1. A semiconductor manufacturing apparatus using a plurality of gases for processing, comprising:
a chamber into which said plurality of gases flow;
a plurality of mass flow controllers provided corresponding to said plurality of gases;
a plurality of mass flowmeters, a mass flowmeter measuring each flow rate of said plurality of gases;
a plurality of valves controlling each flow of said plurality of gases; and
a control unit controlling openingclosing of said plurality of valves such that said plurality of gases flow into said chamber directly during an operation of said semiconductor manufacturing apparatus, and controlling openingclosing of said plurality of valves such that anyone of said plurality of gases flows into said mass flowmeter when inspecting said mass flow controller, wherein
said control unit selects a mass flowmeter having an optimum flow rate range among said plurality of mass flowmeters in accordance with a flow rate range of a mass flow controller to be inspected.
2. The semiconductor manufacturing apparatus according to claim 1, wherein
said control unit calculates an actual flow rate of a gas based on a flow rate set for said mass flow controller to be inspected and a conversion factor, and selects a mass flowmeter having an optimum flow rate range among said plurality of mass flowmeters.
3. The semiconductor manufacturing apparatus according to claim 1, wherein
said control unit selects any mass flow controller for inspection from said plurality of mass flow controllers in accordance with an instruction, from an operator.
4. The semiconductor manufacturing apparatus according to claim 3, wherein
said control unit inspects said mass flow controller selected for inspection based on an inspection range of said mass flow controller and an increment of said inspection range set by the operator.
5. The semiconductor manufacturing apparatus according to claim 4, wherein
said control unit sets any value up to full scale for said mass flow controller as the inspection range of said mass flow controller.
6. The semiconductor manufacturing apparatus according to claim 1, wherein
said control unit determines if a mass flow controller under inspection is acceptable based on a predetermined reference value, and
said semiconductor manufacturing apparatus further comprising a display unit displaying a result of said determination of said control unit.
7. The semiconductor manufacturing apparatus according to claim 1, further comprising
a second mass flow controller provided in parallel to a first mass flow controller among said plurality of mass flow controllers, wherein
said first and second mass flow controllers are of a same type, and
said control unit controls openingclosing of said plurality of valves so that said second mass flow controller operates when an anomaly is detected in said first mass flow controller.
8. A semiconductor manufacturing apparatus using a plurality of gases for processing, comprising:
a chamber into which said plurality of gases flow;
a plurality of mass flow controllers provided corresponding to said plurality of gases;
a mass flowmeter measuring each flow rate of said plurality of gases;
a plurality of valves controlling each flow of said plurality of gases;
a control unit controlling openingclosing of said plurality of valves such that said plurality of gases flow into said chamber directly during an operation of said semiconductor manufacturing apparatus, and controlling openingclosing of said plurality of valves such that anyone of said plurality of gases flows into said mass flowmeter when inspecting said mass flow controller; and
an external port to which external inspection equipment is connected, wherein
said control unit controls openingclosing of said plurality of valves so that anyone of said plurality of gases flows into said external inspection equipment via said mass flowmeter and said external port.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
What is claimed is:
1. A photographing apparatus comprising:
an image pickup part which records a moving picture and photographs a still picture upon a photographing instruction given during recording of the moving picture;
a file recording part which records a moving picture file corresponding to the recorded moving picture and a still picture file corresponding to the photographed still picture; and
an information recording part which records a connection information indicating a correspondence between a section of the moving picture corresponding to a time of the photographing instruction and the still picture.
2. A photographing apparatus according to claim 1, wherein the file recording part records a connection information file storing the connection information.
3. A photographing apparatus according to claim 2, wherein the connection information file is renewed by adding pieces of connection information corresponding to still pictures newly photographed in response to a plurality of photographing instructions during recording of one moving picture.
4. A photographing apparatus according to claim 2, wherein the connection information is stored in part of the moving picture file.
5. A photographing apparatus according to claim 2, wherein the file recording part records a still picture file corresponding to a still picture photographed in response to a photographing instruction while no moving picture is recorded, and the connection information file is recorded only when both the moving picture file and the still picture file is recorded.
6. A photographing apparatus according to claim 2, further comprising:
an input part which receives instruction as to whether or not the recorded moving picture file is to be saved; and
a deletion part which deletes the recorded connection information when it is instructed not to save the moving picture file.
7. A photographing apparatus according to claim 1, wherein the moving picture file includes a plurality of still image frames, and the connection information includes respective names of the moving picture file and the still picture file, and a frame number specifying a still image frame which is a section of the moving picture file corresponding to the still picture.
8. A photographing apparatus according to claim 1, wherein the connection information includes respective names of the moving picture file and the still picture file, a recording start time and a recording end time of the moving picture, and a period between the recording start time and a time when the instruction is given to photograph the still picture.
9. A method for controlling recording of a moving picture and a still picture, comprising the steps of:
recording a moving picture;
generating a folder in a specified storage for each moving picture as the moving picture is recorded;
saving in a generated folder a moving picture file;
photographing a still picture in response to a photographing instruction given during recording of the moving picture; and
saving in a generated folder a still picture file corresponding to the photographed still picture.
10. A method according to claim 9, wherein the storage is provided with a storing folder for storing the moving picture file and the still picture file, and the folder for each moving picture is generated in the storing folder, and the still picture file corresponding to the still picture photographed in response to the photographing instruction given during a non-recording period of the moving picture is recorded in the storing folder and outside the generated folder.
11. A method according to claim 9, further comprising the step of recording a connection information file storing a connection information indicating a correspondence between the still picture and the section of the moving picture corresponding to the time of the photographing instruction in the generated folder.
12. A method according to claim 9, further comprising the step of setting name of the still picture file so as to include a character string which is part of name of the moving picture file and distinguish a plurality of moving picture files from one another.
13. A method according to claim 12, wherein the name of the still picture file is so set as to include a numerical value which varies according to the number of photographing instructions given during recording of one moving picture.
14. An image editing apparatus for editing still images which are frame images of a moving picture, the apparatus comprising:
a memory which stores a moving picture file storing a moving picture, and a connection information file storing a connection information indicating a predetermined correspondence between a specified still picture and a specific one of the still images;
a memory controller which renews a connection information on an edited specific still image of the saved connection information file, when the specific still image is edited.
15. An image editing apparatus according to claim 14, wherein the memory controller defines a correspondence between the specified still picture and a still image different from the specific still image.
16. An image editing apparatus according to claim 14, wherein the memory controller deletes the connection information on the edited specific still image from the saved connection information file.
17. An image editing apparatus according to claim 14, wherein the connection information file includes a frame number of the specific still image in the moving picture, and the memory controller deletes the frame number of the edited specific still image.
18. An image editing apparatus according to claim 14, wherein the connection information file includes name of the moving picture file, name of the still picture file storing a still picture corresponding to the specific still image, and a frame number specifying the specific still image in the moving picture.
19. An image editing apparatus according to claim 14, wherein the memory stores a still picture file including a first identifier indicating the correspondence to the specific still image in the file name, and the first identifier is changed to a second identifier indicating absence of the correspondence as the connection information is deleted.
20. An image editing apparatus according to claim 14, wherein the other still image is near to the specific still image in the term of time.