1. A laser processing method irradiating a planar object to be processed comprising a GaAs substrate with laser light while locating a converging point within the object, so as to form a modified region to become a starting point region for cutting in the GaAs substrate along a line to cut the object;
wherein the laser light is pulsed laser light having a pulse width of 31 to 54 ns.
2. A laser processing method according to claim 1, wherein the laser light has a pulse pitch of 7.5 to 10 \u03bcm.
3. A laser processing method according to claim 1, wherein, after forming the modified region, the object is cut along the line to cut from the modified region acting as a start point.
4. A laser processing method according to claim 1, wherein the modified region includes a molten processed region.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A magnetic driving element comprising:
a unit including a plurality of magnets supported on a yoke, the unit including a molding support region; and
a shell fully encapsulating the yoke and magnets with a continuous layer of polymer resin and free from any fused plastic at the molding support region, the molding support region configured to receive a support during molding of the shell;
a protective coating arranged over the magnets and the yoke and providing a barrier that seals the magnets relative to the yoke, wherein the shell is of a different material than that of the protective coating, and wherein the protective coating is an epoxy polyester powder coating;
a metallic sleeve arranged over the magnets, wherein gaps are formed between the magnets and the metallic sleeve, and the shell is arranged over the metallic sleeve; and
a potting material arranged in the gaps, wherein the protective coating is of a different material than the potting material, and wherein the potting material includes an epoxy resin with an elastomer and aluminum pigments.
2. A magnetic driving element comprising:
a unit including a plurality of magnets supported on a yoke, the unit including a molding support region; and
a shell fully encapsulating the yoke and the magnets with a continuous layer of polymer resin and free from any fused plastic at the molding support region, wherein the shell contains at least one of an ETFE and PFA materials having 0% to 35% reinforcing fibers;
a protective coating arranged over the magnets and the yoke providing a barrier that seals the magnets relative to the yoke, wherein the shell is of a different material than that of the protective coating, wherein an end of the yoke includes a molding support surface in the molding support region that is configured to receive a molding support during molding of the shell, the protective coating extending to the molding support surface, and wherein the protective coating is an epoxy polyester powder coating;
a metallic sleeve arranged over the magnets, wherein gaps are formed between the magnets and the metallic sleeve, and the shell is arranged over the metallic sleeve;
a potting material arranged in the gaps that includes an epoxy resin with an elastomer and aluminum pigments; and
a bonding material joins the shell and the metallic sleeve, the bonding material including an ETFE powder and an elastomer.