1461129384-0be2ff5a-b9d0-44d7-b7d7-97bce3477e9a

1. A pressure wave generator comprising:
a silicon substrate;
a hole formed in the silicon substrate; and
a film covering the hole,

wherein
the film includes a multilayer film of a heat generating member and a heat insulating layer.
2. The pressure wave generator of claim 1, wherein
the heat generating member is formed of polysilicon doped with boron or phosphorus.
3. The pressure wave generator of claim 1, wherein
a surface of the heat generating member opposite to a side on which the heat insulating layer is formed, and a side surface of the heat generating member, are covered by a barrier layer including an insulating film.
4. The pressure wave generator of claim 1, wherein
the heat insulating layer is a multilayer film of a silicon oxide film and a silicon nitride film.
5. The pressure wave generator of claim 4, wherein
the silicon oxide film is covered by the silicon nitride film.
6. The pressure wave generator of claim 1, wherein
in the film, the heat generating member and the heat insulating layer are successively stacked together from a side on which the hole is provided.
7. The pressure wave generator of claim 1, wherein
the heat generating member generates pressure waves on a side opposite to a side on which the heat insulating layer is formed.
8. The pressure wave generator of claim 1, wherein
a pad is formed on the heat generating member, and an alternating current is applied via the pad to the heat generating member.
9. A device comprising:
the pressure wave generator of claim 1; and
a pressure wave receiver,

wherein
the pressure wave receiver includes a capacitor including a vibration film and a fixed film.
10. The device of claim 9, further comprising:
a cover covering the pressure wave generator and the pressure wave receiver, wherein
the pressure wave generator and the pressure wave receiver are mounted on a printed circuit board.
11. The device of claim 10, wherein
the cover includes an opening corresponding to each of the pressure wave generator and the pressure wave receiver.
12. The device of claim 10, wherein
the cover includes a first opening corresponding to the pressure wave generator and a second opening corresponding to the pressure wave receiver.
13. The device of claim 10, wherein
the printed circuit board includes a first opening corresponding to the pressure wave generator and a second opening corresponding to the pressure wave receiver.
14. The device of claim 12, wherein
a mesh is formed at each of the first and second openings.
15. The device of claim 10, wherein
the pressure wave generator and the pressure wave receiver are formed on the same silicon substrate.
16. The device of claim 15, wherein
the pressure wave receiver further includes a silicon substrate having a hole, and
the hole in the silicon substrate of the pressure wave receiver and the hole in the silicon substrate of the pressure wave generator share a space.
17. The device of claim 10, wherein
there are a plurality of the pressure wave receivers mounted on the printed circuit board and are arranged in a line on the printed circuit board.
18. The device of claim 10, wherein
there are a plurality of the pressure wave receivers mounted on the printed circuit board and are arranged in a cross shape on the printed circuit board.
19. The device of claim 10, wherein
there are a plurality of the pressure wave receivers mounted on the printed circuit board and are arranged in an L-shape on the printed circuit board.
20. The device of claim 10, wherein
the device is electrically connected to another electronic device at a surface of the printed circuit board and the cover perpendicular to a surface of the printed circuit board on which the pressure wave generator is mounted.
21. The device of claim 10, wherein
the device is electrically connected to another electronic device at a surface of the printed circuit board opposite to a surface of the printed circuit board on which the pressure wave generator is mounted.
22. The device of claim 21, wherein
the another electronic device includes a controller which controls the pressure wave generator and the pressure wave receiver.
23. The device of claim 21, wherein
the device is electrically connected to the another electronic device via a bump formed on the surface of the printed circuit board opposite to the surface of the printed circuit board on which the pressure wave generator is mounted.
24. The device of claim 10, wherein
the heat generating member and a vibration electrode included in the vibration film are formed of the same material, and
the heat insulating layer and parts other than the vibration electrode of the vibration film are formed of the same material.
25. A device comprising:
a pressure wave generator;
a pressure wave receiver;
a printed circuit board on which the pressure wave generator and the pressure wave receiver are mounted; and
a cover covering the pressure wave generator and the pressure wave receiver.
26. The device of claim 25, wherein
the pressure wave generator includes a silicon substrate, a hole in the silicon substrate, and a film covering the hole, and
the film includes a multilayer film of a heat generating member and a heat insulating layer which are successive formed from a side on which the hole is formed.
27. The device of claim 25, wherein
a first opening corresponding to the pressure wave generator and a second opening corresponding to the pressure wave receiver are formed in the printed circuit board.
28. The device of claim 25, wherein
the device is electrically connected to another electronic device at a surface of the printed circuit board and the cover perpendicular to a surface of the printed circuit board on which the pressure wave generator is mounted.
29. The device of claim 25, wherein
the device is electrically connected to another electronic device at a surface of the printed circuit board opposite to a surface of the printed circuit board on which the pressure wave generator is mounted.
30. The device of claim 29, wherein
the another electronic device includes a controller which controls the pressure wave generator and the pressure wave receiver.
31. The device of claim 29, wherein
the device is allowed to be mounted on a surface of the another electronic device.
32. The device of claim 25, wherein
the substrate of the pressure wave generator and the substrate of the pressure wave receiver are formed of the same material,
the heat generating member of the pressure wave generator and a vibration electrode in the vibration film of the pressure wave receiver are formed of the same material, and
the heat insulating layer of the pressure wave generator and parts other than the vibration electrode in the vibration film of the pressure wave receiver are formed of the same material.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A method comprising:
operating a fuel cell system including a fuel cell stack, and a fuel cell enclosure at least partially enclosing the fuel cell stack and at least partially defining a hydrogen chamber between the enclosure and the stack, which includes an anode side and a cathode side, the operating comprising including flowing hydrogen into the anode side and flowing air into the cathode side, producing electricity, and operating a primary electrical device connected to the stack using the electricity;
shutting down the stack including:
disconnecting the stack from the primary electrical device;
stopping the flow of air into and out of the cathode side;
maintaining a positive pressure of hydrogen in the hydrogen chamber between the enclosure and the stack above atmospheric pressure; and
allowing oxygen in the stack to be consumed by hydrogen.
2. The method as set forth in claim 1, stopping the flow of hydrogen into the anode side after the flow of air into and out of the cathode side has stopped.
3. The method as set forth in claim 2, wherein the maintaining the positive pressure and the stopping the flow of hydrogen into the anode side is carried out at about 110 to 120 kPa and until fuel cell stack temperature has cooled to less than about 50\xb0 C.
4. The method as set forth in claim 2, wherein the maintaining the positive pressure is carried out at about 160 to 180 kPa.
5. The method as set forth in claim 1, wherein the maintaining the positive pressure is carried out passively after fuel cell stack shutdown.
6. The method as set froth in claim 5, wherein the maintaining the positive pressure is carried out using a passively operated pressure regulator valve.
7. The method as set forth in claim 1, wherein said fuel cell system further includes a hydrogen supply; said anode side include a hydrogen inlet and a hydrogen outlet: and the hydrogen chamber is in fluid communication with at least one of the hydrogen supply, hydrogen inlet or hydrogen outlet.
8. The method as set forth in claim 7, wherein the fuel cell system further comprises a hydrogen recycle line in fluid communication with the hydrogen chamber and the anode inlet.
9. The method as set forth in claim 8, wherein said fuel cell system further comprises a pump in fluid communication with the recycle line.
10. The method as set forth in claim 1, wherein the volume inside the hydrogen chamber is approximately the same as the reactant gas volume inside the fuel cell stack.
11. The method as set forth in claim 1, wherein the hydrogen chamber is at least partially filled with an open pore and non-conductive foam.
12. The method as set forth in claim 1, wherein the hydrogen chamber further includes a catalyst capable of promoting consumption of oxygen inside the chamber.
13. The method as set forth in claim 1, wherein the hydrogen chamber further includes a baffle in sealing contact between an interior portion of the chamber and the exterior portion of the fuel cell stack.
14. The method as set forth in claim 1, wherein the hydrogen chamber further includes a catalyst coated oxygen sensor adapted to measured air or oxygen leakage into the chamber.

1461129374-73c5d210-8cf1-4138-8909-5466432c065c

1. A fluorescence detection system comprising:
a substrate disk being rotatable and having a specimen-holding area on which one or more biological specimens are fixed, wherein the one or more biological specimens are fluorescence labeled;
a rotation unit which rotates the substrate disk;
an excitation-light irradiation unit which performs irradiation of each of said one or more biological specimens with excitation light;
a fluorescence-detection unit which detects fluorescence emitted from said each of the one or more biological specimens; and
a control unit which controls said rotation unit, said excitation-light irradiation unit, and said fluorescence-detection unit so that said each of the one or more biological specimens is irradiate with excitation light while the substrate disk is rotated by the rotation unit, and the fluorescence-detection unit detects said fluorescence emitted from said each of the one or more biological specimens when a predetermined time elapses since each of the one or more biological specimens is irradiated with the excitation light,
wherein the substrate disk is arranged in such a manner that the center of the substrate disk is positioned at the center of rotation of the rotation unit,
and wherein the excitation-light irradiation unit is arranged on the upper side of the substrate disk and irradiates a predetermined excitation-light irradiation position on the substrate disk with the excitation light from the upper side of the substrate disk,
and wherein the fluorescence-detection unit is arranged on the upper side of the substrate disk and detects the fluorescence in such a manner that a fluorescence detection position on the substrate disk and the predetermined excitation-light irradiation position are at identical distances from the center of rotation of the rotation unit and at angular positions that are different by angle \u03b8 with respect to the direction of rotation of the rotation unit, wherein \u03b8 is not equal to 0;
and wherein the angle \u03b8 changes based on the speed of rotation of the substrate disk by the rotation unit.
2. A fluorescence detection system according to claim 1, wherein said one or more biological specimens are labeled with a fluorescent material having a fluorescent lifetime on the order of microseconds to milliseconds.
3. A fluorescence detection system according to claim 1, wherein said specimen-holding area is realized by one or more grooves spirally or concentrically arranged on the substrate disk.
4. A fluorescence detection system according to claim 3, wherein each of said one or more grooves has a width which is greater than a diameter of a light spot which said excitation light forms on said substrate disk.
5. A fluorescence detection system according to claim 1, wherein said substrate disk is opaque to said excitation light.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A granular pesticide composition enabling dissolution control for each pesticidal active ingredient, having a granule size of 0.3 to 3 mm in diameter or of 0.6 to 3 mm in breadth and 2 to 10 mm in length, which comprises a non-disintegrable part in the form of granules being not disintegrated in water within 30 minutes and a disintegrable part being disintegrated in water within 30 minutes,
wherein the non-disintegrable part contains (a) first acidic pesticidal active ingredient selected from sulfonylurea-based compounds and difluoromethanesulfonylanilide compounds represented by the formula,
wherein R1 is a hydrogen atom, alkyl group or alkoxyalkyl group, and salts thereof, (b) a cationic surfactant which is gelled in water selected from dialkyldimethylammonium chlorides wherein the alkyl part has 8-22 carbon atoms, and (c) a basic substance having a pH of 7.5 or higher in a 1 wt % aqueous solution or a 1 wt % aqueous suspension, and
wherein the disintegrable part contains a second pesticidal active ingredient selected from compounds other than the first acidic pesticidal active ingredient (a).
2. The granular pesticide composition according to claim 1, wherein the basic substance is sodium hydrogen carbonate, sodium carbonate, calcium hydroxide, calcium carbonate, basic white carbon or basic Japanese acid clay.
3. The granular pesticide composition according to claim 1, wherein the cationic surfactant is dilaurydimethylammonium chloride, dioleyldimethylammonium chloride, dicocoyldimethylammonium chloride or distearyldimethylammonium chloride.
4. A process of preparing a granular pesticide composition enabling dissolution control for each pesticidal active ingredient according to claim 1, which process comprises the step of subjecting granules as the non-disintegrable part containing a first pesticidal active ingredient, a cationic surfactant and a basic substance, a second a pesticidal active ingredient, a nonionic or anionic surfactant and an extender to an extrusion granulation through a screen of which the mesh opening has a diameter larger than the granule size or granule length of the non-disintegrable part to form granules of the granular pesticidal composition enabling dissolution control for each pesticidal active ingredient having a granule size of 0.3 to 3 mm in diameter or of 0.6 to 3 mm in breadth and 2 to 10 mm in length, wherein the first acidic pesticidal active ingredient is selected from sulfonylurea-based compounds and difluoromethanesulfonylanilide derivatives represented by the formula,
wherein R1 is a hydrogen atom, alkyl group or alkoxyalkyl group, and salts thereof wherein the cationic surfactant which is gelled in water is selected from dialkyldimethylammonium chlorides wherein the alkyl part has 8-22 carbon atoms, wherein the basic substance has a pH of 7.5 or higher in a 1 wt. % aqueous solution or a 1 wt. % aqueous suspension, and
wherein the second pesticidal active ingredient is selected from compounds other than the first acidic pesticidal active ingredient.