Author: claimsbot

1. A method of predicting the location of a CDMA mobile communications unit in a wireless communications service area, comprising the steps of:
(a) receiving measure attribute information from a mobile unit location in the service area, said attribute information being specific to the location of the mobile unit in the service area;
(b) computing the probability of the mobile unit being at a specific location in the service area in response to said received attribute information using a likelihood probability function, said likelihood probability function having an iterative procedure for generating a maximum likelihood estimator of the mobile unit’s location in this service area, wherein said likelihood probability function includes a frequentist likelihood function;
(c) generating an output indicative of the likelihood of the mobile unit being at said location in the service area.
2. A method according to claim 1 wherein the maximum likelihood estimator comprises the coordinates in the service area which maximizes the likelihood probability function.
3. A method of predicting the location of a CDMA mobile communications unit in a wireless communications service area, comprising the steps of:
(a) receiving measured attribute information from a mobile unit location in the service area, said attribute information being specific to the location of the mobile unit in the service area;
(b) computing the probability of the mobile unit being at a specific location in the service area in response to said received attribute information using a likelihood probability function;
(c) generating an output indicative of the likelihood of the mobile unit being at said location in the service area;
wherein said likelihood probability function includes an iterative procedure for producing a maximum likelihood estimator of the mobile unit’s location in this service area wherein said likelihood probability function comprises a Bayes-modified likelihood function.
4. A method according to claim 1 wherein said procedure comprises sequential Bayesian procedure characteristics.
5. A method according to claim 4 wherein said sequential Bayesian procedure characteristics are implemented as a frequentist likelihood function.
6. A method according to claim 1 wherein said attribute information comprises a pilot signal strength measurement of at least one visible pilot signal at said location of the mobile unit.
7. A method according to claim 6 and additionally including a step (d) prior to step (b) of reducing the effective size of the service area so as to reduce the number of computations required in step (b).
8. A method according to claim 6 and following step (a) and before step (b), additionally including a step (d) of identifying a region A of support for the mobile unit in the service area and (e) identifying a set of possible pilot signals which can be detected by the mobile unit in said region of support.
9. A method according to claim 8 and additionally including a step (f) of computing an approximation {tilde over (\u03b8)}ij(x,y) of the probability the mobile unit detects a pilot signal at said specific location (x,y) in said region A for all pilot signals in said set of possible pilot signals and where j is a sector of a multi-sector based station I in said region of support.
10. A method according to claim 9 wherein {tilde over (\u03b8)}ij(x,y) is derived from an RF model for the RF power Rij(x,y) received by the mobile unit and where the model is of the form of
Rij(x,y)=TijGij(x,y)Lij(x,y)Fij(x,y)Mij(x,y)

where Tij is the transmit power associated with sector j of base station I, Gij(x,y) is the antenna gain for the sector j of base station I along the direction pointing towards the location (x,y) within A, Lij(x,y) is the distance loss between the base station I associated with the sector j and the location (x,y) within A, Fij(x,y) is the shadow fading factor and Mij(x,y) is the measured noise factor.
11. A method according to claim 10 wherein said attribute information comprises the measured visibility of a pilot signal transmitted from a base station and the likelihood probability function comprises an iterative frequentist maximum likelihood (ML) function in the form of
L
ML
s

\u2061

(

x
,
y

)
\u221d
L
ML

s
–
1
\u2061

(

x
,
y

)
\u2062
\u220f

ij
\u2208
K
\u2062

\u2003

\u2062
\u03b8
~

ij

\u2061

(

x
,
y

)
\u03bc
ij
s
\u2061
1
–
\u03b8
~

ij

\u2061

(

x
,
y

)
1
–

\u03bc
ij
s
,
(

x
,
y

)

\u2208
A
where x and y comprise rectilinear coordinates in the service area A, s is the number of measurement epochs, and \u03bcijs is equal to one or zero depending on whether the mobile unit can detect a pilot signal ij at measurement epoch s.
12. A method of predicting the location of a CDMA mobile communications unit in a wireless communications service area, comprising the steps of:
(a) receiving measure attribute information from a mobile unit location in the service area, said attribute information being specific to the location of the mobile unit in the service area;
(b) computing the probability of the mobile unit being at a specific location in the service area in response to said received attribute information using a likelihood probability function;
(c) generating an output indicative of the likelihood of the mobile unit being at said location in the service area;
wherein said attribute information comprises a pilot signal strength measurement of at least one visible pilot signal at said location of the mobile unit;
and following step (a) and before step (b), additionally including a step (d) of identifying a region A of support for the mobile unit in the service area and (e) identifying a set of possible pilot signals which can be detected by the mobile unit in said region of support;
and additionally including a step (f) of computing an approximation {tilde over (\u03b8)}ij(x,y) of the probability the mobile unit detects a pilot signal at said specific location (x,y) in said region A for all pilot signals in said set of possible pilot signals and where j is a sector of a multi-sector based station I in said region of support;
wherein {tilde over (\u03b8)}ij(x,y) is derived from an RF model for the RF power Rij(x,y) received by the mobile unit and where the model is of the form of
Rij(x,y)=TijGij(x,y)Lij(x,y)Fij(x,y)Mij(x,y)
where Tij is the transmit power associated with sector j of base station I, Gij(x,y) is the antenna gain for the sector j of base station I along the direction pointing towards the location (x,y) within A, Lij(x,y) is the distance loss between the base station I associated with the sector j and the location (x,y) within A, Fij(x,y) is the shadow fading factor and Mij(x,y) is the measured noise factor;
wherein said attribute information comprises the measured visibility of a pilot signal transmitted from a base station and the likelihood probability function comprises an iterative Bayes-modified maximum likelihood (ML) estimator in the form of
L

B
\u2062

\u2003

\u2062
ML

s

\u2061

(

x
,
y

)
\u221d
L

B
\u2062

\u2003

\u2062
ML
s
–
1
\u2061

(

x
,
y

)
\u2062

\u2003

\u2062
\u220f

ij
\u2208
K
\u2062

\u2003

\u2062
n
ij

s
–
1
+
\u03b1
ij

\u2061

(

x
,
y

)
\u03bc
ij
s
\u2061
s
–
1
–

n
ij

s
–
1
+
\u03b2
ij

\u2061

(

x
,
y

)
1
–

\u03bc
ij
s
\u03b1
ij

\u2061

(

x
,
y

)
+
\u03b2
ij

\u2061

(

x
,
y

)
+
s
–
1
,
(

x
,
y

)

\u2208
A
where x and y comprise rectilinear coordinates in the service area A s is the number of measurement epochs, \u03b7ijs\u22121 is the number of times a pilot signal in section j of a multi-sector base station I is visible through the first s\u22121 measurement epochs, \u03b1ij(x,y) and \u03b2ij(x,y) are parameters of a beta distribution, and \u03bcijs is equal to one or zero depending on whether the mobile unit can detect a pilot signal ij at measurement epoch s.
13. A method according to claim 12 where
\u03b1
ij

\u2061

(

x
,
y

)
=

{
1
,
if
\u2062

\u2003

\u2062
\u03b8
~

ij

\u2061

(

x
,
y

)
\u2264

1

2
\u2003

\u2062
\u03b8
~

ij

\u2061

(

x
,
y

)
1
–

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~

ij

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(

x
,
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,
if
\u2062

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ij

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(

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,
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)
>

1

2
\u2062
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ij

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(

x
,
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)
=

{
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1
–

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~

ij

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(

x
,
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\u03b8
~

ij

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(

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,
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,
if
\u2062

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~

ij

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(

x
,
y

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1

2
1
,
if
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~

ij

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(

x
,
y

)
>

1

2
.
14. A method according to claim 11 wherein the frequentist likelihood function LMLs(x,y) is combined with a discrete uniform prior distribution for the location of the mobile unit of the form
P
ML
\u03b8

\u2061

(

x
,
y

)
=

1

\uf605
A
\uf606
,
(

x
,
y

)

\u2208
A
to generate a sequential Bayesian procedure which provides a posterior distribution for the location of the mobile unit of the form
P
ML
s

\u2061

(

x
,
y

)
\u221d
P
ML

s
–
1
\u2061

(

x
,
y

)
\u2062
\u220f

ij
\u2208
K
\u2062

\u2003

\u2062
\u03b8
~

ij

\u2061

(

x
,
y

)
\u03bc
ij
s
\u2061
1
–
\u03b8
~

ij

\u2061

(

x
,
y

)
1
–

\u03bc
ij
s
,
(

x
,
y

)

\u2208

A
.
where \u2225A\u2225 is the number of grid points contained within A, and where x and y comprise rectilinear coordinates in the service area A, s is the number of measurement epochs, and \u03bcijs is equal to one or zero depending on whether the mobile unit can detect a pilot signal ij at measurement epoch s.
15. A method of predicting the location of a CDMA mobile communications unit in a wireless communications service area, comprising the steps of:
(a) receiving measure attribute information from a mobile unit location in the service area, said attribute information being specific to the location of the mobile unit in the service area;
(b) computing the probability of the mobile unit being at a specific location in the service area in response to said received attribute information using a likelihood probability function;
(c) generating an output indicative of the likelihood of the mobile unit being at said location in the service area;
wherein said attribute information comprises a pilot signal strength measurement of at least one visible pilot signal at said location of the mobile unit;
and following step (a) and before step (b), additionally including a step (d) of identifying a region A of support for the mobile unit in the service area and (e) identifying a set of possible pilot signals which can be detected by the mobile unit in said region of support;
and additionally including a step (f) of computing an approximation {tilde over (\u03b8)}ij(x,y) of the probability the mobile unit detects a pilot signal at said specific location (x,y) in said region A for all pilot signals in said set of possible pilot signals and where j is a sector of a multi-sector based station I in said region of support;
wherein {tilde over (\u03b8)}ij(x,y) is derived from an RF model for the RF power Rij(x,y) received by the mobile unit and where the model is of the form of
Rij(x,y)=TijGij(x,y)Lij(x,y)Fij(x,y)Mij(x,y)
where Tij is the transmit power associated with sector j of base station I, Gij(x,y) is the antenna gain for the sector j of base station I along the direction pointing towards the location (x,y) within A, Lij(x,y) is the distance loss between the base station I associated with the sector j and the location (x,y) within A, Fij(x,y) is the shadow fading factor and Mij(x,y) is the measured noise factor;
wherein the frequentist likelihood function LBMLs(x,y) is combined with a discrete uniform prior distribution for the location of the mobile unit of the form
P

B
\u2062

\u2003

\u2062
ML

\u03b8

\u2061

(

x
,
y

)
=

1

\uf605
A
\uf606
,
(

x
,
y

)

\u2208
A
to generate a sequential Bayesian procedure which provides a posterior distribution for the location of the mobile unit of the form
P

B
\u2062

\u2003

\u2062
ML

s

\u2061

(

x
,
y

)
\u221d
P
BML

s
–
1
\u2061

(

x
,
y

)
\u2062

\u2003

\u2062
\u220f

ij
\u2208
K
\u2062
n
ij

s
–
1
+
\u03b1
ij

\u2061

(

x
,
y

)
\u03bc
ij
s
\u2061
s
–
1
–

n
ij

s
–
1
+
\u03b2
ij

\u2061

(

x
,
y

)
1
–

\u03bc
ij
s
\u03b1
ij

\u2061

(

x
,
y

)
+
\u03b2
ij

\u2061

(

x
,
y

)
+
s
–
1
,
(

x
,
y

)

\u2208

A
.
where \u2225A\u2225 is the number of grid points contained within A, and where x and y comprise rectilinear coordinates in the service area A, s is the number of measurement epochs, n is the number of times a pilot signal in section j of a multi-sector base station I is visible through the first s\u22121 measurement epochs, \u03b1ij(x,y) and \u03b2ij(x,y) are parameters of a beta distribution, and \u03bcijs is equal to one or zero depending on whether the mobile unit can detect a pilot signal ij at measurement epoch s.
16. A method according to claim 15 where
\u03b1
ij

\u2061

(

x
,
y

)
=

{
1
,
if
\u2062

\u2003

\u2062
\u03b8
~

ij

\u2061

(

x
,
y

)
\u2264

1

2
\u2003

\u2062
\u03b8
~

ij

\u2061

(

x
,
y

)
1
–

\u2003

\u2062
\u03b8
~

ij

\u2061

(

x
,
y

)
,
if
\u2062

\u2003

\u2062
\u03b8
~

ij

\u2061

(

x
,
y

)
>

1

2
\u2062
\u2062
\u03b2
ij

\u2061

(

x
,
y

)
=

{
\u2003

\u2062

1
–

\u2003

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\u03b8
~

ij

\u2061

(

x
,
y

)
\u03b8
~

ij

\u2061

(

x
,
y

)
,
if
\u2062

\u2003

\u2062
\u03b8
~

ij

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(

x
,
y

)
\u2264

1

2
1
,
if
\u2062

\u2003

\u2062
\u03b8
~

ij

\u2061

(

x
,
y

)
>

1

2
.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. An optical transmitter, comprising:
a laser configured to supply a first optical signal;
a first splitter configured to supply a first portion of the optical signal and a second portion of the optical signal;
a first modulator configured to receive the first portion of the optical signal;
a second modulator configured to receive the second portion of the optical signal, the first modulator including:
a second splitter having an input configured to receive the first portion of the optical signal, and first, second, and third outputs,
first, second, and third waveguides, each of which being coupled to a corresponding one of the first, second, and third outputs of the second splitter the second splitter being configured to supply a substantially equal amount of optical power to each of the first, second, and third waveguides;
a coupler having first, second, and third inputs, each of which being coupled to the first, second, and third waveguides, respectively, the coupler further having an output;
a first electrode provided adjacent the first waveguide, the first electrode being configured to modulate a refractive index of a portion of the first waveguide in accordance with first information associated with a first data stream;
a second electrode provided adjacent the second waveguide, the second electrode being configured to adjust a refractive index of a portion of the second waveguide;
a third electrode provided adjacent the third waveguide, the third electrode being configured to modulate a refractive index of a portion of the third waveguide in accordance with a second information associated with a second data stream,
wherein the output of the coupler supplies a second optical signal carrying the first and second information.
2. An optical transmitter in accordance with claim 1, wherein the coupler is a first coupler, the second modulator includes:
a third splitter having an input configured to receive the second portion of the optical signal, and first, second, and third outputs,
first, second, and third waveguides, each of which being coupled to a corresponding one of the first, second, and third outputs of the third splitter;
a second coupler having first, second, and third inputs, each of which being respectively coupled to the first, second, and third waveguides of the second modulator, the coupler further having an output;
a fourth electrode provided adjacent the first waveguide of the second modulator, the fourth electrode being configured to modulate a refractive index of a portion of the first waveguide of the second modulator in accordance with third information associated with a third data stream;
a fifth electrode provided adjacent the second waveguide of the second modulator, the fifth electrode being configured to adjust a refractive index of a portion of the second waveguide of the second modulator;
a sixth electrode provided adjacent the third waveguide of the second modulator, the sixth electrode being configured to modulate a refractive index of a portion of the third waveguide of the second modulator in accordance with a fourth information associated with a fourth data stream,
wherein the output of the second coupler supplies a third optical signal carrying the third and fourth information.
3. An optical transmitter in accordance with claim 1, wherein the laser is a distributed feedback (DFB) laser.
4. An optical transmitter in accordance with claim 3, wherein the first optical signal is a continuous wave (CW) optical signal.
5. An optical transmitter in accordance with claim 1, wherein the second optical signal is complies with a different quadrature phase shift keying format.
6. An optical transmitter in accordance with claim 1, wherein the output of the coupler is a first output, the coupler further including second and third outputs, the optical device further including:
a first photodiode coupled to the first output; and
a second photodiode coupled to the second output.
7. An optical transmitter in accordance with claim 1, further including:
first and second photodiodes;
a control circuit configured to receive outputs from the first and second photodiodes and supply first and second outputs;
a first phase adjusting circuit coupled to the first waveguide, the first phase adjusting circuit being configured to adjust a phase of light in the first waveguide in response to the first output from the control circuit; and
a second phase adjusting circuit coupled to the second waveguide, the second phase adjusting circuit being configured to adjust a phase of light in the second waveguide in response to the second output from the control circuit.
8. An optical transmitter in accordance with claim 1, further including:
first and second photodiodes;
a control circuit configured to receive outputs from the first and second photodiodes and supply first and second outputs;
a first variable optical attenuator coupled to the first waveguide, the first variable optical attenuator being configured to adjust an optical power of light in the first waveguide in response to the first output from the control circuit; and
a second variable optical attenuator coupled to the second waveguide, the second variable optical attenuator being configured to adjust an optical power of light in the second waveguide in response to the second output from the control circuit.
9. An optical transmitter in accordance with claim 1, further including:
first and second photodiodes;
a control circuit configured to receive outputs from the first and second photodiodes and supply first and second outputs;
a first variable optical attenuator coupled to the first waveguide, the first variable optical attenuator being configured to adjust an optical power of light in the first waveguide in response to the first output from the control circuit; and
a second variable optical attenuator coupled to the second waveguide, the second variable optical attenuator being configured to adjust an optical power of light in the second waveguide in response to the second output from the control circuit.
10. A wavelength division multiplexed optical communication system, comprising:
a plurality of transmitters; and
a wavelength division multiplexer coupled to the plurality of transmitters, one of the plurality of transmitters including:
a laser configured to supply a first optical signal;
a first splitter configured to supply a first portion of the optical signal and a second portion of the optical signal;
a first modulator configured to receive the first portion of the optical signal;
a second modulator configured to receive the second portion of the optical signal, the first modulator including:
a second splitter having an input configured to receive the first portion of the optical signal, and first, second, and third outputs,
first, second, and third waveguides, each of which being coupled to a corresponding one of the first, second, and third outputs of the second splitter, the second splitter being configured to supply a substantially equal amount of optical power to each of the first, second, and third waveguides;
a coupler having first, second, and third inputs, each of which being coupled to the first, second, and third waveguides, respectively, the coupler further having an output;
a first electrode provided adjacent the first waveguide, the first electrode being configured to modulate a refractive index of a portion of the first waveguide in accordance with first information associated with a first data stream;
a second electrode provided adjacent the second waveguide, the second electrode being configured to adjust a refractive index of a portion of the second waveguide;
a third electrode provided adjacent the third waveguide, the third electrode being configured to modulate a refractive index of a portion of the third waveguide in accordance with a second information associated with a second data stream,
wherein the output of the coupler supplies a second optical signal carrying the first and second information.
11. A wavelength division multiplexed optical communication system in accordance with claim 10, wherein the coupler is a first coupler, the second modulator includes:
a third splitter having an input configured to receive the second portion of the optical signal, and first, second, and third outputs,
first, second, and third waveguides, each of which being coupled to a corresponding one of the first, second, and third outputs of the third splitter;
a second coupler having first, second, and third inputs, each of which being respectively coupled to the first, second, and third waveguides of the second modulator, the coupler further having an output;
a fourth electrode provided adjacent the first waveguide of the second modulator, the fourth electrode being configured to modulate a refractive index of a portion of the first waveguide of the second modulator in accordance with third information associated with a third data stream;
a fifth electrode provided adjacent the second waveguide of the second modulator, the fifth electrode being configured to adjust a refractive index of a portion of the second waveguide of the second modulator;
a sixth electrode provided adjacent the third waveguide of the second modulator, the sixth electrode being configured to modulate a refractive index of a portion of the third waveguide of the second modulator in accordance with a fourth information associated with a fourth data stream,
wherein the output of the second coupler supplies a third optical signal carrying the third and fourth information.
12. A wavelength division multiplexed optical communication system in accordance with claim 10, wherein the laser is a distributed feedback (DFB) laser.
13. A wavelength division multiplexed optical communication system in accordance with claim 12, wherein the first optical signal is a continuous wave (CW) optical signal.
14. A wavelength division multiplexed optical communication system in accordance with claim 10, wherein the second optical signal complies with a differential quadrature phase shift keying format.
15. A wavelength division multiplexed optical communication system in accordance with claim 10, wherein the output of the coupler is a first output, the coupler further including second and third outputs, the optical device further including:
a first photodiode coupled to the first output; and
a second photodiode coupled to the second output.
16. A wavelength division multiplexed optical communication system in accordance with claim 10, further including:
first and second photodiodes;
a control circuit configured to receive outputs from the first and second photodiodes and supply first and second outputs;
a first phase adjusting circuit coupled to the first waveguide, the first phase adjusting circuit being configured to adjust a phase of light in the first waveguide in response to the first output from the control circuit; and
a second phase adjusting circuit coupled to the second waveguide, the second phase adjusting circuit being configured to adjust a phase of light in the second waveguide in response to the second output from the control circuit.
17. A wavelength division multiplexed optical communication system in accordance with claim 10, further including:
first and second photodiodes;
a control circuit configured to receive outputs from the first and second photodiodes and supply first and second outputs;
a first variable optical attenuator coupled to the first waveguide, the first variable optical attenuator being configured to adjust an optical power of light in the first waveguide in response to the first output from the control circuit; and
a second variable optical attenuator coupled to the second waveguide, the second variable optical attenuator being configured to adjust an optical power of light in the second waveguide in response to the second output from the control circuit.
18. A wavelength division multiplexed optical communication system in accordance with claim 11, further including:
an optical rotator circuit configured to receive the third optical signal and supply a polarization rotated third optical signal; and
a polarization combiner circuit configured to combine the polarization rotated third optical signal and the second optical signal.

1. A semiconductor integrated circuit device comprising:
a power supply line and a ground line each placed to extend in a first direction; and
first and second cells placed in a region interposed between the power supply line and the ground line to be adjacent to each other in the first direction, and each having a transistor and an intra-cell line each for implementing a circuit function, wherein
a metal wiring line extending in a second direction orthogonal to the first direction is placed in a boundary portion between the first and second cells so as not to short-circuit the power supply line and the ground line.
2. The semiconductor integrated circuit device of claim 1, wherein the metal wiring line is a dummy line in a floating state which is not connected to either of the power supply line and the ground line.
3. The semiconductor integrated circuit device of claim 1, wherein the metal wiring line includes a first line formed to protrude from the power supply line, and a second line formed to protrude from the ground line, and unconnected to the first line.
4. The semiconductor integrated circuit device of claim 1, wherein the metal wiring line is formed to protrude from the power supply line, and unconnected to the ground line.
5. The semiconductor integrated circuit device of claim 1, wherein the metal wiring line is formed to protrude from the ground line, and unconnected to the power supply line.
6. The semiconductor integrated circuit device of claim 1, wherein the metal wiring line includes a plurality of small sections.
7. The semiconductor integrated circuit device of claim 6, wherein one of the plurality of small sections is connected to the power supply line.
8. The semiconductor integrated circuit device of claim 6, wherein one of the plurality of small sections is connected to the ground line.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A light emitting device comprising:
a crystalline substrate having a plurality of side surfaces;
a light emitting structure layer comprising a first conductive type semiconductor layer, an active layer, and a second conductive type semiconductor layer on the substrate; and
a first electrode on the first conductive type semiconductor layer and a second electrode on the second conductive type semiconductor layer;
wherein an amorphous region is defined in a side surface of the substrate, and the amorphous regions of two side surfaces adjacent to each other have different depths from a top surface of the substrate.
2. The light emitting device according to claim 1, wherein the substrate has first and second side surfaces at least adjacent to each other, and a first amorphous region defined in the first side surface is horizontally spaced from a second amorphous region defined in the second side surface.
3. The light emitting device according to claim 2, wherein the first amorphous region defined in the first side surface is divided into two regions and the two regions are spaced from each other in the first side surface, and the second amorphous region defined in the second side surface is divided into two regions and the two regions are spaced from each other in the second side surface,
wherein the two first amorphous regions defined in the first side surface and the two second amorphous regions defined in the second side surface are horizontally spaced from each other.
4. The light emitting device according to claim 1, wherein the substrate has a first side surface, a second side surface, a third side surface, and a fourth side surface, and the amorphous region is defined in each of the first, second, third, and fourth side surfaces,
wherein the amorphous regions defined in at least two side surfaces adjacent to each other of the first, second, third, and fourth side surfaces are horizontally spaced from each other.
5. The light emitting device according to claim 2, wherein each of the first amorphous region defined in the first side surface and the second amorphous region defined in the second side surface has a width of 10 \u03bcm to 40 \u03bcm.
6. The light emitting device according to claim 1, wherein the substrate has first and second side surfaces at least adjacent to each other, and a first amorphous region defined in the first side surface partially overlap a second amorphous region defined in the second side surface in a horizontal direction.
7. The light emitting device according to claim 6, wherein the region in which the first and second amorphous regions overlap each other has a width less than that of a region in which the first and second amorphous regions do not overlap each other.
8. The light emitting device according to claim 6, wherein the region in which the first and second amorphous regions horizontally overlap each other has a width of 30 \u03bcm or less.
9. The light emitting device according to claim 1, wherein the amorphous region has a band shape on the side surface.
10. The light emitting device according to claim 1, wherein the substrate comprises a crystalline sapphire substrate.
11. The light emitting device according to claim 1, wherein the substrate has a pattern on a top surface thereof.
12. The light emitting device according to claim 1, wherein the amorphous region has a depth determined by a focus of a laser for cutting the light emitting device.
13. A light emitting device package comprising:
a body having a recess;
first and second conductive members disposed in the recess, the first and second conductive members being separated from each other,
a light emitting device electrically connected to the first and second conductive members, the light emitting device being disposed in the recess; and
a molding member in which the light emitting device is buried,
wherein the light emitting device comprises: a crystalline substrate having a plurality of side surfaces; a light emitting structure layer comprising a first conductive type semiconductor layer, an active layer, and a second conductive type semiconductor layer on the substrate; and a first electrode on the first conductive type semiconductor layer and a second electrode on the second conductive type semiconductor layer; wherein an amorphous region is defined in a side surface of the substrate, and the amorphous regions of two side surfaces adjacent to each other have different depths from a top surface of the substrate.
14. The light emitting device package according to claim 13, wherein the substrate has first and second side surfaces at least adjacent to each other, and a first amorphous region defined in the first side surface is horizontally spaced from a second amorphous region defined in the second side surface.
15. The light emitting device package according to claim 14, wherein each of the first and second side surfaces has at least two first and second amorphous regions.
16. The light emitting device package according to claim 15, wherein the substrate has first and second side surfaces at least adjacent to each other, and a first amorphous region defined in the first side surface partially overlap a second amorphous region defined in the second side surface in a horizontal direction.
17. The light emitting device package according to claim 16, wherein the region in which the first and second amorphous regions overlap each other has a width less than that of a region in which the first and second amorphous regions do not overlap each other.
18. A lighting device comprising:
a module board; and
a plurality of light emitting device packages disposed on the module board,
wherein the light emitting device package comprises: a body having a recess; first and second conductive members disposed in the recess, the first and second conductive members being separated from each other, a light emitting device electrically connected to the first and second conductive members, the light emitting device being disposed in the recess; and a molding member in which the light emitting device is buried, and
the light emitting device comprises: a crystalline substrate having a plurality of side surfaces; a light emitting structure layer disposed on a top surface of the substrate,
wherein an amorphous region is defined in a side surface of the substrate, and the amorphous regions of two side surfaces adjacent to each other have different depths from a top surface of the substrate.
19. The lighting device according to claim 18, wherein the substrate has first and second side surfaces at least adjacent to each other, and a first amorphous region defined in the first side surface is horizontally spaced from a second amorphous region defined in the second side surface.
20. The lighting device according to claim 18, wherein the substrate has first and second side surfaces at least adjacent to each other, and a first amorphous region defined in the first side surface partially overlap a second amorphous region defined in the second side surface in a horizontal direction.