1. A method comprising:
forming a mask pattern over a semiconductor substrate;
forming a gate oxide layer over a top of the semiconductor substrate exposed through the mask pattern;
forming access gates which are self-aligned with both side walls of the mask pattern, over a top of the gate oxide layer;
removing the mask pattern;
forming first dielectric spacers to be attached to side walls of the access gates;
forming an insulating layer adapted to cover the access gates and the first dielectric spacers; and
forming two cell gates, which are self-aligned with opposite side walls of the two access gates, respectively, each first dielectric spacer being interposed between a corresponding cell gate and a corresponding access gate, said cell gates separately arranged over a top of the insulating layer.
2. The method of claim 1, wherein the method further comprises, after forming the two cell gates, selectively removing an exposed portion of the insulating layer using the cell gates as an etching mask.
3. The method of claim 2, wherein the method further comprises, after selectively removing the exposed portion of the insulating layer, forming source and drain junctions and an intermediate transfer node junction on portions of the semiconductor substrate which are exposed through the access gates and the cell gates, through ion implantation.
4. The method of claim 1, wherein the mask pattern is formed to include two distinct dielectric layers.
5. The method of claim 1, wherein the forming the access gates comprises:
forming an access gate layer to cover the mask pattern;
forming a second spacer layer over a top of the access gate layer; and
etching back the second spacer layer and the access gate layer.
6. The method of claim 1, wherein the forming the cell gates comprises:
forming a cell gate layer;
forming a third spacer layer over a top of the cell gate layer; and
etching back the third spacer layer and the cell gate layer.
7. The method of claim 1, wherein the insulating layer is an Oxide-Nitride-Oxide (ONO) layer.
8. The method of claim 1, wherein the method is a method of manufacturing an Electrically Erasable Programmable Read-Only Memory (EEPROM) device.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A split loading funnel for guiding a gob of molten glass that includes:
two or more individual funnel segments coupled together by mounting blocks, each of the individual funnel segments including an upper portion and a lower portion, the upper portions of the individual funnel segments together providing an inlet having an entrance plane, and the lower portions of the individual funnel segments together providing an outlet having an exit plane, wherein each of the lower portions of the individual funnel segments has a concave interior guide surface, and wherein a mounting block is secured between each pair of circumferentially adiacent lower portions of the two or more individual funnel segments to position the interior guide surfaces relative to one another such that the interior guide surfaces cooperate to define a guide passage extending along a longitudinal axis and terminating at the outlet.
2. The split loading funnel set forth in claim 1, wherein the two or more individual funnel segments comprise a first funnel segment with a first concave interior surface and a second funnel segment with a second concave interior surface.
3. The split loading funnel set forth in claim 1, wherein the split loading funnel comprises:
a first funnel segment that includes a lower portion and a lateral flange extending from each side of the lower portion, wherein the lower portion of the first funnel segment has a first concave interior guide surface;
a second funnel segment that includes a lower portion and a lateral flange extending from each side of the lower portion, wherein the lower portion of the second funnel segment has a second concave interior guide surface; and
a pair of mounting blocks, one of the mounting blocks securing one of the lateral flanges extending from the lower portion of the first funnel segment to one of the lateral flanges extending from the lower portion of the second funnel segment, and the other of the mounting blocks securing the other lateral flange extending from the lower portion of the first funnel segment to the other lateral flange extending from the lower portion of the second funnel segment.
4. The split loading funnel set forth in claim 3, wherein the first concave interior guide surface has a cross-sectional profile and the second concave interior guide surface has a cross-sectional profile.
5. The split loading funnel set forth in claim 4, wherein the cross-sectional profiles of the first and second concave interior guide surfaces are the same.
6. The split loading funnel set forth in claim 4, wherein the cross-sectional profiles of the first and second concave interior guide surfaces are different.
7. The split loading funnel set forth in claim 3, wherein the first funnel segment further includes a upper portion having a first concave interior surface angled outwardly from the first concave interior guide surface, wherein the second funnel segment further includes a upper portion having a second concave interior surface angled outwardly from the second concave interior guide surface, and wherein the first and second concave interior surfaces of the upper portions face each other to define the inlet that communicates with the, guide passage defined by the lower portions of the first and second funnel segments.
8. The split loading funnel set forth in claim 7, wherein the mounting blocks are tapered along their lengths to angle the first and second interior guide surfaces towards one another so that the cross-sectional area of the guide passage varies down the longitudinal axis.
9. The split loading funnel set forth in claim 3, wherein each of the pair of mounting blocks is tapered to angle the first and second interior guide surfaces towards one another so that the cross-sectional area of the guide passage progressively decreases down the longitudinal axis of the guide passage towards the outlet.
10. The split loading funnel set forth in claim 1, wherein the interior guide surfaces of the multiple individual funnel segments are heat-treated or coated to provide wear resistance, limit heat transfer, or lower friction.
11. A glassware forming machine that includes:
a blank mold for forming a molten glass gob into a glass parison;
a split loading funnel positioned above said blank mold to guide the molten glass gob into said blank mold, the split loading funnel comprising two or more individual funnel segments coupled together by mounting blocks, each of the individual funnel segments including an upper portion and a lower portion, the upper portions of the individual funnel segments together providing an inlet with an entrance plane through which the molten glass gob is received in the split loading funnel, and the lower portions of the individual funnel segments together providing an outlet having an exit plane through which the molten glass gob leaves the split loading funnel, wherein each of the lower portions of the individual funnel segments has a concave interior guide surface, and wherein a mounting block is secured between each pair of circumferentially adiacent lower portions of the two or more individual funnel segments to position the interior guide surfaces relative to one another such that the interior guide surfaces cooperate to define a guide passage that terminates at the outlet of the split loading funnel.
12. The machine set forth in claim 11, wherein the split loading funnel comprises:
a first funnel segment that includes a lower portion and a lateral flange extending from each side of the lower portion, wherein the lower portion of the first funnel segment has a first concave interior guide surface;
a second funnel segment that includes a lower portion and a lateral flange extending from each side of the lower portion, wherein the lower portion of the second funnel segment has a second concave interior guide surface; and
a pair of mounting blocks, one of the mounting blocks securing one of the lateral flanges extending from the lower portion of the first funnel segment to one of the lateral flanges extending from the lower portion of the second funnel segment, and the other of the mounting blocks securing the other lateral flange extending from the lower portion of the first funnel segment to the other lateral flange extending from the lower portion of the second funnel segment.
13. The apparatus set forth in claim 12, wherein a cross-sectional profile of the first concave interior guide surface and a cross-sectional profile of the second concave interior guide surface are different.