1. A method of cataloguing a data collection composed of a plurality of data symbols, said data symbols having a defined order with respect to one another within the data collection, said method of cataloguing being characterised by;
(i) forming a first data element from an initial sequencing of symbols present within the data collection, said data element being stored at a storage location within the data collection having a storage address,
(ii) transforming the first data element into a first data item, said data item being capable of being ranked with respect to other data items,
(iii) storing the first data item using an ordered catalogue data structure which defines a plurality of sequentially arranged storage positions,
(iv) associating with the first data item the storage address from which the first data element was retrieved,
(v) consecutively repeating steps (i) through (iv) for each adjacent data element from the data collection, where each subsequent adjacent data element is formed from the same number of symbols as that used to form the first data element, and
(vi) sorting the ordered catalogue data structure by ranking the data item stored within said catalogue data structure.
2. A method of cataloguing a data collection as claimed in claim 1, wherein the size of the catalogue data structure is substantially equivalent to the size of the data collection.
3. A method of cataloguing a data collection as claimed in claim 1, wherein the catalogue data structure is formed from an array.
4. A method of cataloguing a data collection as claimed in claim 1, wherein data items are associated with storage addresses through the provision of a parallel address data structure.
5. A method of cataloguing a data collection as claimed in claim 4 wherein the parallel address data structure is formed from an array.
6. A method of cataloguing a data collection as claimed in claim 1 wherein data items are associated with storage addresses throughout the storage of storage addresses within the content data structure.
7. A method of cataloguing a data collection as claimed in claim 1 wherein data items are associated with storage addresses through the provision of a duplicate based data structure.
8. A method of cataloguing a data collection as claimed in claim 1 wherein the transform process applied to data elements provides numeric format data elements.
9. A method of cataloguing a data collection as claimed in claim 1 wherein the transform process applied to data elements is implemented by a direct hash function.
10. A method of cataloguing a data collection as claimed in claim 1 wherein the transform process applied to data elements is implemented by a lossy hash function.
11. A method of cataloguing a data collection as claimed in claim 10 wherein a retrieval validation process is executed within a search process which uses the catalogue data structure.
12. A method of cataloguing a data collection as claimed in claim 1 wherein the most significant symbol of data items is not stored within the resulting sorted catalogue data structure.
13. A method of cataloguing a data collection as claimed in claim 1 wherein a class data structure is provided.
14. A method of cataloguing a data collection as claimed in claim 13 wherein a class data structure is provided by an array which defines a number of storage positions equal to the number of unique most significant symbols present within data items.
15. A method of cataloguing a data collection as claimed in claim 1, further characterised by;
(vii) forming at least one ordered content data structure which defines a number of storage positions equal to the maximum number of unique data elements which can exist,
(viii) associating with each storage position at least one data element, and
(ix) storing within each storage position of the content data structure a positive or negative indicator depending on whether said at least one data element associated with the storage position is present within the data collection.
16. A method of cataloguing a data collection as claimed in claim 15 wherein the content data structure is formed from an array.
17. A method of cataloguing a data collection as claimed in claim 1 wherein the catalogue data structure is used to find specific data element symbol sequences by running a plurality of search queries generated from a data element symbol sequence.
18. A method of cataloguing a data collection as claimed in claim 17 wherein the plurality of search queries run are generated using a sliding window process.
19. A method of cataloguing a data collection as claimed in claim 18 wherein the results generated by the plurality of search queries run are processed by a search pattern sequence detection process.
20. A method of cataloguing a data collection as claimed in claim 19 wherein the search pattern sequence detection process detects the presence of a pattern on inspection of the spatial relationship between storage addresses associated with data elements found by said search queries.
21. A method of cataloguing a data collection as claimed in claim 20 wherein an error tolerance threshold is used to test whether matching pattern sequences have been detected.
22. A method of detecting the presence of search patterns within a data collection catalogued in accordance with claim 1, said method being characterised by;
i) receiving a search pattern sequence,
ii) forming a plurality of search queries by running a sliding window process over the received search pattern sequence,
iii) retrieving a plurality of storage addresses from the catalogue data structure, said search addresses being associated with data elements which match the search queries formed, and
iv) detecting the presence of the search pattern sequence received by inspecting the spatial relationship between the storage addresses received.
23. A method of pattern detection as claimed in claim 22 wherein an error tolerant threshold is used to test whether matching pattern sequences have been detected.
24. Computer executable instructions stored on a computer readable medium, said computer executable instructions being adapted to execute the method of cataloguing a data structure as claimed in claim 1.
25. A computer readable medium with computer executable instructions stored therein, said computer executable instructions being adapted to execute the method of cataloguing a data structure as claimed in claim 1.
26. (canceled)
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An electrostatic chucking device comprising:
an electrostatic chucking portion which includes a plate-like body, a principal surface of which is used as a mounting surface that mounts a plate-like specimen, an electrostatic adsorption electrode provided in the plate-like body and a power-feeding terminal that applies a direct-current voltage on the electrostatic adsorption electrode; and
a base stage that is provided on the other principal surface and supports the electrostatic chucking portion,
wherein the plate-like body is made of a corrosion-resistant ceramic, and
a circular insulation member is provided in a circumferential edge portion between the electrostatic chucking portion and the base stage, and a heat radiation plate is provided on a principal surface of the base stage on an electrostatic chucking portion side.
2. The electrostatic chucking device according to claim 1, wherein the corrosion-resistant ceramic is made of one or two or more selected from a group consisting of yttrium aluminum oxide composite oxides, rare earth element-added yttrium aluminum oxide composite oxides and yttrium oxide.
3. The electrostatic chucking device according to claim 1, wherein the heat radiation plate is made of metal or an organic resin having thermal conductivity.
4. The electrostatic chucking device according to claim 1, wherein the mounting surface includes a plurality of protrusion portions having a diameter smaller than the thickness of the plate-like specimen.
5. The electrostatic chucking device according to claim 1, wherein the surface roughness Ra of an end surface of the power-feeding terminal on an electrostatic adsorption electrode side is in a range of 0.05 \u03bcm to 1.0 \u03bcm.
6. The electrostatic chucking device according to claim 1, wherein an insulation layer is provided under the electrostatic adsorption electrode, and the insulation layer and the heat radiation plate are adhered to each other via an organic adhesive layer.
7. The electrostatic chucking device according to claim 6, wherein the circular insulation member is provided to surround the electrostatic adsorption electrode, the organic adhesive layer and the heat radiation plate, and the distance between the electrostatic adsorption electrode and the base stage is larger than the distance between the circular insulation member and the base stage.
8. The electrostatic chucking device according to claim 1, wherein the circular insulation member is made of an insulating ceramic which has a thermal conductivity which is larger than that of the corrosion-resistant ceramic of the plate-like body.