What is claimed is:
1. A deposited-film formation apparatus for forming a deposited film on a substrate by;
generating plasma in a discharge space defined between a power-applying electrode and the substrate in a vacuum chamber, the substrate being servable as an electrode disposed opposingly to the power-applying electrode; and
decomposing a material gas fed into the vacuum chamber, wherein;
the substrate has a flexibility, and the power-applying electrode is provided with an undulation on its surface on the side of discharge space in such a way that the distance between the substrate and the power-applying electrode comes to be a desired value in agreement with the curving of the substrate.
2. The deposited-film formation apparatus according to claim 1, wherein the undulation is formed in agreement with the curving of the substrate in the course of its transportation.
3. A deposited-film formation apparatus for forming a deposited film on a substrate by;
generating plasma in a discharge space defined between a power-applying electrode and the substrate in a vacuum chamber, the substrate being servable as an electrode disposed opposingly to the power-applying electrode; and
decomposing a material gas fed into the vacuum chamber, wherein;
the power-applying electrode has a structure comprising a plurality of sheets or a plurality of columnar members which are bundled upright with respect to the substrate.
4. The deposited-film formation apparatus according to claim 3, wherein the substrate has a flexibility, and the power-applying electrode is an electrode which is pressed against the surface of the substrate in such a way that individual sheets or individual columnar members constituting the power-applying electrode come into contact with that surface at their upper ends so that a curved shape of the substrate is transferred to the surface of the power-applying electrode.
5. The deposited-film formation apparatus according to claim 3, wherein a means for pressing the power-applying electrode against the surface of the substrate in such a way that individual sheets or individual columnar members constituting the power-applying electrode come into contact with that surface is further provided at the power-applying electrode on its side opposite to the substrate side.
6. The deposited-film formation apparatus according to claim 3, which has a mechanism for transporting the substrate and wherein the surface that connects substrate-side ends of the plurality of sheets or plurality of columnar members is so formed as to be in agreement with the curving of the substrate in the course of its transportation.
7. A deposited-film formation process comprising the step of:
generating plasma in a discharge space defined between a power-applying electrode and the substrate in a vacuum chamber, the substrate being servable as an electrode disposed opposingly to the power-applying electrode; and
decomposing a material gas fed into the vacuum chamber, to form a deposited film on the substrate while the substrate is transported,
wherein;
the process further comprises the steps of:
providing the power-applying electrode with an undulation on its surface in agreement with the curving of the substrate in the course of its transportation; and
disposing the power-applying electrode in the vacuum chamber.
8. A deposited-film formation process comprising the steps of:
generating plasma in a discharge space defined between a power-applying electrode and the substrate in a vacuum chamber, the substrate being servable as an electrode disposed opposingly to the power-applying electrode; and
decomposing a material gas fed into the vacuum chamber, to form a deposited film on the substrate,
wherein;
the inside of the vacuum chamber is brought into conditions for forming the deposited film, and the deposited film is formed by generating the plasma after the power-applying electrode, constituted of a plurality of sheets or a plurality of columnar members which are bundled upright with respect to the substrate, is so pressed against the substrate as to come into contact with its surface to transfer a curved shape of the substrate to the surface of the power-applying electrode and then the power-applying electrode is separated from the surface of the substrate.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A ground-working tool, comprising:
a shaft;
a drive motor disposed in mechanical cooperation with the shaft;
a gear set configured to be driven by the drive motor;
at least one arm disposed in mechanical cooperation with the gear set and defining a longitudinal axis, wherein the at least one arm is movable proximally and distally in a reciprocating motion;
at least one head disposed in mechanical cooperation with the at least one arm; and
at least one blade being selectively removable from the at least one head.
2. The tool according to claim 1, wherein at least one of the head and the blade include attachment structure thereon to facilitate attachment between the head and the blade.
3. The tool according to claim 1, wherein the at least one blade includes an elongated ground-contacting surface, the elongated ground-contacting surface disposed substantially parallel to the longitudinal axis.
4. An attachment for use with a ground-working tool, the ground-working tool including a drive motor, a gear set configured to be driven by the drive motor, at least one arm disposed in mechanical cooperation with the gear set and defining a longitudinal axis wherein the at least one arm is movable proximally and distally in a reciprocating motion, the at least one head disposed in mechanical cooperation with the at least one arm; the attachment including:
at least one blade being selectively removable from the at least one head.
5. The attachment of claim 4, wherein the at least one blade includes an attachment structure thereon to facilitate attachment between the blade and the head of the ground-working tool.
6. The attachment of claim 4, wherein the at least one blade includes an elongated ground-contacting surface, the elongated ground-contacting surface disposed substantially parallel to the longitudinal axis of the ground-working tool.
7. The attachment of claim 4, wherein the at least one blade is configured to be snapped on to the at least one head.
8. The attachment of claim 4, wherein the at least one blade is longitudinally slidable with respect to the at least one head.
9. A package including at least one blade for use with a ground-working tool, the ground-working tool including a drive motor, a gear set configured to be driven by the drive motor, at least one arm disposed in mechanical cooperation with the gear set and defining a longitudinal axis wherein the at least one arm is movable proximally and distally in a reciprocating motion, the at least one head disposed in mechanical cooperation with the at least one arm; the package including:
at least one blade being selectively removable from the at least one head.
10. The package of claim 9, wherein the at least one blade includes an attachment structure thereon to facilitate attachment between the blade and the head of the ground-working tool.
11. The package of claim 9, wherein the at least one blade includes an elongated ground-contacting surface, the elongated ground-contacting surface disposed substantially parallel to the longitudinal axis of the ground-working tool.
12. The package of claim 9, wherein the at least one blade is configured to be snapped on to the at least one head.
13. The package of claim 9, wherein the at least one blade is longitudinally slidable with respect to the at least one head.