Author: claimsbot

1. An image forming apparatus comprising:
a rotating member;
a forming unit for each of a plurality of colors used in image formation, configured to form a developer image of a corresponding color on the rotating member or on a recording medium on the rotating member;
a driving unit configured to rotate the rotating member;
a period detection unit configured to detect a rotation period of the rotating member; and
a control unit configured to, according to a detection result detected by the period detection unit, obtain a variation in the rotation period of the rotating member due to a change in the driving unit, and perform correction control for misregistration in the developer image formed on the rotating member or on the recording medium on the rotating member by the forming unit.
2. The image forming apparatus according to claim 1,
wherein the period detection unit is further configured to detect the rotation period of the rotating member by detecting a mark formed on the rotating member.
3. The image forming apparatus according to claim 2,
wherein a plurality of marks are formed on the rotating member, and
the period detection unit is further configured to detect the rotation period of the rotating member by measuring time for detecting the plurality of marks.
4. The image forming apparatus according to claim 1,
wherein the period detection unit is further configured to detect the rotation period of the rotating member by measuring a reflection characteristic of a surface of the rotating member.
5. The image forming apparatus according to claim 4,
wherein the period detection unit is further configured to measure the reflection characteristic by emitting light to the surface of the rotating member and receiving reflected light.
6. The image forming apparatus according to claim 4,
wherein the period detection unit is further configured to detect the rotation period of the rotating member by determining periodicity of the reflection characteristic.
7. The image forming apparatus according to claim 4,
wherein the period detection unit is further configured to acquire first waveform data regarding the surface of the rotating member and second waveform data that includes at least a portion of the first waveform data, and detect the rotation period of the rotating member based on the first waveform data and the second waveform data.
8. The image forming apparatus according to claim 1, further comprising:
a measurement unit configured to measure temperature,
wherein, in the detection of the variation in the rotation period of the rotating member, the control unit is further configured to determine a change in the circumferential length of the rotating member based on the temperature measured by the measurement unit.
9. The image forming apparatus according to claim 1,
wherein, in the correction control, the control unit is further configured to control a speed of a driving motor that transmits driving power to the driving unit that rotates the rotating member.
10. The image forming apparatus according to claim 1,
wherein the forming unit includes a photosensitive member on which an electrostatic latent image is formed, and by transferring a developer image obtained by developing the electrostatic latent image onto the rotating member or onto the recording medium on the rotating member, the forming unit forms a developer image on the rotating member or on the recording medium on the rotating member, and
in the correction control, the control unit is further configured to control a forming position of the electrostatic latent image on the photosensitive member.
11. The image forming apparatus according to claim 1,
wherein the control unit is further configured to obtain movement speed of the surface of the rotating member based on the variation in the rotation period of the rotating member.
12. The image forming apparatus according to claim 1, further comprising:
a misregistration detection unit configured to detect a misregistration detection pattern formed on the rotating member,
wherein the detection performed by the period detection unit and the detection performed by the misregistration detection unit are performed in parallel.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A system for displaying a frame environment in a web browser, the system comprising:
a first frame adapted to display a view;
a second frame adapted to notify a third frame to load the view in the first frame when a history page associated with the view is loaded in the second frame by the web browser; and
a third frame for loading the view in the first frame.
2. The system of claim 1, wherein the second frame is assigned a universal resource locator (URL) that is added to the browser’s history.
3. The system of claim 2 wherein the browser history comprises a list of websites the browser has previously displayed.
4. The system of claim 2 wherein the third frame detects a click of a link in the first frame and loads a second view, associated with the link, in the first frame.
5. The system of claim 4 wherein the third frame updates the URL of the second frame with a second URL when the third frame loads the second view.
6. The system of claim 5 wherein the second URL is added to the list of websites the browser has displayed.
7. The system of claim I wherein the history page is loaded into the second frame by the web browser when the user clicks on a navigation button in the browser.
8. A computer program product embodied on a computer readable medium for providing a frame. environment that controls navigation within the frame environment using a navigation button of a web browser, the computer program product comprising computer instructions for:
loading a view in a first frame;
assigning a universal resource locator (URL) identifying the view to a second frame; and
loading the view in the first frame when the URL identifying the view is loaded in the second frame by the web browser in response to a click of the navigation button of the web browser.
9. The computer program product of claim 8 further comprising computer instructions for detecting a click of a link in the first frame and loading a second view, associated with the link, in the first frame.
10. The computer program product of claim 9 further comprising computer instructions for updating the URL of the second frame with a second URL identifying the second view.
11. A method for associating a history entry in the browser’s history with a view displayed in a first frame, comprising:
detecting a click on a link in a first frame;
loading the view associated with the link into the first frame without creating a history entry for the view; and
updating a URL of a second frame to cause the browser to add the URL to the browser history.
12. The method of 11 further comprising:
receiving data from the second frame identifying the view when the URL associated with the view is loaded into the second frame by the web browser; and
loading the view into the first frame.
13. The method of claim 12 wherein the URL associated with the view is loaded into the browser in response to a user clicking a navigation button on the web browser.
14. A method for associating a history entry in a web browser’s history with a view displayed in a frame environment, comprising:
detecting a click on a link in a first frame;
loading the view associated with the link into the first frame;
causing a history entry associated with the view to be entered in the web browser’s history for a second frame;
receiving data from the second frame identifying the view when the history entry associated with the view is loaded into the second frame by the web browser; and
loading the view into the first frame.
15. The method of claim 14 wherein the history entry associated with the view is loaded into the second frame in response to a user click on a navigation button in the web browser.
16. A method for providing a frame environment that displays a view to a user, comprising:
providing a first frame for displaying a view;
providing a second frame for loading the view in the first frame; and
providing a third frame for notifying the second frame to load the view in the first frame when a history page associated with the view is loaded by the browser in response to a user selection of a navigation function of the browser.
17. A method for controlling a navigation button of a web browser in a frame environment, comprising:
displaying a first view in a first frame;
navigating a second frame to a universal resource locator (URL) that identifies the first view, such that the URL is entered into the web browser’s history;
causing the first view to be displayed in the first frame when the URL identifying the first view is loaded into the second frame in response to a user clicking on the navigation button of the web browser.
18. The method of claim 17 wherein the first view is loaded into the first frame in a way that does not create a history entry in the web browser.
19. The method of claim 17 wherein the navigation button is a forward button of the web browser.
20. The method of claim 17 wherein the navigation button is a back button of the web browser.
21. A method for controlling a navigation button of a web browser in a frame environment, comprising:
loading a view in a first frame such that the web browser does not record a history entry for the view;
causing a universal resource locator (URL) of a second frame to be loaded into the web browser’s history, the URL associated with the view; and
causing the view to be loaded into the first frame when the web browser navigates the second frame to the URL associated with the view when a user clicks on the navigation button in a web browser.
22. The method of claim 21 wherein the URL identifies the view.
23. The method of claim 21 wherein the navigation button is a forward button of the web browser.
24. The method of claim 21 wherein the navigation button is a back button of the web browser.
25. A computer program product embodied on a computer medium for for controlling a navigation button of a web browser in a frame environment, the computer program product comprising instructions for:
displaying a first view in a first frame;
navigating a second frame to a universal resource locator (URL) that identifies the first view, such that the URL is entered into the web browser’s history;
causing the first view to be displayed in the first frame when the URL identifying the first view is loaded into the second frame in response to a user clicking on the navigation button of the web browser.
26. A computer program product embodied on a computer readable medium for controlling a navigation button of a web browser in a frame environment, the computer program product comprising computer instructions for:
loading a view in a first frame such that the web browser does not record a history entry for the view;
causing a universal resource locator (URL) of a second frame to be loaded into the web browser’s history, the URL associated with the view; and
causing the view to be loaded into the first frame when the web browser navigates the second frame to the URL associated with the view when a user clicks on the navigation button in a web browser.
27. A system for navigating between multiple views within a web browser, comprising:
a first view contained within the web browser and displayed to a user;
a second view contained within the web browser and hidden from the user;
a history page associated with the second view;
wherein the second view is displayed to the user when the history page is loaded by the web browser in response to a user navigation.
28. The system of claim 27 wherein an entry in a web browser history is created for the history page.
29. The system of claim 28 wherein the user navigation comprises clicking on a navigation button of the web browser.
30. The system of claim 27 wherein the browser does not create an entry in a web browser history for the first or second view.
31. The system of claim 27 wherein the first view is hidden within the web browser when the second view is displayed to the user.
32. A method for navigating between multiple views within a web browser, comprising:
displaying a first view within the web browser to a user;
associating a history page with the first view wherein the web browser adds an entry for the history page in a web browser history;
replacing the first view with a second view in response to a user navigation, wherein the first view is hidden from the user within the web browser;
displaying the first view to the user when the user navigates to the history page using a navigation button of the web browser.
33. The method of claim 32 wherein the browser does not create an entry in the web browser history for the first or second view.
34. The method of claim 32 wherein the history page is hidden from the user.
35. The method of claim 32, further comprising:
causing the second view to be hidden from the user within the web browser.

1. A film formation apparatus for a semiconductor process, comprising:
a process container configured to accommodate a plurality of target substrates stacked at intervals;
a support member configured to support the target substrates inside the process container;
a heater configured to heat the target substrates inside the process container;
an exhaust system configured to exhaust gas inside the process container;
a source gas supply circuit configured to supply a source gas into the process container, the source gas being for depositing a thin film on the target substrates;
a mixture gas supply circuit configured to supply a mixture gas into the process container, the mixture gas containing a doping gas for doping the thin film with an impurity and a dilution gas for diluting the doping gas; and
a control section configured to control an operation of the apparatus including the mixture gas supply circuit,
wherein the mixture gas supply circuit comprises
a gas mixture tank disposed outside the process container and configured to mix the doping gas with the dilution gas to form the mixture gas,
a mixture gas supply line configured to supply the mixture gas from the gas mixture tank into the process container,
a doping gas supply circuit configured to supply the doping gas into the gas mixture tank, and
a dilution gas supply circuit configured to supply the dilution gas into the gas mixture tank.
2. The apparatus according to claim 1, wherein the mixture gas supply circuit includes a merged gas line for the doping gas and the dilution gas from the doping gas supply circuit and the dilution gas supply circuit to be merged therein and then supplied into the gas mixture tank.
3. The apparatus according to claim 1, wherein the mixture gas supply circuit further comprises a first switching valve disposed on the mixture gas supply line, and the control section is configured to keep the first switching valve closed so as to store the doping gas and the dilution gas from the doping gas supply circuit and the dilution gas supply circuit within the gas mixture tank, and to then open the first switching valve so as to supply the mixture gas into the process container.
4. The apparatus according to claim 3, wherein the mixture gas supply circuit further comprises a pressure meter configured to measure pressure inside the gas mixture tank, and the control section is configured to open and close the first switching valve, based on measurement values by the pressure meter.
5. The apparatus according to claim 1, wherein the gas mixture tank has a volume of 200 to 5,000 cc.
6. The apparatus according to claim 1, wherein the mixture gas supply circuit further comprises a first switching valve disposed on the mixture gas supply line, and the control section is configured to pulse-wise open and close the first switching valve while the doping gas and the dilution gas are continuously supplied from the doping gas supply circuit and the dilution gas supply circuit into the gas mixture tank.
7. The apparatus according to claim 6, wherein the mixture gas supply circuit further comprises a pressure meter configured to measure pressure inside the gas mixture tank, and the control section is configured to pulse-wise open and close the first switching valve, based on measurement values by the pressure meter.
8. The apparatus according to claim 6, wherein the source gas supply circuit comprises a source gas supply line configured to supply the source gas into the process container, and a second switching valve disposed on the source gas supply line, and the control section is configured to pulse-wise open and close the second switching valve in synchronism with operation to pulse-wise open and close the first switching valve.
9. The apparatus according to claim 8, wherein the apparatus further comprises a purge gas supply circuit configured to supply a purge gas into the process container, the purge gas supply circuit comprises a purge gas supply line configured to supply the purge gas into the process container, and a third switching valve disposed on the purge gas supply line, and the control section is configured to pulse-wise close and open the third switching valve in synchronism with operation to pulse-wise open and close the first and second switching valves.
10. The apparatus according to claim 9, wherein the purge gas supply line is connected to the mixture gas supply line downstream from the first switching valve.
11. A film formation method for a semiconductor process, comprising:
heating a plurality of target substrates stacked at intervals inside a process container;
supplying a source gas into the process container, the source gas being for depositing a thin film on the target substrates; and
supplying a mixture gas from a gas mixture tank disposed outside the process container into the process container, while supplying a doping gas for doping the thin film with an impurity and a dilution gas for diluting the doping gas into the gas mixture tank to form the mixture gas.
12. The method according to claim 11, comprising performing operation to pulse-wise supply the mixture gas from the gas mixture tank into the process container, while continuously supplying the doping gas and the dilution gas into the gas mixture tank.
13. The method according to claim 12, comprising performing operation to pulse-wise supply the mixture gas, based on measurement values by a pressure meter configured to measure pressure inside the gas mixture tank.
14. The method according to claim 12, comprising performing operation to pulse-wise supply the source gas in synchronism with operation to pulse-wise supply the mixture gas.
15. The method according to claim 14, comprising performing operation to pulse-wise supply a purge gas into the process container in synchronism with an operation to pulse-wise supply the mixture gas and the source gas, in opposite phase.
16. A computer readable medium containing program instructions for execution on a processor, which, when executed by the processor, cause a film-formation apparatus for a semiconductor process to execute
heating a plurality of target substrates stacked at intervals inside a process container;
supplying a source gas into the process container, the source gas being for depositing a thin film on the target substrates; and
supplying a mixture gas from a gas mixture tank disposed outside the process container into the process container, while supplying a doping gas for doping the thin film with an impurity and a dilution gas for diluting the doping gas into the gas mixture tank to form the mixture gas.
17. The medium according to claim 16, wherein the program instructions, when executed by the processor, cause the film-formation apparatus to execute
performing operation to pulse-wise supply the mixture gas from the gas mixture tank into the process container, while continuously supplying the doping gas and the dilution gas into the gas mixture tank.
18. The medium according to claim 17, wherein the program instructions, when executed by the processor, cause the film-formation apparatus to execute
performing operation to pulse-wise supply the mixture gas, based on measurement values by a pressure meter configured to measure pressure inside the gas mixture tank.
19. The medium according to claim 17, wherein the program instructions, when executed by the processor, cause the film-formation apparatus to execute
performing operation to pulse-wise supply the source gas in synchronism with operation to pulse-wise supply the mixture gas.
20. The medium according to claim 19, wherein the program instructions, when executed by the processor, cause the film-formation apparatus to execute
performing operation to pulse-wise supply a purge gas into the process container in synchronism with an operation to pulse-wise supply the mixture gas and the source gas, in opposite phase.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A robot comprising:
at least one link rotatably provided around an axis;
a motor to rotate the at least one link around the axis;
a first sensor to detect a rotation state of the motor;
a second sensor to detect a rotation state of the at least one link; and
a controller configured to control the rotation state of the at least one link based on first information from the first sensor,
the controller comprising:
a first comparator configured to compare the first information received from the first sensor with a first expected value that is determined according to the first information outputted from the first sensor while the motor rotates under normal condition based on a command signal to the motor;
a second comparator configured to compare second information received from the second sensor with a second expected value that is determined according to the second information outputted from the second sensor while the motor rotates under the normal condition based on the command signal; and
a determination device configured to determine an abnormality in the first sensor and an abnormality in the second sensor based on each comparison result of the first comparator and the second comparator.
2. The robot according to claim 1,
wherein the first sensor comprises an encoder attached to the motor, and
wherein the second sensor comprises any one of a speed sensor, an acceleration sensor, and a strain sensor.
3. The robot according to claim 2,
wherein the at least one link includes link dodies, and
wherein the link bodies are sequentially coupled from a base via the respective shafts, and constitute an arm unit.
4. The robot according to claim 3, wherein the second sensor is provided to correspond to each of the at least one link which is driven by each motor.
5. The robot according to claim 3, wherein the second sensor comprises the acceleration sensor and is provided at a distal end of the at least one link positioned at the most distal end from the base.
6. The robot according to claim 1,
wherein the at least one link includes link dodies, and
wherein the link bodies are sequentially coupled from a base via the respective shafts, and constitute an arm unit.
7. The robot according to claim 6, wherein the second sensor is provided to correspond to each of the at least one link which is driven by each motor.
8. The robot according to claim 6, wherein the second sensor comprises the acceleration sensor and is provided at a distal end of the at least one link positioned at the most distal end from the base.
9. A robot comprising:
means for rotating a link around an axis;
first means for detecting a rotation state of the means for rotating;
second means for detecting a rotation state of the link;
a first comparison means for comparing first information received from the first means with a first expected value that is determined according to the first information outputted from the first means while the means for rotating rotates under normal condition based on a command signal to the means for rotating;
a second comparison means for comparing, second information received from the second means with a second expected value that is determined according to the second information outputted from the second means while the means for rotating under the normal condition based on the command signal; and
means for determining an abnormality in the first means and an abnormality in the second means based on each comparison result of the first comparison means and the second comparison means.