1. A method for packaging a microelectromechanical system (MEMS) device, comprising:
providing a ceramic header comprising ceramic material;
mechanically polishing the ceramic header;
thermally treating the ceramic header to fuse ceramic particles left from the mechanical polishing with surfaces of the ceramic header;
mounting a MEMS device chip onto the ceramic header;
establishing electrical connectors between the MEMS device chip and the ceramic header; and
coupling a capping element to the ceramic header to at least partially enclose the MEMS device chip within a cavity formed between the capping element and the ceramic header.
2. The method of claim 1, wherein the ceramic header comprises fired and metallized ceramic material.
3. The method of claim 2, wherein the ceramic material comprises aluminum oxide.
4. The method of claim 3, wherein the ceramic header comprises at least 90% aluminum oxide.
5. The method of claim 3, wherein the capping element is coupled to the ceramic header by welding a metallized seal ring to a metallic perimeter formed on a surface of the ceramic header.
6. The method of claim 5, wherein the capping element comprises transparent glass.
7. The method of claim 5, wherein the mechanical polishing includes grinding edges of the ceramic header.
8. The method of claim 7, wherein the edges include beveled edges.
9. The method of claim 7, wherein the thermally treating includes using one or more heat sources to generate a localized temperature in a range of approximately 1700 to 2300\xb0 C.
10. The method of claim 9, wherein the thermally treating comprises thermally polishing the edges with one or more flame sources.
11. The method of claim 10, wherein the MEMS device comprises a spatial light modulator.
12. The method of claim 11, wherein the spatial light modulator comprises a digital micromirror device.
13. The method of claim 10, wherein the MEMS device comprises an accelerometer, a gyroscope or a pressure sensor.
14. The method of claim 1, wherein the ceramic material comprises aluminum oxide.
15. The method of claim 1, wherein the capping element is coupled to the ceramic header by welding a metallized seal ring to a metallic perimeter formed on a surface of the ceramic header.
16. The method of claim 15, wherein the capping element comprises transparent glass.
17. The method of claim 1, wherein the mechanical polishing includes grinding edges of the ceramic header; and the edges include beveled edges.
18. A method for packaging a microelectromechanical system (MEMS) device, comprising:
providing a ceramic header comprising ceramic material;
grinding edges of the ceramic header;
thermally polishing the ceramic header with one or more flame sources to fuse particles left from grinding the edges with surfaces of the ceramic header;
mounting a MEMS device chip onto the ceramic header;
establishing electrical connectors between the MEMS device chip and the ceramic header; and
coupling a capping element to the ceramic header to enclose the MEMS device chip within a hermetically sealed cavity formed between the capping element and the ceramic header.
19. The method of claim 18, wherein the ceramic material comprises aluminum oxide.
20. The method of claim 19, wherein the capping element is coupled to the ceramic header by welding a metallized seal ring to a metallic perimeter formed on a surface of the ceramic header.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A burglarproof tool fitting holder device, being used for a multi-piece tool fitting, and comprising:
a tool fitting holder body, being formed with multiple joint parts, wherein the joint parts are set into a joint end of the tool fitting;
a fixture unit, being used to fasten the tool fitting and further comprising:
a fixing cover plate, being provided at one side of the body; and
a fixing pedestal, being provided at the other side of the body, combining with the fixing cover plate via two sides of the tool fitting, and fasten the tool fitting, the fixing pedestal being formed with multiple fixing spaces arranged in order, at least one rib being formed in each of two opposite inner fringes of the fixing cover plate and fixing space to wedge to a groove on the side of the tool fitting from outside of the tool fitting; wherein the fixing space is formed with a separator, each separator aims at and is inserted into a side of each of the tool fittings and extends towards one end of the fixing cover plate to combine with the fixing cover plate, wherein at least one rib is formed at the outside of the separator and used to wedge to the groove from the external side of the tool fitting;
thus, the at least one rib formed in the inner fringes of the fixing space, the at least one rib formed in the inner fringes of the fixing cover plate, and the at least one rib formed in the inner fringes of the outside of the separator respectively wedge the groove from the external side of the tool fitting, so that double effects of tool fitting hanging and protection against burglars may be attained.
2. The burglarproof tool fitting holder device according to claim 1, wherein at least one side of the tool fitting holder body is formed with a track securing the multiple joint parts equidistantly or un-equidistantly.
3. The burglarproof tool fitting holder device according to claim 2, wherein any of the ends of the track is formed with at least one notch and the joint part wedges and glides into the track from the notch.
4. The burglarproof tool fitting holder device according to claim 3, wherein the track is a T-shaped cross section and the notch is an I-shaped cross section.
5. The burglarproof tool fitting holder device according to claim 4, wherein the track further comprises a sealing part combining with the notch of I-shaped cross section and thus a T-shaped cross section is formed.
6. The burglarproof tool fitting holder device according to claim 1, wherein a suspension hole is formed on the tool fitting holder body.
7. The burglarproof tool fitting holder device according to claim 1, wherein the tool fitting holder body and multiple joint parts are integrally formed.