1. A mass flow controller comprising:
a gas passageway forming member that forms a gas passageway;
a flow rate adjusting unit that is disposed in the gas passageway and includes a valve adjusting a flow rate of a gas and an actuator adjusting an opening degree of the valve;
an opening degree setting information storage unit that stores opening degree setting information in which an opening degree setting value of the valve, used when a gas flows into the gas passageway with a flow rate defined according to a process procedure before performing the process procedure, is obtained in advance for each process procedure; and
a setting unit that acquires the opening degree setting value corresponding to the process procedure from the opening degree setting information storage unit and controls the actuator on the basis of the acquired opening degree setting value,
wherein the gas passageway forming member further includes:
a gas inlet port,
a gas outlet port,
a plurality of independent gas passageways that connects the gas inlet port and the gas outlet port to each other,
a gas exhaust port that is provided in each gas passageway,
a three-way valve that is provided at the position where each gas exhaust port is provided in the gas passageway, and
a synchronization unit that synchronizes an opening and closing control of the three-way valves of the gas passageways,
wherein each gas passageway is provided with the flow rate adjusting unit and the setting unit,
when the three-way valve of the first gas passageway is opened and the three-way valve of another gas passageway is closed, the setting unit of the first gas passageway adjusts the flow rate adjusting unit of the first gas passageway using a first opening degree setting value corresponding to one process procedure acquired from the opening degree setting information storage unit so as to become a first gas flow rate in accordance with the one process procedure,
the setting unit of the second gas passageway adjusts the flow rate adjusting unit of the second gas passageway using a second opening degree setting value corresponding to the next process procedure acquired from the opening degree setting information storage unit so that the gas flowing through the second gas passageway has a second gas flow rate, and
when the process procedure is switched, the synchronization unit allows only the three-way vale of the second gas passageway to be opened and allows the three-way valve of another gas passageway including the first gas passageway to be closed.
2. The mass flow controller according to claim 1, further comprising:
valves that are respectively provided near the gas inlet port and the gas outlet port.
3. The mass flow controller according to claim 2,
wherein each gas valve is an air operation valve or an electromagnetic valve.
4. A substrate processing device comprising:
a substrate processing chamber that includes a processing subject holding unit holding a processing subject; and
a control unit that controls a mass flow controller, adjusting the amount of a gas supplied into the substrate processing chamber on the basis of an opening degree of a valve, in accordance with a program,
wherein the control unit controls the mass flow controller on the basis of an opening degree setting value of the valve when the gas flows into the substrate processing chamber with a flow rate defined by the process procedure obtained in advance before performing the process procedure,
wherein a gas passageway forming member of the mass flow controller includes:
a gas inlet port, a gas outlet port,
a plurality of independent gas passageways that connects the gas inlet port and the gas outlet port to each other,
a gas exhaust port that is provided in each gas passageway,
a three-way valve that is provided at the position where each gas exhaust port is provided in the gas passageway, and
a synchronization unit that synchronizes an opening and closing control of the three-way valves of the gas passageways,
wherein each gas passageway is provided with the flow rate adjusting unit and the setting unit,
wherein the control unit informs the setting unit of the first passageway of one process procedure of the program, and then informs the setting unit of the second gas passageway of the next process procedure during the one process procedure,
when the three-way valve of the first gas passageway is opened and the three-way valve of another gas passageway is closed, the setting unit of the first gas passageway adjusts the flow rate adjusting unit of the first gas passageway using a first opening degree setting value corresponding to one process procedure acquired from the opening degree setting information storage unit so as to become a first gas flow rate in accordance with the one process procedure,
the setting unit of the second gas passageway adjusts the flow rate adjusting unit of the second gas passageway using a second opening degree setting value corresponding to the next process procedure acquired from the opening degree setting information storage unit so that the gas flowing through the second gas passageway has a second gas flow rate, and
when the program is switched from the one process procedure to the next process procedure, the synchronization unit of the mass flow controller allows only the three-way vale of the second gas passageway to be opened and allows the three-way valve of another gas passageway including the first gas passageway to be closed.
5. The substrate processing device according to claim 4,
wherein the mass flow controller includes valves that are respectively provided near the gas inlet port and the gas outlet port.
6. The substrate processing device according to claim 5,
wherein each gas valve is an air operation valve or an electromagnetic valve.
7. A gas flow rate adjusting method of adjusting a flow rate of a gas flowing through a gas passageway using a flow rate adjusting unit including a valve that is disposed on a gas passageway and an actuator that controls an opening degree of the valve, the gas flow rate adjusting method comprising:
acquiring an opening degree setting value corresponding to a first process procedure from an opening degree setting information storage unit when an execution instruction of the first process procedure described in a program storing a gas flow rate for each process procedure is received, the opening degree setting information storage unit storing opening degree setting information including opening degree setting values of the valve, the opening degree setting value being obtained in advance for each process procedure and being used when causing a gas to flow to the gas passageway at a flow rate defined according to a process procedure before the process procedure is performed;
performing a first adjustment of flow rate by controlling the actuator on the basis of the opening degree setting value;
acquiring, in parallel with the controlling the actuator, an opening degree setting value corresponding to a second process procedure subsequent to the first process procedure in the program;
controlling an actuator in another gas passageway different from the gas passageway associated with the execution instruction of the first process procedure, on the basis of the opening degree setting value corresponding to the second process procedure; and
performing switching between gas passageways by stopping the flow of the gas flowing through the gas passageway and causing the gas to flow through the another gas passageway, simultaneously when the first process procedure is switched to the second process procedure.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method of making a structured surface article comprising at least one cube corner element having a plurality of faces, the method comprising:
providing a prepared substrate having a plurality of non-machined faces arranged to form a plurality of cavities and protrusions extending above said cavities; and
removing material from the prepared substrate to form at least one machined face such that the machined face and at least one of the non-machined face together form one of the plurality of faces of the at least one cube corner element and wherein a transition line lies between the machined face and the non-machined face.
2. The method of claim 1, wherein the removing step further forms at least one additional machined face, the at least one additional non-machined face and at least one additional machined face forming at least another of the plurality of faces.
3. The method of claim 1, wherein the removing step forms the machined face in an orientation offset by less than about 10 degrees of arc from a desired orientation.
4. The method of claim 1, wherein the providing step comprises:
providing an initial substrate having an intermediate face; and
producing a negative copy of the initial substrate to form the prepared substrate, the non-machined face being a replica of the intermediate face.
5. The method of claim 1, wherein the providing step comprises:
embossing the non-machined face into the prepared substrate.
6. The method of claim 1, wherein the non-machined face and the machined face are substantially planar.
7. The method of claim 6, wherein the non-machined face and the machined face are substantially coplanar.
8. The method of claim 6, wherein the non-machined face and the machined face are noncoplanar.
9. The method of claim 8, wherein the removing step forms the machined face in an orientation offset by less than about 10 degrees of arc from that of the non-machined face.
10. The method of claim 1, wherein the at least one cube corner element comprises a PG cube corner element.
11. The method of claim 1 wherein the providing step comprises:
providing a first substrate having a plurality of intermediate protrusions;
removing material from an upper portion of at least some of the intermediate protrusions to form intermediate pyramids therein;
producing a negative copy of the first substrate to form the prepared substrate, wherein the plurality of cavities correspond to the intermediate pyramids.
12. The method of claim 1, wherein the removing material from the prepared substrate step comprises removing material from an upper portion of at least some of the protrusions to form a plurality of machined faces.
13. The method of claim 11, wherein the providing a first substrate step comprises providing an initial substrate, modifying the initial substrate to define initial protrusions, and making a negative copy of the initial substrate to produce the first substrate.
14. The method of claim 11, wherein the intermediate protrusions have a triangular cross-section.
15. The method of claim 11, wherein the intermediate protrusions have a diamond-shaped cross-section.
16. The method of claim 11, wherein the intermediate protrusions are substantially fully interconnected.
17. The method of claim 11, wherein at least some of the intermediate protrusions are not fully interconnected.
18. The method of claim 11, wherein the removing material from an upper portion of at least some of the intermediate protrusions step comprises removing material from an upper portion of each of the intermediate protrusions to form intermediate cube corner pyramids therein.
19. The method of claim 11, wherein the removing material from the prepared substrate step comprises removing material from an upper portion of each of the protrusions to form cube corner pyramids therein.
20. The method of claim 19, wherein the removing material from the prepared substrate step forms cube corner pyramids substantially in registration with the cavities to form compound cube corner pyramids that comprise at least portions of the cube corner pyramids and at least portions of neighboring cavities.
21. The method of claim 11, wherein at least some of the cube corner elements are preferred geometry (PG) cube corner elements.
22. The method of claim 11, wherein the at least one cube corner element is a plurality of cube corner elements forming a structured surface, the method further comprising replicating the structured surface to form retroreflective cube corner sheeting.
23. A method of forming in a substrate a structured surface extending along a reference plane and containing multiple preferred geometry (PG) cube corner elements each of which includes at least one nondihedral edge that (1) is nonparallel to the x-y plane; and (2) is substantially parallel to an adjacent nondihedral edge of a neighboring cube corner element, comprising:
providing a prepared substrate; and
forming in the prepared substrate groove side surfaces that extend along axes that are substantially parallel to the reference plane;
wherein portions of at least some groove side surfaces form at least portions of the PG cube corner elements.
24. The method of claim 23, wherein the prepared substrate has an initial structured surface that includes a first plurality of faces, and wherein the groove side surfaces define additional faces, the additional faces and the first plurality of faces together forming the preferred geometry (PG) cube corner elements.
25. The method of claim 24, wherein exactly one of the three faces of each preferred geometry (PG) cube corner element is a compound face comprising one of the first plurality of faces and one of the additional faces.
26. The method of claim 24, wherein exactly two of the three faces of each preferred geometry (PG) cube corner element are compound faces comprising one of the first plurality of faces and one of the additional faces.
27. The method of claim 24, wherein all of the three faces of each preferred geometry (PG) cube corner element are compound faces comprising one of the first plurality of faces and one of the additional faces.
28. The method of claim 24, wherein the first plurality of faces define at least one cube corner cavity that has at least four faces.
29. The method of claim 24, wherein the additional faces define cube corner pyramids.
30. The method of claim 24, wherein a transition plane separates at least some of the first plurality of faces from at least some of the additional faces.
31. The method of claim 23, wherein the providing step comprises providing a prepared substrate having an exposed surface that is structured, and wherein the groove side surfaces are formed in the exposed surface.
32. The method of claim 23, wherein the providing step comprises:
providing a first substrate having a plurality of initial protrusions;
removing material from an upper portion of at least some of the initial protrusions to form intermediate pyramids therein; and
producing a negative copy of the first substrate to form the prepared substrate, the prepared substrate having a plurality of cavities corresponding to the intermediate pyramids, the prepared substrate also having secondary protrusions extending above the cavities.
33. The method of claim 23, further comprising replicating the structured surface to form retroreflective cube corner sheeting.