1-8. (canceled)
9. A parking lock mechanism for a vehicle transmission comprising:
a mechanical locking device (15);
a movable thrust element (6) being actively connected to the mechanical locking device (15) in such a manner that when the movable thrust element (6) is moved to a first position, the thrust element (6) moves the mechanical locking device (15) to an unlocked condition and when the movable thrust element (6) is moved to a second position, the thrust element (6) moves the mechanical locking device (15) to a locked condition;
a parking lock actuation device (1) with a first movable output element (5);
an emergency actuation device (12) with a second movable output element (11); and
a first elastic element (8),
the first output element (5) being connected, via the first elastic element (8), with the thrust element (6) such that movement of the first output element (5) is transmittable, via the first elastic element (8), to the thrust element (6), and the second output element (11) being directly connected to the thrust element (6),
the thrust element (6) having a recess (7) and the first elastic element (8) being at least partially arranged therein in such a manner that a first side (8A) the first elastic element (8) is in contact with a first wall (7A) of the recess (7) and an opposite, second side (8B) the first elastic element (8) is in contact with the first output element (5).
10. The parking lock mechanism according to claim 9, wherein the thrust element (6) is connected to a selector disk (10) for selecting one of gears and gear ratios of the vehicle transmission, and the selector disk (10) is connected to the mechanical locking device (15).
11. The parking lock mechanism according to claim 9, wherein an end area of the first output element (5) is arranged between the elastic element (8) and a second wall (7B) of the recess (7), opposite the first wall (7A) of the recess (7), in such a manner that movement of the first output element (5) in a first direction (9A) is transmittable to the thrust element (6) by the first elastic element (8), and movement in a second direction (9B) is transmittable to the thrust element (6) directly by the second wall (7B).
12. The parking lock mechanism according to claim 9, wherein:
the parking lock mechanism has a second elastic element (14) arranged at least partially in the recess (7), which with a first side (14A) is in contact with a second wall (7B) of the recess (7), opposite the first wall (7A) of the recess (7), and with a second side (14B) is in contact with the first output element (5), and
an end area of the first output element (5) is arranged between the first and the second elastic elements (8, 14) in such a manner that movement of the first output element (5), in a first direction (9A), is at least partially transmittable via the first output element (5) to the thrust element (6) and movement, in a second direction (9B), is at least partially transmittable by the second elastic element (14) to the thrust element (6).
13. The parking lock mechanism according to claim 9, wherein one of the parking lock actuation device (1) and the emergency actuation device (12) comprises an actuator (2) for moving the first output element (5) or the second output element (11), respectively.
14. The parking lock mechanism according to claim 13, wherein the actuator (2) is one of a hydraulic actuator, a pneumatic actuator and an electro-mechanical actuator.
15. The parking lock mechanism according to claim 9, wherein one of the parking lock actuation device (1) and the emergency actuation device (12) is designed such that movement of either the first or the second output elements (5, 11), respectively, is produced manually by a vehicle operator.
16. A parking lock mechanism in combination with one of an automatic transmission, automated gearshift transmission and a dual-clutch transmission of either a passenger vehicle or a utility vehicle, the parking lock mechanism comprising:
a mechanical locking device (15);
a movable thrust element (6) being actively connected to the mechanical locking device (15) in such a manner that when the movable thrust element (6) is moved to a first position, the thrust element (6) moves the mechanical locking device (15) to an unlocked condition and when the movable thrust element (6) is moved to a second position, the thrust element (6) moves the mechanical locking device (15) to a locked condition;
a parking lock actuation device (1) with a first movable output element (5);
an emergency actuation device (12) with a second movable output element (11); and
a first elastic element (8),
the first output element (5) being connected, via the first elastic element (8), with the thrust element (6) such that movement of the first output element (5) is transmittable, via the first elastic element (8), to the thrust element (6), and the second output element (11) being directly connected to the thrust element (6),
the thrust element (6) having a recess (7) and the first elastic element (8) being at least partially arranged therein in such a manner that a first side (8A) the first elastic element (8) is in contact with a first wall (7A) of the recess (7) and an opposite, second side (8B) the first elastic element (8) is in contact with the first output element (5).
17. A parking lock mechanism for a vehicle transmission, the parking lock mechanism comprising:
a mechanical locking device (15);
a thrust element (6) being axially slidable between first and second positions, the thrust element (6) being connected to the mechanical locking device (15) such that movement of the thrust element (6) to the first position biases the mechanical locking device (15) to an unlocked condition and movement of the thrust element (6) to the second position biases the mechanical locking device (15) to a locked condition, and the thrust element (6) includes a recess (7);
a parking lock actuation device (1) comprising a first output element (5) having an end located within the recess (7) of the thrust element (6);
a first elastic element (8) being located within the recess (7) of the thrust element (6) such that a first end (8A) of the first elastic element (8) contacts a first wall (7A) of the recess (7) and a second end (8B) of the first elastic element (8) contacts the end of the first output element (5), the first elastic element (8) biasing the end of the first output element (5) toward a second wall (7B) of the recess (7), which is opposite the first wall (7A) of the recess (7), such that movement of the first output element (5) being transmitted, via the first elastic element (8), to the thrust element (6); and
an emergency actuation device (12) comprising a second output element (11) being directly connected to the thrust element (6) such that the thrust element (6) being movable by the emergency actuation device (12) via the second output element (11) between the first and the second positions.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A nanocluster source comprising:
a cooled aggregation chamber;
a magnetron arranged to sputter a target, said magnetron in communication with said cooled aggregation chamber such that sputtered atoms of said target are received within said cooled aggregation chamber;
a vacuum source in communication with said cooled aggregation chamber;
a source of at least one noble aggregation gas in communication with said cooled aggregation chamber; and
a source of hydrogen gas in communication with said cooled aggregation chamber.
2. A nanocluster source according to claim 1, wherein said magnetron is arranged within said cooled aggregation chamber.
3. A nanocluster source according to claim 1, wherein said source of hydrogen gas is in communication with said magnetron.
4. A nanocluster source according to claim 1, wherein said target is a silicon wafer.
5. A nanocluster source according to claim 1, wherein said vacuum source is arranged to produce a base pressure of about 1\xd710\u22126 Ton or less and a working pressure in the range of 1\xd710\u22121 Ton to 5\xd710\u22121 Torr within said cooled aggregation chamber.
6. A nanocluster source according to claim 1, wherein said source of hydrogen gas is a source of molecular hydrogen.
7. A nanocluster source according to claim 1, wherein said source of hydrogen gas is arranged to provide hydrogen gas of less than 1% of the flow rate of the total aggregation gasses provided by said source of at least one noble aggregation gas and said source of hydrogen gas.
8. A nanocluster source according to claim 7, wherein the nanocluster source produces substantially amorphous silicon nanoclusters
9. A nanocluster source according to claim 1, wherein said source of hydrogen gas is arranged to provide hydrogen gas of greater than 1% of the flow rate of the total aggregation gasses provided by said source of at least one noble aggregation gas and said source of hydrogen gas.
10. A nanocluster source according to claim 9, wherein the nanocluster source produces substantially crystalline silicon nanoclusters.
11. A nanocluster source according to claim 1, wherein said source of hydrogen gas is arranged to provide hydrogen gas of 1%-5% of the flow rate of the total aggregation gasses provided by said source of at least one noble aggregation gas and said source of hydrogen gas, and wherein the nanocluster source produces substantially crystalline silicon nanoclusters.
12. A method of producing nanoclusters, comprising:
sputtering a target;
providing at least one noble aggregation gas;
providing a hydrogen gas;
sweeping, by said provided at least aggregation gas and said hydrogen gas, the sputtered atoms of the target through an aggregation zone; and
maintaining a working pressure within the aggregation zone,
whereby said sputtered atoms aggregate to produce nanoclusters within the aggregation zone.
13. A method according to claim 12, wherein said sputtering comprises:
bombarding the target with ions of said provided at least one noble aggregation gas accelerated to a kinetic energy greater than 200 eV in the presence of said provided hydrogen gas.
14. A method according to claim 12, wherein the target is a silicon wafer.
15. A method according to claim 12, wherein said maintained working pressure is in the range of 1\xd710\u22121 Torr to 5\xd710\u22121 Torr.
16. A method according to claim 12, wherein said provided hydrogen gas is molecular hydrogen gas.
17. A method according to claim 12, wherein said provided hydrogen gas is less than 1% of the total flow rate of said provided at least one noble aggregation gas and said hydrogen gas.
18. A method according to claim 17, wherein said produced nanoclusters are substantially amorphous silicon nanoclusters.
19. A method according to claim 12, wherein said provided hydrogen gas is greater than 1% of the total flow rate of said provided at least one noble aggregation gas and said hydrogen gas.
20. A method according to claim 12, wherein said provided hydrogen gas is 1%-5% of the total flow rate of said provided at least one noble aggregation gas and said hydrogen gas.
21. (canceled)