyl or 2-(N,N-dibenzylamino)ethyl and R4 is hydrogen.
94. A compound having the formula
in which
R1 is benzyloxymethyl;
R2 is
(a) C1-C12 alkyl optionally substituted with one or more groups selected from halo, hydroxy, cyano, nitro, COOH and COOCH3;
(b) C2-C8 cycloalkyl optionally substituted with one or more groups selected from halo, hydroxy, cyano, nitro, COOH and COOCH3;
(c) C2-C12 alkenyl optionally substituted with one or more groups selected from halo, hydroxy, cyano, nitro, COOH and COOCH3;
(d) C2-C12 alkoxyalkyl;
(e) a 5- or 6-membered saturated or unsaturated heterocyclic group having from one to three heteroatoms selected from nitrogen, oxygen and sulfur, optionally substituted by from 1 to 3 groups independently selected from halo, C1-C4 alkyl, C1-C4 alkoxy, oxo, and hydroxy;
(f) \u2014(CH2)nR3, where R3 is (i) a 5- to 9-membered saturated or unsaturated heterocyclic group having from one to three heteroatoms selected from nitrogen, oxygen and -sulfur, optionally substituted by from 1 to 3 groups independently selected from halo, C1-C4 alkyl, C1-C4 alkoxy, oxo, and hydroxy; (ii) \u2014NR6R7 where R6 and R7 are independently selected from hydrogen, methyl, ethyl and benzyl; or (iii) COOR8 where R8 is C1-C4 alkyl; and n is 2 or 3;
(g) optionally substituted phenyl, where the substituents are independently selected from mono- and di-(C1-C4 alkyl); mono- and dihalo; mono-, di-, and tri-(C1-C4 alkoxy); mono- and dicyano; nitro; methylsulfonyl; mono-, di-, and (trifluoromethyl); C1-C2 alkyleneoxy; C1-C2 alkylenedioxy; \u2014(CH2)qCOOR9 where R9 is C1-C4 alkyl; or \u2014(CH2)qNR10R11 where R10 and R11 are independently hydrogen, (C1-C4) alkyl, COR12 where R12 is C1-C4 alkyl, SO2R13 where R13 is C1-C4 alkyl, or COOR14 where R14 is C1-C4 alkyl and CONR\u2032R\u2033; and g is an integer from 1 to 4;
(h) optionally substituted benzyl, where the substituents are selected from mono-, di-, and tri-(C1-C4) alkyl; mono-, di-, and tri-halo; mono-, di-, and tri-(C1-C4 alkoxy); mono-, di-, and tri-(C1-C4 alkylthio); mono- and dicyano; nitro; methylsulfonyl; mono-, di-, and tri-(trifluoromethyl); mono-, di-, and tri-COOR\u2032; mono-, di-, and tri-CONR\u2032R\u2033; mono-, di-, and tri-NR27R28 where R27 and R28 are independently selected from hydrogen, C1-C4 alkyl, acetyl, and methylsulfonyl; C1-C2 alkyleneoxy; C1-C2 alkylenedioxy; and mono-, di-, and tri-(C1-C6 alkoxyalkyl);
(i) a saturated or unsaturated fused ring carbocyclic group having from 8 to 10 ring atoms; or
(j) methylene-1- or 2-naphthyl;
and R4 is hydrogen.
95. A compound having the formula
in which R1 and R2 are both benzyl and R4 is hydrogen.
96. The compound of claim 92, wherein
R1 is
(a) C1-C6 alkyl, optionally substituted with one or more groups selected from halo, hydroxy, cyano, nitro, COOH and COOCH3;
(b) C2-C6 alkenyl optionally substituted with one or more groups selected from halo, hydroxy, cyano, nitro, COON and COOCH3;
(c) C3-C6 cycloalkyl optionally substituted with one or more groups selected from halo, hydroxy, cyano, nitro, COOH and COOCH3;
(d) adamantyl;
(e) optionally substituted phenyl in which the substituents are selected from mono- and dihalo, mono- and di-(C1-C4 alkoxy), mono- and di-(C1-C4 alkylthio), C1-C2 alkyleneoxy; C1-C2 alkylenedioxy, mono- and di-(C1-C4 alkyl), mono- and di-(trifluoromethyl), mono- and di-(C1-C4 hydroxyalkyl), mono- and di-(C1-C4 alkoxyalkyl), mono- and di-hydroxy, mono- and di-cyano, mono- and di-(COCH3), and mono- and di-NHR26;
(f) a 5- or 6-membered saturated or unsaturated heterocyclic group having from one to three heteroatoms selected from nitrogen, oxygen and sulfur, optionally substituted by from 1 to 3 groups independently selected from halo, C1-C4 alkyl, C1-C4 alkoxy, oxo and hydroxy;
(g) optionally substituted benzyl in which the substituents are selected from mono- and dihalo, mono- and di-(C1-C4 alkoxy), mono- and di-(C1-C4 alkylthio), C1-C2 alkyleneoxy; C1-C2 alkylenedioxy, mono- and di-(C1-C4 alkyl), mono- and di-(trifluoromethyl), mono- and di-(C1-C4 hydroxyalkyl), mono- and di-(C1-C4 alkoxyalkyl), mono- and di-hydroxy, mono- and di-cyano, mono- and di-(COCH3), and mono- and di-NHR26;
(h) naphthyl; or
(i) CH2XR5, where X is oxygen, sulfur, \u2014NH\u2014 or \u2014CH2\u2014 and R5 is selected from (i) C1-C6 alkyl; (ii) C3-C6 cycloalkyl; (iii) optionally substituted phenyl in which the substituents are selected from mono- and di-(C1-C4 alkyl), mono- and dihalo, mono- and di-(C1-C4 alkoxy), C1-C2 alkyleneoxy, C1-C2 alkylenedioxy, mono- and di-(trifluoromethyl), nitro, hydroxy, mono- and di-(C1-C4 hydroxyalkyl), mono- and di-(C1-C4 alkoxyalkyl), mono- and di-hydroxy, mono- and dicyano, mono- and di-(COCH3), and mono- and di-NHR26; (iv) benzyl; (v) 2-carbamide-indolyl; or (vi) a 5- to 9-membered saturated or unsaturated heterocyclic group having from one to three heteroatoms selected from nitrogen, oxygen and sulfur optionally substituted by from 1 to 3 groups independently selected from halo, C1-C4 alkyl, C1-C4 alkoxy, oxo and hydroxy;
R2 is
(a) C1-C12 alkyl optionally substituted with one or more groups selected from halo, hydroxy, cyano, nitro, COOH and COOCH3;
(b) C2-C8 cycloalkyl optionally substituted with one or more groups selected from halo, hydroxy, cyano, nitro, COOH and COOCH3;
(c) C2-C12 alkenyl optionally substituted with one or more groups selected from halo, hydroxy, cyano, nitro, COOH and COOCH3;
(d) C2-C12 alkoxyalkyl;
(e) a 5- or 6-membered saturated or unsaturated heterocyclic group having from one to three heteroatoms selected from nitrogen, oxygen and sulfur, optionally substituted by from 1 to 3 groups independently selected from halo, C1-C4 alkyl, C1-C4 alkoxy, oxo, and hydroxy;
(f) \u2014(CH2)nR3, where R3 is (i) a 5- to 9-membered saturated or unsaturated heterocyclic group having from one to three heteroatoms selected from nitrogen, oxygen and sulfur, optionally substituted by from 1 to 3 groups independently selected from halo, C1-C4 alkyl, C1-C4 alkoxy, oxo, and hydroxy; (ii) \u2014NR6R7 where R6 and R7 are independently selected from hydrogen, methyl, ethyl and benzyl; or (iii) COORS where R8 is C1-C4 alkyl; and n is 2 or 3;
(g) optionally substituted phenyl, where the substituents are independently selected from mono- and di-(C1-C4 alkyl); mono- and dihalo; mono-, di-, and tri-(C1-C4 alkoxy); mono- and dicyano; nitro; methylsulfonyl; mono-, di-, and tri-(trifluoromethyl); C1-C2 alkyleneoxy; C1-C2 alkylenedioxy; \u2014(CH2)qCOOR9 where R9 is C1-C4 alkyl; or \u2014(CH2)qNR10R11 where R10 and R11 are independently hydrogen, (C1-C4) alkyl, COR12 where R12 is C1-C4 alkyl, SO2R13 where R13 is C1-C4 alkyl, or COOR14 where R14 is C1-C4 alkyl and CONR\u2032R\u2033; and q is an integer from 1 to 4;
(h) optionally substituted benzyl, where the substituents are selected from mono-, di-, and tri-(C1-C4) alkyl; mono-, di-, and tri-halo; mono-, di-, and tri-(C1-C4 alkoxy); mono-, di-, and tri-(C1-C4 alkylthio); mono- and di-cyano; nitro; methylsulfonyl; mono-, di-, and tri-(trifluoromethyl); mono-, di-, and tri-COOR\u2032; mono-, di-, and tri-CONR\u2032R\u2033; mono-, di-, and tri-NR27R28 where R27 and R28 are independently selected from hydrogen, C1-C4 alkyl, acetyl, and methylsulfonyl; C1-C2 alkyleneoxy; C1-C2 alkylenedioxy; and mono-, di-, and tri-(C1-C6 alkoxyalkyl);
(i) a saturated or unsaturated fused ring carbocyclic group having from 8 to 10 ring atoms; or
(j) methylene-1- or 2-naphthyl; and
R4 is
(a) hydrogen;
(b) (CH2)mCOOR\u2032 where m is 0, 1 or 2;
(c) CONR16R17 where R16 and R17 are independently (i) hydrogen; (ii) C1-C5 alkyl optionally substituted with one or more groups selected from halo, hydroxy, cyano, nitro, COOH and COOCH3; (iii) C3-C6 cycloalkyl; (iv) C2-C8 alkoxyalkyl; (v) a 5- to 10-membered saturated or unsaturated heterocyclic group having from one to three heteroatoms selected from nitrogen, oxygen and sulfur optionally substituted by from 1 to 3 groups independently selected from halo, hydroxy, oxo, C1-C4 alkyl, C1-C4 alkoxy, COCH3, COOR\u2032, and NR29R30 where R29 and R30 are independently selected from hydrogen, C1-C4 alkyl, acetyl, or methylsulfonyl; (vi) a saturated or unsaturated fused ring carbocyclic group having from 8 to 10 ring atoms; (vii) (CH2)pR18 where R18 is a 5- or 6-membered saturated or unsaturated heterocyclic group having from 1 to 3 heteroatoms selected from nitrogen, oxygen and sulfur, optionally substituted by from 1 to 3 groups independently selected from halo, hydroxy, C1-C4 alkyl, C1-C4 alkoxy and oxo, and p is 1, 2 or 3; (viii) phenyl optionally substituted by one or more groups independently selected from mono-, di-, and tri-halo, mono-, di-, and tri-hydroxy, mono-, di-, and tri-(C1-C4 alkyl), C1-C2 alkyleneoxy, C1-C2 alkylenedioxy, COOR\u2032, and NR29R30 where R29 and R30 are independently selected from hydrogen, C1-C4 alkyl, acetyl, and methylsulfonyl; (ix) optionally substituted benzyl where the substituents are selected from mono-, di-, and tri-(C1-C4 alkyl); mono-, di-, and tri-halo; mono-, di-, and tri-(C1-C4 alkoxy); nitro; methylsulfonyl; mono-, di-, and tri-(trifluoromethyl); NR\u2032R\u2033; C1-C2 alkyleneoxy; C1-C2 alkylenedioxy; or (x) an aralkyl group comprising a chain of from 1 to 4 methylene groups substituted by one or two phenyl groups;
(d) C1-C4 alkoxy;
(e) optionally substituted phenoxy, where the substituents are independently selected from mono- and di-(C1-C4) alkyl; mono- and dihalo; mono-, di-, and tri-(C1-C4 alkoxy); cyano; nitro; methylsulfonyl; mono-, di-, and tri-trifluoromethyl; C1-C2 alkyleneoxy; C1-C2 alkylenedioxy; \u2014(CH2), COOR9 where R9 is C4 alkyl; or \u2014(CH2)rNR30R31 where R30 and R31 are independently hydrogen, (C1-C4) alkyl, COR32 where R32 is C1-C4 alkyl, SO2R33 where R33 is C1-C4 alkyl, or COOR34 where R34 is C1-C4, alkyl;
(f) SO2NR35R36 where R35 and R36 are independently hydrogen, C1-C4 alkyl or phenyl; or
(g) NR37R38 where R37 and R38 are independently hydrogen; C1-C4 alkyl; phenyl; COR39 where R39 is C1-C47 alkyl; or SO2R40 where R40 is hydrogen or C1-C4 alkyl;
wherein R26 is COCH3, SO2CH3, SO2C6H3, COOR\u2032 or CONR\u2032R\u2033; and
wherein R\u2032 and R\u2033 are independently hydrogen or C1-C4 alkyl;
and pharmaceutically acceptable salts thereof.
97. The compound of claim 92, wherein
R1 is phenyl, substituted phenyl, a 5- or 6-membered saturated or unsaturated heterocyclic group having from one to three heteroatoms selected from nitrogen, oxygen and sulfur optionally substituted by from 1 to 3 groups independently selected from halo, alkyl, alkoxy, oxo or hydroxy, or CH2XR5; R2 is benzyl, substituted benzyl, C2-C4 alkyl, or \u2014(CH2)2R3, where R3 is a 5- to 6-membered saturated or unsaturated heterocyclic group having from one to three heteroatoms selected from nitrogen, oxygen and sulfur; and R4 is hydrogen.
98. The composition of claim 92, wherein R1 is phenyl.
99. The composition of claim 92, wherein R1 is substituted phenyl.
100. The composition of claim 92, wherein R1 is mono- or dihalophenyl.
101. The composition of claim 100, wherein R1 is 3,4-dichlorophenyl.
102. The composition of claim 92, wherein R1 is a 5- or 6-membered saturated or unsaturated heterocyclic group having from one to three heteroatoms selected from nitrogen, oxygen and sulfur, optionally substituted by from 1 to 3 groups independently selected from halo, C1-C4 alkyl, C1-C4 alkoxy, oxo or hydroxy.
103. The composition of claim 92, wherein R1 is thienyl.
104. The composition of claim 92, wherein R1 is CH2XR5, where X is oxygen, sulfur, \u2014NH\u2014 or \u2014CH2\u2014 and R5 is selected from (i) C1-C6 alkyl; (ii) C3-C6 cycloalkyl; (iii) optionally substituted phenyl in which the substituents are selected from mono- and di-(C1-C4 alkyl), mono- and dihalo, mono- and di-(C1-C4 alkoxy), C1-C2 alkyleneoxy, C1-C2 alkylenedioxy, mono- and di-(trifluoromethyl), nitro, hydroxy, mono- and di-(C1-C4 hydroxyalkyl), mono- and di-(C1-C4 alkoxyalkyl), mono- and di-hydroxy, mono- and dicyano, mono- and di-(COCH3), and mono- and di-NHR26; (iv) benzyl; (v) 2-carbamide-indolyl; or (vi) a 5- to 9-membered saturated or unsaturated heterocyclic group having from one to three heteroatoms selected from nitrogen, oxygen and sulfur, optionally substituted by from 1 to 3 groups independently selected from halo, C1-C4 alkyl, C1-C4 alkoxy, oxo and hydroxy.
105. The composition of claim 104, wherein R1 is CH2XR5 and R5 is phenyl, substituted phenyl, or benzyl.
106. The composition of claim 104, wherein X is oxygen
107. The composition of claim 106, wherein R5 is benzyl, phenyl, or substituted phenyl.
108. The composition of claim 107, wherein R5 is phenyl.
109. The composition of claim 107, wherein R5 is 4-chlorophenyl.
110. The composition of claim 107, wherein R3 is benzyl.
111. The composition of claim 92, wherein R2 is benzyl.
112. The composition of claim 92, wherein R2 is substituted benzyl.
113. The composition of claim 96, wherein R2 is benzyl or substituted benzyl.
114. The composition of claim 113, wherein R2 is benzyl substituted by an a C1-C4 alkyl group, a C1-C4 alkoxy group, or a halogen.
115. The composition of claim 113, wherein R2 is 4-methylbenzyl.
116. The composition of claim 113, wherein R2 is 4-methoxybenzyl.
117. The composition of claim 113, wherein R2 is 4-fluorobenzyl.
118. The composition of claim 92, wherein R2 is a C2-C4 alkyl group.
119. The composition of claim 118, wherein R2 is ethyl.
120. The composition of claim 118, wherein R2 is n-butyl.
121. The composition of claim 92, wherein R2 is \u2014(CH2)2R3, where R3 is a 5- to 6-membered saturated or unsaturated heterocyclic group having from one to three heteroatoms selected from nitrogen, oxygen and sulfur.
122. The composition of claim 121, wherein R3 is 1-piperidino.
123. The composition of claim 92, wherein R4 is hydrogen.
124. The composition of claim 92, wherein further providing that:
if R1 is 4-chlorophenoxymethyl and R4 is hydrogen, then R2 is not methyl or 2-(N,N,-diethylamino)ethyl;
if R1 is phenoxymethyl and R4 is hydrogen, then R2 is not 2-(N,N,-diethylamino)ethyl;
if R1 is phenyl and R4 is hydrogen, then R2 is not methyl;
if R1 is 4-chlorophenyl and R4 is hydrogen then R2 is not methyl, n-butyl or allyl;
if is 4-bromophenyl and R4 is hydrogen, then R2 is not n-butyl or benzyl;
if R1 is 4-methylphenyl and R4 is hydrogen, then R2 is not n-propyl;
if R1 is 2-furyl and R4 is hydrogen, then R2 is not benzyl or (4-chlorobenzyl);
if R1 is methyl and R4 is hydrogen, then R2 is not methyl or ethyl;
if R1 is t-butyl and R4 is hydrogen, then R2 is not 4-chlorobenzyl; and
if R1 is 1-naphthyl and R4 is hydrogen, then R2 is not methyl.
125. The composition of claim 92, wherein further providing that:
if R1 is 4-chlorophenoxymethyl, then R2 is not methyl or 2-(N,N,-diethylamino)ethyl;
if R1 is phenoxymethyl, then R2 is not 2-(N,N,-diethylamino)ethyl;
if R1 is phenyl, then R2 is not methyl;
if R1 is 4-chlorophenyl, then R2 is not methyl, n-butyl or allyl;
if R1 is 4-bromophenyl, then R2 is not n-butyl or benzyl;
if R1 is 4-methylphenyl, then R2 is not n-propyl;
if R1 is 2-furyl, then R2 is not benzyl or (4-chlorobenzyl);
if R1 is methyl, then R2 is not methyl or ethyl;
if R1 is t-butyl, then R2 is not 4-chlorobenzyl; and
if R1 is 1-naphthyl, then R2 is not methyl.
126. The composition of claim 92 further comprising a pharmaceutically acceptable diluent or carrier.
127. The composition of claim 92 further comprising (a) an anesthetically or analgesically effective amount of the compound and (b) a pharmaceutically acceptable diluent or carrier.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A movable body apparatus including a movable body which substantially moves along a predetermined plane, the apparatus comprising:
a reflection surface which is arranged at one of the movable body and the outside of the movable body, with a first direction within a plane parallel to the predetermined plane serving as a longitudinal direction, and having a predetermined width in a second direction orthogonal to the first direction;
a measurement device which has a plurality of sensors, each of the plurality of sensors measuring positional information of the movable body in a third direction orthogonal to the predetermined plane at a plurality of measurement points placed on the reflection surface; and
a controller which performs position control of the movable body,
wherein:
the placement of the plurality of measurement points is decided so that of the plurality of measurement points, n points (wherein, n is an integer of two or more) or more are positioned within the predetermined width on the reflection surface, and when the movable body is at a predetermined position, n+1 or more of the plurality of measurement points are positioned to be within the predetermined width on the reflection surface, and
the controller performs the position control of the movable body, using first measurement information that includes measurement information at a first measurement point out of the n points or more measurement points positioned within the predetermined width on the reflection surface or the n+1 or more measurement points positioned within the predetermined width on the reflection surface when the movable body is at the predetermined position, and switches measurement information used for the position control of the movable body to second measurement information that includes measurement information at a second measurement point which is different from the first measurement point, in the case where abnormality occurs in the first measurement information due to malfunction of at least one of the plurality of sensors when the movable body is at a position where the measurement at the first measurement point is performed.
2. The movable body apparatus according to claim 1 wherein
the reflection surface is arranged on a surface substantially parallel to the predetermined plane of the movable body.
3. The movable body apparatus according to claim 2 wherein
in the movable body, the reflection surface is arranged apart in a pair in the second direction, and
the placement of the measurement points is decided so that the n or more measurement points are constantly positioned in at least one of the pair of reflection surfaces when the movable body is in a predetermined range within the predetermined plane.
4. The movable body apparatus according to claim 1 wherein
each of the first measurement information and the second measurement information includes measurement information at a plurality of measurement points.
5. The movable body apparatus according to claim 1 wherein
each of the first measurement information and the second measurement information is measurement information at one measurement point.
6. The movable body apparatus according to claim 1 wherein
the measurement device has a plurality of heads which irradiate measurement beams on the measurement point, and
the controller performs the switching when the abnormality in the measurement information occurs due to malfunction of the heads.
7. The movable body apparatus according to claim 1 wherein
the measurement device has a plurality of heads which irradiate measurement beams on a measurement point, and the plurality of heads irradiate the measurement beams on different measurement points, respectively.
8. The movable body apparatus according to claim 1 wherein
the measurement points are placed in the second direction, each spaced apart by half or less than half the predetermined width of the reflection surface at a substantially equal distance.
9. The movable body apparatus according to claim 1 wherein
the measurement device has a first and second head which irradiate measurement beams on a same measurement point, and
an irradiation area of the measurement beam irradiated from the first head is in proximity with an irradiation area of the measurement beam irradiated by the second head, without overlapping.
10. A pattern formation apparatus that forms a pattern on an object, the apparatus comprising:
a patterning device which forms the pattern on the object, and
the movable body apparatus according to claim 1 in which the object is mounted on the movable body.
11. The pattern formation apparatus according to claim 10 wherein
the object has a sensitive layer, and the patterning device forms the pattern on the object by exposing the sensitive layer.
12. An exposure apparatus that forms a pattern on an object by irradiating an energy beam, the apparatus comprising:
a patterning device that irradiates the energy beam on the object;
the movable body apparatus according to claim 1 in which the object is mounted on the movable body, and
a driver which drives the movable body to make the object relatively move with respect to the energy beam.
13. A device manufacturing method comprising:
exposing an object using the exposure apparatus according to claim 12; and
developing the object that has been exposed.
14. A movable body apparatus including a movable body which substantially moves along a predetermined plane, the apparatus comprising:
a reflection surface which is arranged at one of the movable body and the outside of the movable body, with a first direction within a plane parallel to the predetermined plane serving as a longitudinal direction, and which has a predetermined width in a second direction orthogonal to the first direction;
a measurement device which measures positional information of the reflection surface in a third direction orthogonal to the predetermined plane at a plurality of measurement points placed on the reflection surface, the measurement device having a plurality of head sets each of which includes a first head that irradiates a measurement beam on a first measurement point and a second head that irradiates a measurement beam on the first measurement point concurrently with the first head; and
a controller which controls a position of the movable body using measurement information generated by the first head, and also switches the measurement information used from the measurement information generated by the first head to measurement information generated by the second head in the case where abnormality occurs in the measurement information generated by the first head, wherein
the controller performs the switching when the abnormality in the measurement information occurs due to malfunction of at least one of the first head and the second head.
15. The movable body apparatus according to claim 14 wherein
the reflection surface is arranged on a surface substantially parallel to the predetermined plane of the movable body.
16. The movable body apparatus according to claim 14 wherein
measurement points, on which the measurement beams are irradiated by the first head and the second head included in the head sets, are placed, each by the predetermined width, at a substantially equal distance.
17. The movable body apparatus according to claim 14 wherein
in the measurement device, at least a part of a measurement area where the measurement beam of the first head irradiates overlaps at least a part of a measurement area where the measurement beam of the second head irradiates.
18. A pattern formation apparatus that forms a pattern on an object, the apparatus comprising:
a patterning device which forms the pattern on the object, and
the movable body apparatus according to claim 14 in which the object is mounted on the movable body.
19. The pattern formation apparatus according to claim 18 wherein
the object has a sensitive layer, and the patterning device forms the pattern on the object by exposing the sensitive layer.
20. An exposure apparatus that forms a pattern on an object by irradiating an energy beam, the apparatus comprising:
a patterning device that irradiates the energy beam on the object;
the movable body apparatus according to claim 14 in which the object is mounted on the movable body; and
a driver which drives the movable body to make the object relatively move with respect to the energy beam.
21. A device manufacturing method comprising:
exposing an object using the exposure apparatus according to claim 20; and
developing the object that has been exposed.
22. A movable body apparatus including a movable body which substantially moves along a predetermined plane including a first direction and a second direction orthogonal to the first direction, the apparatus comprising:
a measurement device which measures positional information of the movable body in a direction orthogonal to the predetermined plane, at a plurality of measurement points placed in a movement range of the movable body, whereby
the measurement device has a plurality of heads disposed along the first direction and along the second direction, each of the plurality of heads concurrently generating measurement information regarding a same measurement point when the movable body is located at a predetermined position.
23. The movable body apparatus according to claim 22 wherein
the head is placed at the movable body.
24. The movable body apparatus according to claim 22 wherein
the movable body has a reflection surface which reflects measurement beams irradiated from the heads.
25. The movable body apparatus according to claim 22 wherein
the plurality of heads includes a first head and a second head which irradiate measurement beams on the same measurement point of the plurality of measurement points when the movable body is at the predetermined position, and
at the measurement point, at least a part of an irradiation area of the measurement beam irradiated from the first head overlaps at least a part of an irradiation area of the measurement beam irradiated from the second head.
26. The movable body apparatus according to claim 22 wherein
the plurality of heads includes a first head and a second head which irradiate measurement beams on the same measurement point of the plurality of measurement points when the movable body is at the predetermined position, and
at the measurement point, an irradiation area of the measurement beam irradiated from the first head is in proximity with an irradiation area of the measurement beam irradiated from the second head, without overlapping.
27. The movable body apparatus according to claim 22 wherein
the plurality of heads includes a first head and a second head which irradiate measurement beams on the same measurement point of the plurality of measurement points when the movable body is at the predetermined position, and the apparatus further comprises:
a controller which controls a position of the movable body using measurement information generated by the first head of the plurality of heads irradiating measurement beams on the same measurement point, and also switches the measurement information used from the measurement information generated by the first head to measurement information generated by the second head of the plurality of heads in the case where abnormality occurs in the measurement information generated by the first head.
28. The movable body apparatus according to claim 27 wherein
the controller performs the switching when the abnormality in the measurement information occurs due to malfunction of the heads.
29. A pattern formation apparatus that forms a pattern on an object, the apparatus comprising:
a patterning device which forms the pattern on the object, and
the movable body apparatus according to claim 22 in which the object is mounted on the movable body.
30. The pattern formation apparatus according to claim 29 wherein
the object has a sensitive layer, and the patterning device forms the pattern on the object by exposing the sensitive layer.
31. An exposure apparatus that forms a pattern on an object by irradiating an energy beam, the apparatus comprising:
a patterning device that irradiates the energy beam on the object;
the movable body apparatus according to claim 22 in which the object is mounted on the movable body, and
a driver which drives the movable body to make the object relatively move with respect to the energy beam.
32. A device manufacturing method comprising:
exposing an object using the exposure apparatus according to claim 31; and
developing the object that has been exposed.