1. An optical combiner module, disposed in an intersection of a plurality of color lights split by a beam splitter module, the optical combiner module comprising:
a combiner, comprising at least a pared-corner, wherein the combiner is substantially a regular hexahedron, at least one corner of the combiner is cut to form at least one lean surface, the lean surface is connected to a top surface or a bottom surface of the combiner, and an angle between the lean surface and the top surface or the bottom surface is larger than 0\xb0;
a plurality of prisms, disposed adjacent to the combiner, wherein one side of one of the prisms is leaned adjacent to the pared-corner of the combiner; and
a plurality of light valves for forming the image, respectively disposed in a path of the color lights after the prisms, wherein the color lights are reflected to the light valves by a total reflection plane of each of the prisms respectively and said color lights reflected by the light valves are transmitted through the prisms and thereafter are combined by the combiner.
2. The optical combiner module of claim 1, wherein the combiner comprising:
four sides; and
the at least one lean surface comprising three lean surfaces, wherein the top surface and the bottom surface are adjacent to the sides respectively, a portion of the lean surfaces is adjacent to the top surface and one of the sides, and another portion of die lean surfaces is adjacent to the bottom surface and another one of the sides.
3. The optical combiner module of claim 2, wherein the prisms comprises three total internal reflection (TIR) prisms, and each of the TIR prisms comprising:
a first prism, comprising a first light incident plane, a first junction surface and a first light exit plane; and
a second prism, comprising a second junction surface and a second light exit plane, wherein an air gap is disposed between the second junction surface and a portion of the first junction surface, another portion of the first junction surface is disposed adjacent to the one of the lean surfaces, and the second light exit plane is disposed adjacent to another one of the side.
4. The optical combiner module of claim 3, wherein each of the first light incident planes of the TIR prisms is disposed on a first plane, and the top surface of the combiner is disposed on a second plane, and an angle between die first plane and the second plane is about 45\xb0.
5. The optical combiner module of claim 2, wherein a shape of the lean surfaces of the combiner is regular triangle.
6. The optical combiner module of claim 3, wherein the TIR prisms comprise a red light total internal reflection (TIR) prism, a green light TIR prism and a blue light TIR prism, and the red light TIR prism and the blue light TIR prism is disposed on opposite side of the combiner.
7. The optical combiner module of claim 6, further comprising:
a blue light reflecting coating, disposed in the red light TIR prism; and
a red light reflecting coating, disposed in the blue light TIR prism.
8. The optical combiner module of claim 3, wherein the second light exit plane of the second prism comprises a transparent region and a light shielding region.
9. A digital light projection system, comprising:
a light source, for emitting a light;
a beam splitter module, disposed in a path of the light after the light source, wherein the light is split by the beam splitter module into a plurality of color lights;
the optical combiner module of claim 1, disposed in an intersection of the color lights of the beam splitter module; and
a projection lens, disposed in a path of the color lights after the optical combiner module.
10. The digital light projection system of claim 9, wherein the color lights comprise a first color light, a second color light and a third color light.
11. The digital light projection system of claim 10, wherein the beam splitter module comprising:
a first two-way beam splitter mirror, disposed in a pat of the light after the light source for reflecting the first color light and transmitting the second color light and the third color light; and
a second two-way beam splitter mirror, disposed in a pat of the second color light and the third color light after the first two-way beam splitter mirror for reflecting the second color light and transmitting the third color light.
12. The digital light projection system of claim 11, further comprising:
a rod integrator, disposed in a path of the light between the light source and the first two-way beam splitter mirror.
13. The digital light projection system of claim 11, wherein the beam splitter module further comprising:
at least a first condenser lens, disposed in a path of the light between the light source and die first two-way beam splitter mirror.
14. The digital light projection system of claim 13, wherein the beam splitter module further comprising:
a plurality of second condenser lenses, disposed in a path of the first color light, the second color light and the third color light between the second two-way beam splitter mirror and a plurality of TIR prisms.
15. The digital light projection system of claim 11, wherein the beam splitter module further comprising:
at least a reflection mirror, disposed in a path of the light between the first two-way beam splitter mirror and the combiner.
16. The digital light projection system of claim 9, wherein a first light incident planes of the TIR prisms is disposed on a first plane, and the top surface of the combiner is disposed on a second plane, and an angle between the first plane and the second plane is about 45\xb0.
17. The digital light projection system of claim 9, wherein a shape of the lean surfaces of the combiner is regular triangle.
18. The digital light projection system of claim 9, wherein the TIR prisms comprise a red light TIR prism, a green light TIR prism and a blue light TIR prism, and the red light TIR prism and the blue light TIR prism are disposed on opposite side of the combiner.
19. The digital light projection system of claim 18, further comprising:
a blue light reflecting coating, disposed in the red light TIR prism; and
a red light reflecting coating, disposed in the blue light TIR prism.
20. The digital light projection system of claim 9, wherein the second light exit plane of the second prism comprises a transparent region and a light shielding region.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A laser irradiation apparatus comprising:
a short-side polarized beam generating means for generating a linearly polarized rectangular laser beam whose cross section is a rectangle with an electric field directed toward a short-side direction of the rectangle or elliptically polarized toward a short-side direction of the rectangle; and
a means for irradiating a surface with the polarized rectangular laser beam.
2. A laser irradiation apparatus according to claim 1, further comprising:
a transfer means for transferring the surface in a direction perpendicular to a long side of the polarized rectangular laser beam; and
an incident angle adjusting means for increasing an incident angle of the polarized rectangular laser beam to the surface in the direction.
3. A laser irradiation apparatus according to claim 1, wherein the surface is a surface of a monocrystalline semiconductor film.
4. A laser irradiation apparatus according to claim 1, wherein an energy density of the polarized rectangular laser beam is 500 mJcm2 or more.
5. A laser irradiation apparatus comprising:
a first laser oscillator for outputting a first laser beam;
a second laser oscillator for outputting a second laser beam;
a pulse controller for controlling the first laser oscillator and the second laser oscillator so as to make laser pulse output timings of the first laser oscillator and the second laser oscillator different from each other;
a first polarization means for transforming the first laser beam to first linearly polarized laser beam;
a second polarization means for transforming the second laser beam to second linearly polarized laser beam;
a beam combining means for combining the first linearly polarized laser beam and the second linearly polarized laser beam; and
a rectangular beam generating means for turning a combined laser beam form the beam combining means to a rectangular polarized laser beam whose cross section is a rectangle,
wherein the first polarization means is configured to polarize the first laser beam in a long-side direction of the rectangle, and the second polarization means is configured to polarize the second laser beam in a short-side direction of the rectangle.
6. A laser irradiation apparatus according to claim 5, further comprising a means for irradiating a surface of a monocrystalline semiconductor film with the rectangular polarized laser beam.
7. A laser irradiation apparatus according to claim 5, wherein an energy density of the rectangular polarized laser beam is 500 mJcm2 or more.
8. A laser irradiation apparatus comprising:
a first laser oscillator for outputting a first laser beam;
a second laser oscillator for outputting second laser beam;
a beam combining means for combining the first laser beam and the second laser beam;
a rectangular beam generating means for turning a combined laser beam from the beam combining means to a rectangular laser beam whose cross section is a rectangle; and
a means for irradiating a surface with the rectangular laser beam,
wherein the first laser beam and the second laser beam are linearly polarized, and
wherein a polarization direction of the first laser beam and a polarization direction of the second laser beam are perpendicular to each other at the surface.
9. A laser irradiation apparatus according to claim 8, wherein the surface is a surface of a monocrystalline semiconductor film.
10. A laser irradiation apparatus according to claim 8, wherein an energy density of the rectangular laser beam is 500 mJcm2 or more.
11. A laser irradiation apparatus comprising:
a circularly polarized beam generating means for generating a circularly polarized rectangular laser beam whose cross section is a rectangle, and
a means for irradiating a surface with the circularly polarized rectangular laser beam.
12. A laser irradiation apparatus according to claim 11, wherein the surface is a surface of a monocrystalline semiconductor film.
13. A laser irradiation apparatus according to claim 11, wherein an energy density of the circularly polarized rectangular laser beam is 500 mJcm2 or more.
14. A laser irradiation apparatus comprising:
a laser oscillator for outputting a linearly polarized laser beam;
an unpolarization means for turning the linearly polarized laser beam to an unpolarized laser beam; and
a rectangular beam generating means for turning the unpolarized laser beam to a rectangular laser beam whose cross section is a rectangle; and
a means for irradiating a surface with the rectangular laser beam.
15. A laser irradiation apparatus according to claim 14, wherein the surface is a surface of a monocrystalline semiconductor film.
16. A laser irradiation apparatus according to claim 14, wherein an energy density of the rectangular laser beam is 500 mJcm2 or more.
17. A laser irradiation apparatus comprising:
a laser oscillator; and
a polarizer arranged to polarize a laser beam output from the laser oscillator,
wherein an energy density of the polarized laser beam on an irradiation surface is greater than 500 mJcm2.
18. A laser irradiation apparatus according to claim 17, further comprising
a condenser lens arranged so that the polarized laser beam is introduced.
19. A laser irradiation apparatus according to claim 17, further comprising:
a beam expander arranged to expand the polarized laser beam;
a cylindrical lens array arranged so that the expanded polarized laser beam is introduced; and
a condenser lens arranged so that the expanded polarized laser beam passed thorough the cylindrical lens array passes thorough.
20. A laser irradiation apparatus according to claim 17, further comprising:
a second laser oscillator;
a second polarizer arranged to polarize a second laser beam output from the second laser oscillator;
a pulse controller configured to control the laser oscillator and the second laser oscillator so that timings of the laser beam and the second laser beam are different from each other; and
a beam splitter arranged to combine the polarized laser beam and the polarized second laser beam,
wherein a polarization direction of the laser beam intersects a polarization direction of the second laser beam.
21. A laser irradiation apparatus according to claim 17, further comprising a means for irradiating a surface of a monocrystalline semiconductor film with the polarized laser beam.