1. A retractable clothes dryer vent comprising:
a support;
a duct coupling mounted in the support and having a first duct coupling end, a second duct coupling end opposite the first duct coupling end, and a duct coupling opening extending through the support;
a dryer vent hose having a first hose end extending from the first duct coupling end of the duct coupling and a second hose end opposite the first hose end;
a dryer exhaust coupling extending from the second hose end;
a first retraction guide assembly having a first retraction guide assembly first end mounted to the support and a first guide retraction guide assembly second end anchored to the dryer exhaust coupling; and
a second retraction guide assembly having a second retraction guide assembly first end mounted to the support and a second guide retraction guide assembly second end anchored to the dryer exhaust coupling.
2. The retractable clothes dryer vent of claim 1, wherein:
the first retraction guide assembly comprises:
a first retractable spool assembly mounted to the support; and
a first retractable line extending from a first line first end to a first line second end opposite the first line first end, wherein the first line first end is maintained in the first retractable spool assembly, the first line second end is anchored to the dryer exhaust coupling, and the first retractable line is retractable into the first retractable spool assembly; and
the second retraction guide assembly comprises:
a second retractable spool assembly mounted to the support; and
a second retractable line extending from a second line first end to a second line second end opposite the second line first end, wherein the second line first end is maintained in the second retractable spool assembly, the second line second end is anchored to the dryer exhaust coupling, and the second retractable line is retractable into the second retractable spool assembly.
3. The retractable clothes dryer vent of claim 2, wherein:
the first retractable spool assembly comprises:
a first retracting spool housing mounted to the support;
a first spool mounted and rotatable in the first retracting spool housing and coupled to the first line first end of the first retractable line; and
a first coil spring mounted in the first retracting spool housing and biasing the first spool to retract the first retractable line; and
the second retractable spool assembly comprises:
a second retracting spool housing mounted to the support;
a second spool mounted and rotatable in the second retracting spool housing and coupled to the second line first end of the second retractable line; and
a second coil spring mounted in the second retracting spool housing and biasing the second spool to retract the second retractable line.
4. The retractable clothes dryer vent of claim 2 further comprising:
a plurality of first guide eyelets attached in a first row along a length of the dryer vent hose, the first retractable line extending through the plurality of first guide eyelets; and
a plurality of second guide eyelets attached in a second row along the length of the dryer vent hose, the second retractable line extending through the plurality of second guide eyelets.
5. The retractable clothes dryer vent of claim 4 further comprising:
a first anchor on the dryer exhaust coupling aligned with the first row of first guide eyelets, wherein the first anchor anchors the first line second end of the first retractable line to the dryer exhaust coupling; and
a second anchor on the dryer exhaust coupling aligned with the second row of second guide eyelets, wherein the second anchor anchors the second line second end of the second retractable line to the dryer exhaust coupling.
6. The retractable clothes dryer vent of claim 1, wherein the support comprises:
a vent housing comprising a first side wall, a second side wall, a third side wall, a fourth side wall, and a back wall forming a box shape; and
a flange mounted to an open edge of the vent housing formed by the first side wall, second side wall, third side wall, and fourth side wall;
wherein the duct coupling is mounted in, and the first retraction guide assembly first end and the second retraction guide assembly first end are mounted to, the first side wall of the vent housing.
7. The retractable clothes dryer vent of claim 1, wherein the support comprises a shelf.
8. The retractable clothes dryer vent of claim 1, wherein the support comprises a wire frame.
9. The retractable clothes dryer vent of claim 1, wherein the dryer vent hose is flexible and retractable.
10. The retractable clothes dryer vent of claim 1, wherein the dryer exhaust coupling is an elbow coupling.
11. A method of installing a clothes dryer comprising the steps of:
a) pulling a dryer exhaust coupling of a retractable clothes dryer vent, mounted to a wall of a building, away from the wall, the retractable clothes dryer vent comprising:
a support mounted to the wall;
a duct coupling mounted in the support and having a first duct coupling end, a second duct coupling end opposite the first duct coupling end, and a duct coupling opening extending through the support;
a dryer vent hose having a first hose end extending from the first duct coupling end of the duct coupling and a second hose end opposite the first hose end;
the dryer exhaust coupling extending from the second hose end;
a first retraction guide assembly having a first retraction guide assembly first end mounted to the support and a first guide retraction guide assembly second end anchored to the dryer exhaust coupling; and
a second retraction guide assembly having a second retraction guide assembly first end mounted to the support and a second guide retraction guide assembly second end anchored to the dryer exhaust coupling;
b) attaching the dryer exhaust coupling to a dryer exhaust tube of the clothes dryer; and
c) moving the clothes dryer to an operational position at the wall with the dryer exhaust coupling attached to the dryer exhaust tube located vertically below the duct coupling.
12. The method of claim 11, wherein step a) comprises the substep of extending a first retractable line from a first retractable spool assembly of the first retraction guide assembly and extending a second retractable line from a second retractable spool assembly of the first retraction guide assembly;
the first retraction guide assembly comprising:
a first retractable spool assembly mounted to the support; and
a first retractable line extending from a first line first end to a first line second end opposite the first line first end, wherein the first line first end is maintained in the first retractable spool assembly, the first line second end is anchored to the dryer exhaust coupling, and the first retractable line is retractable into the first retractable spool assembly; and
the second retraction guide assembly comprising:
a second retractable spool assembly mounted to the support; and
a second retractable line extending from a second line first end to a second line second end opposite the second line first end, wherein the second line first end is maintained in the second retractable spool assembly, the second line second end is anchored to the dryer exhaust coupling, and the second retractable line is retractable into the second retractable spool assembly.
13. The method of claim 11 further comprising the step of attaching the support of the retractable clothes dryer vent to the wall.
14. The method of claim 11 further comprising the step of inserting a vent housing of the support between a pair of studs in the wall and mounting a flange of the support to the wall, wherein the support comprises:
the vent housing comprising a first side wall, a second side wall, a third side wall, a fourth side wall, and a back wall forming a box shape; and
the flange mounted around an open edge of the vent housing formed by the first side wall, second side wall, third side wall, and fourth side wall;
wherein the duct coupling is mounted in, and the first retraction guide assembly first end and the second retraction guide assembly first end are mounted to, the first side wall of the vent housing.
15. The method of claim 11 further comprising the step of attaching the second duct coupling end of the duct coupling to a duct leading outside the building.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method of extracting data from an overlay target, the method comprising:
(a) providing image information or one or more intensity signals of the overlay target;
(b) obtaining an overlay error from the overlay target by analyzing the image information or the intensity signal(s) of the overlay target;
(c) obtaining a systematic error metric from the overlay target by analyzing the image information or the intensity signal(s) of the overlay target; and
(d) obtaining a noise metric from the overlay target by applying a statistical model to the image information or the intensity signal(s) of the overlay target.
2. A method as recited in claim 1, wherein the systematic error metric is obtained by obtaining an asymmetry value of portions of the overlay target which are designed to be symmetrical.
3. A method as recited in claim 2, wherein the systematic error metric is obtained by obtaining a first asymmetry value at a first orientation of the overlay target and a second asymmetry value at a second orientation of the overlay target, wherein the first orientation is perpendicular to the second orientation.
4. A method as recited in claim 1, wherein the noise metric is obtained by applying one or more algorithms selected from a group consisting of a statistical algorithm, an integrated noise algorithm, an integrated derivative algorithm, and a signal-to-noise algorithm.
5. A method as recited in claim 1, further comprising determining a quantitative metric on a quality of the overlay error based on the systematic metric andor the noise metric.
6. A method as recited in claim 5, further comprising determining a stepper correction based on the overlay error and the determined quantitative metric.
7. A method as recited in claim 5, further comprising determining whether one or more wafers associated with the target pass or fail based on the overlay error and the determined quantitative metric.
8. A method as recited in claim 5, wherein the overlay error is obtained from a target that is in a development inspection stage (DI) prior to performance of a next process step or a final inspection of the overlay target (FI).
9. A method as recited in claim 8, further comprising determining a DIFI bias associated with the overlay target, wherein the DIFI bias prediction is based on the systematic error metric.
10. A method as recited in claim 9, further comprising adjusting the overlay error by the determined DIFI bias.
11. A method as recited in claim 1, further comprising identifying the overlay error as a flyer when the systematic andor noise metric does not meet a predefined specification.
12. A method as recited in claim 1, further comprising repeating operation (a) through (d) for a plurality of targets.
13. A method as recited in claim 12, further comprising:
for each overlay error, determining a quantitative metric on a quality of the overlay error based on the systematic metric andor the noise metric for such overlay error;
analyzing the overlay errors and their quantitative metrics to determine a characteristic associated with the overlay targets.
14. A method as recited in claim 13, wherein the characteristic is a stepper correction.
15. A method as recited in claim 13, wherein the characteristic is a DFFI bias.
16. A method as recited in claim 13, wherein the characteristic is a determination as to whether there is a process excursion for the plurality of product wafers.
17. A method as recited in claim 13, wherein the characteristic is a determination as to whether a different overlay error measurement mode or recipe or an alternative overlay target is to be used for a current overlay target.
18. A method as recited in claim 13, wherein the quantitative metric for each overlay error is a confidence level for each overlay error.
19. A computer system for extracting data from an overlay target, comprising:
one or more processors;
one or more memory, wherein at least one of the processors and memory
(a) provide image information or one or more intensity signals of the overlay target;
(b) obtain an overlay error from the overlay target by analyzing the image information or the intensity signal(s) of the overlay target;
(c) obtain a systematic error metric from the overlay target by analyzing the image information or the intensity signal(s) of the overlay target; and
(d) obtain a noise metric from the overlay target by applying a statistical model to the image information or the intensity signal(s) of the overlay target.
20. An overlay metrology tool for extracting data from an overlay target, comprising:
an optical measurement system for obtaining images of the overlay target; and
the computer system of claim 19.
21. A computer system as recited in claim 19, wherein the at least one of the processors and memory further analyze the overlay error based on the systematic metric andor the noise metric.