1. A tool for adjusting at least one of loft angle or lie angle of a golf club, comprising:
a body having a first clamping portion and a second clamping portion, the first and second clamping portions defining a clamp opening having a substantially rectangular cross section and a longitudinal axis;
a first lever having first and second ends, the first end slidingly engaging the body and attaching to the second clamping portion, the first lever having a longitudinal axis lying in a plane containing the longitudinal axis of the clamp opening; and
a second lever removably mounted to the body of the tool, the second lever having a longitudinal axis lying in a plane perpendicular to the longitudinal axis of the first lever when the second lever is mounted to the body of the tool; further including a release mechanism connected to the body, the release mechanism having an opening and a threaded portion, the threaded portion moveable from an engaged position in which the threaded portion engages a corresponding threaded portion formed on the first lever to a released position in which the threaded portion disengages from the corresponding threaded portion of the first lever to permit the first lever to slide through the opening in the release mechanism.
2. The tool of claim 1, wherein the first lever comprises a shaft having a threaded portion between a first unthreaded portion and a second unthreaded portion.
3. The tool of claim 1, wherein the second clamping portion comprises a T-shaped block removably mounted to the first end of the first lever, the T-shaped block having a crossbar portion and a base portion, the crossbar portion substantially perpendicular to the base portion.
4. The tool of claim 3, wherein the crossbar portion has a first surface and a second surface, wherein a hole extends from the first surface into the crossbar portion.
5. The tool of claim 4, wherein the first end of the first lever extends into the hole extending from the first surface into the crossbar portion.
6. The tool of claim 5, further including a set screw extending into the crossbar portion for securing the crossbar portion to the first lever.
7. The tool of claim 3, wherein the base portion of the T-shaped block extends from a second surface of the crossbar portion and has a beveled surface inclined at an angle relative to a plane normal to the longitudinal axis of the first lever, and wherein the first clamping portion comprises a U-shaped block having a beveled wall having a surface substantially parallel to the beveled surface of the T-shaped block.
8. The tool of claim 3, wherein the crossbar portion and the base portion are a unitary structure.
9. A golf club adjustment tool, comprising:
an attachment structure having an adjustable receiving area and a surface, an opening extending from the surface to the adjustable receiving area;
a quick release mechanism attached to the attachment structure, the quick release mechanism having an opening aligned with the opening in the attachment structure;
a first lever having a first end and a second end and a longitudinal axis, the first lever extending through the openings in the attachment structure and the quick release mechanism, wherein the first end of the lever is in the adjustable receiving area;
a second lever removably attached to the attachment structure, the second lever having a longitudinal axis substantially perpendicular to the longitudinal axis of the first lever when the second lever is attached to the attachment structure;
a first clamping element attached to the attachment structure within the adjustable receiving area, the first clamping element having a clamping portion including a wall having a surface inclined at an angle relative to a plane normal to the longitudinal axis of the first lever; and
a second clamping element attached to the first end of the first lever, the second clamping element moveable toward and away from the first clamping element, the second clamping element having a clamping surface opposite and substantially parallel to the inclined wall of the first clamping element to form an elongated opening having a longitudinal axis intersecting the longitudinal axis of the first lever.
10. The golf club adjustment tool of claim 9, wherein the first lever has a threaded region that cooperates with the quick release mechanism for releasing the first lever.
11. The golf club adjustment tool of claim 9, wherein the inclined surface of the first clamping element is bordered by two opposed walls forming a notch and the clamping surface of the second clamping element is formed at the end of a flange, the flange being capable of mating with the notch.
12. The golf club adjustment tool of claim 11, further including a mating barrel attached to the attachment structure, wherein the second lever is removably attached to the attachment structure by inserting the second lever into the mating barrel.
13. The golf club adjustment tool of claim 9 wherein the second clamping element is removably attached to the first lever.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A substrate processing apparatus comprising:
a reaction tube having in an interior thereof a processing chamber in which a plurality of substrates disposed in a direction perpendicular to a substrate processing surface can be processed; and
a heating device provided to surround an outer circumference of the reaction tube,
a gas inlet tube being provided on a side face of said reaction tube in a region for processing a substrate inside said reaction tube, so as to reach at least an outside of said heating device, and
a gas spouting port being disposed in the gas inlet tube in a slit form so as to straddle at least a plurality of the substrates in a direction perpendicular to said substrate processing surface, for spouting gas from said gas inlet tube into said processing chamber.
2. The substrate processing apparatus as claimed in claim 1, wherein
said gas inlet tube comprises a plurality of gas introduction partition portions partitioned in a direction perpendicular to a processing surface of said substrates, and
said gas spouting port is formed in each of said gas introduction partition portions.
3. The substrate processing apparatus as claimed in claim 2, wherein said gas spouting port is formed one for each of said gas introduction partition portions.
4. The substrate processing apparatus as claimed in claim 2, wherein an opening area of said gas spouting port is identical to a cross-sectional area of said gas introduction partition portion in a direction perpendicular to said substrate processing surface.
5. The substrate processing device as claimed in claim 1, wherein said gas inlet tube is formed so that a distance from at least said gas spouting port to an upstream tip-end portion of the gas inlet tube is greater than a distance between two ends of said gas spouting port in a circumferential direction of the substrates.
6. The substrate processing apparatus as claimed in claim 1, wherein said gas inlet tube is formed along an entire side along said substrate processing region.
7. The substrate processing apparatus as claimed in claim 1, further comprising:
a gas exhaust tube being provided on a side face of said reaction tube in a region for processing a substrate inside said reaction tube so as to reach at least an outside of said heating device; and
a gas exhaust port being disposed in the gas exhaust tube in a slit form so as to straddle at least a plurality of the substrates in a direction perpendicular to said substrate processing surface, for exhausting gas into said gas exhaust tube from said processing chamber.
8. The substrate processing apparatus as claimed in claim 7, wherein
said gas exhaust tube comprises a plurality of gas exhaust partition portions partitioned in a direction perpendicular to a processing surface of said substrates, and
said gas exhaust port is formed in each of said gas exhaust partition portions.
9. The substrate processing apparatus as claimed in claim 2,
wherein a process gas supply portion and a first inert gas supply portion are connected to an upstream side of said gas introduction partition portions,
the substrate processing apparatus further comprising a gas supply control portion for, when processing the substrates in said reaction tube, supplying a process gas from the process gas supply portion when the substrates are disposed in positions opposing the gas introduction partition portions, and supplying an inert gas from the inert gas supply portion when no substrate is disposed in positions opposing the gas introduction partition portions.
10. The substrate processing apparatus as claimed in claim 1, further comprising a plasma generating device constituted from electrodes disposed outside the processing chamber, with said gas inlet tube placed between these electrodes, for creating plasma of a gas in said gas inlet tube.
11. The substrate processing apparatus as claimed in claim 1, further comprising a second inert gas supply portion for supplying an inert gas from above said reaction tube into the reaction tube.
12. The substrate processing apparatus as claimed in claim 11, further comprising a third inert gas supply portion for supplying an inert gas from below said reaction tube into the reaction tube.
13. The substrate processing apparatus as claimed in claim 1, further comprising a gas interrupting portion above said reaction tube.
14. The substrate processing apparatus as claimed in claim 13, wherein said gas interrupting portion is provided in an inner wall of said reaction tube.
15. The substrate processing apparatus as claimed in claim 1, comprising protruding portions provided to protrude inward from an inner wall surface of said reaction tube at, at least, an upper and a lower end of said gas inlet tube and said gas exhaust tube.
16. The substrate processing apparatus as claimed in claim 15, comprising notched portions provided in the same positions as in said protruding portions in a circumferential direction with respect to a processing surface of said substrates.
17. The substrate processing apparatus as claimed in claim 16, wherein a temperature detector for detecting a temperature within a processing chamber is housed in said notched portions of said protruding portions.
18. The substrate processing apparatus as claimed in claim 1,
wherein a width of said spouting port in a direction horizontal to said substrate surface is \xbd or less of a diameter of said substrates.
19. A method of manufacturing a semiconductor device for processing in use of the substrate processing apparatus as claimed in claim 1,
the method comprising the steps of:
conveying substrates into said reaction tube;
processing the substrates by introducing a gas from said gas spouting port across the substrates within said reaction tube while maintaining a gas flow velocity in said gas inlet tube, and heating said reaction tube by means of said heating device; and
conveying the substrates out of said reaction tube.
20. A reaction vessel in a cylindrical shape having in an interior thereof a processing chamber in which a plurality of substrates disposed in a direction perpendicular to a substrate processing surface can be processed, comprising:
a gas inlet tube and a gas exhaust tube being provided on a side face of said reaction tube in a region for processing a substrate inside said reaction tube, said gas inlet tube and said gas exhaust tube extending in a direction perpendicular to said side face of said reaction tube, and
a gas spouting port being disposed in at least said gas inlet tube in a form so as to straddle at least a plurality of the substrates in a direction perpendicular to said substrate processing surface, for spouting gas from said gas inlet tube into said processing chamber.