1. An error detection method comprising:
setting an integrated circuit to be tested to a stationary point wherein the integrated circuit comprises at least one inverter and wherein the at least one inverter is fixed to high or low;
supplying a voltage signal modulated at a predetermined frequency to the integrated circuit;
generating an observation signal containing information on power supply current flowing through the integrated circuit at the stationary point;
extracting a determination signal from the observation signal; and
detecting leak current and determining presence or absence of an error in the integrated circuit based on a size of spectral component of the determination signal at the predetermined frequency.
2. The error detection method according to claim 1, wherein the determination of the presence or absence of an error in the integrated circuit under test is performed based on a difference in size of the spectral component at a plurality of stationary points.
3. The error detection method according to claim 1, wherein the determination of the presence or absence of an error in the integrated circuit under test is performed based on a comparison result between a size of the spectral component at a plurality of stationary points and a reference value.
4. The error detection method according to claim 3, wherein the reference value is a size of the spectral component in a reference integrated circuit determined to be nondefective.
5. The error detection method according to claim 1 wherein the extraction of the determination signal removes DC component from the observation signal generated by converting power supply current flowing through the integrated circuit under test at the stationary point into a voltage and superposing the voltage onto the modulated voltage signal.
6. The error detection method according to claim 1, wherein the extraction of the determination signal calculates a differential signal between the observation signal generated by converting power supply current flowing through the integrated circuit under test at the stationary point into a voltage and superposing the voltage onto the modulated voltage signal and a DC signal after removing AC component from the modulated voltage signal, and removes DC component from the differential signal.
7. A signal extraction circuit comprising:
a power supply generator supplying a modulated voltage signal modulated at a predetermined frequency to an integrated circuit to be tested, wherein the integrated circuit is set at a stationary point and the integrated circuit comprises at least one inverter and wherein the at least one inverter is fixed to high or low; and
a determination signal extractor extracting a determination signal from an observation signal containing information on power supply current flowing through the integrated circuit at the stationary point and supplying the determination signal to a determination device which detects a leak current and determines presence or absence of an error in the integrated circuit based on a size of spectral component of the determination signal at the predetermined frequency.
8. The signal extraction circuit according to claim 7, wherein the determination signal extractor comprises:
an observation signal generator generating the observation signal by converting power supply current flowing through the integrated circuit under test at the stationary point into a voltage and superposing the voltage onto the modulated voltage signal; and
a DC component remover removing DC component from the observation signal and outputting the determination signal.
9. The signal extraction circuit according to claim 7, wherein the determination signal extractor comprises:
an observation signal generator generating the observation signal by converting power supply current flowing through the integrated circuit under test at the stationary point into a voltage and superposing the voltage onto the modulated voltage signal;
an AC component remover removing AC component from the modulated voltage signal;
a differential signal generator outputting a differential signal between the observation signal and a DC signal from the AC component remover; and
a determination signal output portion removing DC component from the differential signal and outputting the determination signal.
10. An error detection apparatus comprising:
a stationary point setting portion setting an integrated circuit to be tested at a stationary point, wherein the integrated circuit comprises at least one inverter and wherein the at least one inverter is fixed to high or low;
a power supply generator supplying a modulated voltage signal modulated at a predetermined frequency to the integrated circuit under test set at the stationary point;
a determination signal extractor extracting a determination signal from an observation signal containing information on power supply current flowing through the integrated circuit at the stationary point; and
a determinator which detects leak current and determines presence or absence of an error in the integrated circuit based on a size of spectral component of the determination signal at the predetermined frequency.
11. The error detection apparatus according to claim 10, wherein the determinator determines the presence or absence of an error in the integrated circuit under test based on a difference in size of the spectral component at a plurality of stationary points.
12. The error detection apparatus according to claim 10, wherein the determinator determines the presence or absence of an error in the integrated circuit under test based on a comparison result between a size of the spectral component at a plurality of stationary points and a reference value.
13. The error detection apparatus according to claim 12, wherein the reference value is a size of the spectral component in a reference integrated circuit determined to be nondefective.
14. The error detection apparatus according to claim 10, wherein the determinator performs Fourier transform on the determination signal, extracts a size of the spectral component at the predetermined frequency, and determines presence or absence of an error in the integrated circuit under test based on the extracted size of the spectral component.
15. The error detection apparatus according to claim 11, wherein the determinator performs Fourier transform on the determination signal, extracts a size of the spectral component at the predetermined frequency, and determines presence or absence of an error in the integrated circuit under test based on the extracted size of the spectral component.
16. The error detection apparatus according to claim 12, wherein the determinator performs Fourier transform on the determination signal, extracts a size of the spectral component at the predetermined frequency, and determines presence or absence of an error in the integrated circuit under test based on the extracted size of the spectral component.
17. The error detection apparatus according to claim 10, wherein the power supply generator comprises a power supply and a modulator superposing a sinusoidal wave at the predetermined frequency onto a voltage from the power supply.
18. The error detection apparatus according to claim 11, wherein the power supply generator comprises a power supply and a modulator superposing a sinusoidal wave at the predetermined frequency onto a voltage from the power supply.
19. The error detection apparatus according to claim 12, wherein the power supply generator comprises a power supply and a modulator superposing a sinusoidal wave at the predetermined frequency onto a voltage from the power supply.
20. The error detection apparatus according to claim 13, wherein the power supply generator comprises a power supply and a modulator superposing a sinusoidal wave at the predetermined frequency onto a voltage from the power supply.
21. The error detection method according to claim 1, wherein the presence or absence of an error in the integrated circuit is automatically determined by a computing unit.
22. The error detection method according to claim 1, further comprising removing DC component from the observation signal.
23. The signal extraction circuit according to claim 7, wherein the determination signal extractor removes DC component from the observation signal.
24. The error detection apparatus according to claim 10, wherein the determination signal extractor removes DC component from the observation signal.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An apparatus for replicating holographically recorded data, comprising:
a holographic master media having holographically recorded data thereon;
a light source, having a tunable wavelength, for generating a master reference beam, incident on the holographic master media, thereby generating a first object beam; and
a first copy-reference-beam-generating system including:
a holographic copy media;
a first optical relay system, disposed between the holographic master media and the holographic copy media, for relaying the first object beam from the holographic master media to the holographic copy media;
a reflective surface; and
a second optical relay system disposed between the holographic copy media and the reflective surface so that the optical axis of the second optical relay system is coincident with the optical axis of the first optical relay system, the second optical relay system relaying a portion of the first object beam transmitted by the holographic copy media to the reflective surface, the reflective surface reflecting the transmitted portion of the object beam at the holographic copy media, thereby generating a copy reference beam, the holographic copy media recording an interference pattern between the first object beam and the copy reference beam, thereby replicating at least a portion of holographically recorded data.
2. The apparatus of claim 1 wherein the first and, independently, the second optical relay systems of the first copy-reference-beam-generating system are telecentric in image andor object space.
3. The apparatus of claim 2 wherein the holographic master media is disposed within a resonant cavity, said resonant cavity comprising:
a partial reflector in the optical path of a master reference beam; and
a mirror, disposed in the optical path of a portion of the master reference beam that is not diffracted by the holographic master media, the mirror reflecting the undiffracted portion of the master reference beam at the holographic master media, the holographic master media diffracting the reflected master reference beam and the partial reflector reflecting the undiffracted portion of the reflected master reference beam at the holographic master media to provide an additional first object beam, thereby increasing diffraction efficiency of the holographic master media.
4. The apparatus of claim 3 wherein the resonant cavity can be rotated independently from the holographic master media, thereby changing the angle of incidence \u03b8m of the master reference beam onto the holographic master media, thereby multiplexing the master reference beam.
5. The apparatus of claim 4 wherein the angle of rotation of the resonant cavity is independent of the angle of incidence of the copy reference beam onto the holographic copy media.
6. The apparatus of claim 1 wherein the holographic copy media can be shifted along the direction of the optical axes of the first and the second optical systems of the first copy-reference-beam-generating system.
7. The apparatus of claim 1 further including a second copy-reference-beam-generating system disposed so that the optical axes of the first and the second optical relay systems of the first copy-reference-beam-generating system optionally coincide with the optical axes of the first and the second optical relay
systems of the second copy-reference-beam-generating system.
8. An apparatus for replicating holographically recorded data, comprising:
a first holographic master media having holographically recorded data thereon;
a second holographic master media having holographically recorded data thereon;
a light source, having tunable wavelength, for generating first and second master reference beams incident on the first and the second holographic master media, respectively, thereby generating first and second object beams;
a holographic copy media;
a first optical relay system, disposed between the first holographic master media and the holographic copy media, for relaying the first object beam from the first holographic master media to the holographic copy media; and
a second optical relay system, disposed between the second holographic master media and the holographic copy media, for relaying the second object beam from the second holographic master media to the holographic copy media,
wherein interference between the first and the second object beams is recorded in the holographic copy media thereby replicating at least a portion of holographically recorded data.
9. The apparatus of claim 8 wherein the first holographic master media is disposed within a first resonant cavity, said resonant cavity comprising:
a partial reflector in the optical path of the first master reference beam; and
a mirror, disposed in the optical path of a portion of the first master reference beam that is not diffracted by the first holographic master media, the mirror reflecting the undiffracted portion of the first master reference beam at the holographic master media, the first holographic master media diffracting the reflected master reference beam and the partial reflector reflecting the undiffracted portion of the reflected master reference beam at the holographic master media to provide an additional first object beam and increase diffraction efficiency of the holographic master media.
10. The apparatus of claim 8 wherein the second holographic master media is disposed within a second resonant cavity, said resonant cavity comprising:
a partial reflector in the optical path of the second master reference beam; and
a mirror, disposed in the optical path of a portion of the second master reference beam that is not diffracted by the second holographic master media, the mirror reflecting the undiffracted portion of the master reference beam at the second holographic master media, the second holographic master media diffracting the reflected master reference beam and the partial reflector reflecting the undiffracted portion of the reflected master reference beam at the holographic master media to provide an additional second object beam and increase diffraction efficiency of the second holographic master media.
11. A method for replicating holographically recorded data or mask data, comprising:
generating a first and a second master reference beam by at least one light source;
directing a first master reference beam at a first holographic master media or master mask media, thereby generating a first object beam;
directing the first object beam at a holographic copy media through a first optical relay system, disposed between the first holographic master media or master mask media and the holographic copy media;
directing a second master reference beam at a second holographic master media or master mask media, thereby generating a second object beam;
directing the second object beam at the holographic copy media through a second optical relay system, disposed between the second holographic master media or master mask media and the holographic copy media; and
recording in the holographic copy media the interference pattern between the said first and the second object beams.
12. The method of claim 11 further including
amplifying the diffraction efficiency of the first and the second holographic master media by disposing said first and second holographic master media in a first and a second resonant cavities that each includes:
a partial reflector in the optical path of the first or the second master reference beam; and
a mirror, disposed in the optical path of a portion of the first or the second master reference beam that is not diffracted by the first or the second holographic master media, respectively, the mirror reflecting the undiffracted portion of the said first or second master reference beam at the respective first or second holographic master media, the holographic master media diffracting the reflected master reference beam and the partial reflector reflecting the undiffracted portion of the reflected master reference beam at the respective holographic master media to provide an additional first object beam, respectively, and thereby increase diffraction efficiency of the said first and second holographic master media.
13. An apparatus for recording multiple layers of holographic data or mask data within holographic recording media, comprising:
means for generating a master reference beam;
means for directing a master reference beam at a holographic master media having holographically recorded data thereon or at a master mask media having structural data features thereon, thereby generating a first object beam;
means for relaying the first object beam from the holographic master media or master mask media to a first holographic copy media;
means for relaying a portion of the first object beam transmitted by the first holographic copy media to a first reflective surface, the first reflective surface reflecting the transmitted portion of the first object beam at the first holographic copy media to generate a first copy reference beam;
means for directing the first copy reference beam and the first object beam at the holographic copy media, so as to intersect at the holographic copy media and thereby recording an interference pattern between the first copy reference beam and the first object beam and replicating at least a portion of holographically recorded data or mask data; and
means for shifting the holographic copy media along the direction of an axis between the holographic master media or master mask media and the first reflective surface, thereby recording multiple layers of holographic data within the holographic copy media and replicating at least a portion of holographically recorded data or mask data in multiple layers.
14. An apparatus for replicating holographically recorded data or mask data, comprising:
means for generating a first and a second master reference beam;
means for directing a first master reference beam at a first holographic master media or first master mask media, thereby generating a first object beam;
means for directing the first object beam at a holographic copy media;
means for directing a second master reference beam at a second holographic master media or second master mask media, thereby generating a second object beam;
means for directing the second object beam at the holographic copy media; and
means for recording in the holographic copy media the interference pattern between the said first and the second object beams thereby replicating at least a portion of holographically recorded data or mask data.
15. An apparatus for replicating data, comprising:
a master mask media having structural data features thereon;
a light source, having a tunable wavelength, for generating a master reference beam, incident on the master mask media, thereby generating a first object beam; and
a first copy-reference-beam-generating system including:
a holographic copy media;
a first optical relay system, disposed between the master mask media and the holographic copy media, for relaying the first object beam from the master mask media to the holographic copy media;
a reflective surface; and
a second optical relay system disposed between the holographic copy media and the reflective surface so that the optical axis of the second optical relay system is coincident with the optical axis of the first optical relay system, the second optical relay system relaying a portion of the first object beam transmitted by the holographic copy media to the reflective surface, the reflective surface reflecting the transmitted portion of the object beam at the holographic copy media, thereby generating a copy reference beam, the holographic copy media recording an interference pattern between the first object beam and the copy reference beam, thereby replicating at least a portion of the mask data.
16. An apparatus for replicating data, comprising:
a first master mask media having structural data features thereon;
a second master mask media having structural data features thereon;
a light source, having tunable wavelength, for generating first and second master reference beams incident on the first and the second holographic master media, respectively, thereby generating first and second object beams;
a holographic copy media;
a first optical relay system, disposed between the first master mask media and the holographic copy media, for relaying the first object beam from the first master mask media to the holographic copy media; and
a second optical relay system, disposed between the second master mask media and the holographic copy media, for relaying the second object beam from the second master mask media to the holographic copy media,
wherein interference between the first and the second object beams is recorded in the holographic copy media thereby replicating at least a portion of mask data.