1. A device for evaluating a semiconductor sample, the device comprising:
a first illumination source producing an intensity modulated pump beam for periodically exciting a region on the sample in a manner to generate thermal and plasma waves which modulate the optical reflectivity of the sample;
a second illumination source producing a probe beam to reflect off the region on the sample surface that has been periodically excited wherein the probe beam has a spectral range selected from a group that includes: 395 to 410 nm and 355 to 365 nm;
optics for combining the pump and probe beams so that the pump and probe beams propagate collinearly to the sample;
a detector for monitoring the modulated changes in the power of the reflected probe beam and generating output signals in response thereto, said output signals corresponding to the modulated optical reflectivity of the sample; and
a processor for evaluating the sample using the detector output signals.
2. A device as recited in claim 1, wherein the spectral range of the probe beam is 400 to 405 nm.
3. A method for evaluating a semiconductor sample comprising the steps of:
periodically exciting a region on the sample with an intensity modulated pump beam in a manner to generate thermal and plasma waves which modulate the optical reflectivity of the sample;
focusing a probe beam collinearly with the pump beam, said probe beam having a spectral range selected from a group that includes: 395 to 410 nm and 355 to 365 nm;
monitoring the modulated changes in the power of the reflected probe beam and generating output signals in response thereto, said output signals corresponding to the modulated optical reflectivity of the sample; and
evaluating the sample using the output signals.
4. A method as recited in claim 3, wherein the spectral range of the probe beam is 400 to 405 nm.
5. A method as recited in claim 3, wherein the implantation dose of the sample is evaluated.
6. A method as recited in claim 3, wherein the junction depth of an implanted and annealed sample is evaluated.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A comfort bedding set, comprising:
a comfort quilt having a housing, the housing having a top panel, a bottom panel, sidewalls and end walls, the sidewalls and end walls connecting the top panel to the bottom panel, the top panel having an outer surface;
an insert member removably positioned in the housing;
a pocket positioned on the outer surface of the top panel of the housing;
a pillowcase; and
a removable facing panel attached to the pillowcase.
2. The comfort bedding set according to claim 1, wherein the sidewalls of said housing have an opening for removably positioning said insert in said housing.
3. The comfort bedding set according to claim 1, wherein said housing is fabricated from a soft supple material.
4. The comfort bedding set according to claim 1, wherein said insert comprises:
a plastic sheathing;
soft material sealed within the plastic sheathing; and
an electronic playback and sound producing device sealed within the plastic sheathing.
5. The comfort bedding set according to claim 1, wherein said pillowcase has an outer surface defining an area and said removable facing panel has an area substantially coextensive with the area of the outer surface of said pillowcase, the bedding set further comprising:
a first plurality of snap fasteners positioned on the outer surface of said pillowcase, and
a second plurality of snap fasteners positioned on said facing panel for mating with the first plurality of snap fasteners.
6. A comfort bedding set, comprising:
a comfort quilt having a housing, the housing having a top panel, a bottom panel, sidewalls and end walls, the sidewalls and end walls connecting the top panel to the bottom panel, the sidewalls having an opening defined therein, the top panel having an outer surface;
an insert member insertable through the opening in the sidewalls so that the insert member is removably positioned in the housing;
a fastener on the sidewalls for optionally closing the opening;
a closable pocket positioned on the outer surface of the top panel of the housing; and
a pillowcase; and
a removable facing panel attached to the pillowcase.
7. The comfort bedding set according to claim 6, wherein said housing is fabricated from a soft supple material.
8. The comfort bedding set according to claim 6, wherein said insert comprises:
a plastic sheathing;
soft material sealed within the plastic sheathing; and
an electronic playback and sound producing device sealed within the plastic sheathing.
9. The comfort bedding set according to claim 6, wherein said pillowcase has an outer surface defining an area and said removable facing panel has an area substantially coextensive with the area of the outer surface of the pillowcase, the bedding set further comprising:
a first plurality of snap fasteners positioned on the outer surface of said pillowcase; and
a second plurality of snap fasteners positioned on said removable a facing panel for mating with the first plurality of snap fasteners.
10. A comfort bedding set, comprising:
a comfort quilt having a housing, the housing being fabricated from a soft supple material and having a top panel, a bottom panel, sidewalls and end walls, the sidewalls and end walls connecting the top panel to the bottom panel, the sidewalls having an opening defined therein, the top panel having an outer surface;
an insert member insertable through the opening in the sidewalls so that the insert member is removably positioned in the housing;
a zipper on the sidewalls for optionally closing the opening in the sidewalls;
a closable pocket positioned on the outer surface of the top panel of the housing;
a pillowcase; and
a removable facing panel attached to the pillowcase.
11. The comfort bedding set according to claim 10, wherein said insert comprises:
a plastic sheathing;
soft material sealed within the plastic sheathing; and
an electronic playback and sound producing device sealed within the plastic sheathing.
12. The comfort bedding set according to claim 11, wherein said pillow case has an outer surface defining an area and said removable facing panel has an area substantially coextensive with the area of the outer surface, the bedding set comprising:
a first plurality of snap fasteners positioned on the outer surface; and
a second plurality of snap fasteners positioned on said removable facing panel for mating with the first plurality of snap fasteners.